JPS59177371A - Vacuum deposition device - Google Patents

Abstract

PURPOSE:To prevent the clogging in lifting pipes during operation by a simple method in a device which conducts the molten metal in a melting furnace in the atm. air through the lifting pipes into the evaporation pan in a vacuum deposition vessel by using the plural melting furnaces and providing means for lifting the furnaces to said furnaces. CONSTITUTION:The molten metals 21 in melting furnaces 19, 20 are sucked under vacuum through lifting pipes 17, 18 into the evaporation pan 13 in a vacuum vessel 12 where a material 11 to be plated travels. Said metal is heated by a heater 16 to evaporate and is plated by vacuum deposition on the surface of the steel strip 11. Lifters 22 are operated during this operation to move vertically the furnaces 19. When the furnace 19 is moved upward, the level of the metal 21 in the pan 13 rises as the pressure difference is constant, then the difference in the level in the pan 13 and the level of the metal 21 in the furnace 20 is made larger than the difference in the stationary stage, by which the metal 21 is admitted from the pan 13 into the furnace 20. When the furnace 19 is conversely lowered, the metal 21 moves through the pan 13 to the furnace 19. Stagnation of dross 24 in each part in the pipes 17, 18 is thus obviated and the clogging in the pipes 17, 18 is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum evaporation apparatus for continuously vacuum evaporating a metal plating film such as Zn or At on a copper strip or the like.

Conventionally, this type of vacuum evaporation apparatus has a vacuum vapor deposition apparatus in which vapor-deposited copper 3 is disposed in a vacuum chamber 2 in which a copper strip I runs as shown in No. 11J, and an atmospheric C melting furnace 4 is disposed, and this melting furnace 4 and It communicates with the evaporating pot 3 through a suction pipe 5. The evaporating pot 3 has an evaporating port 6 opened at the top, a heat insulating material 7 pasted on the inner surface, and a heater 8 installed inside.

This vacuum evaporation device vacuum-suctions the molten metal 9, which is a plating material, in the melting furnace 4, guides it from the suction tank 5 to the evaporation pan 3, and heats it with a heater 8 to evaporate the molten metal 9. , continuous ζ-plating on steel strip I.

However, in this vacuum evaporation apparatus, at startup (the molten metal 9 of the two major fireflies is sucked up from the two melting furnaces 4 to the evaporation pot 3), the dross IOC molten metal in the eaves of the melting furnace 4 and the melting furnace wall Some of the compounds (compounds with metal) float and form molten gold M.
There is a risk that it will be sucked up into the suction pipe 5 yen along with 9.

- 10,000, the flow velocity of the molten metal 9 in the suction pipe 5 is low. For example, when the molten metal 9 is Zn, Zn disappears d! 800K
F,/h, and the diameter of the suction tube is 100 m.

The average flow velocity of Zn in the suction pipe 5 is as small as 4 mm/see.

Also, since the flow is laminar, the flow velocity becomes even smaller near the inner wall of the suction tube.

Therefore, the dross IO once sucked up remains at the vent part 5a of the suction pipe 5 and the joint part 5 with the evaporating pot 3 for a long time without being washed away.
It stays near b. Some dross is also generated on the inner wall of the suction pipe 5, and if the dross is accumulated in the vicinity,
The dross Iθ gets stuck or grows and blocks the suction pipe 5. In general, areas blocked by dross IO do not easily re-melt even at low temperatures, making recovery difficult.For this reason, conventionally, when the suction pipe 5 is blocked, both the evaporating pot 3' and the suction pipe 5 Had to convert it to a new one.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a vacuum evaporation apparatus that can easily prevent clogging of a suction pipe during operation. It is.

That is, the present invention provides an evaporation pot for depositing the material to be plated in a vacuum tank in which the material to be plated runs, and also provides a number of melting furnaces in the atmosphere to melt the molten metal (plating material) in each melting furnace. When guiding the metal to the evaporation pot via the suction pipe (-1) Attach a melting furnace vertically moving flat membrane to at least one melting furnace, and move the melting furnace 2 up and down during operation, thereby making the molten metal in the suction pipe constantly flow. This is a special topic.

The present invention will be described below with reference to embodiments illustrating the invention. Second
The figure shows 41i cleaning 1. of vacuum evaporation equipment j1\. j'l' m+
− is. This vacuum steam stone equipment uses 4H, which is the covering material.
, in the vacuum chamber I2 in which the j band II is running (-evaporation i, I4
It is installed in ra. This evaporating pot I3 is
Detour! '1 Provide an evaporator tube I4 opposite to the HII, paste a heat insulating material I5 on the inner surface, and further inside (-heater 1
6 is placed.

At the bottom of this evaporating pot I3, there are two suction pipes I7 and I8. Each of the suction pipes I7 and I8 opens into the pyrolysis furnace I9 and 2θ. Each of the melting furnaces 19 and 20 is installed in the atmosphere, and contains molten metal 2I, which is the second plating material. It is listed.

This vacuum evaporation apparatus consists of a melting furnace 19, a 2" 0 yen bath molten metal, a suction tube 19.20 valve to vacuum the evaporation pan I3, a 7Ia* small heater Z6 for heating, and a 4'- Evaporate and deposit on the surface of if1 zone II.

Furthermore, this vacuum evaporation apparatus operates the C lifter 22 to move the melting furnace Z9 up and down during the operation of evaporation plating. When the melting furnace 19 is moved upward (-), the level of the molten metal 21 (plating material) in the evaporation pot 13 rises because the pressure difference is constant. The difference between the molten metal level of
Z moves. Conversely, when the melting furnace 19 is lowered, it passes from the melting furnace 20 through the evaporation pot I3 to the melting furnace Z! 9 to molten metal 2
I moves.

In this case, the amount of movement of the bath molten metal 21 is independent of the consumption of the molten metal 2I, and the number of vertical movements of the melting furnace I9 can be increased (-therefore, the amount of movement can be increased. The flow rate of molten metal in the suction pipe 77 can be made much higher than in the past, and the direction of the part can be reversed.Therefore, the bend part xya of the suction pipe 77
・1 B-a”n° junction FflS17 b, I
8 Dross 24 does not accumulate in b etc., and suction pipe Z7.1B
or blockage can be prevented.

Note that the number of melting furnaces and suction pipes is two (not limited to three, but may be three or more.Also, not only one melting furnace but also other melting furnaces can be moved up and down so that they can be moved up and down).

As described above, according to the present invention, the simple method of moving the melting furnace up and down has the remarkable effect of preventing blockage of the suction pipe.

[Brief explanation of drawings]

FIG. 1 is a schematic sectional view of a conventional vacuum evaporation apparatus, and FIG. 2 is a schematic sectional view of a vacuum evaporation apparatus showing an embodiment of the present invention. II...Copper band (material to be plated), I2...Vacuum chamber. I3...evaporating pot, I4...evaporating port, IS...insulating material, I6...heater, I'? , 1B... Suction pipe, 19° 20... Melting furnace, 21... Molten metal, 2
2.23... Lifter (vertical movement means) 24... Dross, 173118m... Bend part, 11b, 18b.
・Joint part. Patent Attorney Takehiko Suzue Continued from page 1 0 Author Wake Kanji, 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Shipyard, Mitsubishi Heavy Industries, Ltd. Applicant Nisshin Steel Co., Ltd. Company 3-4-1 Marunouchi, Chiyoda-ku, Tokyo -371-

Claims (1)

[Claims] An evaporation pot for evaporating the plating material installed in a vacuum chamber in which the plating material travels, and a plurality of melting furnaces installed in the atmosphere.
A vacuum evaporation apparatus comprising: a plurality of suction pipes each guiding molten metal in the melting furnace to the evaporation pot; and at least one melting furnace (with a means for vertically moving the melting furnace attached to the melting furnace).