JPS59176148U - 半導体ウエハ−の移動検出装置 - Google Patents

半導体ウエハ−の移動検出装置

Info

Publication number
JPS59176148U
JPS59176148U JP7183683U JP7183683U JPS59176148U JP S59176148 U JPS59176148 U JP S59176148U JP 7183683 U JP7183683 U JP 7183683U JP 7183683 U JP7183683 U JP 7183683U JP S59176148 U JPS59176148 U JP S59176148U
Authority
JP
Japan
Prior art keywords
detection device
movement detection
semiconductor wafer
wafer movement
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7183683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638133Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
大谷　雅樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7183683U priority Critical patent/JPS59176148U/ja
Publication of JPS59176148U publication Critical patent/JPS59176148U/ja
Application granted granted Critical
Publication of JPS638133Y2 publication Critical patent/JPS638133Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Controlling Sheets Or Webs (AREA)
  • Control Of Position Or Direction (AREA)
JP7183683U 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置 Granted JPS59176148U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7183683U JPS59176148U (ja) 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7183683U JPS59176148U (ja) 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置

Publications (2)

Publication Number Publication Date
JPS59176148U true JPS59176148U (ja) 1984-11-24
JPS638133Y2 JPS638133Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-10

Family

ID=30201989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7183683U Granted JPS59176148U (ja) 1983-05-12 1983-05-12 半導体ウエハ−の移動検出装置

Country Status (1)

Country Link
JP (1) JPS59176148U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6356140U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-09-30 1988-04-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6356140U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-09-30 1988-04-14

Also Published As

Publication number Publication date
JPS638133Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-10

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