JPS5917436U - cross moving stage - Google Patents

cross moving stage

Info

Publication number
JPS5917436U
JPS5917436U JP11282882U JP11282882U JPS5917436U JP S5917436 U JPS5917436 U JP S5917436U JP 11282882 U JP11282882 U JP 11282882U JP 11282882 U JP11282882 U JP 11282882U JP S5917436 U JPS5917436 U JP S5917436U
Authority
JP
Japan
Prior art keywords
moving stage
cross moving
cruciform
race
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11282882U
Other languages
Japanese (ja)
Other versions
JPH0238247Y2 (en
Inventor
徹志 野本
智秀 浜田
Original Assignee
株式会社ニコン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ニコン filed Critical 株式会社ニコン
Priority to JP11282882U priority Critical patent/JPS5917436U/en
Publication of JPS5917436U publication Critical patent/JPS5917436U/en
Application granted granted Critical
Publication of JPH0238247Y2 publication Critical patent/JPH0238247Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の十字動載物台の一例で、ａは正面図、ｂ
は平面図、Ｃは側面図を示し、第２図及び第３図は本考
案の一実施例を示し、第２図ａは正面図、第２図すは平
面図、第２図Ｃは側面図、第３図は第２図ａのＡ矢視部
拡大図である。 〔主要部分の符号の説明〕、２・・・・・・中板、４０
・・・・・・Ｙ方向レース、５０・・・・・・Ｘ方向レ
ース、７゜９・・・・・・鋼球、１０・・・・・・鋼板
。Figure 1 shows an example of a conventional cross-motion platform, where a is a front view and b is a front view.
2 and 3 show an embodiment of the present invention, FIG. 2 a is a front view, FIG. 2 is a plan view, and FIG. 2 C is a side view. FIG. 3 is an enlarged view of the section viewed from arrow A in FIG. 2a. [Explanation of symbols of main parts], 2... middle plate, 40
...Y direction race, 50...X direction race, 7°9... Steel ball, 10... Steel plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 十字動載物台の中板にＸ方向とＹ方向の少なくとも一方
向ヘリブ兼用のレース加工を施し、該レースの鋼球案内
面に鋼板を配設して成ることを特徴とする十字動載物台
。A cruciform carrier, characterized in that the center plate of the cruciform carrier is machined with a lace that serves as a helical in at least one direction in the X direction and the Y direction, and a steel plate is arranged on the steel ball guide surface of the race. The stand.
JP11282882U 1982-07-27 1982-07-27 cross moving stage Granted JPS5917436U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11282882U JPS5917436U (en) 1982-07-27 1982-07-27 cross moving stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11282882U JPS5917436U (en) 1982-07-27 1982-07-27 cross moving stage

Publications (2)

Publication Number Publication Date
JPS5917436U true JPS5917436U (en) 1984-02-02
JPH0238247Y2 JPH0238247Y2 (en) 1990-10-16

Family

ID=30261413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11282882U Granted JPS5917436U (en) 1982-07-27 1982-07-27 cross moving stage

Country Status (1)

Country Link
JP (1) JPS5917436U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63118995U (en) * 1987-01-24 1988-08-01
JPH03137982A (en) * 1990-07-06 1991-06-12 Hitachi Kiden Kogyo Ltd Scum skimmer
JPH0615785U (en) * 1992-12-15 1994-03-01 充弘 藤原 Scum removal device
JP2004028329A (en) * 2003-03-28 2004-01-29 Sigma Koki Kk Linear motion stage
WO2018079663A1 (en) * 2016-10-31 2018-05-03 Thk株式会社 Lens moving mechanism

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4894490B2 (en) * 2006-12-07 2012-03-14 株式会社ニコン Guide device, stage device, and optical device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840653U (en) * 1971-09-17 1973-05-23
JPS55165736U (en) * 1979-05-10 1980-11-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840653U (en) * 1971-09-17 1973-05-23
JPS55165736U (en) * 1979-05-10 1980-11-28

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63118995U (en) * 1987-01-24 1988-08-01
JPH03137982A (en) * 1990-07-06 1991-06-12 Hitachi Kiden Kogyo Ltd Scum skimmer
JPH0553558B2 (en) * 1990-07-06 1993-08-10 Hitachi Kiden Kogyo Kk
JPH0615785U (en) * 1992-12-15 1994-03-01 充弘 藤原 Scum removal device
JP2004028329A (en) * 2003-03-28 2004-01-29 Sigma Koki Kk Linear motion stage
WO2018079663A1 (en) * 2016-10-31 2018-05-03 Thk株式会社 Lens moving mechanism
JP2018072633A (en) * 2016-10-31 2018-05-10 Thk株式会社 Lens moving mechanism
US10712528B2 (en) 2016-10-31 2020-07-14 Thk Co., Ltd. Lens moving mechanism

Also Published As

Publication number Publication date
JPH0238247Y2 (en) 1990-10-16

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