JPH0238247Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a highly accurate cross-moving stage used in projectors and the like.

Conventionally, this type of device has a structure in which only the lace is processed as a single item, and it is attached to three plates, an upper plate, a middle plate, and a lower plate, to perform a cross movement.

An example of a cross-moving stage having such a structure is shown in FIGS. 1a, b, and c. Figure 1a is a front view, Figure 1b
is a plan view of FIG. 1a, and FIG. 1c is a side view of FIG. 1a. A pair of races 4, 4 are integrated into the upper plate 1 with screws (not shown) for guiding in the Y direction.
A pair of races 40, 40 are fixed to the middle plate 2, facing the races 4, 4 of the upper plate 1, with screws or the like (not shown). A steel ball 7 is placed between the race 4 and the race 40 so as to be separated by a predetermined distance by a retainer 6. The middle plate 2 also has a pair of races 50, 50 integrated with screws (not shown) for guiding in the X direction, and the lower plate 3 has a pair of races facing the races 50, 50 of the middle plate 2. 5, 5 are fixed with screws (not shown) or the like. A steel ball 9 is disposed between the race 5 and the race 50 with a retainer 8 separating them by a predetermined distance. Because of this structure, when assembling the races 4, 40, 5, and 50, it was necessary to pay attention to the mutual parallelism and perpendicularity of the races as shown in the drawings. The material for the race had to be hardened steel, which had the drawback of requiring a grinding process to process the steel ball guide surface of the race. Furthermore, since precision is required, mechanical strength of each component is also required, making it difficult to manufacture a thin stage.

The object of the present invention is to solve these drawbacks and provide a compact criss-cross motion platform at a low cost and with good mechanical strength.

In order to achieve the above object, the present invention directly forms a race that also serves as a rib in at least one of the X and Y directions on the intermediate plate, and arranges a steel plate on the steel ball guide surface of this race.

The present invention will be described below based on embodiments shown in the drawings.

Figures 2a, b, c, and 3 show one embodiment of the present invention; Figure 2a is a front view, Figure 2b is a plan view of Figure 2a, and Figure 2c is a second embodiment of the present invention. Side view of figure a, 3rd
The figure is a partially enlarged view of the arrow A in FIG. 2a.

As is clear from a comparison between Fig. 2 b, c and Fig. 1 b, c, in Fig. 2 b, c, the Y-direction races 40, 40 and the X-direction races 50, 50 are directly machined on the middle plate 2. There is. Since the races 40 and 50 are integrated with the middle plate 2, they also function as ribs. The steel ball guide surfaces of the races 40 and 50 are constructed by disposing two steel plates 10 and 10, respectively, as shown in FIG. It rotates while being held between a guide surface and two steel plates 10, 10. The two steel plates 10, 10 are fixed at both end faces with countersunk screws 11 to prevent the retainer 6 from coming off, as shown in FIG. Since the angle of the crest of counterscrew 11 is approximately 90 degrees, race 4
90 by milling the 0.50 steel ball guideway.
By forming two steel plates 10 and 1 at the same time,
0 can be made to follow the steel ball guide surface.

With this configuration, the middle plate 2 moves in the X direction with respect to the lower plate 3, and the upper plate 1 moves in the Y direction with respect to the middle plate 2. In other words, upper plate 1 is lower plate 3
It moves in the X direction and the Y direction, that is, it moves crosswise.

Such a race of the middle plate 2 does not need to be hardened, and since the race becomes a rib of the middle plate 2, the mechanical strength of the middle plate 2 is increased.

In addition, in FIG. 2, a pair of laces 4 on the upper plate 1,
4 and the pair of races 5, 5 of the lower plate 3 were formed by quenching, but the pair of races 4, 4 were directly processed on the upper plate 1, and a steel plate was arranged on the steel ball guide surface of the race. Furthermore, if the pair of races 5 and 5 are similarly processed directly on the lower plate 3, the quenching process and
This is effective because the grinding process can be completely omitted.
Of course, instead of using hardened steel as the material for the races 4, 4 in FIG. 2, for example, a steel plate like the race 40 may be used.

Furthermore, in the above example, the Y-direction race 4 is attached to the middle plate 2.
0, 40, X direction races 50, 50 were directly processed, so the right angles of the X direction race and Y direction race were previously exposed during assembly, but now they can be mechanically extracted during processing of the middle plate, making assembly easier. By reducing the time and effort involved, and by arranging a steel plate on the steel ball guide surface of the race, it is possible to obtain a cross-motion platform that is comparable in accuracy to conventional high-precision ones. In view of the ease of machining the middle plate 2, even if only one of the races is directly machined and the other race is integrated with screws, etc., one race will serve as a rib. be able to. In this case, the other race can be made at low cost by using a race in which a steel plate is provided on the steel ball guide surface instead of using hardened steel as in the conventional case.

Furthermore, the countersunk screw 11 for preventing the retainer 6 from coming off can be replaced with a round-headed screw, and especially when it is not necessary to use a screw to prevent the retainer 6 from coming off, the countersunk screw 11 can be replaced with a screw with a round head. Temporarily fasten the steel plates 10, 10 using
Since the steel plates 10, 10 are held between the steel balls and the steel ball guide surface of the race, there is no problem in guiding the steel balls.

As described above, the present invention directly forms a race that also serves as a rib in at least one of the X and Y directions on the middle plate of the cross moving platform, and arranges a steel plate on the steel ball guide surface of the race. With this structure, the middle plate can be made thinner even though the strength is the same as that of the conventional one, and a low-cost cruciate moving platform can be obtained.

[Brief explanation of the drawing]

FIG. 1 shows an example of a conventional cross-moving stage, in which a shows a front view, b shows a plan view, and c shows a side view, FIGS. 2 and 3 show an embodiment of the present invention, and FIG. Figure 2a is a front view, Figure 2b is a plan view, Figure 2c is a side view,
FIG. 3 is an enlarged view of a portion viewed from arrow A in FIG. 2a. Explanation of the symbols of the main parts, 2... middle plate, 40...
Y direction race, 50...X direction race, 7,9...
...Steel ball, 10...Steel plate.

Claims (1)

[Scope of utility model registration request] A cross motion, characterized in that a race that also serves as a rib is directly formed on the middle plate of the cross motion platform in at least one of the X and Y directions, and a steel plate is arranged on the steel ball guide surface of the race. Loading table.