JPS59173335U - 半導体処理液の熱交換器 - Google Patents

半導体処理液の熱交換器

Info

Publication number
JPS59173335U
JPS59173335U JP6902083U JP6902083U JPS59173335U JP S59173335 U JPS59173335 U JP S59173335U JP 6902083 U JP6902083 U JP 6902083U JP 6902083 U JP6902083 U JP 6902083U JP S59173335 U JPS59173335 U JP S59173335U
Authority
JP
Japan
Prior art keywords
heat exchanger
processing liquid
semiconductor processing
heat exchange
exchange plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6902083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0132361Y2 (enrdf_load_stackoverflow
Inventor
三平　治
Original Assignee
小松エレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 小松エレクトロニクス株式会社 filed Critical 小松エレクトロニクス株式会社
Priority to JP6902083U priority Critical patent/JPS59173335U/ja
Publication of JPS59173335U publication Critical patent/JPS59173335U/ja
Application granted granted Critical
Publication of JPH0132361Y2 publication Critical patent/JPH0132361Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP6902083U 1983-05-09 1983-05-09 半導体処理液の熱交換器 Granted JPS59173335U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6902083U JPS59173335U (ja) 1983-05-09 1983-05-09 半導体処理液の熱交換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6902083U JPS59173335U (ja) 1983-05-09 1983-05-09 半導体処理液の熱交換器

Publications (2)

Publication Number Publication Date
JPS59173335U true JPS59173335U (ja) 1984-11-19
JPH0132361Y2 JPH0132361Y2 (enrdf_load_stackoverflow) 1989-10-03

Family

ID=30199184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6902083U Granted JPS59173335U (ja) 1983-05-09 1983-05-09 半導体処理液の熱交換器

Country Status (1)

Country Link
JP (1) JPS59173335U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10246531A (ja) * 1997-03-03 1998-09-14 Eco Touenteii One:Kk 熱電変換装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10246531A (ja) * 1997-03-03 1998-09-14 Eco Touenteii One:Kk 熱電変換装置

Also Published As

Publication number Publication date
JPH0132361Y2 (enrdf_load_stackoverflow) 1989-10-03

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