JPS59172368U - Surface property measuring device - Google Patents

Surface property measuring device

Info

Publication number
JPS59172368U
JPS59172368U JP6683783U JP6683783U JPS59172368U JP S59172368 U JPS59172368 U JP S59172368U JP 6683783 U JP6683783 U JP 6683783U JP 6683783 U JP6683783 U JP 6683783U JP S59172368 U JPS59172368 U JP S59172368U
Authority
JP
Japan
Prior art keywords
measuring device
property measuring
surface property
exoelectrons
stimulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6683783U
Other languages
Japanese (ja)
Inventor
樋口　重雄
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP6683783U priority Critical patent/JPS59172368U/en
Publication of JPS59172368U publication Critical patent/JPS59172368U/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図及び第２図は従来装置の原理図、第３図は本考案
の原理図、第４図は本考案の実施例の断面図である。 １・・・物体、２・・・部品、３・・・ケーシング、４
・・田−タ、Ｒ・・・ランプ、Ａ・・・電子増倍管、ｅ
・・・電子、Ｈ・・・熱源、Ｌ・・・レーザー、Ｆ・・
・光ファイバー、Ｍ・・・メータ。。1 and 2 are principle diagrams of a conventional device, FIG. 3 is a principle diagram of the present invention, and FIG. 4 is a sectional view of an embodiment of the present invention. 1...Object, 2...Parts, 3...Casing, 4
...Data, R...Lamp, A...Electron multiplier, e
...electron, H...heat source, L...laser, F...
・Optical fiber, M...meter. .

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 機械的刺激、熱的刺激、化学的刺激等によって金層類な
どの表面から放射される電子、いわゆるエキソ電子を検
出、計測することによって、物質表面の変化を明らかに
しようとする表面物性計測装置において、レーザー光を
物質表面に照射し刺激することによってエキソ電子を計
測するようにしたことを特徴とする表面物性計測装置。A surface property measuring device that attempts to clarify changes in the surface of materials by detecting and measuring electrons emitted from the surface of gold layers, etc. due to mechanical stimulation, thermal stimulation, chemical stimulation, etc., so-called exoelectrons. A surface physical property measuring device characterized in that exoelectrons are measured by irradiating and stimulating a material surface with a laser beam.
JP6683783U 1983-05-06 1983-05-06 Surface property measuring device Pending JPS59172368U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6683783U JPS59172368U (en) 1983-05-06 1983-05-06 Surface property measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6683783U JPS59172368U (en) 1983-05-06 1983-05-06 Surface property measuring device

Publications (1)

Publication Number Publication Date
JPS59172368U true JPS59172368U (en) 1984-11-17

Family

ID=30197039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6683783U Pending JPS59172368U (en) 1983-05-06 1983-05-06 Surface property measuring device

Country Status (1)

Country Link
JP (1) JPS59172368U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372128A (en) * 1986-09-16 1988-04-01 Matsushita Electronics Corp Thin film manufacturing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372128A (en) * 1986-09-16 1988-04-01 Matsushita Electronics Corp Thin film manufacturing device

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