JPS59169037U - container - Google Patents
containerInfo
- Publication number
- JPS59169037U JPS59169037U JP1983063698U JP6369883U JPS59169037U JP S59169037 U JPS59169037 U JP S59169037U JP 1983063698 U JP1983063698 U JP 1983063698U JP 6369883 U JP6369883 U JP 6369883U JP S59169037 U JPS59169037 U JP S59169037U
- Authority
- JP
- Japan
- Prior art keywords
- container
- precision pattern
- cushioning material
- reticles
- photomasks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は、高精度パターン板の表面に水滴が付着する様
子を示す斜視図であり、第2図は本考案の容器の一実施
例を示す要部断面図であり、第3図は本考案の容器に付
属するバッキング材の一例を示す一部破断斜視図である
。
1・・・高精度パターン板、5・・・容器本体、6・・
・蓋、7・・・内側面、8・・・凸部、9・・・底部、
10・・・底面、11・・・棚部、12・・・バッキン
グ材、13・・・緩衝材、14・・・袋体、15・・・
継ぎ部。FIG. 1 is a perspective view showing how water droplets adhere to the surface of a high-precision pattern plate, FIG. 2 is a cross-sectional view of essential parts showing an embodiment of the container of the present invention, and FIG. FIG. 2 is a partially cutaway perspective view showing an example of a backing material attached to the container of the invention. 1... High-precision pattern board, 5... Container body, 6...
・Lid, 7...Inner surface, 8...Convex part, 9...Bottom part,
DESCRIPTION OF SYMBOLS 10... Bottom surface, 11... Shelf part, 12... Backing material, 13... Cushioning material, 14... Bag body, 15...
joint part.
Claims (1)
は多数枚積層してなる緩衝材を付属させてなるフォトマ
スク、レチクル等の高精度パターン板用容器。A container for high-precision pattern plates such as photomasks and reticles, which is attached with a cushioning material made by folding or laminating a large number of hygroscopic dry cotton cloth.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983063698U JPS59169037U (en) | 1983-04-27 | 1983-04-27 | container |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983063698U JPS59169037U (en) | 1983-04-27 | 1983-04-27 | container |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59169037U true JPS59169037U (en) | 1984-11-12 |
JPS6334273Y2 JPS6334273Y2 (en) | 1988-09-12 |
Family
ID=30193880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1983063698U Granted JPS59169037U (en) | 1983-04-27 | 1983-04-27 | container |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59169037U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63140651U (en) * | 1987-03-05 | 1988-09-16 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3400809A (en) * | 1967-05-22 | 1968-09-10 | Product Packaging Corp | Light tight package |
JPS5280171U (en) * | 1975-12-12 | 1977-06-15 | ||
JPS5518053A (en) * | 1978-07-26 | 1980-02-07 | Mitsubishi Metal Corp | Packing of method semiconductor wafer |
JPS57148165U (en) * | 1981-03-14 | 1982-09-17 | ||
JPS5853133U (en) * | 1981-10-07 | 1983-04-11 | アルバツク成膜株式会社 | Storage equipment for glass substrates, etc. |
JPS6334273U (en) * | 1986-04-07 | 1988-03-05 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5853133B2 (en) * | 1978-03-27 | 1983-11-28 | 日本鋼管株式会社 | Fixed foundation formation method for column bases in steel concrete structures |
-
1983
- 1983-04-27 JP JP1983063698U patent/JPS59169037U/en active Granted
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3400809A (en) * | 1967-05-22 | 1968-09-10 | Product Packaging Corp | Light tight package |
JPS5280171U (en) * | 1975-12-12 | 1977-06-15 | ||
JPS5518053A (en) * | 1978-07-26 | 1980-02-07 | Mitsubishi Metal Corp | Packing of method semiconductor wafer |
JPS57148165U (en) * | 1981-03-14 | 1982-09-17 | ||
JPS5853133U (en) * | 1981-10-07 | 1983-04-11 | アルバツク成膜株式会社 | Storage equipment for glass substrates, etc. |
JPS6334273U (en) * | 1986-04-07 | 1988-03-05 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63140651U (en) * | 1987-03-05 | 1988-09-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS6334273Y2 (en) | 1988-09-12 |
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