JPS59167655U - lap board - Google Patents
lap boardInfo
- Publication number
- JPS59167655U JPS59167655U JP1983062142U JP6214283U JPS59167655U JP S59167655 U JPS59167655 U JP S59167655U JP 1983062142 U JP1983062142 U JP 1983062142U JP 6214283 U JP6214283 U JP 6214283U JP S59167655 U JPS59167655 U JP S59167655U
- Authority
- JP
- Japan
- Prior art keywords
- suction cup
- cavity
- lap board
- suction
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来のラップ盤の斜視図である。第2図イない
しハは本考案の実施例に係るラップ盤を示し、イは研磨
盤、口はパツキン、ハは吸着盤ノ各斜視因である。第3
図ないし第7図は本考案の第1実施例、第2実施例、第
3実施例、゛第4実施例および第5実施例のラップ盤の
吸着口付近の断面図である。第8図は研磨盤の他の例の
斜視図である。
11・・・研磨盤、13・・・パツキン、16・・・吸
着盤、18・・・吸着用穴、20・・・空隙部、21・
・・排気管、23・・・蓋。FIG. 1 is a perspective view of a conventional lapping machine. FIGS. 2A to 2C show a lapping machine according to an embodiment of the present invention, in which A shows a polishing board, a mouth shows a gasket, and C shows a suction board. Third
7 to 7 are cross-sectional views of the vicinity of the suction port of the lapping machine of the first embodiment, the second embodiment, the third embodiment, the fourth embodiment, and the fifth embodiment of the present invention. FIG. 8 is a perspective view of another example of the polishing disk. DESCRIPTION OF SYMBOLS 11... Polishing disc, 13... Packing, 16... Suction cup, 18... Suction hole, 20... Cavity part, 21...
...Exhaust pipe, 23...lid.
Claims (1)
穴を備えていて、その空隙部が真空源に接続されて減圧
される円盤からなる吸着盤と、その吸着盤上に載せられ
、吸着盤の空隙部内を減圧することにより吸着盤に固定
される研磨盤とからなることを特徴とするラップ盤。a suction cup consisting of a disc that is provided with at least one cavity and a suction hole communicating with the cavity, and the cavity is connected to a vacuum source to reduce the pressure; and a suction cup placed on the suction cup; A lapping machine characterized by comprising a polishing disc that is fixed to the suction cup by reducing the pressure in the cavity of the suction cup.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983062142U JPS59167655U (en) | 1983-04-27 | 1983-04-27 | lap board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983062142U JPS59167655U (en) | 1983-04-27 | 1983-04-27 | lap board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59167655U true JPS59167655U (en) | 1984-11-09 |
Family
ID=30192341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1983062142U Pending JPS59167655U (en) | 1983-04-27 | 1983-04-27 | lap board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59167655U (en) |
-
1983
- 1983-04-27 JP JP1983062142U patent/JPS59167655U/en active Pending
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