JPS59165431A - Fastening device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION There are many different situations in which it is necessary to position one body or object in a precisely determined three-dimensional relationship with respect to another body or object. This invention relates to a positioning mechanism that allows two bodies to be "quickly and easily secured in a predetermined spatial relationship with each other, and then equally quickly and easily separated."

For example, when carrying out a production process, it is often necessary to position a workpiece in a precise spatial relationship with respect to a machine or workpiece. Time is a critical factor in production prosthetics, so it is advantageous to use a mechanism that can be quickly installed and removed.

A particular production technique where precise positioning of components is critical to good results is when manufacturing microcircuits. In this industry, a substrate of semiconductor material is first prepared and then subjected to a series of photolithography and other operations to create a number of electronic circuits, or chips as they are commonly called. It is an established practice.

The substrate is initially a thin flat sheet or wafer of material. By passing the strip through a series of processing stations, a series of measurements, photolithography steps, and other steps are performed. Cut the finished product into a number of chips. Although the substrate or wafer may have an original maximum dimension of several inches, each individual chip cut from the substrate may have a maximum dimension of less than one inch. Because each chip contains hundreds or even thousands of individual electronic circuit elements, the physical, chemical, and photographic processes used to construct the chip structure limit the size and tolerances that can be achieved. must be made with the highest precision.

The closest prior art related to this invention is the applicant's own Soviet patents and publications. Inventor's certificate 18909
C7 was awarded on September 16, 1966. The article was published in the Soviet technical magazine Electronic Techniques, 1974.
Year, Volume 1, Microtechnic, pp. 153-16
Published on page 2.

In this invention, two rigid bodies are supported together at three separate support points. Interengaging portions of the two bodies at the first support point limit the three degrees of freedom of movement. At the second support point, the mutually engaging parts limit the two degrees of freedom. The third support point restricts one degree of freedom.

More specifically, at the first support point, the hemisphere of one of the rigid bodies is inserted into an exposed aperture in the form of a trihedral pyramid in the other body, and the hemisphere's The curved surface engages all three planar surfaces of the opening. At the second support point, another hemisphere is inserted into the aperture in the form of a dihedral prism, such that the curved surface of the hemisphere engages both flat surfaces of this aperture. At the third support point, a protrusion on one body engages a flat surface on the other body.

In a preferred form of the invention, the positioning means are also used as support means. That is, one rigid body is supported by gravity above the other body at the same three support points that determine the relative position of the two bodies.

In its presently preferred use for a production process, the fast disconnect positioning mechanism of the present invention has other desirable characteristics. Preferably, one of the rigid bodies is a support mounted on a fixed base. The other rigid body is preferably a removable workpiece support, the support supporting the receiver above the part in a precisely predetermined spatial relationship to the part. I can do it. Preferably, all outwardly projecting interengaging parts are then permanently provided as part of the receiver. That is, the portion of the receiver has hemispheres at the first and second support points and a protrusion at the third support point. The removable workpiece support then has no protruding portion of the locating mechanism and has exposed openings for the first and second support points and a flat surface for the third support point.

This configuration of the parts facilitates the movement of the workpiece support from one station to the next as production operations proceed according to the production process.

More specifically, the receiver of the present invention also includes means for adjusting the position of the engaging portion of the positioning mechanism it has. Similarly, the engaging portion of the positioning mechanism carried by the workpiece support can also be adjusted relative to the workpiece support. This adjustment makes it possible to select over a range the desired position of the workpiece support relative to the receiver.

Another feature of the invention is the incorporation of other specific mechanical features of the engaging portions of the support points that improve the accuracy and reliability of the positioning action.

When used in the production of microcircuits, another novel feature of the invention is the mounting of a workpiece holder on a workpiece support and means for adjusting the position of the holder in two dimensions relative to the support. This is because we have established the following.

The invention also provides a novel production process that adds a series of production steps to a workpiece, each of which requires precise alignment. By utilizing a series of machining sections, each pre-aligned, the workpiece can be passed through each machining section sequentially without the need for extra alignment steps. More specifically, the receiver includes a section, each working section having an alignment means, and all receivers have the same alignment means. Each machining section also includes a tool or device aligned in a predetermined relationship to the alignment means of the associated bearing section. The workpiece is secured to a workpiece support, and the workpiece support is such that each successive receiver is removably attached to the section, with the receivers in relative positions determined by the alignment means of the sections. . Workpieces and/
Alternatively, once the workpiece support has been properly aligned with the first machining section, no adjustment or re-alignment is necessary for subsequent machining sections.

Next, the overall idea of the apparatus of the present invention will be explained with reference to FIGS. 1 to 6.

As shown in Figure 1, the sturdy main body B1. B2 is fixed at three support points. For ease of illustration, each solid body is shown in the form of a generally flat plate.

The upper solid body B1 has an exposed opening 10 on its underside. The aperture 10 has the shape of a trihedral pyramid,
Its widest dimension is at the open or lower end. The top of the pyramid is truncated.

The upper rigid body also has a second exposed opening 30 on the underside. Aperture 30 is in the form of a dihedral prism, with the widest dimension at the open or lower end. The upper end of the prism is truncated.

Equally important in the upper sturdy body is the flat surface part 5.
0, which is best shown in FIG. The flat surface 50 is laterally offset from a common axis passing through the actual or approximate center of the aperture 10.30.

A sturdy hemisphere 20 projects upwardly from the upper surface of the lower sturdy body B2. The surface of a hemisphere is actually a perfect sphere21
A portion of the ball is firmly attached to the upper end of a short column 22. The bottom end of the column is firmly attached to the top of a flat plate. Since it is only the upper surface of the projecting hemisphere that serves to achieve the objectives of the invention, the specific attachment means are merely shown for convenience.

A second hemispherical surface 40 projects from the upper surface of the lower rigid body. Again, for ease of viewing, the surface of this hemisphere is part of a complete sphere 41, which is attached to plate B2 by posts 42.

The upper surface of the sturdy main body B2 has a convexly curved upper end surface 60.
A substantially conical main body 61 having a diameter is also attached.

From the drawing, the upper sturdy body B1 is the lower sturdy body B.
It will be appreciated that when resting on 2, it will be in supportive engagement with it. The hemisphere 20 enters the trihedral pyramid 10 and forms a first support point P1. The face 40 of the hemisphere enters the dihedral prism 30 and the second support point P2't
l-form. A curved surface 60 engages the flat surface 50 to form a third support point.

Figure 1 shows two sturdy bodies B1. Although B2 is shown in the separated state, FIGS. 2 to 6 show the positions of the engaging portions of the three support points when the two main bodies are fixed. That is, FIGS. 2 and 3 show the engaged state of the portion 10.20 that engages the first support point PIO. 2 is a sectional view of FIG. 3, and FIG. 3 is a sectional view of FIG. 2.

The mechanical details of the support point P1 are shown in FIGS. 2 and 3. As shown in FIG. 2, the dimensions of the aperture relative to the diameter of the sphere are such that the entire surface 20 of the hemisphere does not completely fit within the aperture. As can be seen in Figure 3, the hemispherical surface 20 engages all three flat or planar surfaces of the aperture. However, the contact area at each of the three engagement points is relatively small, as can be seen in FIG. FIG. 2 shows only one contact point.

4 and 5 show the engaging portion 3 of the second support point P2.
0.42 engagement state is shown. 4 is a sectional view of FIG. 5, and FIG. 5 is a sectional view of FIG. 4. It will be appreciated that the dimensions of the aperture 300 relative to the diameter of the sphere 41 are such that the entire surface 40 of the hemisphere does not fit within the aperture. The faces of the hemisphere fit into both flat or planar sloped walls of the aperture. As can be seen from FIG. 4, the contact area is relatively small.

The locked state of the engaging portion of the third support point P3 is shown in FIG. Again, the contact area is relatively small.

In accordance with the general idea of the invention, the support point Pl limits the three degrees of freedom of movement that inherently exist between the two rigid bodies. That is, it sets the vertical height of the upper body PI at this point.

Additionally, this limits the upper body from moving laterally and limits the upper body from moving vertically.

Further in accordance with the general idea of the invention, the second support point P
2 limits the two degrees of freedom of movement that the two rigid wooden bodies originally have. That is, this prevents two types of angular movement or rotation that the upper body would otherwise be free to make. One in the vertical plane and the other in the horizontal plane.

Furthermore, in accordance with the overall idea of the invention, the remaining support points P
3 limits the remaining one degree of freedom of movement of the two bodies relative to each other. Specifically, it is the common axis TO of the two balls.
The upper sturdy body prevents rotation around. This is achieved by the third support point P3 being laterally offset from the axis 70.

Consisting constraints on the overall idea of this invention are as follows. Preferably, the trihedral pyramid 10 has a symmetrical structure. That is, the side walls are of the same size and are all sloped at the same angle. dihedral prism 3
Preferably, 0 is also symmetrical. That is, the two sloping sidewalls are slanted at the same angle. The length of the dihedral prism only needs to be long enough to prevent the sphere 41 from engaging with any end wall. Vertical axis 75 of prism 30
are shown in FIGS. 1 and 5. Preferably, the longitudinal axis of the prism is aligned such that it intersects the vertical centerline 80 of the pyramid 1o. Please refer to FIG. However, there may be some error in this respect.

In the case shown, both apertures 10.30 are in the same solid body. However, this is not a limitation of this invention. for example,
The ball 41 may be attached to the upper rigid body and the aperture 30 may be provided in the lower rigid body.

In general, the engaging portion of any one of the three support points may be on any rigid body. However, it is necessary that the other retaining part to its support point be in the other rigid body and in a suitable position. However, it is essential that the position of the third support point P3 is laterally offset from the common axis of support points P1 and P2.

In other words, a tripod support is required.

In a preferred form of the invention, the two bodies are secured together by gravity by placing one body on top of the other and using gravity to hold the mating parts together at their respective support points. It will be done. However, the invention contemplates applying an external force to one or more support points to keep the two bodies secured together, if this is desired.

7-20 illustrate the use of the present invention in manufacturing products such as micro-sized semiconductor electronic circuits.

When the invention is used in a factory layout for manufacturing products, a series of separate processing stations are utilized. Each processing station has a stationary station attached to a fixed base and tools or equipment for carrying out the production process. A removable workpiece support carrying the product to be manufactured is initially placed in one of the processing stations, and this receiver is removably fixed thereto. No tools or equipment are shown in the drawings. After the production process is carried out in the first processing department,
The workpiece support is removed from its support section and transported to another processing section, and the new support is then removably secured to the section.

When carrying out the production procedure according to the invention, all supports are attached to support points Pi, P2 . It is important that the matching means that make up P3 are the same. Before production begins, all tools are aligned with their corresponding receivers.

Next, the supports on which the workpieces are placed are sequentially positioned in the machining sections of each platform. Assuming that the workpiece is properly aligned with the tool on the first machining section, it follows that the workpiece will be correctly aligned with the tool on all subsequent machining sections.

A workpiece support constructed in accordance with the present invention is shown in detail in FIGS. 8-18. FIGS. 7-14 also illustrate the mating relationship between the workpiece support and the first formed receiver. Figures 19 and 20 illustrate the mating relationship between the workpiece support and two other types of receivers.

In FIG. 7, supports 101, 101a are permanently supported on a fixed base 100, such as a workbench. The receiver part 101 and the fixed base 100 together with tools or equipment not specifically shown in the drawings form a first working part, and the receiver part 10
1a and the fixed base 100 together with a different tool or device form a second working part. Workpiece support 1o indicated by a broken line
5 can be supported in the first working section, while a similar workpiece support 1osa (also shown in broken lines) can be supported in the second working section.

8 and 9 show in greater detail the mutually engaged or operative position of the receiver portion 101 and the removable workpiece support 1o5. The device is shown in plan view in FIG. 8 and in side view in FIG. Workpiece support 105 includes a generally rectangular flat metal plate 106 . However, board 10
6 has an L-end busy center portion 106a, which protrudes in a trapezoidal shape. The receiving portion 101 is a rectangular flat metal plate 170
has. Furthermore, the receiving part is an L-shaped metal bracket 171.
, which is firmly fixed to one side of the plate 1700 and then extends upward to have an overhanging portion 172. Trapezoidal end 1 of removable workpiece support 105
06a is the plate 170 of the part 101 and the extending arm 172
inserted between. Support points P1 and P2 are configured between corresponding corners of plate 1HD and the associated end of plate 106, and support point P3 is configured between projecting end 106a of plate 106 and overhang arm 1720.

It can thus be seen that in the embodiment of FIGS. 8 and 9, the workpiece support 105 is supported in a cantilevered manner by the support portion 101. The removable support applies a downward force to the plate 170 through support points PI and P2, whereas an upward force is applied to the overhang arm 172 through support point P3.

In the embodiment of FIGS. 8 and 9, the support point pi.

P2. The mutually engaging parts of P3 are arranged as follows. A removable workpiece support 105 supports support points Pi, P
It has an opening for the support point P3 and a flat surface for the support point P3. The receiver part 101 has a projecting hemispherical surface for all three support points. Other configurations are possible, but since the removable workpiece support 105 must be transported from one processing station to another in a manufacturing operation, a projecting hemispherical surface as part of a self-contained structure is required. This particular arrangement is preferred since it is more susceptible to damage and increases the weight of the parts being transported.

The removable workpiece support 105 also has a structure with another third support point labeled P3' and another separate point labeled P3'. Support point P3' is used in the arrangement shown in FIG. Support point P3' is used in the arrangement shown in FIG.

Thus, the removable workpiece support 105 has a support structure with five separate support points, whereas the receiver has a support structure with five separate support points.
1 has a support structure that creates only three support points. Each of these eight structures allows for vertical adjustment. Both the plate 170 of the receiver section 101 and the plate 106 of the workpiece support 105 normally assume a horizontal position as shown in FIG. However, it may be necessary to make some adjustments in height at one or more of the support points, which is why all eight support structures are provided with such adjustments.

Support Structure Details Each of the eight support structures has a column that passes through an aperture in an associated horizontal plate and is vertically adjustable within the aperture. A typical aperture shown in FIG. 17 is a cylindrical aperture 10 formed in an extension 108a of plate 106.
? It is. A keyway 108 is formed at one point on the periphery of the opening 101.

Similar openings with keyways are provided throughout the support structure at 8').

The mechanical details of the support point P1 are shown in FIGS. 11 and 13-15. The post 121 passes vertically through a key-shaped opening provided in the plate 170 of the receiver section 101.

The central portion 122 of the post 121 has a smooth outer surface and fits into the opening in the plate 170. The central portion 122 has a radially projecting stop 123 that occupies a keyway, thereby preventing the column 121 from rotating relative to the plate 170. A hexagonal retaining nut 124 is threaded onto the upper end of the post 121 and engages the upper surface of the plate 170, and a similar hexagonal retaining nut 175 is threaded onto the lower end of the post and engaged with the lower surface of the plate 110. do. To change the vertical adjustment of the post, loosen one or both lock nuts, raise or lower the post to the desired degree, and retighten both lock nuts.

An opening 127 is formed at the upper end of the column 121 and has the shape of a trihedral pyramid. Figure 14 and 1
See Figure 5. Ball 120 fits into opening 127. Ball 120 has an aperture 128 through its vertical diameter which is recessed at its upper end such that its head receives an allen wrench and a bolt 126 passes through this aperture and extends below the ball. . A threaded hole 129 on the longitudinal axis of the upper end of post 121 and forming a lower extension of opening 127 receives the threaded lower end of bolt 126 .

By fixing the bolt 126 to the column 121, the ball 12
0 can be fixed precisely and reliably to the pillar,
Therefore, the center of the sphere is located on the longitudinal axis of the column, ensuring that the position of the sphere relative to the column is maintained.

At the support point Pi, the column 111 is attached to the removable workpiece support 1.
It is adjustable and supported by a plate 106 of 05. A smooth central portion 112 of post 111 enters the opening in plate 106 and has a radially extending stop 113 which is retained in the keyway. hexagonal locking nut) 114
, 115Aζ are screwed onto the upper and lower ends of the pillars on the upper and lower sides of the plate 106. The method of making vertical adjustment of the column is the same as previously described.

The pillar 111 has an exposed frontage 110 in the shape of a trihedral pyramid at its lower end. Figures 11, 13 and 15
See diagram. As shown in FIGS. 9 to 11, when the workpiece support 105 is supported by the support part 1o1, due to the weight of the workpiece support, the column 111 is centered on the ball 120 and the ball is aligned with the longitudinal axis of the column, but is affected by any eccentricity of the pyramidal aperture 110 with respect to the longitudinal axis of the column.

At support point P2, the lower structure is the same as support point PI. That is, the ball 140 is supported by the pillar 141,
This is a sphere 120 and a column 12 in all aspects, both in structure and operation.
Same as 1.

Of course, in accordance with the general idea of the invention described with respect to FIG. 1, the upper portion of the support point P2 is different. A threaded post 131 is supported by plate 106 in the same manner as post 111. However, its lower end carries a dihedral prism 130 which receives the upper surface of the sphere 1400 hemisphere.

Figure 11.

See FIGS. 12, 13 and 16. Due to the weight of the workpiece support, the column 131 is restricted in two degrees of freedom by the ball 140.

The structure of the support point P3 is shown in FIGS. 1O and 17. The lower structure includes a post 151 that is vertically adjustable with respect to plate 106 and has an upper flat end surface 150. The upper structure is an overhanging arm 1゛72
It has a vertically adjustable column 161 inside. A special housing 166 is fixed to the lower end of the column 161, within the lower part of which the ball 160 is loosely constrained. The dashed line 160' shown in FIG. 17 indicates that the ball 160 will fall somewhat downwards when the two support structures are separated. Pressing the two support structures together causes the ball to move upwardly to the position shown, with its top surface engaging the planar bottom surface 167 of the housing 166. When the two support structures at the support point P3 engage, the final resting position is determined and the ball 1
60 are capable of some rotation and have rolling rather than sliding friction, which means that these structures are capable of producing torque and torque that can adversely affect spatial alignment accuracy. Ensure relief from other stresses. When the ball 160 is thus in its rest position, the ball, together with the housing or receiving socket 166, is attached to the rigid body 1 of the receiving part 101.
This is a protrusion fixed to 70,172.

For example, using the ball 12[1 as the support point PI has the following advantages. The pole or ball is the post on which it is attached 1
Hard stones are made much harder than 21. Using known manufacturing methods, this pole or sphere can also be made much more precisely by forming a hemispherical surface directly on the upper end of the column.

BACKGROUND CONFIGURATIONS As shown in the drawings, three different configurations or shapes of bridges are used in the construction of microelectronic circuits. The receiving portion 101 and the receiving portion 101' shown in FIG. 19, which were previously described in detail, also have a cantilever type support function. However, the support points are reversed. That is, the support point P3' is connected to the column 161' and the housing 1.
By 66', the receiver is configured on the lower plate 170' of the section, and the support points P1 and P2 are configured on the overhanging arm 172'.

FIG. 20 shows a third type of receiver part 101''.

The workpiece support does not have a cantilevered support. Plate 170'
is elongated and approximately the same length as the plate 106 of the workpiece support. Support points PI, P2 are defined at one end of the plate 170', and support point P3' is defined at the other end by the post 161' and the housing 166'.

Although parts of different shapes can be used, the matching means must be made as precisely as possible. especially,
The support structure for support points P1 and P2 is the same 2 in space.
Draw points, the distance between them must be the same. If hemispherical surfaces are used, as is the case with the preferred shape of the receiver, the radii of these surfaces should be the same and the distance between their centers should also be the same.

In particular, the hemispherical surfaces 120, 140 must all have the same diameter and the distance between their centers must be the same. This relationship ensures that the hemispherical surface 120 engages three small equal contact areas within the aperture 11°, regardless of which bridge is currently supporting a particular workpiece support, and the hemispherical Surface 140 engages the same two small contact areas within opening 130.

For all bearings of a particular shape, it is important that the support point P3 lies in the same plane with respect to the common axis of the support points P1 and P2. Specifically, the hemispherical surface 120
, 140 to a common axis of the housing 166 and the ball 1
The positions of 60 should be the same, or as close to the same as possible.

When the receiver constitutes a part, the opening 1 to the pillar 121.141
07 is drilled in the metal plate 170 using a precision method. Each pillar is made larger at first.

An aperture of the trihedral pyramid is formed at the top end, as well as its threaded central extension.

Each ball 120, 140 is bolted to a corresponding post. After this, each pillar is machined to the specified dimensions using a ball to determine the center line.

Construction of the Workpiece Support The workpiece support 105 includes a plate 106 carrying adjustable columns 111, 131, which are located at a support point P.
Opening 110 for i and opening 13 for support point P2
has 0. These openings are used for any of the three shapes of the receiver. The adjustable post 151 of FIG. 17 has a flat surface 150 relative to the support point P3 in relation to the receiver of FIGS. 7-18.

Workpiece support 105 also has posts 151' (see FIGS. 9 and 19) that are inside posts 111, 131. This is used in conjunction with a receiver of the type shown in FIG.

In this case the support is an inverted trap.

Additionally, the workpiece support has an adjustable post 151' at the other end of the plate 106, which has a downwardly facing flat surface 15ON. This is used in conjunction with a receiver of the type shown in FIG.

Workpiece Holder As best shown in FIGS. 8 and 9, the substrate 19θ, which constitutes the workpiece on which the microelectronic circuit will be made, is firmly mounted on the upper surface of the workpiece holder 180. be combined.

Workpiece holder 180 is generally in the form of a flat plate and is placed over the top surface of plate 10B of workpiece support 105. The workpiece holder 180 has holes 181 at each end thereof which receive bolts 182 for securing the workpiece holder to the plate 106. See FIGS. 8, 9 and 10. Each hole is large enough to allow lateral adjustment of the workpiece holder 180. For this reason, when both bolts 182 are loosened, the workpiece holder 18o is removed from the plate 106 that supports it.
can be adjusted in a plane parallel to the

Alignment and Calibration of the Production Process In order to carry out the production process in accordance with the present invention, a series of processing stations are provided. Each processing station includes a receiver fixed to a fixed base and associated tools or equipment for performing a particular production process.

Multiple workpiece supports are also required to create the part to be manufactured. Although the number of processing stations is relatively small, the number of production workpiece supports can be enormous. In addition to the production workpiece support, there is one particular workpiece support that is chosen as a master or pattern. It is constructed similarly to other workpiece supports.

It will be appreciated that the set of devices as a whole is capable of various adjustments. Specifically, each Uke is part, 3
Two support points PI, P2. All of P3 can be adjusted vertically to set the desired reference frame. Each workpiece support has support points Pi, P2 . It has three vertical adjustment sections corresponding to P3. Further, the workpiece holder 180 can be adjusted laterally, longitudinally, or diagonally with respect to the workpiece support supported thereon.

A brief explanation of the procedure is as follows. The first step is to use the master workpiece support to align the receivers of all the workpieces. As a second step, each machine tool or device is aligned with its associated frame of reference, again using the master support to achieve this result. The third step is to adjust all production workpiece supports to be identical to the master support.

This is accomplished by positioning each workpiece support in turn at a particular workpiece. The final step in beginning production for a particular workpiece is to orient the workpiece relative to its workpiece support. This is done in one particular machining section and no further adjustments are necessary as the workpiece advances through the subsequent machining section.

The alignment of the receiver parts is performed as follows. Special features of the master support are the support points Pi, P2 . The vertical adjustment of P3 is established and should not be changed later. The master workpiece support is free of workpiece holders or workpieces and is provided with suitable means for indicating positional alignment, such as an optical reference grid fixed to the face of plate 106. The master workpiece support is inserted into the receiver section of the first processing section.

The support columns 121, 141, t61 are adjusted vertically as necessary to obtain the desired height of the master support as well as the desired angle of inclination. For example, it may be desirable to position the master support so that the flat top surface of plate 106 is precisely horizontal. Pillars 121, 14
Preferably, the vertical positions of 1 are not exactly different from each other. This is because then there will be some change in the horizontal distance between points PI and P2 in the reference frame set by the receiver. After the first machining section receiver aligns the parts, the master support is passed through all the other machining sections in sequence, and each of the other receivers aligns the parts in the same way.

Tool alignment is performed as follows. After the first working part supports align the parts, it supports the master support in the desired position. The tools, photomasks, or other production equipment of the first processing station are then adjusted to the desired location relative to the master workpiece support. Next, the master support is sequentially moved to each of the other processing sections, and the tools or equipment of each processing section are similarly aligned.

If desired, the receivers of all the machining sections can be used to first use the master support to align the sections and then to align the tools of all the machining sections. However, alternatively, when the master support is inserted into the first working part, the receiver may complete alignment of both the part and the tool before moving the master support. Thereafter, at each successive machining station, the master support is used to align both the receiver and the tool or equipment for that machining station before moving to the next machining station.

The purpose of adjusting the production workpiece support is to adjust its support point PI
, P2. The purpose is to ensure that the vertical adjustment of P3 is exactly the same as the adjustment of the master support or pattern. This is done in one processing section. The special instrumentation used in this machining section to align the workpiece support is
There is no need to move from one place to the next. One production workpiece support is inserted into the processing station and its support point is adjusted to the desired position. After this, it is removed and another workpiece support is installed and adjusted. After this, all other production workpiece supports are adjusted in the same processing station.

However, after all production workpiece supports have been adjusted, it is still necessary to orient each workpiece with respect to the workpiece support on which it is carried.

This orientation is determined by the adjustability of the workpiece holder 180. The workpiece is oriented in the very first machining section, and in subsequent machining sections it is not necessary to change the adjustment position of the workpiece holder 180.

More specifically, in accordance with the general idea of the invention, the first processing section is equipped only with instrumentation used for orienting the workpiece, and is equipped with no instrumentation for carrying out the production process itself. No tools or equipment shall be provided. For this reason, the number of processing sections must be equal to the number of production steps performed plus one. For example, if there are ten separate production steps to be performed on a workpiece, there must be eleven machining stations. This is because the first machining section is used only for orienting the workpiece relative to the workpiece support.

However, when manufacturing micro-semiconductor circuits from a substrate such as substrate 190, the step of orienting the workpiece in the first processing section can be omitted. This result shows that the board 190
This can be achieved by making p larger than what is actually needed. At this time, the part of the board that is actually used is recessed well inside the boundary, and when all production steps are completed, the board has an edge remaining that can be scrapped or recycled. I can do it. In this particular case, only 10 processing stations are required to carry out a series of 10 production steps.

In the production process, a particular workpiece, carried on a particular workpiece support, is supported in a first processing station. If it is necessary to orient the workpiece, do it here, otherwise carry out the first production step here. The production process may be, for example, drilling holes or carrying out a photolithography process. The workpiece support is then removed from the first machining station and inserted into the second machining station. In the second machining station, no adjustments need to be made to either the workpiece support or the machining station. Next, the production process is carried out in the second processing department. Similarly, the workpiece support can be snapped off from the second processing station and snap-fitted in the same way quickly into the third processing station, where another production step is carried out. This process continues until the workpiece has passed through all the machining sections. Handling of workpieces during the production process can be performed by relatively inexperienced or untrained personnel because the adjustments or alignments of the various workpieces or equipment do not have to or must be changed. If it is necessary to orient the workpiece in the first machining section, a more skilled worker may be required to do the job.

In the present invention, it is desirable that all the bearings be made as identical as possible, especially for the hemispherical surfaces 120° 140, defined by the surface 150 along with the distance between the centers of the hemispheres and the common axis of the hemispheres. The same can be said about planes. That is, all receivers should set the same reference frame. Of course, when the shape of the part of the uke is different,
It is true that the planes defined by surface 150 are different.

Therefore, high precision is required in the manufacture of the bridge.

However, when making production workpiece supports, high precision is not required. The reason is that the receiver engages the same six small contact areas of the workpiece support, regardless of the working part in which the workpiece support is placed. Since the number of required workpiece supports is enormous, the need for less precision is of practical importance.

Continuing the production process requires the use of a large number of workers, the number of which may be equal to or greater than the number of processing stations. It may be desirable to have specific workers process specific workpieces across all processing stations.

Alternatively, it may be desirable for a particular worker to be stationed at a particular processing section at all times. However, in any case, the workpiece support and receiver part of the present invention can be used in any processing part.
They snap together almost instantaneously to achieve proper alignment, and can be removed almost instantaneously when machining in that section is complete.

Although this invention has been described in considerable detail consistent with patent law by fully disclosing at least one form of this invention, it is understood that this detailed description is in no way intended to limit the scope of this invention. I would like to be recognized.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing two rigid bodies secured at three support points in accordance with the general idea of the invention; FIGS. 2 and 3 show mating parts at one support point; FIG. The cross-sectional views shown in Figures 4 and 5 show the parts that fit together at the second support point.The cross-sectional views and Figure 6 show the parts that fit together at the third support point. , FIG. 7 is a plan view showing the layout of a factory for producing ultra-small electronic circuits, which includes a plurality of processing sections configured according to the present invention, and FIG. 8 shows the individual processing steps shown in FIG. 7. Enlarged plan view of the section,
Figure 9 shows the eighth part including the receiver and the removable workpiece support.
The side view of the machining part in the figure, Figure 1O shows the machining part in Figure 9 along line 1.
11 is a side sectional view taken along line 11-'11 of the machined part in Figure 9, and Figure 12 shows the second support point of the machined part in Figure 11. 13 is a side cross-sectional view taken along line 12-12, FIG. 13 is a cross-sectional view taken along line 13-13 of FIG. 11, showing the first and second support points, and FIG. A cross-sectional plan view taken along line 14-1'4 in Figure 11, Figure 15 is an exploded perspective view of the fitting parts of the first support point, and Figure 816 shows the fitting parts of the second support point. Exploded perspective view, Figure 17 shows the third support point
18 is a detailed view of the workpiece holder taken along line 18-18 in FIG. 9; FIG. 19 is the same as FIG. 9. Figure 20 shows a side view of the machining part for deformation using the same tool holder, but a different type of holder for deformation using the part. It is a figure showing a processing part. Explanation of main symbols B1. B2: Sturdy body 10. 30: Opening 21. 41: Ball 50: Surface 61: Protrusion 6. l Procedural amendment (U仝) (loftr:) 7(、NUTS/NKOG＼°
Late night. 4. Agent

Claims (1)

[Claims] 1) The two rigid bodies can be moved together in a predetermined spatial manner so that the two rigid bodies can be quickly and easily separated and then reattached in perfect order. a first body having first and second exposed apertures;
a second body having first and second projecting hemispheres spaced apart such that the first and second apertures in the body of the body are receivable, the first aperture being a trihedral pyramid; the second aperture is in the form of a dihedral prism, the dimensions of which are widest at the outer end, and the second aperture is widest at the outer end; the axis of the prism extends toward the first aperture, the first body having an exposed support surface external to an axis common to the first and second apertures, and the second body The device has a protrusion adapted to engage the exposed ridge of the first body. 2. In the device according to claim 1), the second body is a support attached to a fixed base, and the first body is a removable workpiece support, The three support points are arranged such that the workpiece support is placed above the receiver so that the receiver can be supported on the receiver by gravity. 3) In a device for removably fixing two solid bodies at three support points so that the bodies can be quickly and easily separated and then reattached in perfect order,
It has two bodies that work together to create three support points,
At the first support point, one body has an exposed opening in the form of a trihedral pyramid whose dimensions are widest at the outer end, and the other body has an exposed opening in the shape of a trihedral pyramid whose dimensions are widest at the outer end; at a second support point, C. one body assumes the shape of a dihedral prism whose dimensions are widest at the outer end; the second body has a projecting hemisphere adapted to be received in the opening in engagement with both planar surfaces thereof, and the axis of the prism is aligned with the first support. It extends towards the third point. , at the p support point, one body has a protrusion external to an axis common to the first and second support points, and the other body engages the protrusion substantially perpendicular to the protrusion; device characterized in that it has a supporting surface. 4) In the device according to claim 3), one body is mounted on a fixed base, the receiver is a part, and both hemispheres are in the receiver part, and the other body is attached to the receiver part. is a removable workpiece support, and the three support points are such that the workpiece support is disposed above the receiver so that the receiver can be supported on the receiver by gravity. equipment located in. 5) A device for securing two solid bodies to each other in a precise predetermined relationship, the attachment of the two bodies being in the form of a trihedral pyramid whose dimensions are widest at the outer ends of the structure used in the section. a first solid body having a protruding aperture, an exposed aperture in the shape of a trihedral pyramid such that its dimensions are widest at the outer end, and an extension of the inner end of the exposed aperture; a second rigid body having a threaded aperture formed as a section; the sphere occupying the outer ends of both said apertures simultaneously, but such that less than half of the volume of said sphere falls within each aperture; a solid sphere having a diameter of approximately 1.5 mm and having a passage passing through its center and recessed at one end, a head received in the recessed end of the passage and a shaft passing through said passage; a bolt, the shank having a threaded projecting end adapted to be received in a threaded opening in the second rigid body so that the ball is connected to the The ball is inserted into the three planar walls of the exposed opening of the second rigid body by being received in the exposed opening of the second rigid body and the bolt being tightened within the threaded opening. It is fixed so that it engages with all of the parts, so that when the two bodies are brought into pressure contact with each other,
A structure in which each of them occupies a precisely predetermined position relative to the center of the sphere. 6) An apparatus for manufacturing microelectronic circuits on an assembly line, comprising a stationary base, two hemispherical surfaces projecting upwardly from the stationary base, and an apparatus for manufacturing microelectronic circuits on an assembly line. a generally rectangular flat plate with a solid body having a fixed protrusion laterally offset from a common axis at the center of the radius of the face of the shape and two exposed openings on its underside; , one of the apertures is in the shape of a trihedral pyramid and the other is in the form of a dihedral prism, and the hemispherical face is received in the corresponding aperture. The receiver is disposed above the part and has a flat surface adapted to be in supporting engagement with the fixed projection, such that the receiver is in supporting engagement with the sloped side wall of the part. a removable workpiece support supporting the workpiece support at three support points; a workpiece holder having a separate means for adjusting the height and an upper surface disposed on the upper surface of said workpiece support and adapted to receive and support a substrate from which a microcircuit is to be fabricated; and means for adjusting the horizontal position of the workpiece holder relative to the workpiece support. 7) The device of claim 1), wherein said protrusion has a convexly curved end for engaging said exposed surface. 8) The device according to claim 1), wherein said protrusion is a rigid ball held loosely confined in a hold-down socket of said second rigid body. 9) The device of claim 3), wherein said protrusion has a convexly curved end that engages said exposed surface. 10) The device as claimed in claim 3), wherein said projection is a rigid ball held loosely and confined in a retainer socket of an associated rigid body. 11) The apparatus of claim 1), wherein the first body includes means for adjusting the position of one exposed opening relative to the rest of the body. 12. The apparatus according to claim 11), wherein the first body is in the form of a generally flat plate having transverse openings for receiving a pair of corresponding posts; an exposed aperture is formed at the end of the post, the post being adjustable within the lateral aperture in a direction perpendicular to the plate;
The device allows the position of the exposed opening to be adjusted. 13) A device according to claim 3, in which one of the bodies includes means for adjusting the position of the exposure opening in the body relative to the remainder of the body. 14) The device according to claim 3), wherein one body is essentially in the form of a flat plate with a lateral opening adapted to receive the post; receiving an elongated column having an exposed aperture at an outer end thereof, the inner end of the column being disposed within the lateral opening, and the column being axially adjustable within the lateral opening; and the position of the associated exposed aperture relative to said plate can be adjusted.