JPS59164150A - Ink jet recording head - Google Patents

Ink jet recording head

Info

Publication number
JPS59164150A
JPS59164150A JP3763183A JP3763183A JPS59164150A JP S59164150 A JPS59164150 A JP S59164150A JP 3763183 A JP3763183 A JP 3763183A JP 3763183 A JP3763183 A JP 3763183A JP S59164150 A JPS59164150 A JP S59164150A
Authority
JP
Japan
Prior art keywords
width
piezoelectric element
groove
recording head
pressure generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3763183A
Other languages
Japanese (ja)
Inventor
Toyoji Shioda
潮田 豊司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3763183A priority Critical patent/JPS59164150A/en
Publication of JPS59164150A publication Critical patent/JPS59164150A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/1618Fixing the piezoelectric elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching

Abstract

PURPOSE:To make it possible to dissolve a problem caused by the shift of a bonding position, by providing a groove, which has a width being 5-30% on the basis of that of a pressure chamber, to the thin plate of an electromechanical converter so as to surround a position where a piezoelectric element must be bonded while bonding said element to the position surrounded by said groove. CONSTITUTION:A groove 501 is provided to the upper plate 102 on the pressure generating chamber 104 formed to a substrate 100 at the bonding position of a piezoelectric element 103 so as to leave a width bp by etching. When the width bp' of the piezoelectric element 103 is made slightly wider than the width bp and made almost equal to the width bi of the pressure generating chamber 104, the piezoelectric element 103 is bonded to the upper plate 102 in the width bp occupying 70-90% of the width bp' and the deformation amount thereof comes to about 2.3 times as compared with a conventional one is determined by the width bp of the groove 501 regardless of the width of the piezoelectric element. Therefore, the deformation amount is not changed even if the shift of the bonding position is generated and the processing numbers accompanying the determination of the bonding position can be reduced and the jet efficiency of ink droplets can be enhanced.

Description

【発明の詳細な説明】 本発明はドロップオンデマンド型インクジェット記録ヘ
ッドに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a drop-on-demand type inkjet recording head.

ドロップオンデマンド型インクジェットプリンタに使わ
れる記録ヘッドは第1図の断面図(a)、上面図(b)
に示すノズル孔101とインク溜り105との間に圧力
発生室(以下圧力室と称する)104を有する噴射チャ
ンネル系統からなる基板100にガラスセラミックない
しステンレス等の材質から成る薄平板状の可撓性の上部
プレート102を接合し、ジルコンチタン酸塩、チタン
酸バリウム等からなる圧電素子103を上部プレート1
02上の圧力室104に対応した位置に接着材、拡散接
合などの手段によって接合した構成からなっている。
The recording head used in a drop-on-demand inkjet printer is shown in cross-sectional view (a) and top view (b) in Figure 1.
A substrate 100 consisting of an ejection channel system having a pressure generation chamber (hereinafter referred to as pressure chamber) 104 between a nozzle hole 101 and an ink reservoir 105 shown in FIG. A piezoelectric element 103 made of zircon titanate, barium titanate, etc. is connected to the upper plate 1.
02 at a position corresponding to the pressure chamber 104 using an adhesive, diffusion bonding, or other means.

また同様構成のものの変形としては同一出願人よシ出さ
れている特許m57−071983 号明訓書「マルチ
ノズル印字ヘッド」がある。
A variation of the same structure is disclosed in patent number M57-071983 ``Multi-nozzle print head'' issued by the same applicant.

さて、前記記録ヘッドの動作原理は電子計算機または通
信回線からの記録信号に従って圧電素子103に電気信
号を印加すると上部プレート102の圧力室104に対
応した部分が圧電素子103と上部プレート102との
バイメタル効果により瞬時に曲げ変形される。その結果
圧力室104の容積が瞬間的に減少し、インク供給管1
06を介して外部より充填された圧力室104内のイン
クに圧力波を発生させる。その圧力波によりノズル孔1
01からインク滴107を1個噴射するものである。
Now, the operating principle of the recording head is that when an electric signal is applied to the piezoelectric element 103 in accordance with a recording signal from an electronic computer or a communication line, a portion of the upper plate 102 corresponding to the pressure chamber 104 is formed by a bimetallic material between the piezoelectric element 103 and the upper plate 102. The effect causes it to bend and deform instantly. As a result, the volume of the pressure chamber 104 decreases momentarily, and the ink supply pipe 1
A pressure wave is generated in the ink inside the pressure chamber 104 filled from the outside via the ink. The pressure wave causes the nozzle hole 1 to
One ink droplet 107 is ejected from 01.

ところで第1図(b)中の断面A−Aを示した第2図に
おいて圧電素子103の幅す、は圧力室104の幅bi
との比、すなわちbp/b、が07から0.9の間にあ
るとき最も変形量が大きく、従って本記録ヘッドはbI
)/bi = 0.7〜0.9の寸法で効率よく動作す
る。これは第3図に示す有限要素法によるモデルを使っ
て数値計算を行なった結果から明らかKなったものであ
る。第3図は第2図の断面図のうち左半分の領域につい
て有限要素に分割したものであり、図中の点線3が計算
結果による変形曲線である。幅bpをパラメータとして
変形量δを調べた結果、第4図に示すグラフとなり、変
形量δの最大点4がす、/b、=0.7〜0.9の範囲
にある。
By the way, in FIG. 2 showing the cross section A-A in FIG. 1(b), the width of the piezoelectric element 103 is the width bi of the pressure chamber 104.
When the ratio of bp/b is between 07 and 0.9, the amount of deformation is largest, so this recording head has bI
)/bi = 0.7 to 0.9. This has become clear from the results of numerical calculations using the finite element method model shown in FIG. FIG. 3 shows the left half region of the cross-sectional view of FIG. 2 divided into finite elements, and the dotted line 3 in the figure is the deformation curve based on the calculation result. As a result of examining the amount of deformation δ using the width bp as a parameter, the graph shown in FIG. 4 is obtained, and the maximum point 4 of the amount of deformation δ is in the range of /b=0.7 to 0.9.

厳密にはb p /b i の値は、圧力室の幅bi、
圧電素子の板厚t9+上部プレートの板厚t1によって
異なるが、0.7から0.9の範囲にある。但し、圧電
素子103が圧力室104の中心に正確に接着された条
件の上のことである。圧電素子103が既位置よりわず
かにずれる、すなわち非対称の位置に接合されると変形
量δが低下し、インク滴の噴射効率が悪くなるという問
題があった。また前記圧電素子103を上部プレート1
02に接合するとき、上記の位置に正確に接合すること
は治具などの使用をもって行なっても非常に困難であり
、工数の増大など製造上のコストは多大なものになると
いう問題があった。
Strictly speaking, the value of b p /b i is the width bi of the pressure chamber,
Although it varies depending on the thickness t9 of the piezoelectric element and the thickness t1 of the upper plate, it is in the range of 0.7 to 0.9. However, this is on the condition that the piezoelectric element 103 is accurately bonded to the center of the pressure chamber 104. If the piezoelectric element 103 is slightly shifted from the existing position, that is, if it is bonded to an asymmetrical position, the amount of deformation δ decreases, resulting in a problem that the ejection efficiency of ink droplets deteriorates. Further, the piezoelectric element 103 is connected to the upper plate 1.
When bonding to 02, it is very difficult to accurately bond at the above position even with the use of jigs, and there is a problem in that manufacturing costs such as increased man-hours are significant. .

本発明の目的は簡単な構成により上部プレートと圧電素
子との接合位置ずれによる問題点を解決するとともにイ
ンク滴の噴射効率を向上させることにある。
An object of the present invention is to use a simple configuration to solve problems caused by misalignment of the bonding position between the upper plate and the piezoelectric element, and to improve the ejection efficiency of ink droplets.

本発明によればノズル孔と圧力発生室とを有してなる1
個または複数個の噴射チャンネ化系統が1つの共通イン
ク溜りに連通して構成され、記録時において前記圧力室
に対応した位置に設けられた電気機械変換器を変形させ
、前記ノズル孔よりインクを噴出させるドロップオンデ
マンド型インクジェット記録ヘッドにおいて、薄板と圧
電素子からなる電気機械変換器の薄板上に、圧電素子の
接合位置の周囲に前記圧力室の幅の5〜30%の幅の溝
を有し、その溝に囲まれた位置に圧電素子を接合したこ
とを特徴とするインクジェット記録ヘッドが得られる。
According to the present invention, the 1 comprises a nozzle hole and a pressure generating chamber.
or a plurality of ejection channel systems are configured to communicate with one common ink reservoir, and during recording, an electromechanical transducer provided at a position corresponding to the pressure chamber is deformed, and ink is ejected from the nozzle hole. In a drop-on-demand type ink jet recording head, a thin plate of an electromechanical transducer consisting of a thin plate and a piezoelectric element has a groove having a width of 5 to 30% of the width of the pressure chamber around the bonding position of the piezoelectric element. An inkjet recording head characterized in that a piezoelectric element is bonded to a position surrounded by the groove can be obtained.

以下本発明の実施例を図面を参照して説明する。Embodiments of the present invention will be described below with reference to the drawings.

第5図は本発明のインクジェット記録ヘッドの構成図で
あり、第6図は第5図中の断面E−Bを示す図である。
FIG. 5 is a block diagram of the inkjet recording head of the present invention, and FIG. 6 is a diagram showing a cross section EB in FIG. 5.

さて、第5図の圧電素子103の接合位置において、前
記の幅bBを残すように外周部をエツチングもしくは機
械加工などによシ溝501を設ける。第6図に示すよう
に圧電素子103の幅゛b、′は前記の幅bpに対して
、やや広くとるようにする。また幅bp′は前記圧力室
の幅biと同一であっても良い。もし、b、’=b、 
 であれば圧電素子103の幅bp′のうち70〜90
−〇幅bpが上部プレート102に接合されておシ、他
の部分は上部プレート102上の溝501の上にあって
浮いている。また、溝501の部分の板厚は他の部分゛
゛の板厚tiに比べて薄くなっており、従って剛性が低
くなっている。これを第7図に示すように第3図と同様
に有限要素法によりモデル化し、数値計算を行なった結
果、圧電素子103の板厚t、と上部プレート102の
板厚tiとの比、す々わちtp/li  をパラメータ
にとれば、その変形量δは第8図のグラフのようになる
。図中の点線8aは第2図に示す従来の電気機械変換器
による結果であり、実線8bは第6図に示す本発明の電
気機械変換器による結果である。
Now, at the bonding position of the piezoelectric element 103 shown in FIG. 5, a groove 501 is provided by etching or machining the outer periphery so as to leave the above-mentioned width bB. As shown in FIG. 6, the widths 'b,' of the piezoelectric element 103 are set to be slightly wider than the width bp. Further, the width bp' may be the same as the width bi of the pressure chamber. If b,'=b,
If so, 70 to 90 of the width bp' of the piezoelectric element 103
- The width bp is joined to the upper plate 102, and the other parts are floating on the groove 501 on the upper plate 102. Further, the thickness of the groove 501 is thinner than the thickness ti of the other portions, and therefore the rigidity is low. As shown in FIG. 7, this was modeled using the finite element method in the same manner as in FIG. If tp/li is taken as a parameter, the amount of deformation δ becomes as shown in the graph of FIG. The dotted line 8a in the figure is the result obtained by the conventional electromechanical converter shown in FIG. 2, and the solid line 8b is the result obtained by the electromechanical converter of the present invention shown in FIG.

第8図かられかるように本発明のものは従来のものに比
べて変形量が約2.3倍(溝501の深さが上部プレー
トの板厚t、の1/2で、b、/b、−〇、8の場合)
も大きくとれることが明らかとなった。また幅に関して
は圧電素子103の幅bp′に関係なく、溝501によ
って設定された接合部の幅bpによって変形量が決定さ
れる。従って、圧電素子103が圧力室104に対して
ずれが生じても接合部の幅す、が確保されていれば変形
量に支障はないことは明らかである。実際の実験におい
ても、上記記載内容が判明し、この効果は多大なもので
あった。
As can be seen from FIG. 8, the deformation amount of the present invention is about 2.3 times that of the conventional one (the depth of the groove 501 is 1/2 of the thickness t of the upper plate, b, / b, -〇, 8)
It has become clear that it is possible to obtain a large amount of Regarding the width, the amount of deformation is determined by the width bp of the joint portion set by the groove 501, regardless of the width bp' of the piezoelectric element 103. Therefore, it is clear that even if the piezoelectric element 103 is misaligned with respect to the pressure chamber 104, there will be no problem with the amount of deformation as long as the width of the joint is secured. In actual experiments, the above-mentioned contents were confirmed, and the effect was significant.

以上に説明したように本発明のインクジェット記録ヘッ
ドは簡単な構成により、上部プレートに対する圧電素子
の接合位置ずれによる問題点を解決することが可能とな
るので接合位置決めに伴う製造工数を減少させることが
出来、さらに、インク滴の噴射効率の良いインクジェッ
ト記録ヘッドが実現でき、非常に有益性の高いものであ
る。
As explained above, the inkjet recording head of the present invention has a simple configuration and can solve the problem caused by misalignment of the bonding position of the piezoelectric element with respect to the upper plate, so that the manufacturing man-hours associated with bonding positioning can be reduced. Moreover, an inkjet recording head with high ink droplet ejection efficiency can be realized, and is extremely useful.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、従来のインクジェット記録ヘッドの構成図で
(a)は側断面図、(b)は上面図、第2図は従来のイ
ンクジェット記録ヘッドの電気機械変換器の断面図、第
3図は第2図の有限要素法モデル図、第4図は第3図の
モデルの計算結果のグラフ、第5図は本発明のインクジ
ェット記録ヘッドの構成図、第6図は本発明のインクジ
ェット記録ヘッドの電気機械変換器の断面図、第7図は
第6図の有限要素法モデル図、第8図は従来のものと本
発明のものとの計算結果のグラフである。図中において
、102は上部プレート、103は圧電素子、104は
圧力発生室、501は溝である。 (b) 第3図 島 第 4図 o        o、s   o7−o、qr、。 bp/bL 第6図 第4図 /UIJ−100 第8図 tJp/lr
FIG. 1 is a block diagram of a conventional inkjet recording head, (a) is a side sectional view, (b) is a top view, FIG. 2 is a sectional view of an electromechanical transducer of a conventional inkjet recording head, and FIG. 3 is a diagram of a conventional inkjet recording head. is a diagram of the finite element method model shown in Fig. 2, Fig. 4 is a graph of the calculation results of the model shown in Fig. 3, Fig. 5 is a block diagram of the inkjet recording head of the present invention, and Fig. 6 is the inkjet recording head of the present invention. 7 is a finite element method model diagram of FIG. 6, and FIG. 8 is a graph of calculation results of the conventional one and the one of the present invention. In the figure, 102 is an upper plate, 103 is a piezoelectric element, 104 is a pressure generating chamber, and 501 is a groove. (b) Figure 3 Island Figure 4 o o, so7-o, qr. bp/bL Fig. 6 Fig. 4/UIJ-100 Fig. 8 tJp/lr

Claims (1)

【特許請求の範囲】[Claims] ノズル孔と圧力発生室とを有してなる1個または複数個
の噴射チャンネル系統が1つの共通インク溜りに連通し
て構成され、記録時において前記圧力発生室に対応した
位置に設けられた電気機械変換器を変形させ、前記ノズ
ル孔よりインクを噴出させるドロップオンデマンド型イ
ンクジェット記録ヘッドにおいて、薄平板状のプレート
と圧電素子からなる電気機械変換器の前記プレート上に
、前記圧電素子の接合位置の周囲に前記圧力発生室の幅
の5〜30%の幅の溝を有し、その溝に囲まれた位置に
圧電素子を接合したことを特徴とするインクジェット記
録ヘッド。
One or more ejection channel systems each having a nozzle hole and a pressure generating chamber are configured to communicate with one common ink reservoir, and an electric current is provided at a position corresponding to the pressure generating chamber during recording. In a drop-on-demand inkjet recording head that deforms a mechanical transducer and ejects ink from the nozzle hole, a bonding position of the piezoelectric element is formed on the plate of the electromechanical transducer consisting of a thin flat plate and a piezoelectric element. An ink jet recording head having a groove having a width of 5 to 30% of the width of the pressure generating chamber around the pressure generating chamber, and a piezoelectric element bonded to a position surrounded by the groove.
JP3763183A 1983-03-08 1983-03-08 Ink jet recording head Pending JPS59164150A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3763183A JPS59164150A (en) 1983-03-08 1983-03-08 Ink jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3763183A JPS59164150A (en) 1983-03-08 1983-03-08 Ink jet recording head

Publications (1)

Publication Number Publication Date
JPS59164150A true JPS59164150A (en) 1984-09-17

Family

ID=12502984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3763183A Pending JPS59164150A (en) 1983-03-08 1983-03-08 Ink jet recording head

Country Status (1)

Country Link
JP (1) JPS59164150A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0800920A2 (en) * 1996-04-10 1997-10-15 Seiko Epson Corporation Ink jet recording head
JPH1134321A (en) * 1997-07-17 1999-02-09 Mita Ind Co Ltd Ink jet head
JP2008200907A (en) * 2007-02-16 2008-09-04 Seiko Epson Corp Liquid jetting head and liquid jetting apparatus
US20100156241A1 (en) * 2008-12-24 2010-06-24 Ngk Insulators, Ltd. Method for manufacturing composite substrate and composite substrate

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0800920A2 (en) * 1996-04-10 1997-10-15 Seiko Epson Corporation Ink jet recording head
EP0800920A3 (en) * 1996-04-10 1998-08-05 Seiko Epson Corporation Ink jet recording head
EP1118467A2 (en) * 1996-04-10 2001-07-25 Seiko Epson Corporation Ink jet recording head
EP1118467A3 (en) * 1996-04-10 2001-10-24 Seiko Epson Corporation Ink jet recording head
USRE39474E1 (en) 1996-04-10 2007-01-23 Seiko Epson Corporation Method of manufacturing an ink jet recording head having reduced stress concentration near the boundaries of the pressure generating chambers
JPH1134321A (en) * 1997-07-17 1999-02-09 Mita Ind Co Ltd Ink jet head
JP2008200907A (en) * 2007-02-16 2008-09-04 Seiko Epson Corp Liquid jetting head and liquid jetting apparatus
US20100156241A1 (en) * 2008-12-24 2010-06-24 Ngk Insulators, Ltd. Method for manufacturing composite substrate and composite substrate
US8288918B2 (en) * 2008-12-24 2012-10-16 Ngk Insulators, Ltd. Composite substrate and manufacturing method thereof
US8585847B2 (en) 2008-12-24 2013-11-19 Ngk Insulators, Ltd. Composite substrate and manufacturing method thereof

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