JPS59162401A - テ−ブル機構 - Google Patents
テ−ブル機構Info
- Publication number
- JPS59162401A JPS59162401A JP3666783A JP3666783A JPS59162401A JP S59162401 A JPS59162401 A JP S59162401A JP 3666783 A JP3666783 A JP 3666783A JP 3666783 A JP3666783 A JP 3666783A JP S59162401 A JPS59162401 A JP S59162401A
- Authority
- JP
- Japan
- Prior art keywords
- bed
- fluid
- sliding table
- static pressure
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 39
- 230000003068 static effect Effects 0.000 claims abstract description 28
- 230000002706 hydrostatic effect Effects 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims 1
- 238000003466 welding Methods 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 238000007789 sealing Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/0009—Energy-transferring means or control lines for movable machine parts; Control panels or boxes; Control parts
- B23Q1/0018—Energy-transferring means or control lines for movable machine parts; Control panels or boxes; Control parts comprising hydraulic means
- B23Q1/0027—Energy-transferring means or control lines for movable machine parts; Control panels or boxes; Control parts comprising hydraulic means between moving parts between which an uninterrupted energy-transfer connection is maintained
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3666783A JPS59162401A (ja) | 1983-03-08 | 1983-03-08 | テ−ブル機構 |
US06/569,217 US4577845A (en) | 1983-01-18 | 1984-01-09 | Hydrostatic pressure XY table |
GB08400872A GB2135916B (en) | 1983-01-18 | 1984-01-13 | Xy table for machine operations |
DE19843401583 DE3401583A1 (de) | 1983-01-18 | 1984-01-18 | Xy-kreuzschlitten |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3666783A JPS59162401A (ja) | 1983-03-08 | 1983-03-08 | テ−ブル機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59162401A true JPS59162401A (ja) | 1984-09-13 |
JPH0368357B2 JPH0368357B2 (enrdf_load_stackoverflow) | 1991-10-28 |
Family
ID=12476204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3666783A Granted JPS59162401A (ja) | 1983-01-18 | 1983-03-08 | テ−ブル機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59162401A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103673947A (zh) * | 2013-12-04 | 2014-03-26 | 江苏宏丰奥凯机电有限公司 | 高压油管万能管型检具 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5397859A (en) * | 1977-02-08 | 1978-08-26 | Fujitsu Ltd | Plane positioning shifter |
JPS5474456A (en) * | 1977-08-20 | 1979-06-14 | Rolls Royce | Rotary placing device |
-
1983
- 1983-03-08 JP JP3666783A patent/JPS59162401A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5397859A (en) * | 1977-02-08 | 1978-08-26 | Fujitsu Ltd | Plane positioning shifter |
JPS5474456A (en) * | 1977-08-20 | 1979-06-14 | Rolls Royce | Rotary placing device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103673947A (zh) * | 2013-12-04 | 2014-03-26 | 江苏宏丰奥凯机电有限公司 | 高压油管万能管型检具 |
Also Published As
Publication number | Publication date |
---|---|
JPH0368357B2 (enrdf_load_stackoverflow) | 1991-10-28 |
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