JPS59157392U - ultrasonic transducer - Google Patents

ultrasonic transducer

Info

Publication number
JPS59157392U
JPS59157392U JP5097883U JP5097883U JPS59157392U JP S59157392 U JPS59157392 U JP S59157392U JP 5097883 U JP5097883 U JP 5097883U JP 5097883 U JP5097883 U JP 5097883U JP S59157392 U JPS59157392 U JP S59157392U
Authority
JP
Japan
Prior art keywords
ultrasonic transducer
forming
thin plate
rectangle
protrusions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5097883U
Other languages
Japanese (ja)
Inventor
政義 谷口
安田　博彦
木下　勝裕
司郎 緒方
日野田　征佑
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to JP5097883U priority Critical patent/JPS59157392U/en
Publication of JPS59157392U publication Critical patent/JPS59157392U/en
Pending legal-status Critical Current

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  • Transducers For Ultrasonic Waves (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ａおよびｂは本考案超音波振動子の原理説明図、
第２図は本考案の一実施例を示すものでａは断面図、ｂ
は上面図である。 １・・・シリコン基板、２・・・凹部、３・・・酸化シ
リコン膜、４・・・薄板状突片、５・・・圧電体、６・
・・上電極板、７・・・下電極板である。Figures 1a and 1b are diagrams explaining the principle of the ultrasonic transducer of the present invention;
Figure 2 shows an embodiment of the present invention, in which a is a sectional view and b is a cross-sectional view.
is a top view. DESCRIPTION OF SYMBOLS 1... Silicon substrate, 2... Recessed part, 3... Silicon oxide film, 4... Thin plate-like protrusion, 5... Piezoelectric body, 6...
. . . upper electrode plate; 7 . . . lower electrode plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 固定枠の方形をなす４箇所から中心に向かって一平面内
に突設した４枚の薄板状突片にそれぞれ圧電バイモルフ
を形成して成る超音波振動子。This ultrasonic transducer is formed by forming a piezoelectric bimorph on each of four thin plate-like protrusions that protrude in one plane from four locations forming a rectangle of a fixed frame toward the center.
JP5097883U 1983-04-05 1983-04-05 ultrasonic transducer Pending JPS59157392U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5097883U JPS59157392U (en) 1983-04-05 1983-04-05 ultrasonic transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5097883U JPS59157392U (en) 1983-04-05 1983-04-05 ultrasonic transducer

Publications (1)

Publication Number Publication Date
JPS59157392U true JPS59157392U (en) 1984-10-22

Family

ID=30181408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5097883U Pending JPS59157392U (en) 1983-04-05 1983-04-05 ultrasonic transducer

Country Status (1)

Country Link
JP (1) JPS59157392U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524029B2 (en) * 1971-11-16 1977-02-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524029B2 (en) * 1971-11-16 1977-02-01

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