JPS59154083A - Reflection type photosensor - Google Patents

Reflection type photosensor

Info

Publication number
JPS59154083A
JPS59154083A JP58028695A JP2869583A JPS59154083A JP S59154083 A JPS59154083 A JP S59154083A JP 58028695 A JP58028695 A JP 58028695A JP 2869583 A JP2869583 A JP 2869583A JP S59154083 A JPS59154083 A JP S59154083A
Authority
JP
Japan
Prior art keywords
light
light emitting
center
center axis
receiving element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58028695A
Other languages
Japanese (ja)
Inventor
Toshiaki Tanaka
敏明 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58028695A priority Critical patent/JPS59154083A/en
Publication of JPS59154083A publication Critical patent/JPS59154083A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto

Abstract

PURPOSE:To obtain the titled device which can be manufactured with good workability and can obtain a high signal transmission rate after securing a high positional accuracy by a method wherein the center of at least one lens of convex lenses is contrived to be in the positional relation of horizontal deviation from the center axis of the element under the convex lens toward the center axis of the other element. CONSTITUTION:The center axis AL1 of a semi-spherical lens L1 on the light emitting side is horizontally deviated from the As1 of the light emitting element 10 to the center of the device, i.e., a position toward the side of the light receiving element. In the same manner, the center axis AL2 of a semi-spherical lens L2 on the light receiving side is horizontally deviated to the center of the device, i.e., the side of the light emitting element. After forming resin sealed bodies 131 and 132 of such form, light non transmitting resin body 15 having optical windows W1 and W2 so as not to block the semi-spherical lens parts L1 and L2 is formed, and light emitting side resin sealed bodies 131 and 132 are fixed in an integral body. Thereby, the titled device which has a high signal transmission efficiency, enabling to set the detection distance to an object to be detected simply and accurately, and can be manufactured with good workability can be obtained.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は発光菓子からの光を被検出物体に照射し、そ
の反射光を受光素子で受光する反射型フォトセンサに関
する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a reflective photosensor that irradiates a detection object with light from a luminescent confectionery and receives the reflected light with a light receiving element.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

同一装置内(二発光菓子および受光素子を有し、発光菓
子からの発光光をレンズ部を走1して被検出物体に照射
し、この被検出物体からの反射光を別のレンズ部を介し
て受光素子で受光し、上記被検出物体の有無を検知する
反射型フォトセンサは第1図の断面図に示すような構造
をしたものが使用されている。図において、ZOは発光
菓子、ZZは受光素子であり、それぞれの素子はリード
フレームI2□ 、12□に配設された状態で、各々半
球レンズ部り、、L、を有する透明樹脂体131.13
□内に封止されている。この発光側および受光側の透明
樹脂体131゜I3□は光路が塞がれないように窓を有
する不透明ケースz4に組み込まれ一体となっている。
In the same device (having two luminescent confectioneries and a light receiving element, the luminescent light from the luminescent confectionery passes through a lens section and irradiates the object to be detected, and the reflected light from this detected object passes through another lens section. A reflective photosensor that receives light with a light-receiving element and detects the presence or absence of the object to be detected has a structure as shown in the cross-sectional view of Figure 1. In the figure, ZO is a luminous confectionery, and ZZ are light-receiving elements, and each element is arranged on lead frames I2□, 12□, and transparent resin bodies 131, 13 each having a hemispherical lens portion, , L,
□ Sealed inside. The transparent resin bodies 131°I3□ on the light emitting side and the light receiving side are integrated into an opaque case z4 having a window so that the optical path is not blocked.

この装置では、装置の前方に存在する被検出物体に能率
的に光を照射しその反射光を受光するだめに発光素子I
Oおよび受光素子ZZの正面部分(二半球レンズ部り、
、L、を形成しである。そしてさらに、発光素子10お
よび半球レンズL、が形成する光の平均的進路方向(光
軸At )と受光素子IIおよび半球レンズ部L2が形
成する光の平均的進路方向(光軸A2)とが装置の1¥
IJ方で交わるよう≦二、透明樹脂体13゜132がや
や回い合う方向に傾けて不透明ケースZ4(:固定され
ている。
In this device, a light emitting element I is used to efficiently irradiate light onto an object to be detected in front of the device and receive the reflected light.
O and the front part of the photodetector ZZ (two hemisphere lens part,
, L, is formed. Furthermore, the average course direction of the light formed by the light emitting element 10 and the hemispherical lens L (optical axis At) and the average course direction of the light formed by the light receiving element II and the hemispherical lens part L2 (optical axis A2) are different from each other. 1 yen for the device
The opaque case Z4 (: fixed) is tilted slightly in the direction in which the transparent resin bodies 13° and 132 rotate so that they intersect in the IJ direction.

このようfx 構造のフォトセンサは、まず発光素子I
Oあるいは受光素子ZZを封止する透明樹脂体rs、、
*z:xfそれぞれ別個に形成した後、不透明ケースI
4に上1記透明・肩脂体13□I3□をぬ:め込み形成
するため5作爲゛(性が悪く、また、上記透明樹脂体I
3□ 、13!の傾斜がすれやすいため、光軸A、、A
、の光軸が合わせに<<、センナの光学的な検出位置の
メ、〜度を出すことが離しいという欠点があった。
A photosensor with such an fx structure first has a light emitting element I.
transparent resin body rs for sealing O or the light receiving element ZZ,
* After forming each z:xf separately, opaque case I
4. Remove the above transparent resin body 13□I3□: 5 steps to form the inset (poor quality, and the above transparent resin body I
3□, 13! The optical axis A,,A
The disadvantage is that it is difficult to align the optical axes of the senna with the optical detection position of the senna.

このような装置の他に@2図(:示すような透明樹脂体
13.  ・I3□を傾斜させることなく同一平面上(
二水平に並設したものが提案された。
In addition to such a device, there is also a transparent resin body 13 as shown in Figure @2 (:).
It was proposed to install two horizontally in parallel.

このような構造のフォトセンサでは、同一リードフレー
ムI2上に設けられた発光素子基台部12a、受光素子
基台ZAb上に発光素子20および受光素子ZIをそれ
ぞれ水平に配設し、これらを半球レンズ部り、、L、を
有する透明樹脂体Z3□ 5Z3.で封止した後、これ
らの透明樹脂体13.,13□を不透明樹脂体(光透過
性樹止体)15で一体封止して形成する。
In a photosensor having such a structure, the light emitting element 20 and the light receiving element ZI are arranged horizontally on the light emitting element base part 12a and the light receiving element base ZAb provided on the same lead frame I2, and these are arranged in a hemisphere. Transparent resin body Z3□ 5Z3. After sealing with these transparent resin bodies 13. , 13□ are integrally sealed with an opaque resin body (light-transmitting resin body) 15.

このような”J Kでは作業性が良好で、素子の配設位
置やレンズ部り、、L、の位置精度も高いものである。
With such "JK", workability is good, and the positional accuracy of the arrangement position of the element and the lens portion, L, etc. is also high.

しかしながら、因で示すように同一リードフレーム12
(二透明樹脂体131.132を形成するものでは、受
光素子IOおよびレンズ部り。
However, as shown in the above, the same lead frame 12
(For those forming the two transparent resin bodies 131 and 132, the light receiving element IO and the lens part.

と受光素子ZZおよびレンズ部り、との間(:角度を与
えることかできず、光軸A、とA2との交点すなわち被
検出物体の検出位置を設定することができない。従って
発光光の被検出物体における反射点方向へ受光側の光軸
A、を向けることができず受光素子IIが反射光を効率
良く受光できないため1発光素子IOから受光素子11
C至る信書の伝達効率が著しく低かった。
and the light-receiving element ZZ and the lens part (: it is not possible to give an angle, and it is not possible to set the intersection of the optical axes A and A2, that is, the detection position of the object to be detected. Since the optical axis A on the light-receiving side cannot be directed toward the reflection point on the detection object, and the light-receiving element II cannot efficiently receive the reflected light, the light-receiving element 11 is moved from the light-emitting element IO to the light-receiving element 11.
The efficiency of communicating letters to C was extremely low.

〔発明の目的〕[Purpose of the invention]

この発明は上記のような点に麹みてなされたものでその
目的とするところは、高い作業性で製造でき、素子やレ
ンズ部の高い位置精度を確保した上で高い信号伝達率を
得ることのできる反射型フォトセンサを提供すること(
二ある。
This invention was made in consideration of the above points, and its purpose is to manufacture with high workability, ensure high positional accuracy of the element and lens part, and obtain a high signal transmission rate. To provide a reflective photosensor that can
There are two.

〔発明の概要〕[Summary of the invention]

すなわちこの発明に係る反射型フォトセンサでは、リー
ドフレームの同一平面上に発光素子と受光界子とを配設
し、少なくとも一方の半球レンズ部の中心が上記素子の
配役位置よりも他方の素子側に水平にずれた位置となる
ようC二それぞれの素子を半球レンズを備えた透明樹脂
体により封止し、さらに不透明樹脂(二より上記透明樹
脂体を一体封止するよう監ユしたものである。
That is, in the reflective photosensor according to the present invention, the light emitting element and the light receiving field are arranged on the same plane of the lead frame, and the center of at least one hemispherical lens part is located closer to the other element than the placement position of the above element. Each element of C2 was sealed with a transparent resin body equipped with a hemispherical lens so that the two elements were horizontally shifted from each other, and then an opaque resin (2) was supervised to integrally seal the above-mentioned transparent resin body. .

〔発明の芙施例〕[Example of invention]

以下図面を参照してこの発明の一実施例を説明する。第
3図はその一例を示す斜視図、第4因は第3図の装置の
ト→′断面を示す因である。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 3 is a perspective view showing one example, and the fourth factor is a factor showing a cross section of the apparatus shown in FIG.

図において、まず外部導出リード12c、z:ldの先
端部の発光素子基台部12aおよび受光素子基台部12
bに各々尋°覗性エポキシ等によって、発光素子IOお
よび受光素子11を取着し、金線等(二よって近接する
外部導出リードI 2 c’Z 2 d’lニワイヤボ
ンテイングを行なう。(is 4因では図面を簡明ζユ
するためホンティングワイヤは省略する。) この後、上記リードフレームI2−を樹脂封止用金型で
挾み、例えは透明エポキシなどの光透過性樹脂を金型内
の中空に注入して発光素子IOおよび受光素子IIのそ
れぞれを同時に樹脂封止(いわゆるトランスファモール
トノする。
In the figure, first, the light emitting element base part 12a and the light receiving element base part 12 at the tips of the external lead-out leads 12c and z:ld are shown.
The light-emitting element IO and the light-receiving element 11 are attached to each part b using transparent epoxy or the like, and wire bonding is performed with gold wire or the like (two adjacent external leads I 2 c'Z 2 d'l). (In order to simplify the drawings, the honting wire is omitted for IS 4 factors.) After this, the lead frame I2- is sandwiched between resin sealing molds, and a light-transmitting resin such as transparent epoxy is inserted into the lead frame I2-. The light-emitting element IO and the light-receiving element II are simultaneously sealed with resin (so-called transfer molding) by injecting the resin into the hollow space in the mold.

ここでこの樹脂封止により形成された発光側樹脂封止体
13.および受光側樹脂封止体132  ′はそれぞれ
半球レンズ−L、、L、を有して成る。
Here, the light emitting side resin sealing body 13 formed by this resin sealing. The light-receiving side resin sealing body 132' includes hemispherical lenses -L, , L, respectively.

これらレンズL1 、L、と発光素子10および受光素
子ZIの位置関係は、第4−(二示すようにレンズ部L
□ 、L2の中心AL、 、ALRと発光素子10およ
び受光素子22の中心As1 、AAs、とが水平方向
゛にずれるようにする。すなわち発光素子20の中心A
 B 1に対し発光側の半球レンズL、の中心軸AL、
を装置の中心部すなわち受光素子側に片寄った位置に水
平にfらずようにする。同様(:、受光側の半球レンズ
L、の中心軸AL、を装置の中心部すなわち発光素子側
に水平にすらずよう(二する。
The positional relationship between these lenses L1, L, the light emitting element 10, and the light receiving element ZI is as shown in the lens part L
The centers AL, , ALR of □, L2 and the centers As1, AAs, of the light emitting element 10 and the light receiving element 22 are made to be shifted in the horizontal direction. That is, the center A of the light emitting element 20
The central axis AL of the hemispherical lens L on the light emitting side with respect to B1,
The center of the device, that is, the light-receiving element should not be placed horizontally in a position that is biased toward the center of the device. Similarly, the central axis AL of the hemispherical lens L on the light-receiving side should not be horizontal to the center of the device, that is, the light-emitting element side.

以上のような形状の樹脂封止体Z3□、13□を形成し
た後、不透明エポキシ樹h口(通常は黒色カーボン入す
エボキシ個脂〕を用いた自長のトランスファモール白:
よって、半球レンズ部り、およびL2を塞がないように
光路窓W1 。
After forming the resin sealing bodies Z3□, 13□ with the above shape, a free-length transfer mold white using an opaque epoxy resin (usually epoxy solid resin containing black carbon):
Therefore, the optical path window W1 is arranged so as not to block the hemispherical lens portion and L2.

vv、を有する光不透過性樹脂体I5を形成し、上記発
光側樹脂封圧体I3□ 、Z3□を一体的に固定する。
A light-impermeable resin body I5 having a shape of vv is formed, and the light emitting side resin sealing bodies I3□ and Z3□ are integrally fixed.

この後、リードフレームZ2の枠部12Fやタイバーr
eT等の不要箇所を切断して反射型フォトセンサと収1
−0 〔発明の効果〕 上記のようにして形成した反射型フォトセンサにおいて
、発光素子10からの発光光の平均的進路方向は、発光
素子10の中心から半球レンズL、の中心を結ぶ方向と
なるが1発光素子IOの中心と発光側半球レンズ部り、
の中、心とがずれているため、発光光の進行方向すなわ
ち光lPt1IIAIは斜め前方にやや傾斜し、同様に
受光側における光の進行方向すなわち光軸A、も傾斜し
て斜め前方からの光が最も効率良(受光される。従って
第4因の装置は、光軸A、および光軸A2の交点B上に
水平面を有する反射物体Cに対して最も感団艮(検知で
き、光学的な特性は、第1図で示した発光側樹脂封圧体
と受光側樹脂封止体との間に角rt=持たせたものと殆
んど等価となる。この第4四の装置では、@2図の装置
に比らべ約5〜lO倍の商い信号伝達率を得ることがで
きた。
After this, the frame portion 12F of the lead frame Z2 and the tie bar r
Cut unnecessary parts such as eT and combine it with a reflective photo sensor.
-0 [Effect of the invention] In the reflective photosensor formed as described above, the average course direction of the emitted light from the light emitting element 10 is the direction connecting the center of the light emitting element 10 to the center of the hemispherical lens L. The center of one light-emitting element IO and the light-emitting side hemisphere lens part,
Since the center and center of the center are shifted, the traveling direction of the emitted light, that is, the light lPt1IIAI, is slightly tilted diagonally forward, and similarly, the traveling direction of the light on the light receiving side, that is, the optical axis A, is also tilted, so that the light from diagonally ahead is the most efficient (light is received).Therefore, the device of the fourth factor is the most sensitive (detectable and optically The characteristics are almost equivalent to those shown in Fig. 1, where the angle rt=is created between the light-emitting side resin sealing body and the light-receiving side resin sealing body.In this 44th device, @ It was possible to obtain a signal transmission rate approximately 5 to 10 times higher than that of the device shown in Figure 2.

また、上記の装置では、発光側樹脂封止体および受光側
樹脂封止体に角It持たせたものと略同等の光学的特性
を、単に発光素子および受光素子とそれぞれの素子上に
設けられた半球レンズL1およびL8との水平位(it
t%i係pc J”らすだけで容易に得ることができる
In addition, in the above device, optical characteristics substantially equivalent to those in which the light-emitting side resin molding body and the light-receiving side resin molding body have an angle It are obtained by simply providing the light-emitting element, the light-receiving element, and the respective elements. horizontal position with hemispherical lenses L1 and L8 (it
It can be easily obtained by simply increasing the t%i ratio pc J''.

言い換えると、この装置では、第1因の装置の製造方法
のような煩雑な製造方法によらず。
In other words, this device does not require a complicated manufacturing method like the method of manufacturing the device of the first cause.

樹脂上1止体形成用の金型を変更することなしく二リー
ドフレーム12上の素子の載置位とを変更するだけで、
フォトセンサの検出位置k ’4々に設定することも可
能である。しかも、レンズ部等の発光および受光側樹脂
封止体の形状および位置の精度は金型の精度で決定され
るため第1図の装置(二比べ光の進行方向(光軸A、I
A、)を精度良く決定することができる。
2. Simply change the placement position of the element on the lead frame 12 without changing the mold for forming the stopper on the resin.
It is also possible to set the detection position k' of the photosensor at four positions. Moreover, since the precision of the shape and position of the light emitting and light receiving side resin sealing body of the lens part etc. is determined by the precision of the mold, the device shown in Fig.
A,) can be determined with high accuracy.

なお、上記実施例では1発光側の光軸A1と受光側の光
軸A2 とを素子の配設される平面に対して同角度で傾
斜させる場合につき述べたが、これは発光素子基台いは
受光素子側の一方の光軸のみをイ頃斜させるよう(ニジ
ても良い。
Note that in the above embodiment, the case where the optical axis A1 on the light emitting side and the optical axis A2 on the light receiving side are inclined at the same angle with respect to the plane on which the element is arranged is described, but this is not possible with the light emitting element base. In this case, only one optical axis on the light-receiving element side is tilted to the right (it may also be tilted to the right).

以上述べたよう(:この発明によれば、第2因に示す従
来の反射型フォトセンサ≦二比べて高い信号伝達効率を
有し、被検出物体の検出距離も簡易に精度良(設定でき
、作業性良く製造できる反射型フォトセンサを提供する
ことができる。
As stated above (: According to the present invention, the signal transmission efficiency is higher than that of the conventional reflective photosensor shown in the second factor ≦2, and the detection distance of the detected object can be easily set with high precision. A reflective photosensor that can be manufactured with good workability can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図はそれぞれ従来の反射型フォトセン
サを示す断面図、第3図および第4図はそれぞれこの発
明の一実施例(二係る反射型フォトセンサを説明する斜
視図および断面図である。 10・・・発光素子、22・・・受光素子、12・・・
リードフレーム、12a・・・発光素子基台、12b・
・・受光素子基台、I31・・・発光側樹脂封止体、1
3、・・・受光側倒1L封止体、I5・・・光不透過性
樹脂体、L、、’L、・・・半球レンズ部(凸レンズ部
]、A1 、A、・・・光軸。 出願人代理人 弁理士 鈴2.江 武 彦第1図 第2図 第4図
1 and 2 are sectional views showing a conventional reflective photosensor, respectively, and FIGS. 3 and 4 are a perspective view and a sectional view illustrating an embodiment of the present invention (2). 10... Light emitting element, 22... Light receiving element, 12...
Lead frame, 12a... light emitting element base, 12b...
... Light-receiving element base, I31 ... Light-emitting side resin sealing body, 1
3. Light-receiving side facing 1L sealing body, I5... Light-opaque resin body, L, , 'L,... Hemispherical lens part (convex lens part), A1, A,... Optical axis . Applicant's agent Patent attorney Suzu 2. Takehiko E Figure 1 Figure 2 Figure 4

Claims (1)

【特許請求の範囲】[Claims] 同一平面上の離間した部位に発光素子基台および受光素
子基台を有するリードフレームと、上記発光素子基台お
よび受光素子基台の同一方向面上にそれぞれ並設された
発光菓子および受光素子と、上記発光菓子および受光素
子の各々を封止し上面に凸レンズ部を荷する光透過性信
服から成る発光側樹脂封止体および受光側偵脂封止体と
、この発光側樹脂封止体および受光側樹脂封止体のそれ
ぞれを一体的≦ユ固足する光不透過性樹脂体とを具誦し
、上記凸レンズの少なくとも一万のレンズ中心がこの凸
レンズ下の素子の菓子中心軸から他方の菓子の菓子中心
軸方間に水平にすれた位置関係にあることを特徴と°す
る反射型フォトセンサ。
A lead frame having a light-emitting element base and a light-receiving element base in separate parts on the same plane, and a light-emitting confectionery and a light-receiving element arranged in parallel on the same direction surface of the light-emitting element base and the light-receiving element base, respectively. , a light-emitting-side resin-sealed body and a light-receiving-side grease-sealed body made of a light-transmitting fabric that seals each of the light-emitting confectionery and the light-receiving element and has a convex lens portion on the upper surface; Each of the light-receiving side resin encapsulants is integrated with a light-impermeable resin body, and at least 10,000 lens centers of the convex lenses are connected from the center axis of the confectionery of the element under the convex lenses to the other side. A reflective photosensor characterized by being horizontally aligned with the center axis of a confectionery.
JP58028695A 1983-02-23 1983-02-23 Reflection type photosensor Pending JPS59154083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58028695A JPS59154083A (en) 1983-02-23 1983-02-23 Reflection type photosensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58028695A JPS59154083A (en) 1983-02-23 1983-02-23 Reflection type photosensor

Publications (1)

Publication Number Publication Date
JPS59154083A true JPS59154083A (en) 1984-09-03

Family

ID=12255609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58028695A Pending JPS59154083A (en) 1983-02-23 1983-02-23 Reflection type photosensor

Country Status (1)

Country Link
JP (1) JPS59154083A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6410620U (en) * 1987-07-10 1989-01-20
US5105239A (en) * 1989-08-11 1992-04-14 Kabushiki Kaisha Toshiba Reflective type optical sensor device
EP0510516A2 (en) * 1991-04-24 1992-10-28 Dr. Johannes Heidenhain GmbH Sensor device on a substrate with an electrical link element and procedure to fabricate such a device
CN100414258C (en) * 2004-07-26 2008-08-27 夏普株式会社 Reflective encoder and electronic device using such reflective encoder
JP2009210422A (en) * 2008-03-04 2009-09-17 Sony Corp Probe device and terahertz spectroscopic apparatus
JP2011107019A (en) * 2009-11-19 2011-06-02 Yamatake Corp Photoelectric sensor
TWI401421B (en) * 2005-10-26 2013-07-11 Avago Tech Ecbu Ip Sg Pte Ltd Reflective encoders with various emitter-detector configurations
WO2014054420A1 (en) * 2012-10-05 2014-04-10 株式会社村田製作所 Light sensor

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6410620U (en) * 1987-07-10 1989-01-20
US5105239A (en) * 1989-08-11 1992-04-14 Kabushiki Kaisha Toshiba Reflective type optical sensor device
EP0510516A2 (en) * 1991-04-24 1992-10-28 Dr. Johannes Heidenhain GmbH Sensor device on a substrate with an electrical link element and procedure to fabricate such a device
CN100414258C (en) * 2004-07-26 2008-08-27 夏普株式会社 Reflective encoder and electronic device using such reflective encoder
TWI401421B (en) * 2005-10-26 2013-07-11 Avago Tech Ecbu Ip Sg Pte Ltd Reflective encoders with various emitter-detector configurations
JP2009210422A (en) * 2008-03-04 2009-09-17 Sony Corp Probe device and terahertz spectroscopic apparatus
JP2011107019A (en) * 2009-11-19 2011-06-02 Yamatake Corp Photoelectric sensor
WO2014054420A1 (en) * 2012-10-05 2014-04-10 株式会社村田製作所 Light sensor
JP5949931B2 (en) * 2012-10-05 2016-07-13 株式会社村田製作所 Optical sensor
JPWO2014054420A1 (en) * 2012-10-05 2016-08-25 株式会社村田製作所 Optical sensor
US10261182B2 (en) 2012-10-05 2019-04-16 Murata Manufacturing Co., Ltd. Optical sensor

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