JPS59153988A - Installation device for vacuum rotary apparatus - Google Patents

Abstract

PURPOSE:To prevent the splinters from scattering to outside by accommodating a vacuum rotary apparatus rotatably in an installation housing, by allowing the colliding splinters as product of breakage to rotate the whole vacuum apparatus, and thereby absorbing the energy given by the collision. CONSTITUTION:When a turbo-rotor 32 of a turbo type molecular pump 30 in a vacuum rotary apparatus 14 is damaged of any cause and goes into breakage, the rotation energy of this turborotor 32 is transmitted to the stationary part of this vacuum rotary apparatus so as to impart the impact force due to splinters collision to this stationary part. At this time, the casing 25 of this vacuum apparatus 14 receives the rotational force owing to this collision of splinters to be put into rotation along with the above-mentioned molecular pump 30, and thus the energy given by the colliding splinters is absorbed.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to an installation device for vacuum rotating equipment containing a vertical rotating body, and particularly to an installation device for collectively installing and fixing a plurality of vacuum rotating equipment. Regarding.

[Technical background of the invention and its problems]

Generally, this divine vacuum rotating device has a built-in deck-type rotating body, and the installation of this vacuum rotating device is as shown in Figure 1, as shown in Fig. 1. 3 to the foundation floor 4. This vacuum rotary device is connected to a vacuum device 5 such as a semiconductor processing device or a space equipment testing device via a connecting pipe 6, thereby forming a vacuum evacuation system. When the vacuum device 5 is maintained at negative pressure, the vacuum rotating device 1 is kept at a negative pressure.
This is done by activating the valve to exhaust the air, and an emergency shutoff valve 7 is provided in the middle of the pipe 6.

The tip flange 6a of the layer 6 is bolted to the upper end of the vacuum rotating device 1 via a gasket (not shown).

By the way, when a vacuum pump device such as a turbo molecular pump is used as the vacuum rotary device 1, the vacuum rotary device 1 is connected to the next stage vacuum pump device 8 via the connecting pipe 9, and the next stage It is necessary to use the 1° C.9 bonzo device 8 to evacuate to a vacuum region where the turbo-type molecular pump operates.

However, in such a vacuum evacuation system, if a gas leak occurs in the vacuum rotating equipment 1 in the middle, this leak is detected and the emergency shutoff valve 7 is operated to close urgently, thereby reducing the vacuum state of the vacuum device 5. It is required to maintain the vacuum so that it does not drop suddenly or worsen, but if the emergency shutoff valve 7 malfunctions due to a failure of a leak detector, etc., the vacuum device 6''5 must be maintained in a vacuum state. becomes impossible.

In addition, when the rotating body of the turbo molecular pump breaks tQ, it is subjected to a collision impact due to the scattering of broken objects, and vibrations due to this impact are transmitted via the piping 6 to the joint 7a of the emergency shutoff valve 7.
The bolt connection force of the connection part 7a is loosened or the force is lowered.

If the connecting portion 7aK of the emergency shut-off valve 7 becomes loose, there is a problem in that even if the emergency shut-off valve 7 is activated, it becomes impossible to maintain the vacuum bowl portion 50.

[Purpose of the invention]

Considering the above points, the present invention effectively prevents the deterioration of the vacuum condition of the vacuum evacuation system even if the rotating body of the vacuum rotating equipment is damaged, and also prevents the damaged items from scattering to the outside. An object of the present invention is to provide an installation device for vacuum rotating equipment that can significantly improve safety against breakage accidents by reliably preventing damage.

[Summary of the invention]

In order to achieve the above-mentioned object, the vacuum rotating equipment installation device according to the present invention seals an installation housing installed on a foundation floor so that it can be divided into at least two parts, and rotatably accommodates the vacuum rotating equipment in this installation housing. In addition to the above;
l) A cooling passage for internal cooling is provided around the outer circumference of the housing with i and ', and further the above 47. Housing λ with η: Connected to negative pressure to maintain negative pressure or vacuum inside the installation housing.

[Embodiments of the invention]

A preferred embodiment of the invention will be described with reference to FIG.

FIG. 2 is a side sectional view showing the vacuum rotary equipment according to the present invention, and reference numeral 10 in the figure indicates an installation housing for the attached device. The housing 10 has a bottomed cylindrical housing body 11 with an upper lid 12 on the top.
It is configured to have a sealed structure that can be divided into two under the Uji Puffer 10, which is sealed so that it can be opened and closed freely via the Uji Puffer 13.
It is accommodated in a Q1 rollable manner. A flange and a flange are integrally formed on the bottom part 11aK of the housing body 11, and this flange is fixed to the foundation floor 16 with anchor bolts 15. A flange lid is also formed at the top of the circumferential side portion 11C of the housing body 110, and the upper lid 2 is placed on this flange lid and connected by bolting or the like.

On the other hand, at the bottom of the housing body 11, there is a storage space. A concave fitting portion 18 is formed to fit and support the lower end protrusion (convex fitting portion) 17 of the vacuum rotary device 14 to be installed, and this concave fitting portion is used for the vacuum rotary device 14 to be reinstalled.゜14
It is provided according to the number of 0 pieces. A concave fitting part 19 is similarly formed on the top cover 12 of the stationary housing 1 ( ), and a convex fitting part formed at the upper end of the vacuum rotating device 14 is fitted into the fitting part 19 . . The vacuum rotary unit 14, which is held in place by engaging with the double-concave fitting portion 19 of the installation housing 10, is spring-biased by the metal base ring 21 and rotates within the installation housing. elastically frictionally fixed in place (
held by frictional contact).

The excavation device's housing is provided with an exhaust pipe 22, and this exhaust T? 22 is connected to a pump or the like that forms a negative pressure source (not shown), and air in the installation housing 10 is exhausted by the operation of the pump and maintained at negative pressure. When the inside of the installation housing 10 is evacuated and becomes negative pressure, the bottom t% 1.1a and the top lid 2 of the installation housing 10 are deformed by the atmospheric pressure so as to compress the metal spring 21, and as a result, the vacuum rotating equipment 14 The rotation force of the vacuum rotating device 14 is increased, and the rotation of the vacuum rotating device 14 about the vertical axis is suppressed.

The vacuum rotary device 14 has a sealed device casing, and a motor 26 is housed in the inner lower part of the device casing.The rotor 27 of the electric motor 26 is mounted on a vertical output shaft 28. Upper lid 5a and bottom 6δ of casing 5
It is rotatably supported by bearings 29a, 291) attached to b. A pump such as a turbo molecular pump 30 is provided on the upper part of the output shirt 28. The molecular pump 30 has a multilayer guide vane 31 fixed to the inner circumferential wall of the device casing 5, and a turbo rotor 32 opposed to the guide vane 31. The shafts are mounted at appropriate intervals in the push direction.

On the other hand, the upper lid 2 of the vacuum rotating device 14
5a tic is formed with a suction hole 33 and a discharge hole 34, and one side of each hole 33 and 3/l communicates with a suction chamber 35 and a discharge v36 in the device casing. Among these, the device casing 5 is connected through the discharge hole 34 and the discharge communication pipe; 37.
:IIP is traced to the discharge chamber 36 formed in the middle of. The other side of the suction hole 33 and the discharge hole 34 is 4'+112
The suction hole 38 and three discharge holes formed in the tosa 12 of the attached housing 10 are airtightly communicated through a cylindrical suction gasket 40 and a discharge gasket /ll'ff. The above-mentioned suction hole 38 and discharge hole 39 are connected to the suction chamber 42 and the connection jumper 4:3, respectively, and among these, the suction hole of the connection, 'lj Channo Z431-1 next stage 11, and the empty rotating coffin 14 44 and its discharge hole 45 communicates with a discharge chamber 46.

The suction chamber 42, the communication chamber 43, and the discharge chamber 46 are formed by partitioning a recess formed on the upper surface of the upper lid 12 of the installation housing 10 with a partition wall 47, and covering the recess with a cover 48 from above. The cover 48 covers each chamber ζ4
2, 43, 46f □ξWhile airtight is achieved by the pipe 4, the suction chamber 2 is connected to, for example, a vacuum system W5 shown in FIG. 1 via a pipe 50i. Discharge chamber 4
6 is connected to other vacuum equipment (not shown) via a discharge pipe 51. Since each of the dampers 42, 43 and 46 is maintained at valve pressure by the operation of the vacuum rotary device 14, the gaskets 49 and cover 48 are deformed under the suppressing action of atmospheric pressure, effectively filling the gas space between each chamber. The pressure can be cut off.

On the other hand, the outer periphery of the housing 10, for example, the bottom 1
Cooling pipes 53a and 53b forming cooling channels for cooling the inside of the installation housing lo are attached to la and the upper lid 12. Of these, the cooling pipes 5:3a are provided in recesses formed on the lower surface of the bottom 11a of the installation housing 10, and by flowing constant temperature water into each cooling pipe 53a, 531),
The safety of the vacuum rotating device 14 is improved by eliminating heat generated by the wind-damaged shade of the motor, bearings, and guide vanes of the vacuum rotating device 14. In this case, the vacuum rotation (the lower part of the three units 14 is in direct contact with the bottom of the installation casing) 1aK, and the upper part is in contact via the cylindrical packing 40, 41 and the metal spring 21, both of which are vacuum rotated by the heat transfer layer. Heat from the equipment 14 is transferred, but this heat is transferred by the cooling pipes 53a and 53b provided in the housing bottom 11a.
Heat removal is performed effectively.

Next, the operation of the present invention will be explained.

The cover 48 attached to the piping 50, 51 connected to a vacuum device (not shown) is attached to the upper lid 12 of the installation housing 1o, the cover 48 is welded and fixed to the upper lid 12, and suction channels 42. A communication channel ζ43 and a discharge chamber 46 are formed. Thus, cylindrical gaskets 40 and 41i are interposed corresponding to the suction hole 38 and the discharge hole 39 provided in the upper lid 12, and these gaskets 40 and 4
1 is attached to the upper part 125a of the vacuum rotary device 14, and the chambers 42, 43, 46 are communicated with the pump suction chamber 35° and the discharge chamber 36 of the vacuum rotary device 4, respectively, and, for example, two vacuum rotary devices 14 are installed in the housing. 10 in series connection state, and friction i′! It is rotatably accommodated by 1 constant (1'? - holding by koshirae contact).

In this accommodated state, when it is appropriate to move to the city engine R'S 26, the city engine J machine 26 is activated and the turbo-type molecular pump (P) is operated. Due to this pump operation, gas to be treated (gas I) in the vacuum device (not shown) is sucked into the piping 50.
The processing gas that has been stored inside the tank 7 is passed from the suction chamber 42 provided in the upper lid 12 to the suction hole 3). Introduced into the pump suction chamber 35 through the suction nozzle 40 and the suction hole 33,
Subsequently, by the pumping action of the molecular pump 30, it is discharged from the discharge chamber I into the connecting pipe 37. This discharged gas flows from the connecting pipe 37 to the discharge hole 34. Discharge gasket 41. Discharge hole 39
is sent to the communication chamber 43 through the communication chamber 4.
3 and is guided to the suction side of the next-stage rotary nuclear device 14. The gas sent to this vacuum rotating device 14 is discharged by its pumping action, and is guided from this discharged gas outlet (j'jl) through a discharge channel 546 to a discharge pipe 5■, and then to another one 7'1. Suctioned into empty equipment.

Now, if the vacuum rotor 32 of the turbo-type molecular pump concave of the alarm 14 is damaged and damaged for some reason, the rotational energy f held by the turbo-rotor 32 is
d is transmitted to the stationary part of the vacuum rotating equipment 14, that is, the guide vane 31 and the equipment casing 5, and applies the impact force caused by the collision of the broken object to the stationary part. In addition, since the installation housing 25 of the vacuum rotating device 14 is rotatably friction-fixed to the nozzle 10, it is rotated together with the molecular pump 30 by the rotational force caused by the collision of the broken object. energy is absorbed. Therefore, in the installation housing 10 of the installation device, out of the rIFI impact force,
Only damped excitation forces are transmitted. For this reason, piping 5
The impact force transmitted to the installation equipment including 0 and 51 is sufficiently absorbed and alleviated along the way, and it is effective to prevent the joint part of the pipe 50 from loosening or generating an impact force that would cause an atmospheric leak. can be prevented.

To prevent leaks due to loosening of bolts or cracks in the equipment casing 25 that may occur in the L-empty rotating equipment 14, the valve pressure (71 empty) is maintained in advance by using a vacuum pump (not shown) inside the installation housing 10. By keeping 7.
Even if the emergency shutoff valves attached to the respective pipes 50 and 51 are inoperable, it is possible to reliably prevent any adverse effects on other connected vacuum devices.

By the way, in the case where a bellows pump (not shown) is used in the vacuum rotating device 14 and the bellows pump is used for pump operation, even if the bellows is damaged and a leak occurs, the installation of the installation device/inside the J-ring 10 will be prevented. By maintaining a negative pressure (vacuum) state, other vacuum equipment to be connected,
It is possible to prevent the vacuum device from being adversely affected.

In addition, cooling pipes 53a, 53. are installed around the outside of the installation housing so that the pump operation is not affected by the ambient temperature of the vacuum rotary equipment housed in the closed installation housing 10 or the surrounding atmosphere. By attaching b and passing a predetermined constant temperature water (cooling water), the ambient temperature can be maintained at a predetermined value, and the heat generated from the vacuum rotary 4 unit 14 can be actively absorbed. .

Furthermore, even if a broken piece of the rotating body breaks through the equipment casing '2!5 and scatters during the operation of the vacuum [ij1 transfer equipment 14], the scattered pieces will be stopped by the entire installation housing and ging 1 (). , since it can be accommodated,
It is possible to completely eliminate the risk of the particles scattering outside the L and ln and impairing safety.

In addition, in the description of one embodiment of the present invention, the two-part first
Although a Q-built installation housing has been described, this installation housing may have a three-part structure in which the top cover, body part, and bottom cover are separated, or may have another separate structure.

〔Effect of the invention〕

As described above, the installation device for a door and idle rotating equipment according to the present invention seals the installation housing so that it can be divided into at least two parts, and rotatably accommodates the vacuum rotating equipment in this installation housing. Since the inside of the installation housing is maintained at negative pressure or vacuum by a negative pressure source, even if the rotating body of vacuum rotating equipment is damaged or broken for some reason, the scattered objects due to the damage will be removed from the vacuum rotating equipment. By colliding with a stationary part of the equipment and rotating this entire vacuum rotating equipment,
Since the energy 'c W'' caused by the P1 collision can be absorbed, it is possible to prevent the impact of the collision from being transmitted directly to the outside. Can prevent crosspieces and gas leaks, and 1;
・Since the inside of the housing with 1 is maintained at a negative pressure or a vacuum, even if a gas leak occurs in the idle rotating equipment, the
The air exhaust system can be kept in a sufficient vacuum state, and its -I
It is possible to prevent IL empty status from occurring in advance and reliably.

Even if the rotating body of vacuum rotating equipment is damaged and the damaged objects break through the equipment casing and scatter, the scattered objects can be stopped by some hacking technique and they can be trapped inside the housing. Therefore, it is possible to effectively prevent flying objects from being scattered outside, and to significantly improve the safety and soundness of the device.

Furthermore, by forming a channel for cooling inside the housing around the outer periphery of the housing with →ノ,・), and by supplying constant temperature water (cooling water) into this housing, the inside of the housing can be
)'j Al + 6 <I'l By cooling to the extent that 11'1-nitrogen is stored inside, it is possible to prevent burnout of the parts contained within.

In addition, by maintaining negative pressure or vacuum inside the housing, the vacuum rotating equipment housed inside the housing is pressed using atmospheric pressure and fixed by friction. Therefore, the rotation mechanism is fixed by friction,
The IlI structure is simple, 77 and can be reliably identified, making it economical.

[Brief explanation of the drawing]

Fig. 1 is a diagram showing the installation of a conventional vacuum rotating equipment that is incorporated into a vacuum evacuation system, and Fig. 2 is a preferred implementation of ↑11: attachment equipment of the vacuum rotating equipment according to the present invention. I14 showing examples
It is a +1 sectional view. DESCRIPTION OF SYMBOLS 10...Installation housing, ring, 11...Using body, 11a...bottom, llb, lid...flange, IIC...side, 12...upper lid, 14...vacuum Rotating equipment, 15...Anchor port, 16...Foundation floor, 21...Kaneishi suji ring, 22...Pulse trachea,
5...Equipment casing, 26...↑(1; Motive, 2
8...Output shaft, 3(]...Turbo type molecular bopon, ;3]...Guide vane, 32...Tase rotor,
42... Suction chamber, /I3... Reunion 57H, chamber, 46... Discharge chamber, 48... Force/ζ-1
49--CyvA pipe, 50, 51--Piping, 5:3a, 53b...Cooling pipe (cooling channel).

Claims (1)

[Claims] 1. At least two installation housings installed on the foundation floor
The vacuum rotary equipment is rotatably housed within the installation housing, and a cooling passage for internal cooling is provided around the outside of the installation housing, and the installation housing is further connected to a negative pressure source. An installation device for vacuum rotating equipment, characterized in that the inside of the installation housing is maintained at negative pressure or vacuum. 2. The installation housing is hermetically sealed so that it can be divided into upper and lower halves by the bottomed cylindrical housing body and the top cover, and the vacuum rotary device is frictionally fixed to the top cover and bottom of the installation housing so as to be rotatable around the axis. An installation device for vacuum rotating equipment according to claim 1. 3. The vacuum rotating device installation device according to claim 2, wherein the 3, 7C idle rotating 1ffJ device is elastically and frictionally fixed by a metal spring between the bottom of the housing body and the top cover. 4. The upper cover of the installation housing is formed with a number of gas chambers that are maintained at negative pressure when the vacuum rotary equipment is operated, and each of the above-mentioned chambers is tightly closed through a sealing hole.
Therefore, when the vacuum rotating equipment is operated, the above cover is
3. The vacuum rotary equipment installation device according to claim 2, wherein the sealing knob is brought into pressure contact by the action of atmospheric pressure. 5. A cooling flow path is formed on the upper cover of the installation housing, the bottom of the housing, or the circumferential side, and constant temperature water is supplied to the flow path to maintain the inside of the housing at a predetermined temperature. An installation device for vacuum rotating equipment according to claim 2.