JPS59152439A - Photosensitive composition having improved adhesive property to metal - Google Patents
Photosensitive composition having improved adhesive property to metalInfo
- Publication number
- JPS59152439A JPS59152439A JP2570083A JP2570083A JPS59152439A JP S59152439 A JPS59152439 A JP S59152439A JP 2570083 A JP2570083 A JP 2570083A JP 2570083 A JP2570083 A JP 2570083A JP S59152439 A JPS59152439 A JP S59152439A
- Authority
- JP
- Japan
- Prior art keywords
- group
- photosensitive resin
- photosensitive composition
- resist
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 7
- 239000002184 metal Substances 0.000 title claims abstract description 7
- 230000001070 adhesive effect Effects 0.000 title abstract 2
- 229920005989 resin Polymers 0.000 claims abstract description 8
- 239000011347 resin Substances 0.000 claims abstract description 8
- 125000003545 alkoxy group Chemical group 0.000 claims abstract description 3
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims abstract description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims abstract description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 3
- 125000001624 naphthyl group Chemical group 0.000 claims abstract description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims abstract description 3
- -1 phenoxyl group Chemical group 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 150000002431 hydrogen Chemical group 0.000 claims description 2
- 241000750631 Takifugu chinensis Species 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 abstract description 7
- 239000003999 initiator Substances 0.000 abstract description 3
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 abstract description 2
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 abstract description 2
- 150000004056 anthraquinones Chemical class 0.000 abstract description 2
- 239000011230 binding agent Substances 0.000 abstract description 2
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 abstract description 2
- KHUXNRRPPZOJPT-UHFFFAOYSA-N phenoxy radical Chemical group O=C1C=C[CH]C=C1 KHUXNRRPPZOJPT-UHFFFAOYSA-N 0.000 abstract 1
- 229920000915 polyvinyl chloride Polymers 0.000 abstract 1
- 239000004800 polyvinyl chloride Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 238000007747 plating Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 4
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- GXVAVHKZHUAZFW-UHFFFAOYSA-N 3h-dithiole;1,3,5-triazine Chemical class C1SSC=C1.C1=NC=NC=N1 GXVAVHKZHUAZFW-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000002491 polymer binding agent Substances 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 1
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- SJIXRGNQPBQWMK-UHFFFAOYSA-N 2-(diethylamino)ethyl 2-methylprop-2-enoate Chemical compound CCN(CC)CCOC(=O)C(C)=C SJIXRGNQPBQWMK-UHFFFAOYSA-N 0.000 description 1
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- LTHJXDSHSVNJKG-UHFFFAOYSA-N 2-[2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOC(=O)C(C)=C LTHJXDSHSVNJKG-UHFFFAOYSA-N 0.000 description 1
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 description 1
- VHSHLMUCYSAUQU-UHFFFAOYSA-N 2-hydroxypropyl methacrylate Chemical compound CC(O)COC(=O)C(C)=C VHSHLMUCYSAUQU-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- DBCAQXHNJOFNGC-UHFFFAOYSA-N 4-bromo-1,1,1-trifluorobutane Chemical compound FC(F)(F)CCCBr DBCAQXHNJOFNGC-UHFFFAOYSA-N 0.000 description 1
- JTHZUSWLNCPZLX-UHFFFAOYSA-N 6-fluoro-3-methyl-2h-indazole Chemical compound FC1=CC=C2C(C)=NNC2=C1 JTHZUSWLNCPZLX-UHFFFAOYSA-N 0.000 description 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- OUZSYEIJTQTXEF-UHFFFAOYSA-N C(C(=C)C)(=O)O.C(C=C)(=O)O.C(C=C)(=O)O.C(O)C(C)(C)CO Chemical compound C(C(=C)C)(=O)O.C(C=C)(=O)O.C(C=C)(=O)O.C(O)C(C)(C)CO OUZSYEIJTQTXEF-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- 239000004709 Chlorinated polyethylene Substances 0.000 description 1
- 239000004641 Diallyl-phthalate Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- LCXXNKZQVOXMEH-UHFFFAOYSA-N Tetrahydrofurfuryl methacrylate Chemical compound CC(=C)C(=O)OCC1CCCO1 LCXXNKZQVOXMEH-UHFFFAOYSA-N 0.000 description 1
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000001540 azides Chemical class 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- GMSCBRSQMRDRCD-UHFFFAOYSA-N dodecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCOC(=O)C(C)=C GMSCBRSQMRDRCD-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- PBOSTUDLECTMNL-UHFFFAOYSA-N lauryl acrylate Chemical compound CCCCCCCCCCCCOC(=O)C=C PBOSTUDLECTMNL-UHFFFAOYSA-N 0.000 description 1
- 210000004185 liver Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 1
- HMZGPNHSPWNGEP-UHFFFAOYSA-N octadecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)C(C)=C HMZGPNHSPWNGEP-UHFFFAOYSA-N 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229940059574 pentaerithrityl Drugs 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920005596 polymer binder Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- KJCLYACXIWMFCC-UHFFFAOYSA-M sodium;5-benzoyl-4-hydroxy-2-methoxybenzenesulfonate Chemical compound [Na+].C1=C(S([O-])(=O)=O)C(OC)=CC(O)=C1C(=O)C1=CC=CC=C1 KJCLYACXIWMFCC-UHFFFAOYSA-M 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/085—Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
Abstract
Description
【発明の詳細な説明】
本発明は金属に対する接着性の改善された感光性組成物
に関するものである。例えば、印刷回路板製造に用いら
れるドライフィルムフォトレジストは従来の溶液型のフ
ォトレジストに較べて金属表面への接着性が低いために
メッキやエツチングの際にアンダーブレーティング、ア
ンダーエツチングなどはなはだしくはレジストが剥離し
基板から浮き上り、期待するパターンが得られないこと
がしばしば経、験されている。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to photosensitive compositions with improved adhesion to metals. For example, dry film photoresists used in the manufacture of printed circuit boards have lower adhesion to metal surfaces than conventional solution-based photoresists, so they often cause underblating or underetching during plating or etching. It is often experienced that the desired pattern cannot be obtained due to peeling off and lifting from the substrate.
そこで、従来からこのような問題を解決するためにベン
ゾイミダゾール、ベンゾトリアゾールやそれらの誘導体
、例えば塩酸塩を添加することが提案されている。しか
−しながら、このような複素環窒累含有化合物又はそれ
らの塩酸塩を含む感光性組成物を用いた場合、現像後の
基板の銅露出面の赤変などが見られ、メッキ、エツチン
グ等の後加工に好ましくない影響を与える。Therefore, in order to solve this problem, it has been proposed to add benzimidazole, benzotriazole, and derivatives thereof, such as hydrochloride. However, when a photosensitive composition containing such a heterocyclic nitrogen-containing compound or a hydrochloride thereof is used, red discoloration of the exposed copper surface of the substrate after development is observed, and problems such as plating, etching, etc. This has an unfavorable effect on post-processing.
本発明者やは、このような問題を解決し、更に感光性組
成物の金属に対する接着性をさらに改善するために鋭意
研究した結果、本発明に到達した。The present inventors have arrived at the present invention as a result of intensive research to solve these problems and further improve the adhesion of photosensitive compositions to metals.
即ち、本発明は密着向上剤として、一般式〔鳥はS R
2またはR2であり、R2およびR3は水素、−NHR
または−N (R)2であり、Rは水素、ヒドロキシル
基、アルキル基、フェニル基、ベンジル基、ナフチル基
、シクロヘキシル基、アルコキシル基またはフェノキシ
基である〕で表わされる2−置換−4,6−ジチオール
−S−トリアジン誘導体の少な(とも−’8Mを含有す
る感光性組成物は銅、アルミなどの金属に対して極めて
接着の優れた画像を形成することを見出し本発明に至っ
た。That is, the present invention provides an adhesion improver having the general formula [Bird is S R
2 or R2, R2 and R3 are hydrogen, -NHR
or -N (R)2, and R is hydrogen, hydroxyl group, alkyl group, phenyl group, benzyl group, naphthyl group, cyclohexyl group, alkoxyl group or phenoxy group] 2-substituted -4,6 It was discovered that a photosensitive composition containing a small amount of -dithiol-S-triazine derivative (both -'8M) forms images with extremely excellent adhesion to metals such as copper and aluminum, leading to the present invention.
本発明に有用なジチオール−S−トリアジン誘導体の例
としては、
等がある。これらのジチオール−s−トリアジン誘導体
の添加量は感光性組成物の重量に対して01〜10重量
%、好ましくは05〜8重量%である。Examples of dithiol-S-triazine derivatives useful in the present invention include: The amount of these dithiol-s-triazine derivatives added is 01 to 10% by weight, preferably 05 to 8% by weight, based on the weight of the photosensitive composition.
本発明において、2−置換−4,6−シチオールーS−
)リアジン誘導体は金属とメルカプチド型錯体を形成す
ることにより接着性向上に寄与しているものと考え9ら
れる。In the present invention, 2-substituted-4,6-sithio-S-
) It is thought that the riazine derivative contributes to improved adhesion by forming a mercaptide type complex with the metal9.
本発明の感光性樹脂はジアゾ系、アジド系、シンナモイ
ル系、アクリロイル糸環公知の感光性樹脂が使用できろ
が、光7重合タイプの感光性樹脂が好適に使用される。The photosensitive resin of the present invention may be a diazo type, an azide type, a cinnamoyl type, or an acryloyl ring type photosensitive resin, but a photosensitive resin of the photoheptapolymerization type is preferably used.
中でも少くとも2個の末端エチレン基を有し、非ガス状
で大気圧下で100°C以上の沸点を有するエチレン性
不飽和化合物よりなる感光性樹脂が好ましい。Among them, a photosensitive resin made of an ethylenically unsaturated compound having at least two terminal ethylene groups, non-gaseous, and having a boiling point of 100° C. or higher at atmospheric pressure is preferred.
このようなエチレン性不飽和化合物よりなる感光性組成
物は一般にエチレン性不飽和化合物、有機重合体バイン
ダーおよび光重合開始剤等の添加剤からなっている。A photosensitive composition comprising such an ethylenically unsaturated compound generally comprises the ethylenically unsaturated compound, an organic polymer binder, and additives such as a photopolymerization initiator.
このようなエチレン性不飽和化合物の例は2−ヒドロキ
シエチルメタクリレート、2−ヒドロキシプロピルメタ
クリレート、4−ヒドロキシエチルメタクリレート、ト
リメチロールプロパントリアクリレート、トリメチロー
ルプロパントリメタクリレート、テトラメチロールメタ
ントリアクリレート、テトラメチロールメタンテトラア
クリレート、テトラメチロールメタントリメタクリレー
ト、テトラメチロールメタンテトラメタクリレート、エ
チレングリコールジメタクリレート、ジエチレングリコ
ールジアクリレート、ジエチレングリコールジメタクリ
レート、テトラエチレングリコールジアクリレート、テ
トラエチレングリコールジメタクリレート、ネオペンチ
ルグリコールジアクリレート、ネオペンチルグリコール
ジメタクリレ゛−ト、1.s−ベンタンジオールジアク
リレート、1,5−ベンタンジオールジメタクリレート
、1.6−ヘキサンシオールジアクリレー)、1..6
’−ヘキサンジオールジメタクリレート、2−エチルへ
キシルアクリレート、2−エチルへキシルメタクリレー
ト、ラウリルアクリレート、ラウリルメタクリレート、
ステアリルアクリレート、ステアリルメタクリレート、
トリアリルインシアヌレート、ジアリルフタレート、ジ
メチルアミノエチルメタクリレート、ジエチルアミノエ
チルメタクリレート、テトラヒドロフルフリルメタクリ
レートなどを挙げることができる。Examples of such ethylenically unsaturated compounds are 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, 4-hydroxyethyl methacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, tetramethylolmethane triacrylate, tetramethylolmethane. Tetraacrylate, tetramethylolmethane trimethacrylate, tetramethylolmethanetetramethacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, tetraethylene glycol diacrylate, tetraethylene glycol dimethacrylate, neopentyl glycol diacrylate, neopentyl glycol diacrylate Methacrylate, 1. s-bentanediol diacrylate, 1,5-bentanediol dimethacrylate, 1,6-hexanethiol diacrylate), 1. .. 6
'-hexanediol dimethacrylate, 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, lauryl acrylate, lauryl methacrylate,
stearyl acrylate, stearyl methacrylate,
Examples include triallyl in cyanurate, diallyl phthalate, dimethylaminoethyl methacrylate, diethylaminoethyl methacrylate, and tetrahydrofurfuryl methacrylate.
また、有磯重合体バインダーはエチレン1生不飽和化合
物と相溶性のあるものが使用されるため、その組合せは
おのずから決まってくるが、本発明に用いられるバイン
ダーはポ・リメタクリレート、ポリスチレン、ポリ塩化
ビニル、塩素化ポリエチレン、ポリビニルアセテート、
ポリビニルアルコール、ポリビニルブチラールおよびそ
れらの共重合体である。In addition, since the Ariiso polymer binder is compatible with the ethylene-1 biounsaturated compound, the combination is determined naturally, but the binder used in the present invention is polymethacrylate, polystyrene, polystyrene, etc. Vinyl chloride, chlorinated polyethylene, polyvinyl acetate,
These are polyvinyl alcohol, polyvinyl butyral, and copolymers thereof.
感光i生組成物に用いられる光重合開始剤はエチレン性
不飽和化合物の重合に適するものがよく、アントラキノ
ン、2−メチルアントラキノン、なトノアントラキノン
誘導体、ベンツ゛イン、ベンゾインメチルエーテルなど
のベンゾイン誘導体、ベンゾフェノン、ミヒラーケトン
などである。The photopolymerization initiator used in the photosensitive biocomposition is preferably one suitable for polymerizing ethylenically unsaturated compounds, such as anthraquinone, 2-methylanthraquinone, tonoanthraquinone derivatives, benzoin derivatives such as benzine and benzoin methyl ether, benzophenone, Michler's ketone, etc.
他に感光性組成物の貯蔵安定性のために熱重合禁止剤や
レジストを確認しやすくするためkで染料顔料、可塑剤
などを使用してもよい。In addition, a thermal polymerization inhibitor may be used for the storage stability of the photosensitive composition, and dye pigments, plasticizers, etc. may be used to make it easier to check the resist.
本発明の感光性組成物はフォトレジストの形成に有用な
組成物であるが、必ずしもこの用途に限定されろもので
はなく、UUインキ、ンルダーレジスト、印刷版などに
も応用できる。Although the photosensitive composition of the present invention is a composition useful for forming photoresists, it is not necessarily limited to this use, and can also be applied to UU inks, printer resists, printing plates, and the like.
以下に実施例を示す。Examples are shown below.
実施例1
トリメチロールプロパントリアクリレート 45 ″ベ
ンゾフェノン 5 〃ミヒ
ラーケトン 0.5〃ヒ
ドロキノンモノメチルエーテル 001〃ク
リスタルバイオレツト 004〃
H
上記組成物の10%メチルエチルケトン溶液を厚さ25
μmのポリエチレンテレフタレートフィルム上に塗布し
、乾燥後25μmの塗膜を作成した。又、比較のため、
2.4,6.− ) IJチオ−・ルーS −) IJ
アシンを添加しない塗膜を同様に作成した。これらの塗
膜を銅板にラミネートしステノプタブレノト(富士写真
フィルム製、15段)を通して2KW超高圧水銀灯(オ
ーク社製JP−2ooo)を用い、5〜60秒間、段階
的に露光した。Example 1 Trimethylolpropane triacrylate 45'' Benzophenone 5 Michler's ketone 0.5 Hydroquinone monomethyl ether 001 Crystal Violet 004
H A 10% methyl ethyl ketone solution of the above composition was added to a thickness of 25%.
It was applied onto a 25 μm polyethylene terephthalate film and dried to form a 25 μm film. Also, for comparison,
2.4,6. -) IJ Thio-Lou S -) IJ
A coating film without the addition of acine was similarly prepared. These coating films were laminated onto a copper plate, and exposed stepwise for 5 to 60 seconds using a 2KW ultra-high pressure mercury lamp (JP-2ooo, manufactured by Oak Co., Ltd.) through a stenoptole (manufactured by Fuji Photo Film Co., Ltd., 15 stages).
次ニポリエチレンテレフタレートフィルムを剥離してク
ロロセン(]、、 ]、1− )リクロロフクン)によ
りスプレー現像機を用いて90秒間現像し、その後水洗
し乾・・栗した。このときの露光秒数とステップタブレ
ット段数を表1に示す。Next, the polyethylene terephthalate film was peeled off and developed with chlorocene (], , ], 1-) using a spray developer for 90 seconds, then washed with water and dried. Table 1 shows the number of exposure seconds and the number of step tablets at this time.
このように現稼されて基板上に残ったレジストにセロテ
ープをはりつけて急激に剥μjlする試験を行なったが
、24.6−)リチオ−ルーS−トリアジンを添加した
レジストは基板に密着したままであったが、無添加のレ
ジストはセロテープとともに剥?j「シた。In this way, a test was carried out in which Sellotape was attached to the resist remaining on the substrate during actual operation and it was rapidly peeled off, but the resist to which 24.6-) Lithio-R-S-triazine was added remained in close contact with the substrate. However, did the additive-free resist come off with cellophane tape? j “Shita.
また、レジストの形成された鋼基板を過硫酸アンモニウ
ムに3分間浸漬して、その後水洗しピロリン酸銅メッキ
液を用いて30分銅メツキを行なった。Further, the steel substrate on which the resist was formed was immersed in ammonium persulfate for 3 minutes, then washed with water, and copper plated for 30 minutes using a copper pyrophosphate plating solution.
この基板を取り出してみると、無添加のレジストは基板
上から浮き上って基板と・の間にメッキ液がはいり込ん
でいるが、2.4.6− トIJチオール−3−)リア
ジンを添加したレジストはこのような現象は見られなか
った。When this substrate is taken out, the additive-free resist floats up from the substrate and the plating solution has entered between the substrate and the substrate. No such phenomenon was observed with the added resist.
次いで鋼メッキされた基板をほうフッ化半田メッキ液を
用いて半田メッキを行ない基板からレジストを剥離して
過硫酸アンモニウムからなるエツチング液により銅をエ
ツチングすると、半田のパターンが得られろ。無添加の
レジストから得られたパターンは画線が不明瞭であった
が、24.6−)リチオ−ルーS−トリアジンを添加し
たそれは明瞭であった。The steel-plated board is then solder plated using a fluoroborated solder plating solution, the resist is stripped from the board, and the copper is etched with an etching solution consisting of ammonium persulfate to obtain a solder pattern. The pattern obtained from the resist with no additives had unclear lines, but the lines were clear in the pattern obtained with the addition of 24.6-)lithio--S-triazine.
表1
5 8段 5段
10 11 720
12 1030 13
1140 ’ 14 1.
150 15 1160
15 11実施例2
実施例1の組成の24.6−)リチオ−ルーS−トリア
ジンの代りに2−フェニルアミノ−4,6−シチオール
ーS−)リアジン
H
を】重量部添加した組成物を用いて同隨に露光現像を行
なった。レジストの形成された銅板を塩化第二銅水溶液
を用いて銅をエツチングしてレジストパターンを得た。Table 1 5 8 stages 5 stages 10 11 720
12 1030 13
1140' 14 1.
150 15 1160
15 11 Example 2 A composition in which part by weight of 2-phenylamino-4,6-sithio-S-)riazine H was added instead of 24.6-)lithio-S-triazine in the composition of Example 1 was used. Exposure and development was performed at the same time. The copper plate on which the resist was formed was etched using a cupric chloride aqueous solution to obtain a resist pattern.
無添加のものは一部鋼面から浮き上っているところもあ
ったが、2−フェニルアミノ−4,6−シチオールーS
−)リアジンを添加したレジストは浮き上りもなくレジ
ストを剥離した後の銅パターンとレジストパターンの線
幅はよく対応していた。There were some parts of the additive-free product that were floating above the steel surface, but 2-phenylamino-4,6-sithio-S
-) The resist to which riazine was added had no lifting and the line widths of the copper pattern and the resist pattern corresponded well after the resist was peeled off.
実施例3
ポリメチルメタクリレート 50重
量部(スミペックスB 住友化学工業製)
トリメチロールプロパントリアクリレート 20 重
量部テトラエチレングリコールジアクリレート 25
〃0、P−)ルエンスルホン酸アミド
6 〃ヒドロキノンモノメチルエーテル
001〃クリスタルバイオレツト
004〃上記組成物を実施例1と同様に塗膜を
形成し、蕗光・現像・メッキを施した。形成された回路
は十分使用に耐えるものであった。Example 3 Polymethyl methacrylate 50 parts by weight (Sumipex B manufactured by Sumitomo Chemical) Trimethylolpropane triacrylate 20 parts by weight Tetraethylene glycol diacrylate 25
〃0, P-) Luenesulfonic acid amide
6 Hydroquinone monomethyl ether
001〃Crystal Violet
004〃A coating film was formed from the above composition in the same manner as in Example 1, and subjected to flashing, development, and plating. The formed circuit was sufficiently usable.
実施例4
ポリビニルンンフマート 100
部3−メチルー1,3−ジアザ−1,9−ベンズアンス
ロン 10 〃クリスタルバイオレット
O05部H
上記組成物を実施例1と同様に塗膜を形成し、露光・現
像を施し、レジストのクロメノ・ツチテストをした結果
、2.4.6− )リチオ−ルーS−トリアジンを添加
したレジストは基板に密着したままであったが、無添加
のレジストはセロテープととも((剥離した(表2)。Example 4 Polyvinyl Nfumato 100
Part 3-Methyl-1,3-diaza-1,9-benzanthrone 10 Crystal violet
O05 Part H A coating film was formed from the above composition in the same manner as in Example 1, exposed and developed, and the resist was subjected to the Chromeno-Tsuchi test. As a result, 2.4.6-) Lithio-R-S-triazine was added. The resist remained in close contact with the substrate, but the additive-free resist was peeled off (Table 2).
表2 クロスハツチテスト
実施例1 ] 00/] 00 =I
O1/100// 2 100/ I O035
/100// 3 99/100 30/
100tt 4 100/100 50/1
00特肝出願人
ダイセル化学工業株式会社Table 2 Cross hatch test example 1] 00/] 00 =I
O1/100// 2 100/ I O035
/100// 3 99/100 30/
100tt 4 100/100 50/1
00 Special liver applicant Daicel Chemical Industries, Ltd.
Claims (1)
、−NHRまたは−N 、 (R) 2てあり、Rは水
素、ヒドロキシル基、アルキル基、フェニル基、ベンジ
ル基、ナフチル基、シクロヘキシル基、アルコキシル基
またはフェノキジル基である。〕 で表わされる2−置換−4,6−ジチオール−S−トリ
アジン誘導体の少な(とも一種類を組成物の01〜10
重量%含有させたことを%命とする金属に対する接着性
の改善された感光性組成物。[Claims] In the photosensitive resin, CR, is SR2 or R2, R2 and Karasu are hydrogen, -NHR or -N, (R)2, and R is hydrogen, a hydroxyl group, an alkyl group, a phenyl group. , benzyl group, naphthyl group, cyclohexyl group, alkoxyl group or phenoxyl group. ] A small amount of the 2-substituted-4,6-dithiol-S-triazine derivative represented by
A photosensitive composition with improved adhesion to metals due to its inclusion of % by weight.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2570083A JPS59152439A (en) | 1983-02-18 | 1983-02-18 | Photosensitive composition having improved adhesive property to metal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2570083A JPS59152439A (en) | 1983-02-18 | 1983-02-18 | Photosensitive composition having improved adhesive property to metal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59152439A true JPS59152439A (en) | 1984-08-31 |
Family
ID=12173061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2570083A Pending JPS59152439A (en) | 1983-02-18 | 1983-02-18 | Photosensitive composition having improved adhesive property to metal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59152439A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105425543A (en) * | 2014-09-12 | 2016-03-23 | 住友化学株式会社 | Curable resin composition |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5671151A (en) * | 1979-11-14 | 1981-06-13 | Hitachi Ltd | Anomaly detection system |
JPS58100844A (en) * | 1981-12-11 | 1983-06-15 | Hitachi Chem Co Ltd | Photosensitive resin composition |
-
1983
- 1983-02-18 JP JP2570083A patent/JPS59152439A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5671151A (en) * | 1979-11-14 | 1981-06-13 | Hitachi Ltd | Anomaly detection system |
JPS58100844A (en) * | 1981-12-11 | 1983-06-15 | Hitachi Chem Co Ltd | Photosensitive resin composition |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105425543A (en) * | 2014-09-12 | 2016-03-23 | 住友化学株式会社 | Curable resin composition |
JP2016056323A (en) * | 2014-09-12 | 2016-04-21 | 住友化学株式会社 | Curable resin composition |
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