JPS59149828U - Opening/closing device for carrier hooks for wafers, etc. - Google Patents
Opening/closing device for carrier hooks for wafers, etc.Info
- Publication number
- JPS59149828U JPS59149828U JP4280083U JP4280083U JPS59149828U JP S59149828 U JPS59149828 U JP S59149828U JP 4280083 U JP4280083 U JP 4280083U JP 4280083 U JP4280083 U JP 4280083U JP S59149828 U JPS59149828 U JP S59149828U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- closing device
- carrier
- wafers
- air cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chain Conveyers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一例によるキャリヤ引掛棒の開閉装置
を備えた搬送装置の正面図、第２図はその側面図、第３
図は半導体材料の洗浄工程を示す立面図、第４図は第１
図に示された搬送装置の要部を示す拡大図、そして第５
図はキャリヤと引掛棒の関係を示す斜視図である。
図中、１０・・・・操作軸、１１・・・引掛棒、１２・
・・エアシリンダ、１３・・・水平な部材、１４・・・
ガイド、１５．１５’・・田ツド、１６．１６’・・・
第２のロッド、３０・・・キャリヤ。FIG. 1 is a front view of a conveyance device equipped with an opening/closing device for a carrier hook according to an example of the present invention, FIG. 2 is a side view thereof, and FIG.
The figure is an elevational view showing the process of cleaning semiconductor materials, and Figure 4 is the first
An enlarged view showing the main parts of the conveying device shown in the figure, and a fifth
The figure is a perspective view showing the relationship between the carrier and the hook bar. In the figure, 10... operating shaft, 11... hook bar, 12...
...Air cylinder, 13...Horizontal member, 14...
Guide, 15.15'... Tatsudo, 16.16'...
Second rod, 30...carrier.
Claims (2)
ヤを搬送するためのそれぞれ並置された操作軸に取付け
られたほぼコ字形の一対の引掛棒を前記キャリヤに引掛
けまたは前記キャリヤから外す開閉装置であって、前記
操作軸の上または下に設置されたエアシリンダと、前記
操作軸と前記エアシリンダの間に在って前記エアシリン
ダで上下に移動される水平な部材と、前記部材に取付け
られた一対のロッドと、それぞれ前記操作軸に固定され
且つ対応の前記ロッドに連結された第２のロッドと、前
記部材の水平状態を保つガイドとを含むウェハ等のキャ
リヤ引掛、 棒の開閉装置。(1) An opening/closing device for transporting a carrier supporting a semiconductor material such as a silicon wafer, by which a pair of substantially U-shaped hook bars attached to operating shafts arranged in parallel are hooked onto or removed from the carrier. an air cylinder installed above or below the operating shaft; a horizontal member located between the operating shaft and the air cylinder and moved up and down by the air cylinder; and a horizontal member attached to the member. a pair of rods, a second rod each fixed to the operating shaft and connected to the corresponding rod, and a guide for keeping the member in a horizontal state.
て、前記水平な部材は平板からなるウェハ等のキャリヤ
引掛棒の開閉装置。(2) Utility Model Metal Frame The device according to claim 1, wherein the horizontal member is a flat plate, and is an opening/closing device for a carrier hook bar for wafers, etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4280083U JPS59149828U (en) | 1983-03-24 | 1983-03-24 | Opening/closing device for carrier hooks for wafers, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4280083U JPS59149828U (en) | 1983-03-24 | 1983-03-24 | Opening/closing device for carrier hooks for wafers, etc. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59149828U true JPS59149828U (en) | 1984-10-06 |
Family
ID=30173336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4280083U Pending JPS59149828U (en) | 1983-03-24 | 1983-03-24 | Opening/closing device for carrier hooks for wafers, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59149828U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49351U (en) * | 1972-04-04 | 1974-01-05 | ||
| JPS5325342U (en) * | 1976-08-10 | 1978-03-03 | ||
| JPS5638067U (en) * | 1979-08-30 | 1981-04-10 |
-
1983
- 1983-03-24 JP JP4280083U patent/JPS59149828U/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49351U (en) * | 1972-04-04 | 1974-01-05 | ||
| JPS5325342U (en) * | 1976-08-10 | 1978-03-03 | ||
| JPS5638067U (en) * | 1979-08-30 | 1981-04-10 |
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