JPS59146434A - Production of vertical recording type magnetic head - Google Patents

Abstract

PURPOSE:To mass produce vertical recording type magnetic heads having high record/reproduction efficiency in a simple manufacturing process by unifying main magnetic poles 22 made of soft magnetic thin film layers by holding a guared material block from both sides with a protecting film adhered to a single side surface. CONSTITUTION:Projections 32a for formation of auxiliary magnetic poles having trapezoidal sections and planar tops are formed on a magnetic block 32 with prescribed spaces. Then nonmagnetic plate type blocks 31 are joined to each other with their mirror polished surfaces 31a and grooves 33 set opposite to each other. A joined matter 35 of the blocks 31 and 32 is cut out to a desired thickness along the faces shown by chain by lines m1, m2-. A main surface 36a is finished into a mirror surface. In this case, the thickness of an auxiliary magnetic pole part 27 is set at about a/bapprox.=1-1.5 at a place near the tip of a main magnetic pole 22. This pole 22 is formed on the surface 36a of an obtained composite plate matter 36, and an insulated protecting film 38 is coated on the pole 22 by sputtering, vapor desposition, ion plating and other processes. Then a composite plate matter 36' which serves as a guard material block 24' is adhered from the side of the film 38.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention &J2 is directed to a method for manufacturing an old recording type magnetic head.7. ,).

Background technology and its problems
In the direction of the transition to the direction of the transition between the air tape and the head of the air , l of magnetic tape
I7 In the unlikely event that the opposite direction (illization, so-called vertical side 1 + self-recording method) is possible (Iro. Then 1. α0 (g or wholesale? Self σ / tile (1 kyu &' value or thick (
This is due to the fact that the perpendicular recording method has a smaller self-field (111a) in the magnetic layer than in the case of [2].

As for the il + direct writing line used in this 11th type of recording method, various O types have been proposed, but this nT: is a white line. In the method, in order to perform the IE recording (ru° conversion) ideally, the main component of magnetic rise must be emitted from the magnetic head. A') You can rest assured that you are working as perpendicularly to the medium as possible. Such a magnetic field is 1, 5 in Fig. 1, and magnetic recording U\1. A main magnetic pole (2) made of, for example, permalloy thin 11 and an auxiliary magnetic pole (
3), and then attach the coil (4) to the pole (3).
There is also an excitation type sensitive head to the auxiliary I1 which is wrapped around the head.

However, in this case, behind the medium (1), the medium (
Since it is necessary to place the auxiliary magnetic pole (3) close to 1), the actual assembly and handling operations such as mounting the magnetic medium are difficult. There are some flaws. .

In order to avoid such drawbacks, as shown in FIG. 2, a magnetic layer (7) is used as a magnetic medium (1) on a non-magnetic base (5) with a high magnetic permeability layer (6). A structure with a main magnetic flux (2) is used as the magnetic head.
) with high magnetic permeability auxiliary core (8
) is placed at the tip of the main pillar 2 (12), at a position that is set back from the sliding contact surface with the magnetic medium, and the coil (4) is placed on the auxiliary core (8). A main magnetic pole excitation type single magnetic pole head (h) wound around the main magnetic pole is arranged to perform recording.

However, since this magnetic head has an open 4+H path configuration, it generally has a lower recording efficiency than a ring type magnetic head. It is very important to improve this recording efficiency, and considering use at high frequencies, it is desirable to lower the impedance of the coil to make it easier to drive.

As shown in FIG. 3, this type of magnetic head h has a main magnetic pole (2
) and the distance from the center of the coil (4) to the main magnetic pole (2).
Experimentally and theoretically, it has been found that the best recording efficiency is obtained when the lengths of b and 1-1a/b are 21 to 1.5. Furthermore, it is obvious that by winding the coil (4) as close to the tip of the auxiliary core (8) as possible and further reducing the winding diameter, recording efficiency can be increased and the impedance of the coil (4) can be lowered. The problem is how and when to realize such a magnetic head.

In a magnetic head like the one shown in Fig. 3, if the distance a between the main pole (2) and the center of the coil (4) is reduced in order to increase recording efficiency, the core becomes thinner and mechanical strength becomes a problem. , there is actually an upper limit.

Therefore, as shown in Fig. 4, the winding window hole (9) (
A magnetic head has been devised in which a non-magnetic base (10) (10') formed with a magnetic head (9') is disposed. This magnetic head is manufactured by the steps shown in FIG. First, a non-magnetic material that will become one of the holding bodies (10) has four parts (11a) forming the winding window hole (9) and an adhesive surface (llb) to which one of the auxiliary cores (8) is bonded. Attach a 4iB plate-like block (121) made of ferrite, etc. to one of the auxiliary cores (8) to the body block (11) from the inner surface of the tip of the four parts (Ill) to the adhesive surface (1lb) to the glass a M'l.
Il:3). Next, the magnetic plate-shaped block (
12), the magnetic plate-shaped block 02) is sharpened to the required corner ffj7 to form one composite block (1a).
a), main 4't', reif @ (add 21, O'), and main magnetic film (2), and 11tll +fl+ fll
ll''--mentioned non-1! The other composite block (14') produced in the same manner as the composite block 04) of the metal block (11) and the magnetic plate block (12) is joined. After that, convert this zygote to D [the track width will be 5]
The main magnetic pole ribs +2+ are cut, the head mounting is brought into contact with the base (not shown), and the sliding movement with the magnetic medium is polished, and the winding window hole (lla') consisting of the recesses (lla) (lla') is cut. By winding the coil (4) around 91 (9'), the magnetic head shown in FIG. 4 is obtained.

By configuring the head in this way, the coil (
Even if the winding part of 4) is removed, the non-impact property on both sides is maintained.
(!Body H) It is possible to maintain mechanical strength because it is supported by (10'), and therefore the auxiliary core (8) (8'
) can be made thinner.

However, in the magnetic head having such a configuration, the following problems occur during the manufacturing process of the composite block (141 (14')) consisting of the non-magnetic block (old) (11') and the magnetic plate-like block H (12').

(1) When processing the non-magnetic block (II) (11'), the processing accuracy of the winding window hole recesses (ha) (ha'),
In particular, the inner surface of the tip of the winding window hole four parts (11; 1) (lla'') r) + 1)'
It is difficult to improve the machining accuracy of the angle formed by (12') with the joint surface (llb) (llb'). (Figure 6A
reference).

(2) Therefore, if the magnetic plate-like block (121 (12')) is moved in parallel, the machining accuracy of the non-magnetic block (1υ (11')) cannot be improved, and since the contact points are not on the same plane, the adhesive (See Figure 6 B) (3) As the adhesive layer becomes thicker, air bubbles C are formed in it. ”17~sf131 (
13') Even if you use a crow, compared to general fugo~light, etc., it will be dented in the mirror surface with ``flo and soft T'' (l is throat, and the samurai has a wide back layer J], of course A concavity (l becomes larger by 1 stone (see Figure 7).

(4) On top of this, 11 snow 1 Il pole and 1, ``A) Magnetic soda j1
(, if λ is sputtered, and the first snow is H'0, and the shore i' is raised, a 7;1 (minute) of I sentence fJ-1 will occur, or - Jre/I'm still a magnet
1 degree Hakumo is springy (n, r) magnetic properties deteriorate -1 ro, flaw in side dish is 5t) b).

The invention's 1-'s + origin I()], these drawbacks 蓓・revised f+4. j7,
ML record 4q? : l knee efficiency sieve shell, 11 tastes j゛ζ
j1. Qti and Ki-Nodoru・l! +1 thick in the process;
11 no f; H'f 7:) 1 purpose recording method of manufacturing a magnetic head [111 If: 4: Forming in 3° block - 4th step and this protrusion 7
In addition, the street division space 4 (, 9 has a 312-sided monster of the size of light), which is 7 + 'j part 蓓 and non-magnetic I (4
, ↑1゛B[]tsuk formation process and the protrusion if,B
The li! ＋ River and IN part 1 by winding the 1st and 2nd sides by combining 4 magnetic blocks and 4 non-magnetic blocks leaving no leg space. The process of forming a protrusion σ-shaped body into an r-flat surface and the process of forming a main body consisting of a soft magnetic material rQE I interlayer on the surface of the first conjugated plate-like body. Form the magnetic poles with -16 etchings,
The first? y Intermediate plate-like body and second ear plywood-like body are attached to each other.
Direct recording type 1r + qi head to mouth i] Can be done with a single step of the dog turtle life '7. ).

1,443 to 10 below, the present invention vertical 6
Self-Record J~Reil! ! <Part 1 of the manufacturing method of the air head - Maruka; About the bird - Crii? .

I will clarify.

The 81st No. 11 is made according to the present invention.
The entire head is shown as a whole. Warehouse 1
The magnetic nozzle l (from the soft magnetic I3 material thin film layer lj 7. Main magnetic pole shear 2) by the magnetic field lj is coated with a protective film U, 3 on the - side side.
) are joined and integrated so as to sandwich the guard-skipping block from both rules, and this guard-skipping block (
241 (24') is treated behind this with the non-magnetic rEt material part ra5) (25') remaining at a certain position from the contact surface of the magnetic medium. ,fi'
) to j configuration, off, 4ζCl'tg':t Fm
Ki) (26') to soil 1 - magnetic pole (22) to 1;
The auxiliary sensitization section where one coil (4) is divided into seven parts (
27') and Nao? '! 1 (OQ) (29') is formed into a F, and the main magnetic pole (22+) is connected to Kamisuke 7i1 (pole part (27) (2
7') through coil C! 4.Next, perpendicular recording of the present invention 2'j'i, (IB magnetic head ji) to obtain this 71i self-recording magnetic head.
One implementation of the illumination method will be explained with reference to FIG. 9.

First, a 1″1 plate-shaped block of outer magnetic material (a block of magnetic material)
: Use 1 force, iq-. This throat (i &l' is a plate-like block 1) is non-4Q (cow ferrite (ZI + ferrite), forsterei (・, photocerano・, crystallized glass, titanium barium, titanate titanate 1 riuno 2,
A+! 2(,)3-Ti(consisting of Σ system t=Niramix), and (I-(sex)l-4 block(UZ
4 from Mn-Zn yarn, Ni-Znn yarn ball elite
．． i7i completed! Ib) is a non-4jfJ, plate-like block C(1) and a magnetic material block → its heat j))? It is desired that the tension wheels be similar, and for this reason, it is desirable to use a non-magnetic plate-like block C3+1 and a magnetic material block (the three are made of non-magnetic and magnetic ferrite, respectively).
. This non-magnetic plate-like block (31) - magnetic material block (3). a)V
For example, for a diamond whetstone (groove (: 33) is formed with a spacing between 33 and 33.
It has a planar bottom surface (3:E) which includes a protrusion for forming a hem (32a) and is also large enough to constitute a winding space.

In addition, auxiliary magnetic pole forming protrusions (32a) are provided on the magnetic material block and are formed at predetermined intervals on the magnetic material block (q).

^"U(+3F material block (r;'i'< iNi +It P
n-plane (31a) and groove (:Jl:(l facing each other)''C
Join. θ) (Mitsuyabe (321 river surface and a♀C (3
Align the bottom of the + with a space for the winding. This bonding can be done using glass fusion bonding, epoxy bonding, inorganic adhesive, water glass adhesive, etc.
According to 4), line 1 (・However, it is preferable to use glass at a high temperature so that it does not melt in the bath during the second fusion, since the glass may be fused again in a later step.Next, Kansencho.

m2. As shown in In3..., d is a non-magnetic plate-like block C (I), a magnetic material block (non-magnetic plate-like block 31 with 351 to the required thickness), and a magnetic material block θ. Cut out the non-magnetic plate-like block part rules and magnetic properties of one guard material block (cut out multiple plywood boards (JliJ) across the 2nd and 1st sides of the guard material block). The wood block portion (13; The thickness of the nearby auxiliary high pole part CA71 is as shown above.
As explained and clarified in Figure 3 (a/1) 1-1.5 degree 1
Set it to τL.

The material surface (36
In a), the above-mentioned main magnet 22) is made of, for example, permalloy, centast, or magnetic amorphous material with a thickness of 0.5 to 3 μm. The magnetic thin piece (37j) is crushed by sputtering, vapor deposition, ionizing, etc., and photoetched so that the main magnetic pole (2) is formed with narrow tracks IM and spacing. Next, put a protective film on top of this (c)
Forming 5i02. Si 3N4, A (!20
A grade 3 insulator 9 film 8) is deposited by sputtering, vapor deposition, or ion plating.Then, the other guard material block (24 The composite plate-shaped body (36') that will become the insulation layer (36') is adhered from the insulation retention membrane stage) side.

Although it is desirable to use a glass adhesive as the adhesive 6!1 from the standpoint of improving reliability, it is also possible to use an inorganic adhesive such as water glass or an organic adhesive such as epoxy resin.

In this case, a groove corresponding to the main magnetic pole (magnetic thin film 37j) is formed in advance on the joint surface of the other composite plate (36') by, for example, etching, and an adhesive is applied in the groove. By this, both composite plates (: (fi) and (
36') can also be glued.

Then, as shown in 8M 1+" 2T..., each band-shaped magnetic thin film (cut at 2'0) is glued to the head mounting base (not shown), and the tip surface, that is, the surface of the magnetic plate-shaped block OD. The side is polished to form a sliding contact surface S with the magnetic medium. According to such a process, a main magnetic pole (24) made of a magnetic thin film (37) is provided facing the sliding contact surface S with the magnetic medium. This main magnetic pole shaft has both ends at its tip.
11.11 K is foreign news j (materials department (j51 (25')
is arranged, behind which a magnetic phase part (26') is arranged, and this magnetic material part 15) (26') is arranged.
By winding the coil (4) around the auxiliary magnetic pole part t27) (27') and the main magnetic pole (edge), the vertical recording type magnetic head 1 according to the present invention is obtained.

And it has the following characteristics.

(1) When manufacturing a composite plate made of magnetic materials and external magnetic material, the joint surface is on the flat side, so it is possible to polish the latitudinal surface. The main magnetic pole length can be shortened and recording/reproducing efficiency can be improved. Furthermore, since it is bonded on the surface, the bonding work is +7il 71'-, so the conventional drawbacks such as air/'t'l and dents in the contact layer do not occur, and the winding window The structure of the brocade is simple and can be easily formed in one process.

(2) In addition, in the magnetic head having the structure shown in FIGS. 4 and 5 described above, the composite plate-like bodies must be bonded one by one, but in this embodiment, one bonding process is performed. Since a large number of composite plate-like bodies can be manufactured in one cutting process, it is suitable for mass production.

(3) To make the shape of the auxiliary magnetic pole near the tip of the main magnetic pole tapered in order to increase mechanical strength and improve recording and reproducing efficiency, in the conventional example described above, one ferrite block is used to make up the auxiliary magnetic pole. It is necessary to machine each block into a tapered shape, and as the shape of the block becomes more complicated, it is difficult to improve the processing accuracy, and furthermore, the processing requires a lot of effort, but according to this embodiment, it is necessary for grinding to form a and ν. By using a whetstone of a certain shape, the machining accuracy can be improved and the machining process can be performed easily.

(4) In addition, in the conventional magnetic head mentioned above, the range of contact between the non-magnetic material and the magnetic material is thin (and the range of contact between the magnetic material and the non-magnetic material is wide). There is a risk that the magnetic material may crack, but according to this embodiment 1fl, the non-magnetic material part is thin and small, so the contact length is small, and the range of thermal expansion that can be bonded to the magnetic material is not as strict as that of conventional magnetic heads. Wider range of material selection.

FIG. 10 shows a perpendicular recording magnetic head obtained by another embodiment of the method for manufacturing a perpendicular recording magnetic head of the present invention. The manufacturing method for this perpendicular recording magnetic head is shown in Fig. 11.
e-4'', magnetic 4A block (34 protrusion (32a
) is formed with a predetermined width corresponding to the main pole width in the tap width direction at t=-C. The other manufacturing steps are similar to the above example.
- This means that the mediating plate-like body such as ε[N12 diagram] j< J is 1
Through the process of joining this composite plate-like body and a symmetrical intermediary plate-like body, the chemical formula 11 recording type magnetism shown in Fig. 10 can be manufactured by this example. .

In this magnetic head, the same effects as those of the above-mentioned embodiments are achieved, and the winding part is constricted and the wire part lj
A is narrower than the pP of the head, so #i to lr'+! It is possible to make the size of the four sides smaller, lower the color line impedance, and further improve the recording efficiency.

In addition, FIG. 13 shows an FH structure (
~It's a trench type in vertical writing ^p Ki-\ Throat Na Show 1-9 This shi 4j
：Directly written as f, i～ri magnetic head is rj乍(33)a
For example, as shown in FIG.
If section (331)) is provided.
'- is taken and 1f is assumed. In this example? I-
In C, the formation of the diagonal part (3:3b) is a simple process such as slightly changing the shape of the die V mode (tl, 5 stones), and is similar to the above embodiment. It is easy to understand that the action and effect of ＋813% (while maintaining the necessary strength, the length Tm of the part of the main magnetic pole that protrudes from the auxiliary magnetic pole can be shortened to %, which has the advantage of reducing magnetic recording efficiency) be.

In addition, IB, 4g1g material part 4 in a real example.
26) Either one of (26') is made of inflexible material7. ) is a town.

It should be noted that the present invention is limited to the above-described embodiments, and it goes without saying that other configurations may be adopted without departing from the gist of the present invention.

Effects of the Invention As described above, according to the present invention, there is an advantage in that a perpendicular recording magnetic head can be produced with a high hI in 110 simple steps in terms of recording/writing efficiency.

[Brief explanation of the drawing]

Figures 1 and 21'a are diagrams of the perpendicular recording magnetic head, and Figure 3 is an enlarged part of Figure 2. 1F-1 diagram showing an example of the in-mold recording type magnetic head since FIT.
Figure 21-6A, a process diagram showing an example of the manufacturing method shown in the figure, is of the same magnetic head! I (4 construction 1 "I'")
Hl'-1 body block and 4i are the 11th self-view of the joint 7Qi of the plate-like block, and FIG. The sweat in Figure 6 (view, 81st IA is the present invention 1p-ii1 record no lil!? IZ, (one of the methods for manufacturing the head 111)
For example, Shiri? ? TAJ['1 White i11.'-+ h: Hemostasis diagram showing an example of magnetic flux, 7:, B B Figure B
&f times 1', I A o) -ft, y enlargement 1・
(Inkstone drawing, i 91>41 is -4 of the present invention, +47.:
Taking il as an example (0) l+43ii process diagram, 1fs
x. Figures and #i'';1: (Figures are examples of magnetic heads according to other embodiments of the present invention, respectively.
Z4! , 11 and 12 respectively show the example in FIG. 10 (Ij
A manufacturing drawing of another embodiment of the present invention, FIG. 14 is similar to FIG. 13.
Other embodiments of the present invention that illustrate the illustrated examples h'! FIG. 2 is a perspective view showing main parts of one example. (31) is the non-right 1* block, (34 is the magnetic 4A block, (32, 1) is the protrusion for forming the auxiliary shank, (3:
() is a folded plywood-like body.

Claims (1)

[Claims] 6]: Form a protrusion for forming an auxiliary magnet on the magnetic rod to form the mouth part.
．． g1θjj has a planar bottom surface as large as light to form f':"j space. 6 ++' 1 part is formed into a non-magnetic block.
# Part ra: +ru and 4H leaving 51 spaces,
5. The first step is achieved by joining the image block and the non-image block including Nikki.弗、1st and 2nd sliding plywood-like object is stored in the throat, and one side of the upper H Mito is 'plane I + IF Ij'''? ?! In the Jl calendar, the stingray female forming the main magnetic pole consisting of a thin soft layer, the ventral plywood-like body of Ex. 4. Method for manufacturing the edge magnetic head.