JPS5914007U - surface roughness meter - Google Patents

surface roughness meter

Info

Publication number
JPS5914007U
JPS5914007U JP10878682U JP10878682U JPS5914007U JP S5914007 U JPS5914007 U JP S5914007U JP 10878682 U JP10878682 U JP 10878682U JP 10878682 U JP10878682 U JP 10878682U JP S5914007 U JPS5914007 U JP S5914007U
Authority
JP
Japan
Prior art keywords
surface roughness
roughness meter
elements
recorded
dielectric material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10878682U
Other languages
Japanese (ja)
Inventor
孝 鈴木
Original Assignee
イ−グル工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イ−グル工業株式会社 filed Critical イ−グル工業株式会社
Priority to JP10878682U priority Critical patent/JPS5914007U/en
Publication of JPS5914007U publication Critical patent/JPS5914007U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の一実施例を示すもので、第１図は基準計
測盤の断面図、第２図はエレメントの拡大断面図、第３
図は表面粗さ計の全体系統図、第４図は第１図における
要部拡大図である。 １・・・基準計測盤、２・・・エレメント、３・・・金
属体、３・・・誘電体、５・・・計測表面、６・・・電
荷附与装置、７・・・切換装置、８・・・電位計測装置
、９・・・電算機、１０・・・表示装置、１１・・・記
憶装置、ａ・・・対象物。The drawings show an embodiment of the present invention, in which Fig. 1 is a sectional view of the reference measuring board, Fig. 2 is an enlarged sectional view of the element, and Fig. 3 is an enlarged sectional view of the element.
The figure is an overall system diagram of the surface roughness meter, and FIG. 4 is an enlarged view of the main parts of FIG. 1. DESCRIPTION OF SYMBOLS 1... Reference measurement board, 2... Element, 3... Metal body, 3... Dielectric material, 5... Measurement surface, 6... Charge imparting device, 7... Switching device , 8... Potential measuring device, 9... Computer, 10... Display device, 11... Storage device, a... Target object.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 金属体３上に誘電体４を配置してなり、電気容量法で対
象面との間隔を計測する微少な計測表面５を有する複数
のエレメント２を規則的に配列した基準計測盤１を有し
、前記各エレメント２における計測値を全体的もしくは
部分的に表示あるいは記録することを特徴とする表面粗
さ計。It has a reference measurement board 1 which is made up of a dielectric material 4 placed on a metal body 3 and has a plurality of elements 2 regularly arranged, each having a minute measurement surface 5 for measuring the distance from the target surface using the capacitance method. , a surface roughness meter characterized in that the measured values at each of the elements 2 are displayed or recorded in whole or in part.
JP10878682U 1982-07-20 1982-07-20 surface roughness meter Pending JPS5914007U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10878682U JPS5914007U (en) 1982-07-20 1982-07-20 surface roughness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10878682U JPS5914007U (en) 1982-07-20 1982-07-20 surface roughness meter

Publications (1)

Publication Number Publication Date
JPS5914007U true JPS5914007U (en) 1984-01-27

Family

ID=30253666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10878682U Pending JPS5914007U (en) 1982-07-20 1982-07-20 surface roughness meter

Country Status (1)

Country Link
JP (1) JPS5914007U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002372321A (en) * 2001-06-14 2002-12-26 Kobe Steel Ltd Safety valve for pressurized superfluidity cryostat
JP2006098403A (en) * 2004-09-28 2006-04-13 General Electric Co <Ge> Sensor system and operating method thereof
JP2011075869A (en) * 2009-09-30 2011-04-14 Sharp Corp Method and device for discriminating recording material discrimination, image forming method, and image forming apparatus
JPWO2010050607A1 (en) * 2008-10-31 2012-03-29 株式会社フジクラ Capacitive sensor
JP2013533952A (en) * 2010-05-07 2013-08-29 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Finder

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5486368A (en) * 1977-12-08 1979-07-09 Westinghouse Electric Corp Surface measuring device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5486368A (en) * 1977-12-08 1979-07-09 Westinghouse Electric Corp Surface measuring device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002372321A (en) * 2001-06-14 2002-12-26 Kobe Steel Ltd Safety valve for pressurized superfluidity cryostat
JP2006098403A (en) * 2004-09-28 2006-04-13 General Electric Co <Ge> Sensor system and operating method thereof
JPWO2010050607A1 (en) * 2008-10-31 2012-03-29 株式会社フジクラ Capacitive sensor
JP2011075869A (en) * 2009-09-30 2011-04-14 Sharp Corp Method and device for discriminating recording material discrimination, image forming method, and image forming apparatus
JP2013533952A (en) * 2010-05-07 2013-08-29 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Finder

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