JPS59139898U - 光照射炉 - Google Patents

光照射炉

Info

Publication number
JPS59139898U
JPS59139898U JP3354583U JP3354583U JPS59139898U JP S59139898 U JPS59139898 U JP S59139898U JP 3354583 U JP3354583 U JP 3354583U JP 3354583 U JP3354583 U JP 3354583U JP S59139898 U JPS59139898 U JP S59139898U
Authority
JP
Japan
Prior art keywords
light irradiation
heater
sub
furnace
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3354583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6115511Y2 (enrdf_load_stackoverflow
Inventor
立躬 平本
芳樹 三村
洋 清水
荒井　徹治
悟 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP3354583U priority Critical patent/JPS59139898U/ja
Publication of JPS59139898U publication Critical patent/JPS59139898U/ja
Application granted granted Critical
Publication of JPS6115511Y2 publication Critical patent/JPS6115511Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Furnace Details (AREA)
JP3354583U 1983-03-10 1983-03-10 光照射炉 Granted JPS59139898U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3354583U JPS59139898U (ja) 1983-03-10 1983-03-10 光照射炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3354583U JPS59139898U (ja) 1983-03-10 1983-03-10 光照射炉

Publications (2)

Publication Number Publication Date
JPS59139898U true JPS59139898U (ja) 1984-09-18
JPS6115511Y2 JPS6115511Y2 (enrdf_load_stackoverflow) 1986-05-14

Family

ID=30164328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3354583U Granted JPS59139898U (ja) 1983-03-10 1983-03-10 光照射炉

Country Status (1)

Country Link
JP (1) JPS59139898U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293378A (ja) * 1985-10-07 1987-04-28 アドヴァンスト　セミコンダクター　マティリアルズ　アメリカ　インコーポレイテッド 軸対称的なエピタキシヤル成長装置中で基板を加熱するための方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293378A (ja) * 1985-10-07 1987-04-28 アドヴァンスト　セミコンダクター　マティリアルズ　アメリカ　インコーポレイテッド 軸対称的なエピタキシヤル成長装置中で基板を加熱するための方法及び装置

Also Published As

Publication number Publication date
JPS6115511Y2 (enrdf_load_stackoverflow) 1986-05-14

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