JPS59138465A - Liquid jet recording apparatus - Google Patents

Abstract

PURPOSE:To obtain a liquid jet recording apparatus good in frequency characteristics in the emission of liquid droplets and capable of enhancing a recording speed, by rapidly performing the re-replenishment of a liquid by providing a auxiliary liquid supply port. CONSTITUTION:Gaps, which are respectively auxiliary liquid supply ports, are provided not only between a side wall 202 and an orifice plate 205 but also between the side wall 202 and a substrate 201. The re-replenishment of a liquid is performed ont only from the liquid flowline corresponding to one orifice 204 but also from the above mentioned gaps while the loss of power inherent to energy for forming liquid droplets in a flight state is reduced as possible to achieve the performance of rapid liquid replenishment. In the typical obliquely viewed partial drawing, the part where coarse oblique lines are applied to the upper end part of a side wall 302 is a part to which an orifice plate 305 is closely adhered and a part to which the oblique lines are not applied comes to a gap part. The position of the gap part is pref. provided in the vicinity of a heat generating part and, when provided in a liquid flowline, more pref. provided to the opposite side of the orifice. The gap provided to the side wall can enhance a max. frequency limit to a large extent.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a liquid jet recording apparatus, and more particularly to a liquid jet recording apparatus capable of improving recording speed.

There have been reports of various liquid jet recording methods that have been developed or put into practical use for recording characters, figures, etc. on a recording material by ejecting liquid from a liquid ejection port. A recent trend is on-demand technology, which has features such as ejecting droplets only when necessary for recording, so there is no need for means such as a means to collect unnecessary liquid or a high-voltage power supply for deflecting the droplets. The on-demand liquid jet recording system is attracting attention as described above.However, in order to perform high-speed recording, droplets must be ejected at a high frequency. Furthermore, in order to improve the frequency characteristics of droplets, liquid equivalent to the amount of ejected droplets must be instantly replenished. For 100 years, in order to quickly replenish liquid, companies do not provide any side walls for each discharge port to provide a dedicated liquid flow path between each discharge port.
Unnecessary droplet ejection energy may be propagated to adjacent ejection ports, making it difficult to accurately land the droplets on the recording material.Also, each adjacent ejection port has its own dedicated liquid flow path. If a side wall is provided to form a side wall and each ejection port is separated and independent, unnecessary droplet ejection energy will not be transmitted to adjacent ejection ports, but the speed of the liquid into the liquid flow path corresponding to each ejection port will be reduced. The problem of resupply has not been resolved.

The present invention has been made in view of these points, and is capable of liquid jet recording that improves the frequency characteristics of droplet ejection and improves the recording speed by quickly replenishing the liquid. The purpose is to provide equipment.

The above-mentioned conventional problems will be further explained using figures, and the concept of a means for solving the above-mentioned problems according to the present invention will be explained using figures.

In the following, for example, Publication in Second (OLS) No. 2843
An example of an apparatus applied to the recording methods described in Publication No. 064 and No. 2944005 will be explained, but the concept of the present invention includes not only apparatuses applied to such recording methods but also other devices. For example, a drop-on-demand type liquid jet recording device using a piezoelectric element also falls within this category.

Figure 1 shows a discharge port (orifice) for discharging liquid to form flying droplets, a liquid flow path communicating with the discharge port, and an energy acting part that constitutes at least a part of the liquid flow path. A schematic partial plan view showing the vicinity of the heat acting part of a liquid jet recording head (recording head) of a liquid jet recording apparatus, which has a heat acting part as a heat acting part, and an electrothermal converter that generates heat applied to a liquid in the heat acting part. 0101 is the substrate, 102 is the side wall, 1
06 is an electrothermal transducer 0 As shown in FIG. 1, the electrothermal transducers 103 that supply energy for ejecting droplets from the ejection port (oriice) are separated by side walls 102. Understood 0 Figure 2 (aJ to Figure 2 (0) are schematic cross-sectional views taken along the dashed line xx' shown in Figure 1. Figure 2 (a) What is shown is for explaining a conventional liquid jet recording device, and FIGS. 2(b) and 2.
The figures (Ql are for explaining the liquid jet recording apparatus of the present invention, respectively).

In Fig. 2(a) to Fig. 2(C), each 2[)1
is a substrate, 202 is a side wall, 206 is an electrothermal converter, 204
is an orifice, and 205 is a plate (hereinafter referred to as an orifice plate) on which the orifice 204 is provided.

As shown in FIG. 2(a), in the conventional case, the side wall 20
2 is formed continuously from the substrate 201 to the orifice plate 205, and the side wall 202 and the substrate 201 or the orifice plate 205 are in close contact with each other without any gaps or the like.

On the other hand, in the case of the present invention shown in FIG. 2(1)), the second
In the case shown in FIG. 0, gaps are provided between the side wall 202 and the substrate 201, each serving as an auxiliary liquid supply port.

In the present invention, the loss of the original power of energy for the formation of flying droplets is reduced as much as possible, and the replenishment of liquid is performed not only by the liquid flow path corresponding to one orifice, but also by the second orifice. The purpose is to replenish the liquid quickly and easily by replenishing the liquid through gaps such as those shown in Figure 1)) and Figure 2 (Q).

That is, the liquid jet recording device of the present invention includes a plurality of ejection ports (orifices) for ejecting liquid to form a plurality of flying droplets, a liquid flow path communicating with the ejection ports, and a liquid flow path communicating with the ejection ports. A side wall forming the liquid flow path in a liquid jet recording device having an ejection energy acting part forming at least a part of a flow path, and an ejection energy unit generating ejection energy to be applied to the liquid in the ejection energy acting part. It is characterized in that an auxiliary liquid supply port is provided in a portion where discharge energy is applied or in a part of the vicinity thereof.

According to the present invention, it is possible to prevent the original power loss of energy for the formation of flying droplets, and to quickly replenish the amount of liquid equivalent to the amount of ejected droplets, thereby improving the frequency characteristics of droplet ejection. A liquid jet recording device suitable for good high-speed recording can be provided.

The liquid jet recording apparatus of the present invention will be explained in more detail.

FIG. 3(a) and FIG. 6(b)d are diagrams showing an example of how to provide a gap, and each is a schematic perspective partial view.

In the figure, 601 is a substrate, 602 is a side wall, 303 is an electrothermal converter, 304 is an orifice plate, and 305 is an orifice plate. In the figure, the roughly hatched part of the upper part of the side wall 602 is the part that comes into close contact with the orifice plate 605, and the unshaded part is the gap 2 [5 minutes].

What is shown in FIG. 6(a) is an example in which a part of the side wall 602 is formed low. FIG. 6(b) is an example in which the side wall 02 is made one step lower from the middle. be.

The type shown in Figure 6(a) and Figure 6(1)) is of the type shown in Figure 2(b), but it can be considered as the type shown in Figure 2(C) in exactly the same way. It will be done.

Furthermore, one of the preferred embodiments of the present invention is illustrated using the drawings.
]do.

FIGS. 4 to 6 are diagrams for explaining this embodiment example,
Fig. 4 is a schematic cross-sectional view, Fig. 5 is a schematic side view assembly view,
FIG. 61 is a schematic plan partial view.

In FIGS. 4 to 6, 401 is a substrate, and 40
2 is a side wall, 403 is a heat acting part, 404 is an orifice, 4
05 is an orifice plate, 406 is an outer wall, 407 is a rear wall plate, 408 is a heating resistance layer, 409 is an electrode layer, 410 is a wiring, and 411 is a protective layer.

The manufacturing procedure of this embodiment example will be briefly explained below.
1DOμm of the substrate was removed by etching.

Next, a Ta layer with a thickness of 2000 μm was laminated as the heat generating resistor layer 408, and an A1 layer with a thickness of t−1 μm was laminated as the electrode 409, and then a heat generating part (heater) array having a shape of 60 μm, 771×100 μm was formed at a pitch of 200 μm using a photolithography process.

In addition, as a film for preventing oxidation of the Ta layer, preventing penetration of ink liquid, and mechanical shock resistance due to puzzles generated when liquid is subjected to thermal energy, 5iOz) age 0.5μm thick, 51 (3
A protective layer 411 is formed by sequentially laminating 1 μm thick layers by sputtering.
was formed.

Next, a side wall 4 [J2 (roughly shaded portion is in close contact with the Oriace plate as in FIG. 6(a) and FIG. 3(b)] of the heater as shown in FIG. 6) and a liquid flow path were formed. .

Liquid flow path width is 1QQpm width, Y from common liquid chamber to heater
mn750μm, the length of part a in Figure 6 is 5[10μm
(Therefore, the length of part b is 25oPrn), side wall 4
The height of 02 is 50 at the part that comes into close contact with the Oriais plate 405.
It was formed in μm. The gap between the side wall 402 and the orifice plate 405 was 20 pm.

The orifice 404 is formed directly above the heater, the orifice diameter is 4op711, and the thickness is 3011m (+7)N.
It was formed by etching a 1cr plate.

A rear wall plate 407 and two outer walls 406 were formed, and a through hole was provided in the second outer wall 406 to provide a supply pipe for supplying ink.

When the embodiment of the present invention manufactured as described above was driven by applying a rectangular voltage of 5 μθ, the highest frequency at which droplets were ejected was 8.5 KH2.

A side wall in which part a of the side wall is in close contact with the Oriice plate as shown in Fig. 6 was manufactured, and the dimensions of each part were made the same as in this embodiment, and the highest frequency at which droplets were ejected was similarly measured, and it was found to be 3 KHz. there were.

As described above, in this embodiment, the gap provided in the side wall is
We were able to significantly improve the maximum frequency limit compared to conventional models.

In addition, as a result of manufacturing many modified examples, it is better to have the gap near the heat generating part, and generally it is better to provide the gap within 1 mark, more preferably within 500 pm.
When providing a gap in the liquid flow path, it is more preferable to provide the gap on the opposite side of the orifice.As mentioned above, the gap may be provided in other than the space between the orifice plate and the side wall, or between the side wall and the substrate. , a gap may be provided in the side wall. Further, the auxiliary liquid supply port may be located not on the main liquid supply side but on the terminal end side of the liquid flow path.

The size of the gap should be determined appropriately depending on the size of the droplets to be ejected, the size of the liquid flow path, etc., the density of the ejection port, the type of liquid (ink) used, etc. It goes without saying that the size should be set to such a level that it is not affected by the droplet ejection energy of the adjacent ejection ports.

Further, in the present invention, the member provided with the discharge port is referred to as an orifice plate, but this does not need to be plate-shaped.

As described above, FIG. 3(a) and FIG. 6(1)) are diagrams each schematically showing an example of how to set the gap. Therefore, it goes without saying that the units shown in FIG. 3 (IL) and FIG. 6 (1) I may be adjacent or repeated. In addition, in both figures, the side of the liquid flow path that is not at the terminal end is not cut to the position shown in the figure, even if a flow path or liquid chamber, etc. for supplying liquid to the liquid flow path is formed. good.

[Brief explanation of the drawing]

Figure 1 is a schematic partial plan view of the recording head, Figure 2 (a)
FIGS. 2(c) to 2(c) are schematic cross-sectional partial views of each of ti. FIG. 2(a) is a conventional example, FIG. 2(1)) and FIG. 2(C).
1 and 2 respectively show examples of the recording head of the present invention. Figure 6(a)
and FIG. 6(b) are schematic perspective partial views of the recording head section of the present invention, and FIGS. 4 to 6 are diagrams for explaining embodiments of the present invention, and FIG. 4 is a schematic perspective view. FIG. 5 is a schematic perspective assembly view, and FIG. 6 is a schematic partial plan view. 101.201.301.401...Substrate 102
．． 202, 302, 402...Side wall 103.20
3, 303.403...Heat action section 204, 3
04.404... Orifice 205.305.4
05φ... Orifice plate 406... Outer wall
407... Rear wall plate 408... Heating resistance layer No. 409... Electrode layer 410... Wiring
411... Applicant for the insurance company Canon Co., Ltd.

Claims (1)

[Claims] An ejection port for ejecting a liquid to form flying droplets, a liquid flow path communicating with the ejection port, an ejection energy action section forming at least a part of the liquid flow path, and the ejection energy action. In a liquid jet recording device having an ejection energy generating body that generates ejection energy to be applied to the liquid in the liquid, an auxiliary liquid supply port is provided at or near a portion of the side wall forming the liquid flow path where the ejection energy is applied. A liquid jet recording device comprising: