JPS59134865A - 高電界コンデンサ構造体 - Google Patents

高電界コンデンサ構造体

Info

Publication number
JPS59134865A
JPS59134865A JP10599883A JP10599883A JPS59134865A JP S59134865 A JPS59134865 A JP S59134865A JP 10599883 A JP10599883 A JP 10599883A JP 10599883 A JP10599883 A JP 10599883A JP S59134865 A JPS59134865 A JP S59134865A
Authority
JP
Japan
Prior art keywords
layer
polycrystalline
silicon
silicon oxide
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10599883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228585B2 (enrdf_load_stackoverflow
Inventor
ドネリ−・ジエイ・デイマリア
ドナルド・ア−ル・ヤング
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to JP10599883A priority Critical patent/JPS59134865A/ja
Publication of JPS59134865A publication Critical patent/JPS59134865A/ja
Publication of JPS6228585B2 publication Critical patent/JPS6228585B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP10599883A 1983-06-15 1983-06-15 高電界コンデンサ構造体 Granted JPS59134865A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10599883A JPS59134865A (ja) 1983-06-15 1983-06-15 高電界コンデンサ構造体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10599883A JPS59134865A (ja) 1983-06-15 1983-06-15 高電界コンデンサ構造体

Publications (2)

Publication Number Publication Date
JPS59134865A true JPS59134865A (ja) 1984-08-02
JPS6228585B2 JPS6228585B2 (enrdf_load_stackoverflow) 1987-06-22

Family

ID=14422373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10599883A Granted JPS59134865A (ja) 1983-06-15 1983-06-15 高電界コンデンサ構造体

Country Status (1)

Country Link
JP (1) JPS59134865A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6228585B2 (enrdf_load_stackoverflow) 1987-06-22

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