JPS59126632A - X-ray exposing device - Google Patents

Abstract

PURPOSE:To improve the durability of the titled device by a method wherein the fluctuation of pressure generating from the shifting of an alignment scope is obserbed by an auxiliary chamber and a shifting member. CONSTITUTION:When the alignment scope 9 is advanced to the point located above a mask 6 and a wafer 7, the third valve 22 is opened. Thereupon, the alignment scope 9 advances, and a float 23 is shifted to the right-hand direction in a cylinder 20 in the amount of reduction of the volume of an X-ray lead-out chamber 5. As a result, the abnormal increase of the internal pressure of the X- ray lead-out chamber 5 for the outside air pressure can be prevented, thereby enabling to prevent the damage and deformation of the second X-ray lead-out window 8.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an X-ray generator for transferring fine patterns on a mask onto a wafer using X#.

(Prior Art) A method and apparatus for a soft X-leg 11 trough that can be applied to the manufacture of LSI and VLSI are disclosed in Japanese Patent Publication No. 41551/1983. This product is considered to have paved the way for pattern transfer technology with a resolution of 1 micron or less.

This is because this X@ lithography has a shorter wavelength than the conventional photolink roughy, so there is less diffraction and scattering due to dirt and dust, so it is suitable for transferring fine patterns on the submicron scale. Taking this a step further, a soft Disclosed. This device has a target that generates soft
a high-vacuum chamber which houses a preparatory material in i and has a first soft X@drawing window made of a material that easily transmits soft X-rays; Both have a second soft X-ray extraction window for extracting the soft X@ from the soft X-ray extraction window of the body 1 into the atmosphere, and
It consists of a soft X-ray extraction chamber filled with a gas that is difficult to absorb SV (for example, helium gas). This method is very superior in that the mask and wafer can be handled in the atmosphere. Further, 1% Japanese Patent Publication No. 57-169242 movably arranges an alignment scope for aligning the mask and the wafer in the soft X-ray extraction chamber, and the soft A technique is disclosed in which a tire flam membrane and air supply/exhaust means are provided to absorb the pressure difference between the inside and outside of the drawer chamber (which occurs as the volume of the drawer chamber changes).

Although this technique has an excellent idea regarding the arrangement of the alignment scope, it has the following drawbacks regarding the means for absorbing the pressure difference between the inside and outside of the soft X-ray extraction chamber. First, the diaphragm membrane deforms each time the alignment scope is moved, so its durability becomes a problem. In addition, when two or three alignment scopes are prepared, it is necessary to use a diaphragm membrane with a large amount of deformation. 8son that interferes with other mechanisms
Next, the supply/exhaust means requires a pressure difference detector, a pump, a valve, etc., so the structure becomes larger and
This is uneconomical because an expensive gas such as helium is exhausted when the alignment scope is moved. 9. A special alignment scope is prepared. In various cases, such as when moving the alignment scope during step-and-repeat exposure, it is possible to perform tie-by-tie alignment (die by die alignment).
)'l: If this is done, there will be a significant loss of helium gas, etc. Therefore, both are not practical.

OBJECTS OF THE INVENTION It is an object of the invention to provide an X-ray exposure apparatus that eliminates one or more of the drawbacks.

(Structure of the present invention) According to the present invention, an X-ray source;
an extraction chamber; the gas supply means; an alignment scope movably disposed within the X-ray extraction chamber; an auxiliary chamber connected to the X extraction chamber via an exhaust pipe; The X-ray extraction chamber is arranged in a chamber so as to be slidable due to the pressure difference between the inside and outside of the X-ray extraction chamber, and the X-ray extraction chamber is arranged to slide due to the pressure difference between the inside and outside of the X-ray extraction chamber. (1) a moving means for changing a space connected to the X-ray extraction chamber; and (1) an evacuation means for evacuation of the gas in the X-ray extraction chamber via the evacuation pipe when filling with the scientific body; There is provided an X-enjoyable device 6, which is characterized in that it is set at an initial position. By employing a glass cylinder as the auxiliary chamber and a carbon material float as the moving member, it is possible to follow minute pressure differences inside and outside the Xll11J drawer chamber. Further, a vacuum pump can be employed as the evacuation means. (Examples) The present invention will be described below based on examples. The figure is an explanatory diagram schematically showing an embodiment of the present invention.

A vacuum chamber 1 houses an electron gun 2 and a target 3. The target 3 generates soft X-rays by being irradiated with electrons from the electron gun 2. Target 3 radiates soft Xi downward in the figure. The opening in the side wall of the vacuum chamber 1 on the side from which soft
Line drawing windows 4 are arranged. 10) As the X-ray extraction window 4, a beryllium product that absorbs little soft X-rays and has relatively high mechanical stress can be used.
The X-ray extraction chamber 5 is for guiding the soft X-rays transmitted through the first X-ray extraction window 4 to the mask 6 and the uninot 7. The X-touge drawer chenno <5 is basically box-shaped, and its upper wall is #101XH drawer window 4.
The seven openings exposed inside the drawer chamber 5 are connected to the wall chamber 1. 1st XIvI! drawer window 4
A second X-ray extraction window 8 is disposed directly at the lower wall of the X-ray extraction chamber 5 opposite to -. As the x@drawer window 8 of w, 2, a transparent polyimide film or polyester film (mylar), which absorbs little soft X#, can be used.

An alignment scope 9 for aligning the mask 6 and the wafer 7 is movably arranged in the X-ray extraction chamber 5. In the figure, the distal end of the alignment scope 9 protrudes into the X-ray extraction chamber 5 36, and the vicinity of its intermediate portion is connected to the X-ray extraction chamber 5 via a bellows 10.

This alignment scope 9 is located at position #1, where it is retracted from above the mask 6 and wafer 7 during exposure.

In order to align the alignment marks on the mask 6 and wafer 7 during alignment, bubble alignment marks are provided on the mask 6 and wafer 7, which are advanced above these, for aligning the x-y coordinate axes and for alignment in the rotational direction. Full S is formed, and it can be observed simultaneously (visually or electrically).
In such cases, four alignment scopes are prepared.

Pressure helium gas He from the helium gas pump 11 is sent through a pressure reducing valve (regulator) 12 to a supply pipe 13 for supplying helium scum. At this time, the pressure after decompression is 'n/100 to Po+ for a certain atmospheric pressure Pa.
The supply pipe 13 is connected to the pressure reducing valve 12 and
There is a pipe between the wire drawing chamber 5 and the line drawing chamber 5, and a first valve 14 for helium supply is provided in the middle.1. The 111th pipe 15 with a diameter of 0.2 to 0.5 is
In order to leak 1 um gas into the X-ray extraction chamber 5, the #1 valve 14 is bypassed and connected to the supply pipe 13. A drain pipe 16 for discharging the gas in the X-ray extraction chamber 5 is connected to a vacuum pump 18 via a second valve 17. A branch 1119 from the discharge pipe 16 is connected to one end of the cylinder 20. The other end of the cylinder 20 is connected to the atmosphere via a pipe 21 and a third valve 22. A float 23 is slidably provided within the cylinder 20. The cylinder 20 is made of glass (2), and the float is made of a substance containing carbon.In this way, even if the cylinder 20 and float 23 are closely welded together, the friction between them is very small. For example, when the pressure difference between the atmospheric pressure PO and the internal pressure P of the x11!drawer chamber 5 is about P./2000, the float becomes movable. Light receiving element 24
A first photocoupler consisting of b and a second photocoupler consisting of a light emitting element 25a and a light receiving element 25b similarly arranged on the other end side of the cylinder 20 are moved in order to inspect the position of the float 23. Float 2
3 is the light emitting element 24a or 25a and the light receiving element 24b or 2
In the 1st and 2i paths connecting
The photocouplers g2 are arranged inward from the left and right ends of the movement stroke of the float 23 (the left and right ends of the printer 20), respectively, and this predetermined amount is equal to the width of the float 23. When the float 23 moves to the E side and blocks the first path between the older element element 24a and the light receiving element 24b, the float 23X+5 right 11111 Until the pressure oil returns to #1 and flows out of the #1 optical path, the path will remain blocked for ft'.When the float 23 moves to the right, the float 23 moves to the left. The optical path continues to be blocked until the right end goes out of the connecting path between the light-emitting element 25a and the light-receiving element 25b. Placed below 5=V Cc7”1. ((, Cedar exit pipe 160) X-ray extraction chamber 5 and chi 2
The part 1v between the valve 17 (where it is branched towards the atmosphere ~ this branch 5TI = ° and the length of the Xi drawer chamber 5 υ
It is set to be long enough to prevent the air flowing backwards from entering immediately. oxygen sensor 2
7 measures the oxygen concentration in the X-ray extraction chamber 5. If the oxygen concentration is below a predetermined value as a result of this measurement, it is assumed that the X-ray extraction chamber 5 is filled with helium gas. A pressure sensor 28 detects the pressure within the X#il drawer chamber 5, which is indispensable for detecting abnormal conditions such as pressure exceeding predetermined limits (high pressure side and low pressure side). Second
A vacuum leak pipe is provided in the inlet F pipe between the valve 17 and the X pump 18.Next, the operation will be explained.

(11 Initial set operation, firstly) ~ When opening the third valve 14, 17, 22, all pumps 18
Activate X+Ii! j! The gas in the drawer chamber 5 is extracted. Then, if air exists in the X-ray drawer 5, it will be extracted. At this time, similar to the principle of pole blowing, the internal pressure at 19 decreases due to the flow of gas in the exhaust pipe 16, so the float at position 1 (at) moves to position b1 (initial position) in Figure 1.
Next, proceed to the X acid drawer, exhaust the chamber 5, and connect it to the oxygen sensor 27 to detect it.1. When the degree of suspiciousness of the face is less than the fixed value of 9r ((The alignment scope 9 is retracted to the first position.

i7) When the end of evacuation is detected, Xie 1 ~ Mu 3 Half] 4゜] 7.22 is Sae) taken 71. Then, Zheng 3 valve 2
2 (it is also possible to close the valve 1 and the second valve 14, 17 in response to the JJA evacuation completion detection). 1-, the internal pressure of the X-ray extraction chamber 5 becomes Po +)'e / 100 C due to the action of the pressure reducing valve ]2.
(becomes 4), so the float 23 moves to the right from the (b1 position), and the float 23 moves directly to the emitting element 2.
4a and the light-receiving element 24b, the float 23 stopped near the first optical path. Condition C
(The position of the float 23 at this time is
The initial set operation is completed when the alignment scope 9 is moved from position 1 to the mask wafer. to open. Then, alignment scope 9 advances and
The float 23 is increased by the amount that the volume of the drawing chamber 5 is reduced.
moves to the right inside the shifter 2o. By this,
The internal pressure of the wire drawing chamber 5 is prevented from becoming abnormally high compared to the pressure pressure, and as a result, damage or deformation of the second X@drawing window 8 can be prevented. Then, when the advance of the alignment scope 9 is stopped, the #3 valve 22 is closed.In this way, even if the alignment scope 9 advances (supports) or retreats for mask and wafer alignment from now on, the Fluctuations in the internal pressure of the X-ray extraction chamber 5 are suppressed by the movement of the float 23. Here, the first and second
11 - The function of the pipes 15 and 26 will be explained. Ideally, the X-ray extraction chamber 5 should be airtight, but because a bellows 10 is used to make the alignment scope 9 movable, air actually flows into the chamber 5. there is a possibility.

Therefore, if the first and 142+1-thread pipes 15 and 26 are valved to leak helium gas, 8x! Since the internal pressure of the drawer chamber 5 is higher than atmospheric pressure, air can be prevented from flowing into the chamber. In addition, the X-ray extraction chamber 5
By opening it to atmospheric pressure through the leak pipe 26, the flow rate of helium gas in the 211th leak pipe 26 changes even if the atmospheric pressure changes slightly (within P7100). As a result, the internal pressure of the X1lilJ drawer chamber 5 is maintained for a while.It should be noted that this leakage accumulation does not need to be large, and only a small amount is sufficient.Next, regarding the branch position number of #21, explain. When the alignment scope 9 retreats to the first position after alignment, for some reason
It is assumed that the ability of the float 23 to follow changes in the volume of the I-drawer chamber 5 has decreased. At this time, the internal pressure of the X-ray extraction chamber 5 decreases, so there is a possibility that air will flow back through the second leak pipe 26.

Therefore, the length of the exhaust pipe 16 from the X-ray extraction chamber 5 to the $2 leak pipe 26 is set to be long enough to prevent the air flowing backward from entering the chamber 5. By doing this, the air that has flowed back is collected in the discharge pipe 16, so that the air that has flowed back is prevented from diffusing into the chamber 5, and it can be easily discharged.

(3) Operation in the event of an abnormality: First, if the lug 70-23 enters the first path between the light-emitting element 24a and the light-receiving element 24b at a time other than during the initial set operation,
The movement of the alignment scope 9 is stopped, the valve 22 is opened, and the float 23 is moved to the right.

When it is photoelectrically detected that the float 23 has evacuated from the first source path, the third valve 22 is closed.As a result, the cylinder 20 is filled with helium gas equivalent to the volume of the float 23 (7). Ru. Thereafter, the alignment scope 9 is made movable. And alignment scope 9
If the float 23 enters the first path again due to the movement of , the same operation as described above is repeated. The operation of filling the cylinder 20 with helium gas corresponding to the volume of the float 23 during this operation is performed to compensate for the phase difference between the four movements of the alignment scope 9 and the float 23.

Next, when the float 23 enters the second path between the first light emitting element 25a and the light receiving element 25b (position (c) in the figure), the alignment scope 9 is stopped,
Open the first to third valves 14.17.22. This moves the float 23 to the left. When it is photoelectrically detected that the float 23 has retreated from the second source path, tJ!
Close L1 to third valves 14.17.22. As a result, helium gas corresponding to the volume of the float 23 is discharged from the cylinder 20. Then alignment scope 9
allows for the movement of If the float 23 enters the second optical path again due to the movement of the alignment scope 9, the above operation is repeated.

By this, alignment scope 9 and float 23
The phase shift of the four movements is compensated for. At this time, discharging helium gas by the volume of the float 23 is useful.

In addition, if the alignment scope 9 and float 23 run out of control in the direction of increasing or decreasing the internal pressure of the X-ray extraction chamber 5, or if the pill tube 15 or the 211th tube 26 is clogged and the When the internal pressure decreases or increases, the pressure sensor 28 detects this. As a result, movement of the alignment scope 9 is prohibited.

If the rise or fall of the internal pressure does not end even with this, the second valve 1 is opened and the vacuum pump 18 is operated. Then, the process moves to the above-mentioned initial setting operation or instructs (displays) inspection of the device.

In the above embodiment, one cylinder 2o was prepared, but multiple cylinders may be prepared as necessary.
The ray source is not limited to a soft X-ray source depending on the material of the mask and the photoresist, and any gas may be used to fill the X-ray extraction chamber 5 as long as it is difficult to absorb X-rays. Further, a mask may also be used as the second X-ray extraction window. Furthermore, the vacuum pump 18
can also be used to evacuate a vacuum chamber.

(Effects of the present invention) According to the present invention as described above, the following effects can be obtained. (Gn L so as to absorb the pressure change accompanying the movement of the alignment scope by the 11 auxiliary chamber and the moving member.
Therefore, durability is improved. 6 (21) Since the gas in the X-ray extraction chamber moves between the auxiliary chamber and the auxiliary chamber in accordance with the movement of the alignment scope, gas loss can be extremely reduced.

(3) Since the initial setting of the moving member is performed using the exhaust operation during gas filling, no special driving source is required.

[Brief explanation of drawings]

The figure is an explanatory diagram showing an embodiment of the present invention. Explanation of symbols of main parts 1...Vacuum chamber, 2...Electron gun, 3...Target, 4...First X-ray extraction window, 5. ...X-ray drawer chamber. 8...#2 X-ray drawer window. 9... Alignment scope. 11... Helium gas cylinder, 12...
・Pressure reducing valve, 13... Supply pipe. 14...#1 valve, 15...
No. 111-ri pipe. 16...Discharge pipe, 17...Second valve, 18...Vacuum pump, 20...
...Cylinder, 22...Third valve,
23...Float, 24a, 24b...
- Arithmetic 1 photo coupler, 25a, 25b...2nd
Photocoupler. 26...Second leak pipe. Applicant: Takao Watanabe, Agent of Nippon Gengaku Kogyo Co., Ltd.

Claims (1)

[Scope of Claims] 1. An X-ray extraction chamber filled with a gas that absorbs ζXi to record X-rays and wafer numbers; means for supplying the gas; an alignment scope that is movable within the X-ray drawer chamber; an auxiliary chimney 1 connected to the X-ray drawer chamber through an exhaust pipe;
(a) is arranged so as to slide due to the pressure difference between the inside and outside of the drawer chamber, and is connected to the Xi drawer chamber in order to compensate for the change in the volume (M) of the X-ray drawer chamber due to the movement of the alignment scope. a moving means for changing the space in which the gas is filled; and an evacuation means for evacuating the gas in the X# drawer chamber through the exhaust pipe; XW!1 dew 51t1. device characterized by a number setting slot. 2. The supply means supplies a helium gas source at a pressure higher than atmospheric pressure by a fixed value, and the The X-ray exposure apparatus according to claim 1, characterized in that a leakage path for helium gas is formed in the atmosphere through a drawer chamber.3. A helium supply pipe was provided between the two, and a valve was installed in the helium supply pipe to control the supply of helium gas. The invention is characterized in that it comprises a first leak pipe that leaks into the X-ray extraction chamber, and a second leak pipe that is arranged from the discharge pipe toward the atmosphere. X-ray exposure apparatus. 4. The second II-reduction tube is placed at a predetermined distance from the X-ray extraction chamber so as to prevent air flowing back from the leakage tube from diffusing into the X-ray extraction chamber. X according to claim 3, characterized in that
#! Fukigen device-05, the auxiliary chamber is connected to 3 valves for opening to the atmosphere during the exhaust.1. The X dew-proof device according to claim 1, characterized in that: