JPS59121735A - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPS59121735A
JPS59121735A JP57227413A JP22741382A JPS59121735A JP S59121735 A JPS59121735 A JP S59121735A JP 57227413 A JP57227413 A JP 57227413A JP 22741382 A JP22741382 A JP 22741382A JP S59121735 A JPS59121735 A JP S59121735A
Authority
JP
Japan
Prior art keywords
anode
cathode
hollow part
anodes
short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57227413A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0346943B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57227413A priority Critical patent/JPS59121735A/ja
Publication of JPS59121735A publication Critical patent/JPS59121735A/ja
Publication of JPH0346943B2 publication Critical patent/JPH0346943B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57227413A 1982-12-28 1982-12-28 イオン発生装置 Granted JPS59121735A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57227413A JPS59121735A (ja) 1982-12-28 1982-12-28 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57227413A JPS59121735A (ja) 1982-12-28 1982-12-28 イオン発生装置

Publications (2)

Publication Number Publication Date
JPS59121735A true JPS59121735A (ja) 1984-07-13
JPH0346943B2 JPH0346943B2 (enrdf_load_stackoverflow) 1991-07-17

Family

ID=16860447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57227413A Granted JPS59121735A (ja) 1982-12-28 1982-12-28 イオン発生装置

Country Status (1)

Country Link
JP (1) JPS59121735A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006040850A1 (ja) * 2004-10-08 2006-04-20 Japan Science And Technology Agency 多価イオン発生源およびこの発生源を用いた荷電粒子ビーム装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006040850A1 (ja) * 2004-10-08 2006-04-20 Japan Science And Technology Agency 多価イオン発生源およびこの発生源を用いた荷電粒子ビーム装置
JP2006108054A (ja) * 2004-10-08 2006-04-20 Japan Science & Technology Agency 多価イオン発生源およびこの発生源を用いた荷電粒子ビーム装置
US7544952B2 (en) 2004-10-08 2009-06-09 Japan Science And Technology Agency Multivalent ion generating source and charged particle beam apparatus using such ion generating source

Also Published As

Publication number Publication date
JPH0346943B2 (enrdf_load_stackoverflow) 1991-07-17

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