Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Toshiba Corp
Original Assignee
Toshiba Corp
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Filing date
Publication date
Application filed by Toshiba CorpfiledCriticalToshiba Corp
Priority to JP22744082ApriorityCriticalpatent/JPS59121725A/ja
Publication of JPS59121725ApublicationCriticalpatent/JPS59121725A/ja
Publication of JPH0133015B2publicationCriticalpatent/JPH0133015B2/ja
System for measuring electrical resistance and temperature during manufacture of thin, conductive films deposited on substrates by means of evaporation or sputter deposition