JPS59113733U - semiconductor pressure transducer - Google Patents
semiconductor pressure transducerInfo
- Publication number
- JPS59113733U JPS59113733U JP765983U JP765983U JPS59113733U JP S59113733 U JPS59113733 U JP S59113733U JP 765983 U JP765983 U JP 765983U JP 765983 U JP765983 U JP 765983U JP S59113733 U JPS59113733 U JP S59113733U
- Authority
- JP
- Japan
- Prior art keywords
- pressure transducer
- semiconductor pressure
- holes
- semiconductor
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案に係る半導体圧力変換器の一実施例を示
す概略断面図、第２図はその要部とするセンサ支持台と
ねじ込み用治具とを示す分解斜視図である。′
１・・・・・・半導体圧力変換器、２・・・・・・半導
体センサ、３・・・・・・内部圧力室、４・・・・・・
ケーシング、５・・・・・・センサ支持台、６・・・・
・・受圧カプセル、７・・・・・・外部接続用端子、８
・・・・・・端子取付は孔、１０．１１・・・・・・導
圧孔、２０・・・・・・大径孔、２１・・・・・・ねじ
込み用治具、２２・・・・・・係合筒部。FIG. 1 is a schematic sectional view showing an embodiment of a semiconductor pressure transducer according to the present invention, and FIG. 2 is an exploded perspective view showing a sensor support base and a screwing jig, which are the main parts thereof. ' 1...Semiconductor pressure transducer, 2...Semiconductor sensor, 3...Internal pressure chamber, 4...
Casing, 5...Sensor support stand, 6...
...Pressure capsule, 7...External connection terminal, 8
...Terminal mounting hole, 10.11...Conduction hole, 20...Large diameter hole, 21...Screwing jig, 22... ...Engagement cylinder part.
Claims (1)
グとその開口端を閉塞するセンサ支持台とからなり、こ
のセンサ支持台には、その周方向に所定間隔おいて前記
半導体センサに接続された複数本の外部接続用端子が貫
通配置されるとともに、これら端子を保持する端子取付
は孔のうち、少なくとも２個所はその外方端側か大径孔
として形成されていることを特徴とする半導体圧力変換
器。It consists of a casing that forms an internal pressure chamber in which a semiconductor sensor is arranged, and a sensor support block that closes the open end of the casing. A semiconductor pressure sensor characterized in that terminals for external connection of the book are arranged through the holes, and at least two of the holes for holding these terminals are formed as large diameter holes on the outer end side. converter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP765983U JPS59113733U (en) | 1983-01-22 | 1983-01-22 | semiconductor pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP765983U JPS59113733U (en) | 1983-01-22 | 1983-01-22 | semiconductor pressure transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59113733U true JPS59113733U (en) | 1984-08-01 |
| JPH0351726Y2 JPH0351726Y2 (en) | 1991-11-07 |
Family
ID=30139185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP765983U Granted JPS59113733U (en) | 1983-01-22 | 1983-01-22 | semiconductor pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59113733U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03194432A (en) * | 1989-12-22 | 1991-08-26 | Hitachi Ltd | Semiconductor pressure sensor |
| JP2832894B2 (en) * | 1988-07-26 | 1998-12-09 | 日立建機株式会社 | Pressure sensor, method of manufacturing the same, and hydraulic equipment including pressure sensor |
-
1983
- 1983-01-22 JP JP765983U patent/JPS59113733U/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2832894B2 (en) * | 1988-07-26 | 1998-12-09 | 日立建機株式会社 | Pressure sensor, method of manufacturing the same, and hydraulic equipment including pressure sensor |
| JPH03194432A (en) * | 1989-12-22 | 1991-08-26 | Hitachi Ltd | Semiconductor pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0351726Y2 (en) | 1991-11-07 |
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