JPS59112942U - IC device inspection equipment - Google Patents

IC device inspection equipment

Info

Publication number
JPS59112942U
JPS59112942U JP715083U JP715083U JPS59112942U JP S59112942 U JPS59112942 U JP S59112942U JP 715083 U JP715083 U JP 715083U JP 715083 U JP715083 U JP 715083U JP S59112942 U JPS59112942 U JP S59112942U
Authority
JP
Japan
Prior art keywords
elements
suction
positioning part
tray
suction head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP715083U
Other languages
Japanese (ja)
Inventor
丸内 彌生
Original Assignee
丸豊精工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 丸豊精工株式会社 filed Critical 丸豊精工株式会社
Priority to JP715083U priority Critical patent/JPS59112942U/en
Publication of JPS59112942U publication Critical patent/JPS59112942U/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Specific Conveyance Elements (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はIC素子の一例を示す斜面図、第2図はIC素
子を収容するトレーの一部を示す斜面図、第3図は一実
施例の概略斜面図、第4図は把持式トレー間欠送り手段
の断面図、第5図はトレーマガジン載置部の断面図、第
6図は把持式トレー間欠送り手段の正面図、第7図はI
C素子取出し手段およびIC素子給送手段の側面図、第
8図はIC素子吸着ノーズの断面図、第9図はIC素子
取出し手段の側面図、第10図は第9図一部の横断面図
、第11図はIC素子給送手段終端部の平面図、第1−
2図、第13図は第11図の吸着ヘッドを含むそれぞれ
異なった角度での断面図である。 1・・・IC素子、2・・・トレー、(3・・・テスタ
ー、5・・・ターンテーブル、7・・・IC素子ホルダ
ー、8・・・IC素子吸着ヘッド、12・・・IC素子
自動供給部)4・・・検査作業手段、(26・・・トレ
ー引き入れ部材、28・・・上置ローラ゛対)13・・
・把持式トレー間欠送り手段、(14・・・IC素子吸
着ノーズ、35・・・上下動基台、38・・・保持枠、
40・・・ホルダー、41・・・リンク、43・・・流
体圧シリンダー、45・・・ラック、46・・・ピニオ
ン)15・・・IC素子取出し手段、(16・・・コン
ベヤ、17・・・仕切部、16a・・・受載部、18・
・・位置決め部、50・・・上下スライダ、51・・・
クランク機構、52・・・溝型本体、54・・・位置決
めピン、58・・・吸気小孔、59・・・噴気小孔)1
9・・・IC素子給送手段、8・・・IC素子吸着ヘッ
ド、55・・・凹状マウス、57・・・位置決めピン。 第12図 第13図
FIG. 1 is a perspective view showing an example of an IC element, FIG. 2 is a perspective view showing a part of a tray that accommodates an IC device, FIG. 3 is a schematic perspective view of one embodiment, and FIG. 4 is a gripping type tray. 5 is a sectional view of the tray magazine mounting section, FIG. 6 is a front view of the grip type tray intermittent feeding means, and FIG. 7 is a sectional view of the intermittent feeding means.
A side view of the C element extraction means and IC element feeding means, FIG. 8 is a sectional view of the IC element suction nose, FIG. 9 is a side view of the IC element extraction means, and FIG. 10 is a cross section of a part of FIG. 9. Figure 11 is a plan view of the terminal end of the IC element feeding means, and Figure 1-
2 and 13 are cross-sectional views of the suction head shown in FIG. 11 taken at different angles. DESCRIPTION OF SYMBOLS 1...IC element, 2...Tray, (3...Tester, 5...Turntable, 7...IC element holder, 8...IC element suction head, 12...IC element automatic supply unit) 4... inspection work means, (26... tray pull-in member, 28... upper roller pair) 13...
・Gripping type tray intermittent feeding means, (14... IC element adsorption nose, 35... vertically movable base, 38... holding frame,
40... Holder, 41... Link, 43... Fluid pressure cylinder, 45... Rack, 46... Pinion) 15... IC element extraction means, (16... Conveyor, 17... ... Partition section, 16a... Receiving section, 18.
...Positioning section, 50...Vertical slider, 51...
Crank mechanism, 52... Groove body, 54... Positioning pin, 58... Intake small hole, 59... Fumarole small hole) 1
9... IC element feeding means, 8... IC element suction head, 55... concave mouse, 57... positioning pin. Figure 12 Figure 13

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)多数のIC素子を整列状態で出し入れ自在に収容
しているトレーを1枚ずつ導入して把持し、収容IC素
子を単位列ずつ取出し位置へ順次送り出して位置決めす
るよう前記トレーを間欠送りするトレー間欠送り手段と
、 取出し位置に達する単位列の各IC素子にそれぞれが対
応するようピッチ設定可能とされたIC素子吸着ノーズ
部材を有し、トレー内の取出し位置にあるIC素子を吸
着して取出しそのままの配列状態で所望位置へ持ち運ん
で解放するIC素子取出し手段と、 IC素子取出し手段から解放されるIC素子を各受載部
に受は入れ、検査作業手段によるIC素子吸着受取用の
位置決め部へ順次間欠的に送り付けるIC素子給送手段
と 前記IC素子吸着用の位置決め部へ送り込まれたIC素
子をテスターに持ち運ぶために、検査作業手段に設けた
IC素子吸着ヘッドとを備えたことを特徴とするIC素
子の検査装置。
(1) Introducing and grasping a tray containing a large number of IC devices arranged in an array so that they can be freely taken out and taken out one by one, and intermittently feeding the tray so that the stored IC devices are sequentially sent out unit row by unit to the take-out position and positioned. and an IC element suction nose member whose pitch can be set so as to correspond to each IC element in a unit row that reaches the ejection position, and the IC element suction nose member that adsorbs the IC elements at the ejection position in the tray. IC element extraction means that takes out the IC elements and carries them to a desired position in the same arrangement as they are and releases them; and IC elements that are released from the IC element extraction means are received in each receiving part, and the IC elements are picked up and received by the inspection work means. The present invention includes an IC element feeding means for sequentially and intermittently feeding the IC elements to the positioning part, and an IC element suction head provided on the inspection work means for carrying the IC elements fed to the positioning part for IC element suction to the tester. An IC device inspection device characterized by:
(2)  IC素子吸着受取用の位置決め部は、該位置
決め部の底部に吸気小孔と、噴気小孔とが開設“  さ
れ、同位置決め部に給送されるIC素子を軽く振動させ
て、IC素子吸着受取用ヘッドの凹状マウスに吸引嵌合
され易くしである実用新案登録請求の範囲第(1)項記
載のIC素子の検査装置。
(2) The positioning part for suctioning and receiving IC elements has a small intake hole and a small blowhole at the bottom of the positioning part, and the IC element being fed to the positioning part is lightly vibrated, and the IC element is The IC device testing device according to claim 1, which is a comb that is easily suction-fitted into a concave mouth of a device suction/receiving head.
(3)  IC素子吸着ヘッドは、間欠駆動されるター
ンテーブル外周部の円周上等配位置に、支柱が上下動自
在に嵌挿されたIC素子ホルダーに設けられると共に、
ターンテーブルとの間に働かせた流体圧シリンダーの作
動によって上下動され、しかも該IC素子吸着ヘッドの
IC素子吸着用凹状マウスの両側には保合孔を形成し、
この係合孔に、前記IC素子吸着用の位置決め部の両側
に立設した位置決めピンを嵌挿することにより、前記凹
状マウスがその位置に位置決めされているIC素子に正
しく対向するようにしである実用新案登録請求の範囲第
(1)項または第(2)項記載のIC素子の検査装置。
(3) The IC element suction head is installed in an IC element holder in which struts are vertically movably fitted at equidistant positions on the circumference of the outer periphery of the turntable, which is intermittently driven;
The IC element suction head is moved up and down by the operation of a fluid pressure cylinder applied between it and the turntable, and retaining holes are formed on both sides of the concave mouth for IC element suction of the IC element suction head.
By inserting positioning pins erected on both sides of the positioning part for attracting the IC element into this engagement hole, the concave mouse can correctly face the IC element positioned at that position. An IC device testing device according to claim 1 or 2 of the utility model registration claim.
JP715083U 1983-01-20 1983-01-20 IC device inspection equipment Pending JPS59112942U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP715083U JPS59112942U (en) 1983-01-20 1983-01-20 IC device inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP715083U JPS59112942U (en) 1983-01-20 1983-01-20 IC device inspection equipment

Publications (1)

Publication Number Publication Date
JPS59112942U true JPS59112942U (en) 1984-07-30

Family

ID=30138683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP715083U Pending JPS59112942U (en) 1983-01-20 1983-01-20 IC device inspection equipment

Country Status (1)

Country Link
JP (1) JPS59112942U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0388176U (en) * 1989-12-25 1991-09-09

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512524U (en) * 1974-06-24 1976-01-09
JPS5314575A (en) * 1976-07-26 1978-02-09 Hitachi Ltd Vacuum pincette
JPS56116644A (en) * 1980-02-20 1981-09-12 Hitachi Ltd Manufacture device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512524U (en) * 1974-06-24 1976-01-09
JPS5314575A (en) * 1976-07-26 1978-02-09 Hitachi Ltd Vacuum pincette
JPS56116644A (en) * 1980-02-20 1981-09-12 Hitachi Ltd Manufacture device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0388176U (en) * 1989-12-25 1991-09-09

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