JPS56116644A - Manufacture device - Google Patents
Manufacture deviceInfo
- Publication number
- JPS56116644A JPS56116644A JP1899580A JP1899580A JPS56116644A JP S56116644 A JPS56116644 A JP S56116644A JP 1899580 A JP1899580 A JP 1899580A JP 1899580 A JP1899580 A JP 1899580A JP S56116644 A JPS56116644 A JP S56116644A
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- chute
- works
- gate
- work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Abstract
PURPOSE:To reduce manhour and increase number of operating units per head, with respect to devices for manufacturing of semiconductor devices, etc. in such a manner as to put them into magazines, by transferring used empty magazines to unloader automatically. CONSTITUTION:Works 2 are sent over to a chute 22 from a work-sending gate 18 of a loader 1 one by one, provided with marking 4, made to slide on the chute 22 and received in an empty magazine of an unloader 5. When all the works have been sent out from a magazine 3, a rack 8 moves by one pitch to set a new magazine 3 onto the gate 18, and a used magazine 38 reaches a gate 19 and slides on a chute 24 and are carried by conveyors 36 and 37 to a stopper 39 and then conveyed by a conveying table 28 over to the work-receiving position. Works remaining in the used magazine 38 are removed by a machanism 7. A magazine 3 which is filled with works is put into a box at a position 40 by a receiving table 28 and a chute 41.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1899580A JPS56116644A (en) | 1980-02-20 | 1980-02-20 | Manufacture device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1899580A JPS56116644A (en) | 1980-02-20 | 1980-02-20 | Manufacture device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56116644A true JPS56116644A (en) | 1981-09-12 |
JPS6257104B2 JPS6257104B2 (en) | 1987-11-30 |
Family
ID=11987138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1899580A Granted JPS56116644A (en) | 1980-02-20 | 1980-02-20 | Manufacture device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56116644A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4443927A (en) * | 1981-11-23 | 1984-04-24 | Cargill Detroit Corp. | Sucker rod machining system |
JPS59112942U (en) * | 1983-01-20 | 1984-07-30 | 丸豊精工株式会社 | IC device inspection equipment |
JPS6068645U (en) * | 1983-10-17 | 1985-05-15 | 株式会社アドバンテスト | IC test equipment |
JPS611097A (en) * | 1984-06-14 | 1986-01-07 | 日立電子エンジニアリング株式会社 | Automatic magazine supplying device |
JPS61188332A (en) * | 1985-02-13 | 1986-08-22 | Hitachi Electronics Eng Co Ltd | Conveyor for electronic parts |
JPS63318757A (en) * | 1987-06-22 | 1988-12-27 | Nec Corp | Device for manufacturing semiconductor |
-
1980
- 1980-02-20 JP JP1899580A patent/JPS56116644A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4443927A (en) * | 1981-11-23 | 1984-04-24 | Cargill Detroit Corp. | Sucker rod machining system |
JPS59112942U (en) * | 1983-01-20 | 1984-07-30 | 丸豊精工株式会社 | IC device inspection equipment |
JPS6068645U (en) * | 1983-10-17 | 1985-05-15 | 株式会社アドバンテスト | IC test equipment |
JPH0238453Y2 (en) * | 1983-10-17 | 1990-10-17 | ||
JPS611097A (en) * | 1984-06-14 | 1986-01-07 | 日立電子エンジニアリング株式会社 | Automatic magazine supplying device |
JPS61188332A (en) * | 1985-02-13 | 1986-08-22 | Hitachi Electronics Eng Co Ltd | Conveyor for electronic parts |
JPH055736B2 (en) * | 1985-02-13 | 1993-01-25 | Hitachi Denshi Enjiniaringu Kk | |
JPS63318757A (en) * | 1987-06-22 | 1988-12-27 | Nec Corp | Device for manufacturing semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS6257104B2 (en) | 1987-11-30 |
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