JPS59111032A - Washer type pressure sensor - Google Patents

Washer type pressure sensor

Info

Publication number
JPS59111032A
JPS59111032A JP22280782A JP22280782A JPS59111032A JP S59111032 A JPS59111032 A JP S59111032A JP 22280782 A JP22280782 A JP 22280782A JP 22280782 A JP22280782 A JP 22280782A JP S59111032 A JPS59111032 A JP S59111032A
Authority
JP
Japan
Prior art keywords
pressure
gap
pressure sensor
piezoelectric element
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22280782A
Other languages
Japanese (ja)
Inventor
Kiyoshi Takeuchi
潔 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP22280782A priority Critical patent/JPS59111032A/en
Publication of JPS59111032A publication Critical patent/JPS59111032A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To enhance pressure resistance and to stabilize output, by constituting the titled pressure sensor so that pressure applied to a pressure receiving surface is mainly received by a gap holding part and a piezoelectric element receives pressure through a buffer body. CONSTITUTION:A hollow outer shell is formed by gap holding parts 13, 14 for holding the predetermined gap between an upper and a lower pressure receiving parts 11, 12 and an internal electrode plate 15 and piezoelectric elements 16, 17 are laminated in this gap in a closely contacted state. A bellows shaped spring 18 is provided to the under surface of the piezoelectric element 17 through a ring shaped spacer 19 made of a good conductive material such as copper. For example, when the pressure sensor constituted as mentioned above is interposed to the clamp part of the head bolt of an engine, the greater part of clamping torque is added to the above mentioned gap holding parts 13, 14 while pressure to the piezoelectric elements 16, 17 is buffered by the spring 18 and, therefore, a possibility such that the characteristics of the piezoelectric elements 16, 17 are attenuated or said elements are damaged is eliminated.

Description

【発明の詳細な説明】 この発明は、耐圧性を向上させるための改良を施したワ
ッシャ型圧力センサに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a washer-type pressure sensor that has been improved to improve pressure resistance.

機械的圧力を受圧して、この受圧力を電気信号として出
力する圧力センサには、単に平板上に形成されたものの
他に、例えば第1図に示すようなワッシャ型の圧力セン
サ1がある。
Pressure sensors that receive mechanical pressure and output the received pressure as an electrical signal include those formed simply on a flat plate, as well as a washer-type pressure sensor 1 as shown in FIG. 1, for example.

このワッシャ型圧力センサ1は、例えば第2図に示す如
く、自動車のエンジンのシリンダ部2において、シリン
ダヘッド3をシリンダブロック4へ取り付けるためのヘ
ッドボルト5の締付部に、通常のワッシャと同様にして
締付固定され、ガスの燃焼に伴って生じる締付圧力の変
化を検出することによって気筒内圧力を計測するのに用
いられる。
For example, as shown in FIG. 2, this washer-type pressure sensor 1 is attached to a tightening part of a head bolt 5 for attaching a cylinder head 3 to a cylinder block 4 in a cylinder part 2 of an automobile engine, similar to a normal washer. It is used to measure the cylinder pressure by detecting the change in the tightening pressure that occurs as the gas burns.

従来のワッシャ型圧力センサ1の構造は、第3図に示す
ように、外周の一部に引出し端子(第1図6で示t)が
突設されたリング状金属板性の内部電極7と、この内部
電極7の両面に密着m層されたリング状の圧電体8と、
この圧電体8の上面に、上記内部電極7に対向して積層
されたリング状の金属製受圧板9とから構成され、更に
、上記積層構造のリング状の内外周を絶縁性保護部材1
0によってモールドして全体をワッシャ型に一体成形す
るとともに、上記内部電極7と受圧部9とが絶縁されて
なるものである。
As shown in FIG. 3, the structure of the conventional washer-type pressure sensor 1 includes an internal electrode 7 made of a ring-shaped metal plate with a lead terminal (t shown in FIG. 1 6) protruding from a part of the outer periphery. , a ring-shaped piezoelectric body 8 which is closely adhered to m layers on both sides of this internal electrode 7;
A ring-shaped metal pressure-receiving plate 9 is laminated on the upper surface of the piezoelectric body 8 facing the internal electrode 7, and an insulating protection member 1 covers the inner and outer peripheries of the ring-shaped laminated structure.
The internal electrode 7 and the pressure receiving part 9 are insulated.

また、前記ヘッドボルト5の締付部における台座やボル
トの表面と圧力センサ1の表面との密着性を高めるため
に、前記受圧板9には銅等の軟質可撓性金属が用いられ
ている。
Further, in order to improve the adhesion between the surface of the pedestal or bolt at the tightening part of the head bolt 5 and the surface of the pressure sensor 1, the pressure receiving plate 9 is made of a soft flexible metal such as copper. .

そして、上記圧力センサ1を前述のように、エンジンの
ヘッドボルト5の締付部に介在させて用いる場合には、
その締付トルクは7〜10Kgmと比較的大きなトルク
で締付けられることによって、受圧板9は締付部の台座
やボルトの表面の粗磨に対応して塑性変形されて、締付
部に密着し、接触面の抵抗を小さくして検出精度を高め
るようにしている。
When the pressure sensor 1 is used by being interposed in the tightening part of the head bolt 5 of the engine as described above,
By tightening with a relatively large tightening torque of 7 to 10 kgm, the pressure receiving plate 9 is plastically deformed in accordance with the rough polishing of the pedestal of the tightening part and the surface of the bolt, and comes into close contact with the tightening part. , the resistance of the contact surface is reduced to improve detection accuracy.

ところが、上記のような圧力センサ1にあっては、単に
金属板または電極板で圧電体を密着挟持しただけの構造
となっているため、受圧面(受圧、板9表面)に加わっ
た圧力は、その殆どが圧電体8へ加えられることとなり
、上記のヘッドボルト5の締付トルクのように比較的大
きな圧力が加わった場合には、圧電特性が減衰して、正
確な圧力検出がCきなくなったり、圧電体が破損してし
まう虞れがある。
However, since the pressure sensor 1 described above has a structure in which a piezoelectric body is simply tightly held between metal plates or electrode plates, the pressure applied to the pressure receiving surface (pressure receiving surface, plate 9 surface) is , most of it is applied to the piezoelectric body 8, and when a relatively large pressure is applied, such as the tightening torque of the head bolt 5 mentioned above, the piezoelectric characteristics are attenuated and accurate pressure detection becomes impossible. There is a risk that the piezoelectric body may be damaged.

この発明は上記の事情に鑑みてなされたもので、一対の
リング状受圧部を、比較的剛性を有する間隙保持部によ
って、所定の間隙を隔てて対向配置し、前記間隙中に前
記間隙保持部に比較して弾性変形の大きい素材で形成さ
れた緩衝体を介して圧電素子を介在させ、この圧電素子
に接触する電極板を設けたことにより、被検物体からの
バイアス圧力を主に前記間隙保持部で受圧するとともに
、被検物体からの圧力変動分が前記緩衝体を介して圧電
素子へ加えられるようにして、受圧面に比較的大きな圧
力が加えられた際にも、圧電体が破損することがなく、
かつ安定した出力を得ることのできるワッシャ型圧力セ
ンサを提供することを目的とする。
The present invention has been made in view of the above-mentioned circumstances, and includes a pair of ring-shaped pressure-receiving parts that are arranged opposite to each other with a predetermined gap between them by a relatively rigid gap-holding part. By interposing a piezoelectric element through a buffer made of a material that has a large elastic deformation compared to the above, and providing an electrode plate in contact with this piezoelectric element, the bias pressure from the object to be measured is mainly applied to the gap. In addition to receiving pressure at the holding part, pressure fluctuations from the test object are applied to the piezoelectric element via the buffer, so that even when a relatively large pressure is applied to the pressure-receiving surface, the piezoelectric element is not damaged. There's nothing to do,
It is an object of the present invention to provide a washer type pressure sensor that can also provide a stable output.

以下この発明の実施例を第4図以下の図面を用いて詳細
に説明する。
Embodiments of the present invention will be described in detail below with reference to FIG. 4 and subsequent drawings.

第4図は、本発明に係るワッシャ型圧力センサの第1の
実施例の構造を示す断面図であり、その外観は第1図で
示した従来のものと同様に全体がリング状に形成されて
いるものである。
FIG. 4 is a sectional view showing the structure of the first embodiment of the washer type pressure sensor according to the present invention, and its appearance is similar to the conventional one shown in FIG. It is something that

同図に示す圧力センサは、上下に対向配置され、同径の
リング状に形成された一対の金属製受圧部11.12と
、前記上側の受圧部11の内周縁および外周縁から一体
に延設されるとともに、上記下側の受圧部12の上面に
溶接されて、上下の受圧部11.12間に所定の間隙を
保持する間隙保持部14.15とによって、中空の外殻
が形成されている。
The pressure sensor shown in the figure has a pair of ring-shaped metal pressure receiving parts 11 and 12 arranged vertically opposite each other and having the same diameter, and extending integrally from the inner and outer peripheral edges of the upper pressure receiving part 11. A hollow outer shell is formed by a gap holding part 14.15 which is welded to the upper surface of the lower pressure receiving part 12 and maintains a predetermined gap between the upper and lower pressure receiving parts 11.12. ing.

上記一対の間隙保持部14.15は、共に鋼鉄等の比較
的剛性を有する金属からなり、上記受圧部11.12と
同心円のリング状に形成されている。
The pair of gap holding parts 14.15 are both made of relatively rigid metal such as steel, and are formed in a ring shape concentric with the pressure receiving part 11.12.

そして、上記一対の受圧部間の間隙には、受圧部と同心
円のリング状に形成された内部電極板15が介挿されて
おり、この内部電極板15の両面には、これと同径のリ
ング状圧電素子16.17が密着積層されている。
An internal electrode plate 15 formed in a ring shape concentric with the pressure receiving part is inserted into the gap between the pair of pressure receiving parts. Ring-shaped piezoelectric elements 16 and 17 are closely stacked.

上記圧電素子16.17は、例えばPZT (商品名)
等の圧電セラミクスであり、内部電極板15との接触面
に同極の電荷が生じるように両者の分極方向は対向させ
てあって、内部電極板15を介して圧電素子の起電ノj
を外部へ導出している。
The piezoelectric elements 16 and 17 are made of, for example, PZT (trade name).
These piezoelectric ceramics are made of piezoelectric ceramics such as, and the polarization directions of the two are opposed so that charges of the same polarity are generated on the contact surface with the internal electrode plate 15, and the electromotive force of the piezoelectric element is
is extracted to the outside.

また、上記圧電素子17の下面には銅等の良導体製のリ
ング状スペーサ19を介して、蛇腹状のバネ18が設番
プられており、このバネ18は下側受圧部12とスペー
サ19との間に圧縮挟持されることによって、上記スペ
ーサ19と圧電素子16.17および内部電極板15を
上方へ押圧して、圧電素子16の上面を上側受圧部11
の内面に圧接させている。
Further, a bellows-shaped spring 18 is installed on the lower surface of the piezoelectric element 17 via a ring-shaped spacer 19 made of a good conductor such as copper. By being compressed and held between the spacer 19, the piezoelectric elements 16 and 17, and the internal electrode plate 15 are pressed upward, and the upper surface of the piezoelectric element 16 is pressed against the upper pressure receiving part 11.
It is pressed against the inner surface of the

従って、上記圧電素子16の上面側に発生する電荷は上
側受圧部11を介して導出され、圧電素子17の下面側
に発生する電荷はスペーサ19゜バネ18を通って下側
受圧部12を介して導出されることとなる。
Therefore, the electric charge generated on the upper surface side of the piezoelectric element 16 is led out via the upper pressure receiving part 11, and the electric charge generated on the lower surface side of the piezoelectric element 17 is led out via the lower pressure receiving part 12 through the spacer 19° spring 18. It will be derived as follows.

更に、上記内部電極板15と圧電素子16,17の内周
側と、間隙保持部14との間には、圧電素子16.17
の両極間の短絡を防止するために絶縁リング20が介挿
されている。
Furthermore, piezoelectric elements 16 and 17 are disposed between the internal electrode plate 15, the inner peripheral side of the piezoelectric elements 16 and 17, and the gap holding part 14.
An insulating ring 20 is inserted to prevent short circuit between the two poles.

上記の如く構成されたワッシャ型圧力センサにあっては
、iえば前記エンジンのヘッドボルト5の締付部に介在
させた場合に、ヘッドボルト5の締(t l−ルクの大
部分は、上記間隙保持部13,14に加わり、圧電素子
16.17にはバネ19によって圧力が緩衝されるため
、圧電素子16,17の特性が減衰したり、破損したり
する虞れがなくなる。
In the washer-type pressure sensor configured as described above, for example, when it is interposed in the tightening part of the head bolt 5 of the engine, most of the tightening torque of the head bolt 5 is In addition to the gap holding parts 13 and 14, the pressure on the piezoelectric elements 16 and 17 is buffered by the spring 19, so there is no risk that the characteristics of the piezoelectric elements 16 and 17 will be attenuated or that they will be damaged.

次に第5図は、本発明の第2の実施例を示す断面図であ
る。
Next, FIG. 5 is a sectional view showing a second embodiment of the present invention.

同図に示すワッシャ型圧力センサは、前記第4図で示し
た第1実施例のものにおけるバネ18とスペーサ19に
代えて、リング状のアルミニウム製スペーサ21を、圧
電索子17と下側受圧部12との間に嵌挿してなるもの
であり、上記スペーサ21の厚さは、圧電素子16の上
面を上側受圧部11下面に圧接できる厚さに形成されて
いる。
The washer type pressure sensor shown in the figure has a ring-shaped aluminum spacer 21 in place of the spring 18 and spacer 19 in the first embodiment shown in FIG. The spacer 21 is formed to have a thickness such that the upper surface of the piezoelectric element 16 can be pressed against the lower surface of the upper pressure receiving section 11.

上記スペーサ21を形成しているアルミニウムのヤング
率Eaは7X 101ON/Ill 2テあり、これに
対して、間隙保持部13.14を形成している鋼鉄のヤ
ング率ESは21X10”N/m2であるため、スペー
サ21は間隙保持部13.14に対して弾性変形し易く
、第1実施例のバネ18と同様の効果を呈する。また、
第1実施例のものに比して部品点数、工数を削減するこ
とができる。
The Young's modulus Ea of the aluminum forming the spacer 21 is 7X 101ON/Ill 2, whereas the Young's modulus ES of the steel forming the gap holding part 13.14 is 21X10"N/m2. Therefore, the spacer 21 is easily deformed elastically with respect to the gap holding part 13.14, and exhibits the same effect as the spring 18 of the first embodiment.
The number of parts and man-hours can be reduced compared to those of the first embodiment.

次に第6図は、本発明の第3の実施例を示づ断面図であ
る。
Next, FIG. 6 is a sectional view showing a third embodiment of the present invention.

同図に示すワッシャ型圧力セン勺は、前記第5図で示し
た第2実施例のものにおけるアルミニウム製スペーサ2
1に代えてプラスチック製のスペーサ22を内部電極板
15と下側受圧部12との間に嵌挿してなるものであり
、上記プラスチック製スペーサ22は導電性を有しない
ため、1枚の圧電素子16で圧力変化を検出する構造と
なっている。
The washer type pressure sensor shown in the same figure is the aluminum spacer 2 in the second embodiment shown in FIG.
1, a plastic spacer 22 is inserted between the internal electrode plate 15 and the lower pressure receiving part 12, and since the plastic spacer 22 does not have conductivity, it can be used as a single piezoelectric element. The structure is such that pressure changes are detected at 16.

上記スペーサ22を形成しているプラスチックのヤング
率Epは1X10”N/m2以下であり、前記アルミニ
ウムよりも小さいため、更に圧電素子13へ加えられる
圧ツノのM’fjj効果を増大させることができる。
The Young's modulus Ep of the plastic forming the spacer 22 is 1×10”N/m2 or less, which is smaller than that of the aluminum, so that the M'fjj effect of the pressure horn applied to the piezoelectric element 13 can be further increased. .

第7図は、本発明の第4の実施例を示づ断面図であり、
同図に示すワッシャ型圧力センサは、上記各実施例にお
けるバネ19やスペーサ21.22等の緩衝部月を設け
る代りに圧電素子自体に圧力緩衝性を持たせたものであ
る。
FIG. 7 is a sectional view showing a fourth embodiment of the present invention,
The washer type pressure sensor shown in the same figure has a piezoelectric element itself which has a pressure buffering property instead of providing buffer parts such as the spring 19 and spacers 21, 22 in each of the above embodiments.

すなわち、上下の受圧部11,12の間に、内部電極を
間に挾んで上下2枚の高分子圧電素子23.24が挟持
された構造となっている。
That is, it has a structure in which two upper and lower polymer piezoelectric elements 23 and 24 are sandwiched between the upper and lower pressure receiving parts 11 and 12 with an internal electrode in between.

上記高分子圧電素子23.24は、ポリフッ化ビニリデ
ン等の純粋な高分子あるいはポリフッ化ビニリデンの中
にPZTの粉末を混合させた複合物等から形成されてお
り、何れの素材においても、そのヤング率は、前記鋼鉄
の1/100程度であるため、前記各実施例と同様の効
果を得ることができる。
The polymer piezoelectric elements 23 and 24 are made of a pure polymer such as polyvinylidene fluoride or a composite of polyvinylidene fluoride mixed with PZT powder. Since the ratio is about 1/100 of that of the steel, it is possible to obtain the same effects as in each of the above embodiments.

以上詳細に説明したように、この発明に係るワッシャ型
圧力センサにあっては、受圧面に加わった圧力を主に間
隙保持部で受圧するとともに、圧電素子は緩衝体を介し
て受圧するように構成したことにより、耐圧性をより向
上させ、かつ安定し1C出力を得ることができる。
As explained in detail above, in the washer type pressure sensor according to the present invention, the pressure applied to the pressure receiving surface is mainly received by the gap holding part, and the piezoelectric element receives the pressure via the buffer body. With this configuration, voltage resistance can be further improved and a stable 1C output can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はワッシャ型圧力センサの外観を示す斜視図、第
2図は同圧力センサを気筒内圧力の検出に応用した例を
示す断面図、第3図は従来のワッシャ型圧力センサの構
造を示す断面図、第4図は本発明に係るワッシャ型圧力
センサの第1の実施例を示す断面図、第5図は本発明の
第2の実施例を示1断面図、第6図は本発明の第3の実
施例を示す断面図、第7図は本発明の第4の実施例を示
す断面図である。
Figure 1 is a perspective view showing the external appearance of a washer type pressure sensor, Figure 2 is a sectional view showing an example of applying the same pressure sensor to detect pressure inside a cylinder, and Figure 3 is a diagram showing the structure of a conventional washer type pressure sensor. 4 is a sectional view showing a first embodiment of the washer type pressure sensor according to the present invention, FIG. 5 is a sectional view showing a second embodiment of the present invention, and FIG. FIG. 7 is a sectional view showing a third embodiment of the invention, and FIG. 7 is a sectional view showing a fourth embodiment of the invention.

Claims (1)

【特許請求の範囲】[Claims] (1)上下に対向配置されて、被検物体からの圧力を受
圧する一対のリング状受圧部と;比較的剛性を有する素
材で形成され、かつ前記一対のリング状受圧部間に所定
の間隙を保持する間隙保持部と; 前記一対の受圧部間の間隙に、前記間隙保持部に比較し
て弾性変形の大きい素材で形成された緩衝体を介して介
在された圧電素子と; 前記圧電素子に接してその起電力を外部へ導出するため
の電極板とを有することを特徴とするワッシャ型圧力セ
ンサ。
(1) A pair of ring-shaped pressure-receiving parts arranged vertically opposite each other to receive pressure from a test object; formed of a relatively rigid material, and with a predetermined gap between the pair of ring-shaped pressure-receiving parts. a gap holding section that holds; a piezoelectric element interposed in the gap between the pair of pressure receiving sections via a buffer made of a material having a larger elastic deformation than the gap holding section; the piezoelectric element 1. A washer-type pressure sensor comprising: an electrode plate that is in contact with the electrode plate and that outputs the electromotive force to the outside.
JP22280782A 1982-12-17 1982-12-17 Washer type pressure sensor Pending JPS59111032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22280782A JPS59111032A (en) 1982-12-17 1982-12-17 Washer type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22280782A JPS59111032A (en) 1982-12-17 1982-12-17 Washer type pressure sensor

Publications (1)

Publication Number Publication Date
JPS59111032A true JPS59111032A (en) 1984-06-27

Family

ID=16788201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22280782A Pending JPS59111032A (en) 1982-12-17 1982-12-17 Washer type pressure sensor

Country Status (1)

Country Link
JP (1) JPS59111032A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157804A (en) * 1984-12-28 1986-07-17 Bridgestone Corp Pneumatic actuator
JP2020183943A (en) * 2019-04-29 2020-11-12 オーエムティー デジタル エス.アール.エル. High-pressure hydraulic system comprising sensor for non-invasive diagnostics

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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JP2020183943A (en) * 2019-04-29 2020-11-12 オーエムティー デジタル エス.アール.エル. High-pressure hydraulic system comprising sensor for non-invasive diagnostics

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