JPS59110951U

JPS59110951U - Electron microscope observation control device

Info

Publication number: JPS59110951U
Application number: JP444183U
Authority: JP
Inventors: 本田　敏和; 実中島; 石橋　有; 誠一郎森
Original assignee: 日本電子株式会社
Priority date: 1983-01-17
Filing date: 1983-01-17
Publication date: 1984-07-26
Also published as: JPH0228606Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は従来装置を説明す茗ための図、第２図は従来装
置における観察モードと観察倍率の切換　、えに伴なう
倍率変化を説明するためめ図、第３図は本考案の一実施
例を説明するための図、第４図は本考案に基づく装置に
おける観察モードと観察倍率の切換えに伴なう倍率変化
を説明するための図である。１：Ｌ／ンズコイル、２：励磁電源、３：記憶装置、４
：観察モード切換えスイッチ、５：観察倍率切換えスイ
ッチ、６．　９ａ、　　９ｂ：読み出し回路、７：倍率
系列設定器、８：操作卓、１−０：倍率設定器、１１：
倍率設定回路、１２：標準系列／設定系列切換え回路、
１３：標準系列／設定系列切換え器。Figure 1 is a schematic diagram to explain the conventional device, Figure 2 is a schematic diagram to explain the switching of observation mode and observation magnification in the conventional device, and the change in magnification caused by the change in observation mode, and Figure 3 is a diagram of the present invention. FIG. 4, which is a diagram for explaining one embodiment, is a diagram for explaining a change in magnification caused by switching the observation mode and observation magnification in the apparatus based on the present invention. 1: L/N coil, 2: Excitation power supply, 3: Storage device, 4
: Observation mode changeover switch, 5: Observation magnification changeover switch, 6. 9a, 9b: Readout circuit, 7: Magnification series setter, 8: Operation console, 1-0: Magnification setter, 11:
Magnification setting circuit, 12: Standard series/setting series switching circuit,
13: Standard series/setting series switch.

Claims

[Scope of utility model registration request]

An excitation current storage means for storing the excitation current value supplied to each lens coil, a first observation mode for performing observation in a standard magnification series consisting of a large number of standard magnifications, and a first observation mode for always starting from a specific magnification. observation mode switching means for selecting one of the second observation modes; observation magnification switching means for selecting an arbitrary magnification from among the observation magnifications in the selected observation mode; Based on the signals from the mode switching means and the observation magnification switching means, the excitation current value data stored in the excitation current storage means is read out and supplied to the lens power supply, and when the observation mode is switched to the first mode. readout control means for controlling the display to return to the final observation magnification at the time of the previous observation in the first mode, and to always return to the specific magnification when switching to the second mode; It has a magnification series setting means for extracting only an arbitrary observation magnification from among the standard magnifications and setting a set magnification series, and the readout control means is configured to perform readout when the first observation mode consists of the standard magnification series. a first readout control means and a second readout control means for performing readout in a set magnification series based on a signal from the magnification series setting means;
Standard series/setting series switching means for switching and connecting one of the readout control means to the storage means, and further comprising means for setting the specific magnification. Observation control device for electron microscope.