JPS5910640Y2 - Electron beam irradiation device - Google Patents

Description

[Detailed Description of the Invention] This invention relates to an electron beam irradiation device, and more particularly, to an improvement in the electron beam irradiation device so that it can irradiate objects of any width without sacrificing the performance of the electron beam irradiation device.

In electron beam irradiation equipment, the width of the irradiation window is determined according to the maximum width of the object to be irradiated, and when the width of the object becomes smaller, the degree of deflection of the deflection device is determined to make effective use of the electron beam. It is devised to reduce the scanning width of the electron beam by changing the

However, in such a case, the amount of electron beam passing through the irradiation window per unit area is limited due to heat generated by electron beam irradiation, and it is necessary to reduce the output as the electron beam scanning width decreases.

Therefore, when the width of the object to be irradiated is small, there arises the disadvantage that the performance of the accelerator tube must be sacrificed, which unnecessarily increases the irradiation cost.

On the other hand, as shown in FIG. 1, a rotary flange 4 is provided at the end of the acceleration tube section 3 that receives the DC high voltage from the high voltage power supply 1 via the cable 2, and the rotary flange 4 and the support 5 The acceleration tube section 3 is connected to the acceleration tube section 3 by a flange 6 provided on the acceleration tube section 3, and the scanner 8 and the deflection device 9, which are connected to the acceleration tube section 3 and have an irradiation window 7 at the end thereof, are rotatable around the axis of the acceleration tube section 3. A radiation irradiation device is being considered.

According to this, although the above-mentioned drawbacks can be solved, the following new problems arise.

In other words, since the cable 2 that electrically connects the high voltage power supply and the acceleration tube is generally placed in the atmosphere, a thick OF cable or the like is used to ensure insulation. If the cable 2 is rotated around the center, the cable 2 will be twisted due to this rotation, and repeated rotations will cause unnecessary twisting force to be applied to the connection between the cable 2 and the acceleration tube section 3, causing insulation deterioration in this area. becomes.

Furthermore, since the accelerating tube section 3 supported by the rotating flange 4 is also in the atmosphere, its insulation structure must be large-scale, and therefore the rotating mechanism of the rotating flange 4, support body 5, etc. must also be large. As a result, this type of device inevitably becomes large in size, and there are drawbacks such as difficulty in manufacturing large-sized devices with high voltage or large capacity.

This idea does not generate unnecessary twisting force on the cable 2 in the atmosphere, and it simplifies the rotation mechanism so that it can be easily applied to large-sized electron beam irradiation equipment.

Hereinafter, one embodiment shown in FIG. 2 will be described.

In the figure, 11 is a high voltage power supply, 12 is an insulated cable having, for example, an OF structure, and 13 is an insulated container fixed to a support frame 14.

This insulating container 13 is filled with an insulating gas such as SF6 gas, and an accelerating tube 15 is provided.

A support flange 16 is attached to the bottom of the insulating container 13 via a bearing 17, and the support flange 16 and bearing 17 form a rotating mechanism 18.
It has a gas seal.

19 is a deflection device, 20 is a vacuum pump, and 21 is a scanner having an irradiation window 22 at its end.

The acceleration tube 15, vacuum pump 20, and scanner 21 are configured to rotate integrally around the beam axis of the acceleration tube 15.

23 is an insulator, and 24 is a connection line. In the apparatus configured in this way, if the width W1 of the object 25 is almost the same as the width of the irradiation window 22, the irradiation window 22 is moved in the moving direction of the object 25, for example, to the left in FIG. They are arranged perpendicularly to the direction of movement from to the right, that is, in a positional relationship as shown by the solid line in FIG.

Next, when the width of the object 25 becomes smaller and becomes W2, the acceleration tube 15 and the vacuum pump 20 connected thereto,
The scanner 21 is rotated about the axis of the acceleration tube 15 by an angle θ that satisfies the relationship θ=COS (B is the width of the irradiation window 22) by the -IW2 rotation mechanism 18.

After rotation, the object 25 is irradiated by deflection scanning over the entire width of the irradiation window 22 in the same manner as described above.

According to this invention, the accelerating tube 15 that receives the high voltage power supply is housed in the insulating container 13, and the accelerating tube 15 is rotated together with the scanner 21 and the like around the beam axis. No rotational force acts on the insulated cable 12 connected to the acceleration tube 15, and no torsional force is applied thereto.

Furthermore, the potential difference between the insulator 23 and the accelerating tube 15 is several volts.
Also, since the current that flows is about several amperes, there is no practical problem with repeated rotations at the rotation angle θ as long as the connecting wire 24 is thin and flexible enough to withstand rotation.

In this way, unnecessary torsional force or the like is not applied to the high voltage insulating portion, so this portion is not damaged and insulation deterioration can be prevented.

Furthermore, since the insulating container 13 is filled with insulating gas,
The insulation structure can be made smaller.

Therefore, the rotation mechanism 18 can also be small and simple, so
Even if the device becomes large in size with a large capacity, it is possible to easily manufacture this type of device that is rotatable.

[Brief explanation of drawings]

FIG. 1 is a partially sectional front view of a conventional device, FIG. 2 is a partially sectional front view showing an embodiment of the device according to the invention, and FIG. 3 is an explanatory diagram of the operation of the device. 11... High voltage power supply, 13... Insulating container, 15...
・Acceleration tube, 18...Rotation mechanism.

Claims (1)

[Scope of utility model registration request] The accelerator tube is installed in an insulating container filled with insulating gas via a rotating mechanism with a gas seal, and an insulated cable for supplying DC high voltage from a high voltage power source to the accelerating tube is connected to the insulating container. It is supported by an insulator attached to the insulator, and a high DC voltage is supplied from the insulator to the acceleration tube through a connecting wire,
An electron beam irradiation device characterized in that the acceleration tube is rotatable around its beam axis.