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Application filed by 横河電機株式会社filedCritical横河電機株式会社
Priority to JP1976028558UpriorityCriticalpatent/JPS5910591Y2/ja
Publication of JPS52120880UpublicationCriticalpatent/JPS52120880U/ja
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Publication of JPS5910591Y2publicationCriticalpatent/JPS5910591Y2/ja