JPS5899133A - Burner for production of base material for optical fiber - Google Patents

Burner for production of base material for optical fiber

Info

Publication number
JPS5899133A
JPS5899133A JP19676881A JP19676881A JPS5899133A JP S5899133 A JPS5899133 A JP S5899133A JP 19676881 A JP19676881 A JP 19676881A JP 19676881 A JP19676881 A JP 19676881A JP S5899133 A JPS5899133 A JP S5899133A
Authority
JP
Japan
Prior art keywords
burner
base material
optical fiber
pipe
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19676881A
Other languages
Japanese (ja)
Inventor
Katsuyuki Imoto
克之 井本
Tsutomu Yabuki
矢吹 勉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Hitachi Ltd
Original Assignee
Hitachi Cable Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd, Hitachi Ltd filed Critical Hitachi Cable Ltd
Priority to JP19676881A priority Critical patent/JPS5899133A/en
Publication of JPS5899133A publication Critical patent/JPS5899133A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/06Concentric circular ports
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/08Recessed or protruding ports
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/20Specific substances in specified ports, e.g. all gas flows specified
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/42Assembly details; Material or dimensions of burner; Manifolds or supports

Abstract

PURPOSE:To obtain a base material for optical fibers which has high accuracy and is free from change in structure by constituting the preceding end parts in the outlet parts of the respective nozzles of a concentrical multitubular burner with quartz glass and forming the remaining parts by metals. CONSTITUTION:In the respective burners of concentrical multitubes for production of optical fibers using quartz glass, an inside pipe 21 which feeds glass raw materials with Ar as a carrier gas and the outermost pipe 24 which feeds O2 do not suffer damage by heat and therefore these pipes are manufactured with stainless steel pipe, etc. The parts 22'', 23'' of a pipe 22' for feeding gaseous Ar and a pipe 23' for feeding H2 which suffer damage by heat are manufactured of quartz glass and are connected to the preceding end parts of the pipes 22', 23'. The base material for optical fibers is manufactured roughly under the same conditions by such burner construction, and the yield of production of the base material for optical fibers having high quality is improved.

Description

【発明の詳細な説明】 本発明は光フアイバ母材製造用バーナ、すなわちガラス
原料、HtOlOt、不活性ガス等を別々に、あるいは
少なくとも一種を混合状態にして石英ガラス製の同心状
多重管バーナの各ノズル内にガスを導入し、ノズル出口
部からガラス微粒子を含んだ火炎を発生させるバーナな
構造に係る。
DETAILED DESCRIPTION OF THE INVENTION The present invention is a burner for producing an optical fiber base material, that is, a concentric multi-tube burner made of quartz glass in which glass raw materials, HtOlOt, inert gas, etc. are used separately or at least in a mixed state. It has a burner structure that introduces gas into each nozzle and generates a flame containing glass particles from the nozzle outlet.

従来の光フアイバ母材の製造方法の一つとして第1図に
示すような方法がある。これは火炎加水分解バーナ1で
ガラス微粒子を含んだ火炎5を発生させ、これを矢印8
方向に回転しながら矢印7方向へ移動する出発材4に吹
付けてロンド状の多孔質ガラス母材2を成長させる。そ
の後、加熱源3で焼結して透明な光7アイパ母材14に
する方法である。この方法は、長尺、大口径、かつ広帯
域で低損失の光7アイパが容易に得られるという特徴を
有しているが、その製造歩留りは悪い。特に伝送帯域と
コア径のバラツキが大きい。仁の原因を究明するため本
発明者は種々実験的検討を行った結果、次のような問題
点を見いだした。
One of the conventional methods for manufacturing an optical fiber base material is the method shown in FIG. In this process, a flame 5 containing glass particles is generated by a flame hydrolysis burner 1, and the flame 5 is
A rond-shaped porous glass base material 2 is grown by spraying the starting material 4 moving in the direction of the arrow 7 while rotating in the direction of the arrow 7. Thereafter, the material is sintered using a heat source 3 to form a transparent optical fiber base material 14. Although this method has the feature that a long, large-diameter, broadband, and low-loss optical 7-eyeper can be easily obtained, its manufacturing yield is poor. In particular, there are large variations in transmission band and core diameter. The present inventor conducted various experimental studies to investigate the cause of jin, and as a result, discovered the following problems.

(1)火炎加水分解バーナ1は、第2図(a)に示すご
とく同心4重管構造をしており、バーナノズル出口部で
ガラス原料、A ’ % Ht 、O*を混合して燃焼
させるようになっている。ところがこのバーナを長時間
使用していると、Htノズル、Arノズル出口部にガラ
ス微粒子が付着し、酸水素炎によって損焼してノズルの
高さ、形状が徐々に変形してくる。そして第2図(b)
のように初期の形状から大幅に変形してしまう。(b)
の場合は光フアイバ母材を約30本作成した段階の形状
である。このようにバーナの形状が徐々に変形してくる
と同一特性の光7アイノく母材を得ることが極めて困難
であることがわかった。
(1) The flame hydrolysis burner 1 has a concentric quadruple tube structure as shown in Fig. 2(a), and is designed to mix and burn glass raw materials, A'% Ht, and O* at the burner nozzle outlet. It has become. However, if this burner is used for a long time, glass particles will adhere to the Ht nozzle and Ar nozzle exits, which will be damaged by the oxyhydrogen flame and the height and shape of the nozzles will gradually change. And Figure 2(b)
The shape changes significantly from its initial shape. (b)
In the case of , the shape is at the stage where about 30 optical fiber base materials have been created. It has been found that it is extremely difficult to obtain a base material with the same characteristics when the shape of the burner gradually deforms in this way.

(2)バーナIFi石英ガラス管を用い、熟練した職人
により手細工で作成されるが、数10μm以下の精度で
同一のものを作ることは極めてむずかしい。したがって
、バーナによる光ファイノ(母材の特性バラツキも極め
て大きいことがわかった。
(2) Burner IFi is made by hand by skilled craftsmen using a quartz glass tube, but it is extremely difficult to make identical pieces with an accuracy of several tens of μm or less. Therefore, it was found that the variation in properties of the optical fiber (base material) due to the burner was extremely large.

(3)バーナのコストは高いために、光フアイバ母材を
20〜30本作るごとに取りかえると高価になり、経済
的でない。しかも、変形し九ツク−すは構造が複雑で溶
着個所も多いため、修理が不可能である。
(3) Since the cost of the burner is high, it is expensive and uneconomical to replace the optical fiber base material every 20 to 30 pieces. Moreover, the deformed nine-piece has a complicated structure and many welded parts, making it impossible to repair.

以上のように、従来法ではバーナの構造の時々刻々の変
化による光フアイバ母材特性のノ(ラツキが大きく、ま
た石英ガラス管で作成されているために、数10μm以
下の精度で同一構造のものを再現することが不可能であ
り、各バーナ間での光7アイバ母材の特性バラツキtあ
る。さらに、)(て、長期にわたって形状変形が少なく
、かつ、再現性よく作れる構造であり、低コストのバー
ナが望まれる。
As described above, in the conventional method, the characteristics of the optical fiber base material vary greatly due to momentary changes in the structure of the burner, and since it is made of quartz glass tube, it is possible to reproduce the same structure with an accuracy of several tens of μm or less. It is impossible to reproduce the same, and there are variations in the characteristics of the optical fiber base material between each burner.Furthermore, it has a structure that has little shape deformation over a long period of time and can be manufactured with good reproducibility. A low cost burner is desired.

したがって、本発明の目的は、高精度で同一構造のもの
が再現でき、かつ使用によって構造上の変化の少ない、
光7アイパ母材製造用バーナを提供することである。
Therefore, an object of the present invention is to reproduce the same structure with high precision, and to minimize structural changes due to use.
It is an object of the present invention to provide a burner for manufacturing Hikari 7 Aipah base material.

本発明は上記目的を達成するため火炎加水分解バーナを
、バーナの大部分を金属(たとえばステンレス)で作り
、横規しゃ4すいH3とArのノズル出口付近のみを石
英ガラス管で作って上記金属製バーナに接続させるよう
にしたものである。バーナを金属で作ればミクロンオー
ダの精度で再現性よく作れる。H2とArノズル出口付
近のみは数(7)の長さの石英ガラス管で作るので、こ
のような短いガラス管は高精度で再現性よく作れる。し
たがって、これら2つのノズルの交換による特性バラツ
キもなくなる。本発明のバーナは上記2つの石英製ノズ
ルのみを交換するだけで長期にゎたつて使用できるので
経済的である。
In order to achieve the above object, the present invention provides a flame hydrolysis burner in which the majority of the burner is made of metal (for example, stainless steel), and only the vicinity of the horizontal nozzle H3 and Ar nozzle exits are made of quartz glass tubes. It is designed to be connected to a manufactured burner. If the burner is made of metal, it can be made with precision on the micron order and with good reproducibility. Since only the H2 and Ar nozzle exit areas are made from quartz glass tubes with a length of several (7), such short glass tubes can be made with high precision and good reproducibility. Therefore, variations in characteristics due to replacement of these two nozzles are also eliminated. The burner of the present invention is economical because it can be used for a long time by simply replacing the two quartz nozzles.

以下、本発明を図面を用いて詳細に説明する。Hereinafter, the present invention will be explained in detail using the drawings.

第3図(a) 、 (b)および(C)は本発明による
バーナの一実施例の構成部品の側断面図である。これら
を用いて組み上げたバーナを第4図に示す。第3図(a
)はステンレス(材質8U8304、商品名)で作られ
ている。この部分は熱による横規かないことを実験的に
見いだしたことと、21と24の管の内径、外径の精度
が光フアイバ母材の形状、屈折率分布を支配する主因で
あること、のため金属で高精度に作られている。ステン
レスを用いたのは管21内から噴射されるガラス原料<
5iC1いPOCtいoecz、)のガスによる腐蝕を
防ぐためである。なお、通常は、管21内はArガスで
パージされているので腐蝕することはない。金属で作る
と石英ガラスで作つ九場合に比し、数10〜100倍程
度の高精度寸法に作れるので、光フアイバ母材の特性も
高精度に作ることが可能である。第3図(b) 、 (
C)は熱による横規がある部分であるので、石英ガラス
で作られている。そして、これらの管22’、23’は
第3図(a)の22′。
FIGS. 3(a), 3(b) and 3(c) are side sectional views of the components of one embodiment of a burner according to the invention. A burner assembled using these is shown in Figure 4. Figure 3 (a
) is made of stainless steel (material 8U8304, product name). We have experimentally found that this part has no horizontal distortion due to heat, and that the precision of the inner and outer diameters of tubes 21 and 24 is the main factor controlling the shape and refractive index distribution of the optical fiber base material. It is made of metal with high precision. Stainless steel was used for the glass raw material injected from inside the tube 21.
This is to prevent corrosion caused by the gas. Note that since the inside of the pipe 21 is normally purged with Ar gas, corrosion will not occur. When made from metal, the dimensions can be made with high precision, several tens to hundreds of times higher than when made from quartz glass, so the characteristics of the optical fiber base material can also be made with high precision. Figure 3(b), (
C) is the part where there is a horizontal ruler caused by heat, so it is made of quartz glass. These tubes 22' and 23' are 22' in FIG. 3(a).

23′の先端部分に接続するものである。したがって2
2’、23’の長さは数個でよいため、管の内径、外径
はかなυ高精度に再現性よく作れる。
23'. Therefore 2
Since only a few lengths of 2' and 23' are required, the inner and outer diameters of the tube can be made with high accuracy and reproducibility.

そして、熱によって横規し始めたら、新しいものと交換
するこふにより、従来のバーナに比し、毎回はぼ同じ条
件で光フアイバ母材の作成を行うこと力5できる。これ
Kよって高品質光フアイバ母材の製造歩留りを向上させ
ることができる。
When the burner starts to straighten due to heat, it can be replaced with a new one, making it possible to create optical fiber preforms under almost the same conditions each time, compared to conventional burners. This can improve the production yield of high-quality optical fiber preforms.

次に第4図のバーナを用いた光フアイバ母材製造法の実
施例について述べる。光7アイパ母材の製造装置は第1
図を用いた。第4図において、24には外径18m、内
径14.5m、23′および231には外径1&3■、
内径12■、22′および22#には外径9m、内径7
1111% 21 Kは外径5.2■、内径&6mの管
をそれぞれ用いた。
Next, an example of a method for manufacturing an optical fiber base material using the burner shown in FIG. 4 will be described. Hikari 7 Aipa base material manufacturing equipment is the first
A diagram was used. In Figure 4, 24 has an outer diameter of 18 m, an inner diameter of 14.5 m, 23' and 231 have outer diameters of 1 & 3 mm,
Inner diameter 12■, 22' and 22# have outer diameter 9m and inner diameter 7
For 1111% 21 K, tubes with an outer diameter of 5.2 mm and an inner diameter of 6 m were used.

そして、25から5iCL4 (0,517m i n
 )、G e C1m (0,1817mムn)、PO
Cls(0,1t/m1n)をAtをキャリヤガスとし
て送シ込み、26からAr (127m1n)を、27
がらHt(3t/m羅n)を、28から01 (sz/
min )をそれぞれ流して光フアイバ母材を作成した
。光フアイバ母材を数回作成するごとに第4図の221
゜231のみをとりはずして洗浄し、形状寸法を測定し
て形状寸法が初期値から数%変形した場合に#i22’
、23’を新しいものと交換して光フアイバ母材の作成
を繰り返した。その結果、従来のバーナを用いた場合に
は、光フアイバ母材を30本作成した場合の光フアイバ
母材の外径、光ファイバの伝送帯域の変動量は数%から
30数%もあったがこれに対し、本発明のバーナを用い
て30本の光フアイバ母材を作成した場合の上記変動量
は10%以下であり、大幅にバラツキが改善されること
がわかつ九。
And 25 to 5iCL4 (0,517min
), G e C1m (0,1817mmmn), PO
Cls (0,1 t/m1n) was fed with At as a carrier gas, and Ar (127m1n) was introduced from 26 to 27.
From 28 to 01 (sz/
min ) were respectively applied to prepare optical fiber preforms. 221 in Figure 4 every time the optical fiber base material is created several times.
゜Remove only ゜231, clean it, measure the shape and dimensions, and if the shape and dimensions have deformed by a few percent from the initial value, #i22'
, 23' were replaced with new ones and the production of the optical fiber base material was repeated. As a result, when using a conventional burner, the variation in the outer diameter of the optical fiber base material and the transmission band of the optical fiber ranged from a few percent to more than 30% when 30 optical fiber base materials were made. In contrast, when 30 optical fiber base materials were made using the burner of the present invention, the amount of variation was less than 10%, indicating that the variation was significantly improved.

本発明は上記実施例に限定されない。たとえば、第4図
において、21.24の先端部の数百も石英ガラス管で
作り、あとの残りの部分を金属で作るようKしてもよい
。またバーナは同心状の4重管だけでなく、5重管、6
重管、3重管などの多重管でもよい。そして熱による横
部の生じるバー属で作ればよい。金属管と石英ガラス管
の接続方法は、第4図のような段を作った簡単なはめ込
み方法とか、22’ 、23’ 、22’ 、23’を
それぞれテーパ形状にしてはめ込むようにする方法など
でもよい。そして着脱容易な構造が好ましい。
The invention is not limited to the above embodiments. For example, in FIG. 4, several hundred of the tips 21.24 may be made of quartz glass tubes, and the remaining portions may be made of metal. In addition, the burners are not only concentric quadruple tubes, but also quintuple tubes and six-layer tubes.
Multiple pipes such as double pipes and triple pipes may be used. Then, it can be made of a bar type that produces side parts due to heat. Methods for connecting metal tubes and quartz glass tubes include a simple fitting method that creates steps as shown in Figure 4, or a method in which 22', 23', 22', and 23' are each made into a tapered shape and fitted. But that's fine. A structure that is easy to attach and detach is preferable.

バーナの容管の先端部の寸法、形状、あるいは各管内に
流すガスの流量、種類なども上記実施例に限定されない
。たとえば、ガラス原料のドーパントは一箇所の管内か
らだけでなく、複数の管内へ導入してもよい。またO3
とHlとの間にはパージ用のAroとかN、などのガス
を流す管を設けてもよい。さらに、0.の外周に雰囲気
制御とか、光フアイバ母材の形状制御などのガス(たと
えば、N!、A’)を流す管を設けてもよい。
The size and shape of the tip of the burner tube, the flow rate and type of gas flowing into each tube, etc. are not limited to the above embodiments. For example, the glass raw material dopant may be introduced not only into one tube but also into a plurality of tubes. Also O3
A pipe for flowing a gas such as Aro or N for purging may be provided between and Hl. Furthermore, 0. A tube may be provided around the outer periphery of the optical fiber for controlling the atmosphere or controlling the shape of the optical fiber base material through which a gas (for example, N!, A') flows.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、従来の光フアイバ母材の製造方法を示す概略
図、第2図(a)、Φ)は従来のバーナの使用前と、光
フアイバ母材を数10本使用した後の変形状態を示した
図、第3図(1) 、 (b) 、 (C)は本発明に
よるバーナの一実施例の構成部品の概略図、第4図は第
3図の部品を組立てて作成した本発明によるバーナの一
実施例の側断面図を示す。 1・・・バー、す、2・・・多孔質母材、3・・・電気
炉、4・・・出発材、5・・・ガラス微粒子を含んだ火
炎、6・・・反応容器、7・・・出発材の引上げ方向、
8・・・出発材の回転方向、9.10・・・ガス導入管
、11,12゜12′・・・ガスの流れ方向、13・・
・引上げ装置、14・・・透明光ファイバ母材、15・
・・圧力検出器、16・・・制御回路、17・・・内圧
制御、排気装置、18.19・・・チャック、20・・
・支持装置、21〜24.22’ 、22’、23’ 
、23’・・・バーナの容管、25〜28・・・ガスの
流入方向。 ′¥J1図 (久)(b) (イψ1トロ貞ラノ           (1ビ晋ネ
ず1第 3 図 (久) 第 4 図 手続補正書(方式) 事件の表示 昭和56 年特許願第196768  号発明の名称 光フアイバ母材製造用バーナ 補正をする者 2、   I!l    ’OIQ+ 株式会社  1
1   立 製 作 所f′ 表 古  二:、111
   勝  成性 所     東京都丁−代fi1区
九ツノ内−J’l11番′t、υ“名称 (612)日
立電線株式会社 −代表者 水上徳五部」 代   理   人 図面
Figure 1 is a schematic diagram showing the conventional manufacturing method of optical fiber base material, and Figure 2 (a), Φ) shows deformation before using a conventional burner and after using several tens of optical fiber base materials. Figures 3 (1), (b), and (C) are schematic diagrams of the components of an embodiment of the burner according to the present invention, and Figure 4 is a diagram showing the state of the burner. 1 shows a sectional side view of an embodiment of a burner according to the invention; FIG. DESCRIPTION OF SYMBOLS 1... Bar, Su, 2... Porous base material, 3... Electric furnace, 4... Starting material, 5... Flame containing glass fine particles, 6... Reaction vessel, 7 ...The pulling direction of the starting material,
8... Rotation direction of starting material, 9.10... Gas introduction pipe, 11, 12° 12'... Gas flow direction, 13...
- Pulling device, 14... Transparent optical fiber base material, 15.
...Pressure detector, 16...Control circuit, 17...Internal pressure control, exhaust device, 18.19...Chuck, 20...
・Support device, 21-24.22', 22', 23'
, 23'... Burner container pipe, 25-28... Gas inflow direction. '¥J1 Figure (ku) (b) Name: Person who corrects burners for optical fiber base material manufacturing 2, I!l 'OIQ+ Co., Ltd. 1
1.Tate Seisakusho f' Table Old 2:, 111
Masatoshi Katsu Location: Tokyo, Tokyo, Tokyo, 1st Ward, Kutsunouchi, J'l11't, υ"Name (612)Hitachi Cable, Ltd. -Representative: Tokugobe Mizukami"Representative: Person drawings

Claims (1)

【特許請求の範囲】[Claims] 1、石英ガラス製の同心状多重管バーナの各ノズル内に
ガスを導入し、ノズル出口部からガラス微粒子を含んだ
火炎を発生させるバーナの構成において、各ノズル出口
部の先端部分の少なくとも一部分を石英ガラスとし、残
りの部分を金属で構成したことを特徴とする光フアイバ
母材製造用バーナ。
1. In a burner configuration in which gas is introduced into each nozzle of a concentric multi-tube burner made of quartz glass and a flame containing glass particles is generated from the nozzle outlet, at least a portion of the tip of each nozzle outlet is A burner for producing an optical fiber base material, characterized in that it is made of quartz glass and the remaining part is made of metal.
JP19676881A 1981-12-09 1981-12-09 Burner for production of base material for optical fiber Pending JPS5899133A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19676881A JPS5899133A (en) 1981-12-09 1981-12-09 Burner for production of base material for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19676881A JPS5899133A (en) 1981-12-09 1981-12-09 Burner for production of base material for optical fiber

Publications (1)

Publication Number Publication Date
JPS5899133A true JPS5899133A (en) 1983-06-13

Family

ID=16363294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19676881A Pending JPS5899133A (en) 1981-12-09 1981-12-09 Burner for production of base material for optical fiber

Country Status (1)

Country Link
JP (1) JPS5899133A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030034574A (en) * 2001-10-26 2003-05-09 주식회사 머큐리 Bunner for over caldding of base optic fiber
US7094049B2 (en) * 2001-12-04 2006-08-22 Atock Co., Ltd. Quartz glass single hole nozzle for feeding fluid and quartz glass multi-hole burner head for feeding fluid

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030034574A (en) * 2001-10-26 2003-05-09 주식회사 머큐리 Bunner for over caldding of base optic fiber
US7094049B2 (en) * 2001-12-04 2006-08-22 Atock Co., Ltd. Quartz glass single hole nozzle for feeding fluid and quartz glass multi-hole burner head for feeding fluid

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