JPS58987U - 半導体ウエ−ハ包装容器 - Google Patents

半導体ウエ−ハ包装容器

Info

Publication number
JPS58987U
JPS58987U JP9248181U JP9248181U JPS58987U JP S58987 U JPS58987 U JP S58987U JP 9248181 U JP9248181 U JP 9248181U JP 9248181 U JP9248181 U JP 9248181U JP S58987 U JPS58987 U JP S58987U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
packaging container
wafer packaging
container
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9248181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6119106Y2 (enEXAMPLES
Inventor
佐藤　信武
武川　五郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP9248181U priority Critical patent/JPS58987U/ja
Publication of JPS58987U publication Critical patent/JPS58987U/ja
Application granted granted Critical
Publication of JPS6119106Y2 publication Critical patent/JPS6119106Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cartons (AREA)
  • Buffer Packaging (AREA)
  • Packages (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging For Recording Disks (AREA)
JP9248181U 1981-06-23 1981-06-23 半導体ウエ−ハ包装容器 Granted JPS58987U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9248181U JPS58987U (ja) 1981-06-23 1981-06-23 半導体ウエ−ハ包装容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9248181U JPS58987U (ja) 1981-06-23 1981-06-23 半導体ウエ−ハ包装容器

Publications (2)

Publication Number Publication Date
JPS58987U true JPS58987U (ja) 1983-01-06
JPS6119106Y2 JPS6119106Y2 (enEXAMPLES) 1986-06-09

Family

ID=29887510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9248181U Granted JPS58987U (ja) 1981-06-23 1981-06-23 半導体ウエ−ハ包装容器

Country Status (1)

Country Link
JP (1) JPS58987U (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003068838A (ja) * 2001-08-22 2003-03-07 Sony Corp ウェハー収納キャリア

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003068838A (ja) * 2001-08-22 2003-03-07 Sony Corp ウェハー収納キャリア

Also Published As

Publication number Publication date
JPS6119106Y2 (enEXAMPLES) 1986-06-09

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