JPS5897648A - Marking device for minute fault - Google Patents

Abstract

PURPOSE:To give a mark very closely to a minute fault accurately by moving a base where a marking-off pin is fixed vertically and mounting this fixing base on a rotatable table. CONSTITUTION:On a supporting base 14, a turntable 1 is fitted and an X-axis seat 5 and an Y-axis seat 2 are fitted to the turntable 1; and an X-axis seat feed screw 4 and an Y-axis feed screw 3 are provided in such a way that they are movable in respective axial directions. The turntable 1 is fitted with a marking-off pin supporting base 12 and movable in one direction by the feed screw 13 and a marking-off pin 9 is moved up and down by a vertical feed screw 11. For marking by this device, the device is installed in a microscope while a sample base 7 is detached and then the marking-off pin 9 is lifted by the vertical feed screw 11; and the sample base 7 having a fixed sample 8 is attached, the marking-off pin 9 is lowered to put a fault close until the marking-off pin 9 is pressed against the sample by the vertical feed screw 11, drawing a marking line through the feed screw 13.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a marking device used for making hard to distinguish scratches on very small parts.

Conventionally, the following method has been used to observe error locations (pinholes, streak #), which are minute defects that occur in magnetic disks.

That is, after observing the error location on the main magnetic disk using an optical microscope with relatively low magnification, move it to the center of the field of view of the optical microscope, hold a sharp-tipped knife in your hand, and make a scratch near the error location. This method uses a high-magnification optical microscope or an electron microscope to investigate the error location. However, several tens of μm on the magnetic disk as mentioned above
Making a scratch near the microscopic defect below with a knife held in your hand is done while looking at a low-magnification optical microscope, so it is impossible to make a scratch within a few tens of micrometers from the defect. , it is not possible to make accurate scratches due to hand shake, and the defect that is being observed is often damaged. In addition, even if you make a scratch at a distance of 100 μm or more from the defect in order to avoid damaging the defect you are trying to observe, even if you can find the scar when observing with a high-magnification optical microscope or electronic a-microscope, the defect will still be visible. In many cases, you have no idea what is in your throat, and it takes a lot of attention and time.

An object of the present invention is to provide a marking device for marking clear scratches very close to minute defects on a very small magnetic disk.

According to the present invention, there is provided a parallel movement table that can move a minute defect to be observed to the center of the field of view of the microscope, a translation table that can move vertically near the center of the field of view of the microscope, and a frame that is attached to the table. This marking device has a linear movable table that allows the tip of the marking stick to be moved linearly toward or away from the marking device, and the marking device has a linearly movable table that allows the tip of the marking stick to be moved linearly toward the center of the microscope. A marking device is obtained which is characterized in that it can be rotated to any angle.

The present invention has a vertically movable scribing stick support base, which is centered around a microscopic defect in a magnetic disk that has been moved to the center of the field of view of the microscope. It is possible to easily and precisely mark a clear marking line very close to a minute defect, which allows the defect to be easily found using a high-magnification optical or electron microscope.

Next, one embodiment of the present invention will be described in detail with reference to the drawings.

FIGS. 1(Jl) and 1(b) show a marking device according to an embodiment of the present invention. #! In FIG. 1(a), Φ), in this embodiment, a rotatable rotary table 1 is mounted on a support table 14. An X-axis portion 5 and a Y-axis wheel 2 are attached to this rotary table 1. The X-axis portion 5 and the Y-axis wheel 2 are provided with an X-axis wheel feed screw 4 and a Y-axis wheel feed screw 3, respectively.
It is movable in each axis direction. The X-axis section 5 is the sample stage 7
is installed in a self-contained manner. Furthermore, a scribing rod support 12 is attached to the rotary table 1, and is movable in one direction by means of a feed screw 13. A scribing rod 9 is attached to the scribing support base 12, and can be fixed with a scribing rod fixing screw 10. The tip of the marking stick 9 is placed on a line passing through the center of the rotary table 1.

Incidentally, the scribing support stand 12 is shown so that the scribing rod 9 can be moved up and down by a screw 11 directly feeding the scribing rod.

FIG. 2 shows the X-axis portion 5 and Y-axis wheel 2 in one embodiment of the present invention. In FIG. 2, the X-axis portion 5 has a protrusion [1115] for fitting the sample stage 7, and this protrusion 15 has a marking parallel to the X-axis and the Y-axis on its upper surface.
is being drawn. X-axis section 5 and Y-axis wheel 2 company feed screw 4
, 3 are set to specific values (zero point positions), the intersection of the marking lia of the protrusion 15 on the X-axis portion 5 is arranged on the straight line along which the tip of the marking stick 9 moves.

Next, a method for marking minute defects according to an embodiment of the present invention will be described. First, after removing only the sample stage 7 and installing the marking device on the optical microscope, set the X-axis wheel feed screw 4 and Y-axis wheel feed screw 3 to specific values (zero point position), and while looking through the microscope, The support base 14 is moved and fixed so that the intersection of the one-marked line a of the protrusion 15 of the axle is located at the center of the field of view of the microscope. Next, scribe stick vertical feed screw 1
Raise the scribing stick 9 at step 1, and fit the sample table 7 on which the sample 8 is fixed into the X fine dust protrusion 15. Set the marking stick 9 at an angle wsIIL with the marking stick fixing screw 10 so that it does not hit the sample 8 and the objective lens of the microscope, and the marking stick vertical feed screw I.
Using IK, bring the tip of the marking stick 9 to the point near the sample 8. While looking through the microscope, bring the defective ' part of the X-axis wheel feed screw 4 and Y-axis wheel feed screw 3 to the center of the field of view of the sit lock, and mark the tip of the marking stick with the S holding stand feed screw 13.
The sample 8 is brought close to the defect using the scriber 9, and the scriber 9 is pressed against the sample 8 using the scriber vertical feed screw 11. Then, a scribe line is drawn on the sample 8 using the scribe stick support screw 13. By rotating the turntable 1 and performing the same operation again, a marking line is drawn near the defect.

By using the above method, if you draw a marking line near a minute defect as shown in Figure 3 (Φ), you can easily mark it with good accuracy, which is better than using the conventional method shown in Figure 3 (a). Defects can be easily found using high-magnification optical and electron microscopes.

As explained above, the present invention eliminates the problems and drawbacks that conventionally occurred when scribing by hand by making it possible to move the table on which the marking stick is fixed, and by installing the fixed table on a rotatable table. It has the effect of making it possible to accurately and easily mark very close to small defects.

[Brief explanation of the drawing]

Figures 1 (a) and (b) are diagrams showing the structure of a marking device according to an embodiment of the present invention, and Figures 2 (a) and (b) are X and Y axes when the sample stage is removed. Diagram showing the seat, Figure 3 (
51) and (b) are diagrams showing the state of marking by the conventional manual method and the method by the marking device of this embodiment. 1... 1 unit, 2... Y-axis seat, 3...
...Y fine dust feed screw, 4...X fine dust feed screw, 5...Y axis seat, 6...sample fixing screw, 7... ...Sample stand, 8...Sample, 9.
...Marking God, 10...Marking rod fixing screw, 11...Marking ILP vertical feed screw, 12
...Scoring stick support stand, 13...Scoring stick support stand feed screw, 14...Support body, 15...
...X fine dust protrusion, 9...marked line. Ward 1

Claims (1)

[Claims] S Microscope 9 A parallel movement table that can move the minute defect to be observed to the center of the field of view, a vertical movement table that can be moved directly near the center of the field of view of the microscope, and a scraping stick attached to the table. A marking device having a linear movable table capable of linearly moving the tip of the marking stick toward or away from the marking device, the marking device having a linear movable table that can linearly move the tip of the marking stick toward or away from the marking rod, and the base on which the marking stick support is attached can be moved at any angle with respect to the center of the field of view of the microscope. A marking device characterized by being able to rotate.