JPS589363B2 - How to measure the thickness of a thin film on a solid plate - Google Patents

How to measure the thickness of a thin film on a solid plate

Info

Publication number
JPS589363B2
JPS589363B2 JP5248178A JP5248178A JPS589363B2 JP S589363 B2 JPS589363 B2 JP S589363B2 JP 5248178 A JP5248178 A JP 5248178A JP 5248178 A JP5248178 A JP 5248178A JP S589363 B2 JPS589363 B2 JP S589363B2
Authority
JP
Japan
Prior art keywords
thickness
film
monomolecular film
cadmium
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5248178A
Other languages
Japanese (ja)
Other versions
JPS54145163A (en
Inventor
入山啓治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5248178A priority Critical patent/JPS589363B2/en
Publication of JPS54145163A publication Critical patent/JPS54145163A/en
Publication of JPS589363B2 publication Critical patent/JPS589363B2/en
Expired legal-status Critical Current

Links

Description

【発明の詳細な説明】 本発明は単分子膜又はそれに準ずる薄膜の厚さを測定す
る方法に関し、さらに詳しくは発ケイ光能を有する物質
の単分子膜と、ケイ光の消光物質の部分とアラキジン酸
カドミウム単分子膜とからなる表面単分子膜との間に厚
さを測定する膜をはさみ、消光物質の部分とアラキジン
酸カドミウムの部分の相対ケイ光強度を測定しその比よ
り、膜の厚さを測定する方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for measuring the thickness of a monomolecular film or a thin film similar thereto, and more particularly, to a method for measuring the thickness of a monomolecular film or a thin film similar thereto, and more specifically, it relates to a method for measuring the thickness of a monomolecular film or a thin film similar to the same, and more specifically, a method for measuring the thickness of a monomolecular film of a substance having luminescence ability, a part of a fluorescence quenching substance, A film whose thickness is to be measured is sandwiched between a surface monomolecular film consisting of a cadmium arachidate monolayer, and the relative fluorescence intensity of the quencher part and the cadmium arachidate part is measured, and from the ratio, it is determined that the thickness of the film is It relates to a method of measuring thickness.

従来単分子膜などの薄膜の厚さを測定するために、その
物質を溶液として水面上に単分子膜を形成させ、それを
測定する方法が行われているが必ずしも満足すべきもの
とはいえなかった。
Conventionally, in order to measure the thickness of thin films such as monomolecular films, the method of forming a monomolecular film on the water surface using the substance as a solution and measuring it has not always been satisfactory. Ta.

本発明者は固体板上で単分子膜などの薄膜を形戎させ、
その厚さを正確に測定できる方法を開発するため研究を
重ねた結果、固体板上に発ケイ光能な有する分子からな
る単分子膜を重ね、この上に厚さを測定する薄膜を形成
した後、さらにその上にケイ光の消光物質の部分とアラ
キジン酸カドミウムの部分とからなる表面単分子膜を重
ね、両部分の相対ケイ光強度を測定し、その比をとれば
、それから薄膜の厚さがわかることを見出し、この知見
に基いて本発明を完成するに至った。
The present inventor forms a thin film such as a monomolecular film on a solid plate,
As a result of repeated research to develop a method that can accurately measure the thickness, a monomolecular film made of molecules with luminescence ability was layered on a solid plate, and a thin film for measuring the thickness was formed on top of this. After that, a surface monomolecular film consisting of a fluorescence quencher part and a cadmium arachidate part is layered on top of that, the relative fluorescence intensity of both parts is measured, and the ratio is taken to determine the thickness of the thin film. Based on this knowledge, we have completed the present invention.

すなわち本発明は、固体板上にアラキジン酸カドミウム
、スチアリン酸カドミウム又はパルミチン酸カドミウム
の単分子膜を少なくとも3層累積し、この上にケイ光性
物質の単分子膜を重ね、厚さを測定する薄膜をその上に
形成した後その薄膜上に、ケイ光の消光物質の部分とア
ラキジン酸カドミウムの部分とからなる表面単分子膜で
おおい、両部分の相対ケイ光強度を測定してその比を求
め、あらかじめ求めておいた相対ケイ光強度の比と、ケ
イ光物質単分膜と表面単分子膜との距離との関係から、
その薄膜の厚さを決定することを取徴とする固体板上の
薄膜の厚さを測定する方法を提供するものである。
That is, in the present invention, at least three monomolecular films of cadmium arachidate, cadmium stearate, or cadmium palmitate are accumulated on a solid plate, a monomolecular film of a fluorescent substance is overlaid on this, and the thickness is measured. After forming a thin film thereon, the thin film is covered with a surface monomolecular film consisting of a fluorescence quencher part and a cadmium arachidate part, and the relative fluorescence intensities of both parts are measured and the ratio is calculated. From the relationship between the relative fluorescence intensity ratio determined in advance and the distance between the fluorescent substance monolayer and the surface monolayer,
A method for measuring the thickness of a thin film on a solid plate is provided, the feature of which is determining the thickness of the thin film.

本発明においては、まず、ガラス板などの固体板上に、
アラキジン酸カドミウム、スチアリン酸カドミウム又は
パルミチン酸カドミウムの単分子膜を少なくとも3層累
積する。
In the present invention, first, on a solid plate such as a glass plate,
At least three monolayers of cadmium arachidate, cadmium stearate, or cadmium palmitate are accumulated.

冫 これらの単分子膜は通常アラキジン酸、スチアリン
酸又はパルミチン酸をそれぞれ10 M〜10’M
のクロロホルム水溶液とし、これをカドミニウムイオン
を有するpH5〜6の水の水面上に滴下することにより
形成することができる。
These monolayers usually contain 10 M to 10'M of arachidic acid, stearic acid or palmitic acid, respectively.
It can be formed by making an aqueous solution of chloroform and dropping it onto the surface of water containing cadmium ions and having a pH of 5 to 6.

これらの単分子膜は、累積膜の作成方法として知られる
プロジェット法(Blodgett’s Tpchni
que)を用いて、前記の固体板上に直接水面上から移
しとることができ、所要層数だけ積み重ねられる。
These monomolecular films are produced using the Blodgett method (Blodgett's method), which is known as a method for producing cumulative films.
que), it can be transferred directly onto the solid plate from above the water surface, and the required number of layers can be stacked.

このようにしてガラス板上に形成したアラキジン酸カド
ミウム単分子膜累積膜(3層)の模式図を第1図に示す
FIG. 1 shows a schematic diagram of a cadmium arachidic acid monolayer cumulative film (three layers) formed on a glass plate in this manner.

図中1はガラス板2はアラキジン酸カドミウム分子であ
る。
In the figure, the glass plate 2 indicated at 1 is a cadmium arachidic acid molecule.

この場合アラキジン酸カドミウム単分子膜1層の厚さは
27Åであり、したがって3層では71Åの厚さとなる
In this case, the thickness of one monolayer of cadmium arachidate is 27 Å, so the thickness of three layers is 71 Å.

次に、この累積模の上にケイ光性物質の単分子膜を1層
累積する。
Next, one layer of a monomolecular film of a fluorescent material is deposited on top of this cumulative pattern.

例えばこのような物質としては次式で表わされる長鎖ア
ルキル化シアニン化合物(以下化合物Aという)のよう
な色素がある。
For example, such a substance includes a dye such as a long-chain alkylated cyanine compound (hereinafter referred to as compound A) represented by the following formula.

この混合物とアラキジン酸とを例えばモル比で1:20
で混合した700ホルム溶液(10−3M)は、水面上
で安定な混合単分子膜を形成する。
This mixture and arachidic acid are mixed in a molar ratio of, for example, 1:20.
A 700 form solution (10-3 M) mixed with 700 forms a stable mixed monolayer on the water surface.

この単分子膜をプロジェット法を応用して、アラキジン
酸カドミウム単分子膜を3層累積させたものの上に1層
累積する。
One layer of this monomolecular film is deposited on top of three layers of a cadmium arachidic acid monomolecular film by applying the Projet method.

化合物Aはケイ光性があり、特に吸収極大520 のと
ころを光励起すると強いケイ光を発する。
Compound A has fluorescent properties, and in particular, when excited with light at the absorption maximum of 520, it emits strong fluorescence.

この場合このケイ光性を有する色素単分子膜は、ガラス
板から71Åは少なくとも離れているので、通常40Å
の距離までおこるといわれるエネルギー移動は、少なく
とも、この単分子膜とガラス板との間では起らない。
In this case, the fluorescent dye monolayer is at least 71 Å away from the glass plate, so it is usually 40 Å away.
Energy transfer, which is said to occur up to a distance of , does not occur between this monomolecular film and the glass plate, at least.

すなわち単分子膜の発するケイ光は、ガラス板によって
少しも消光されない。
In other words, the fluorescence emitted by the monomolecular film is not quenched by the glass plate at all.

このようにして形成したケイ光性物質の単分子膜に、分
子長のわかった化合物の単分子膜を何層か累積し、その
上にさらにケイ光の消光物質の単分子膜を累積した部分
とアラキジン酸カドミウム単分子膜を累積した部分とか
らなる表面単分子膜を形成し、その両部分の表面におけ
る相対ケイ光強度の比を求めこれの、ケイ光単分子膜と
表面層との距離との関係を求めグラフ化する。
The monomolecular film of a fluorescent substance formed in this way is stacked with several monomolecular films of a compound whose molecular length is known, and then a monomolecular film of a fluorescent quenching substance is further accumulated on top of the monomolecular film of a compound whose molecular length is known. Form a surface monomolecular film consisting of a cumulative part of a cadmium arachidic acid monomolecular film, and calculate the ratio of relative fluorescence intensities on the surface of both parts, and calculate the distance between the fluorescent monomolecular film and the surface layer. Find the relationship and graph it.

これをさらに詳しく説明すると、まず、分子長のわかっ
た単分子膜を介在させる前に、これを介在させないでケ
イ光性物質の単分子膜の上に直接上記の表面単分子膜を
形成し、相対ケイ光強度の比を求める。
To explain this in more detail, first, before intervening a monomolecular film of known molecular length, the above-mentioned surface monomolecular film is formed directly on the monomolecular film of the fluorescent material without intervening it, Find the ratio of relative fluorescent intensities.

この消光物質としては例えば次式で表わされる長鎖アル
キル化ビピリジニウムカチオン(以下化合物Bという)
を用い、これとアラキジン酸カドミウムのモル比1:2
の10−3Mクロロホルム溶液を水面上に滴下し安定な
単分子膜を形成する。
As this quencher, for example, a long-chain alkylated bipyridinium cation represented by the following formula (hereinafter referred to as compound B)
and cadmium arachidate in a molar ratio of 1:2.
A 10-3M chloroform solution of the above solution is dropped onto the water surface to form a stable monomolecular film.

そしてプロジェット法によりこの単分子膜をケイ光性物
質の単分子膜の上面の半分に累積させる。
This monolayer is then accumulated on half of the upper surface of the monolayer of fluorescent material using the projector method.

残りの半分には、やはりプロジェット法により、アラキ
ジン酸カドミウム単分子膜を累積させる。
In the remaining half, a cadmium arachidic acid monolayer is accumulated by the Prodget method.

第2図はこのようにして表面単分子膜を形成したガラス
板の模式図であり、図中3はケイ光性物質、化合物Aを
含む単分子膜、4は消光物質、化合物Bを含む単分子膜
、5はアラキジン酸カドミウムからなる単分子膜である
FIG. 2 is a schematic diagram of a glass plate on which a monomolecular film is formed on the surface in this manner. The molecular film 5 is a monomolecular film made of cadmium arachidate.

長鎖アルキル化ビピリジニウムカチオン、例えば前記の
化合物Bは極めて強い消光物質である。
Long chain alkylated bipyridinium cations, such as compound B above, are extremely strong quenchers.

この消光物質からなる単分子膜でおおわれている部分の
色素単分子膜の相対ケイ光強度を■、アラキジン酸カド
ミウム単分子膜でおおわれている部分の色素単分子膜の
相対ケイ光強度をI∞とすると、この場合I=0.04
、■∞=0.75でI/I∞=0.067である。
The relative fluorescence intensity of the dye monomolecular film in the part covered with the monomolecular film made of this quencher is ■, and the relative fluorescence intensity of the dye monomolecular film in the part covered with the cadmium arachidate monomolecular film is I∞. In this case, I=0.04
, ■∞=0.75 and I/I∞=0.067.

次に第3図に示すようてケイ光性物質の単分子膜3と、
消光物質単分子膜4とアラキジン酸カドミウム単分子膜
5とからなる表面単分子膜との間に、分子長のわかった
パルミチン酸カドミウム単分子膜、スチアリン酸カドミ
ウム単分子膜又はアラキジン酸カドミウム単分子膜6を
層数を変えて(この図の場合は2層)はさみ込んだもの
を数種作成し、それぞれの■と■∞を測定し、I/I∞
を求める。
Next, as shown in FIG. 3, a monomolecular film 3 of a fluorescent substance,
Between the surface monolayer consisting of the quencher monolayer 4 and the cadmium arachidate monolayer 5, a cadmium palmitate monolayer, a cadmium stearate monolayer, or a cadmium arachidate monolayer of known molecular length is inserted. Create several types of membrane 6 with different numbers of layers (two layers in this figure), measure each ■ and ■∞, and calculate I/I∞.
seek.

このようにしてI/I∞をたて軸に、横軸にケイ光性物
質の単分子膜3と消光物質単分子膜4との距離dとの関
係をグラフに表わしたものが第4図である。
In this way, the relationship between I/I∞ as the vertical axis and the distance d between the monomolecular film of the fluorescent material 3 and the monomolecular film of the quenching material 4 as the horizontal axis is shown in FIG. It is.

本発明方法により薄膜の厚さを測定するには、前記のケ
イ光性物質の単分子膜の上に、その薄膜を形成し、さら
にその上に前記のような表面単分子膜を形成させたのち
、表面のケイ光相対強度の比I/I∞を求め、これから
前記グラフによりdを求めることにより膜厚を知る。
To measure the thickness of a thin film by the method of the present invention, the thin film is formed on the monomolecular film of the fluorescent substance, and the surface monomolecular film as described above is further formed on top of the monomolecular film of the fluorescent substance. Thereafter, the ratio I/I∞ of the relative intensity of fluorescence on the surface is determined, and d is determined from the above graph to determine the film thickness.

本発明方法によれば、単分子膜だけではなく単分子膜を
数層累積した膜の膜厚も容易に測定できる。
According to the method of the present invention, it is possible to easily measure not only the thickness of a monomolecular film but also the film thickness of a film in which several monomolecular films are accumulated.

この方法を利用すれば太陽電池用などに用いられる色素
電極上の累積膜の厚さを正確に測定できる。
Using this method, it is possible to accurately measure the thickness of the cumulative film on dye electrodes used in solar cells and the like.

次に本発明を実施例によりさらに詳細に説明する。Next, the present invention will be explained in more detail with reference to Examples.

実施例 ガラス板上にブロジェット法によりアラキジン酸カドミ
ウムの単分子膜を3層累積した。
EXAMPLE Three monomolecular films of cadmium arachidate were deposited on a glass plate by the Blodgett method.

次いでこの上にやはりブロジェット法により、前記化合
物Aの単分子膜を累積する。
Then, a monomolecular film of the compound A is deposited thereon also by Blodgett's method.

一方、膜の厚さを測定スるコレステロールの10−3M
クロロホルム溶液を調製し、これをブロジェットにより
単分子膜として化合物Aの単分子膜の上に累積しこれを
消光物質として用いた化合物Bとアラキジン酸カドミウ
ムのモル比1:2の10−3Mクロロモルム溶液から形
成された単分子膜と、アラキジン酸カドミウムの単分子
膜とからなる表面単分子膜ではさみ相対ケイ光強度を測
定し、■/I∞を求めたところ0.371であった。
On the other hand, 10-3M of cholesterol is used to measure the thickness of the membrane.
A chloroform solution was prepared, and this was accumulated as a monomolecular film by Blodget on the monomolecular film of compound A, and this was used as a quenching substance. A surface monomolecular film consisting of a monomolecular film formed from a solution and a monomolecular film of cadmium arachidate was sandwiched, and the relative fluorescence intensity was measured, and ■/I∞ was determined to be 0.371.

この値を第4図のグラフに参照すると、膜厚は14Aで
あることがわかる。
When this value is referred to the graph of FIG. 4, it can be seen that the film thickness is 14A.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はガラス板上の累積膜の状態を示す模式図、第2
図はその累積膜の上にケイ光性物質の単分子膜と、消光
性物質の部分とアラキジン酸カドミウムの部分とからな
る表面単分子膜を累積させた状態を示す模式図、第3図
はそのケイ光性物質の単分子膜と、表面単分子膜との間
にアラキジン酸カドミウムの単分子膜を2層介在させた
状態を示す模式図、第4図は第3図の累積膜表面におけ
る相対ケイ光強度の比と介在するアラキジン酸カドミウ
ムの累積膜の厚さとの関係を表わすグラフである。 符号の説明 1・・・ガラス板、2,5.6・・・アラ
キジン酸カドミウムの単分子膜、3・・・ケイ光性物質
の単分子膜、4・・・消光性物質の単分子膜。
Figure 1 is a schematic diagram showing the state of the accumulated film on the glass plate, Figure 2
The figure is a schematic diagram showing a state in which a surface monomolecular film consisting of a monomolecular film of a fluorescent substance, a part of a quenching substance, and a part of cadmium arachidate is accumulated on the accumulated film. A schematic diagram showing a state in which two monolayers of cadmium arachidate are interposed between a monolayer of the fluorescent material and a surface monolayer. Figure 4 shows the cumulative film surface of Figure 3. 3 is a graph showing the relationship between the ratio of relative fluorescence intensity and the thickness of the intervening cumulative film of cadmium arachidate. Explanation of symbols 1... Glass plate, 2,5.6... Monomolecular film of cadmium arachidate, 3... Monomolecular film of fluorescent substance, 4... Monomolecular film of quenching substance .

Claims (1)

【特許請求の範囲】[Claims] 1 固体板上にアラキジン酸カドミウム、スチアリン酸
カドミウム又はパルミチン酸カドミウムの単分子膜を少
なくとも3層累積し、この上にケイ光性物質の単分子膜
を重ね、厚さを測定する薄膜をその上に形成した後その
薄膜上に、ケイ光の消光物質の部分とアラキジン酸カド
ミウムの部分とからなる表面単分子膜でおおい、両部分
の相対ケイ光強度を測定してその比を求めて、あらかじ
め求めておいた相対ケイ光強度の比と、ケイ光物質単分
膜と表面単分子膜との距離との関係から、その薄膜の厚
さを決定することを特徴とする固体板上の薄膜の厚さを
測定する方法。
1. Accumulate at least three monomolecular films of cadmium arachidate, cadmium stearate, or cadmium palmitate on a solid plate, overlay a monomolecular film of a fluorescent substance on top of this, and then apply a thin film whose thickness is to be measured on top of this. After that, the thin film is covered with a surface monomolecular film consisting of a fluorescence quencher part and a cadmium arachidate part, and the relative fluorescence intensity of both parts is measured and the ratio is determined in advance. A thin film on a solid plate characterized in that the thickness of the thin film is determined from the relationship between the determined relative fluorescence intensity ratio and the distance between the fluorescent substance monolayer and the surface monolayer. How to measure thickness.
JP5248178A 1978-05-01 1978-05-01 How to measure the thickness of a thin film on a solid plate Expired JPS589363B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5248178A JPS589363B2 (en) 1978-05-01 1978-05-01 How to measure the thickness of a thin film on a solid plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5248178A JPS589363B2 (en) 1978-05-01 1978-05-01 How to measure the thickness of a thin film on a solid plate

Publications (2)

Publication Number Publication Date
JPS54145163A JPS54145163A (en) 1979-11-13
JPS589363B2 true JPS589363B2 (en) 1983-02-21

Family

ID=12915903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5248178A Expired JPS589363B2 (en) 1978-05-01 1978-05-01 How to measure the thickness of a thin film on a solid plate

Country Status (1)

Country Link
JP (1) JPS589363B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5717217A (en) * 1994-05-05 1998-02-10 Spectra Group Limited, Inc. Method for determining thickness, degree of cure and other properties of a polymeric coating
US5955002A (en) * 1997-11-12 1999-09-21 Spectra Group Limited, Inc. Method for determining properties of a polymer coating or film cured by cationic polymerization
DE602004032372D1 (en) * 2003-11-05 2011-06-01 Innovative Scient Solutions Inc Method for determining a surface contact force

Also Published As

Publication number Publication date
JPS54145163A (en) 1979-11-13

Similar Documents

Publication Publication Date Title
US4845021A (en) Method for recording optical information in optical high density recording mediums
DE60030978T2 (en) METHOD FOR USING A SENSOR UNIT
Polymeropoulos et al. Photochromism in monolayers
Ton et al. A Versatile Fiber‐Optic Fluorescence Sensor Based on Molecularly Imprinted Microstructures Polymerized in Situ
DE10012793C2 (en) Sensor element for optical detection of chemical or biochemical analytes
Ray et al. Adsorption of sulforhodamine dyes in cationic Langmuir− Blodgett films: spectroscopic and structural studies
US20050037231A1 (en) Fluorescent materials
DE4121426A1 (en) CHEMICAL SENSOR
US5580612A (en) Process for production of layer element containing at least one monomolecular layer of an amphiphilic molecule and one fullerene
DE3617946C2 (en)
JPS589363B2 (en) How to measure the thickness of a thin film on a solid plate
JP3079135B2 (en) Layer having photochromic material, method for producing and using the same
JP2506973B2 (en) Method of manufacturing optical recording medium
Penner Energy transfer between J-aggregated dye monolayers
US5316899A (en) Optical recording medium
US5130162A (en) Process for preparing a photo-recording medium
Nagamura et al. Optical waveguide studies on photoinduced electrochromism in ultrathin films of ion-pair charge-transfer complexes of 4, 4′-bipyridinium ions
JPH03157162A (en) Production of organic thin film
DE3938598A1 (en) Optical bio-sensor - based on fluorescent energy transfer between one dye incorporated in Langmuir-Blodgett film and marker dye
Shen et al. Ex situ and in situ characterization of patterned photoreactive thin organic surface layers using friction force microscopy
JPH0434140B2 (en)
JPH045081A (en) Method for laminating dye lb film
JPH01259353A (en) Optical recording medium and method for detecting recording state
JPS61239988A (en) Recording medium
JPH0827945B2 (en) Reproduction method of optical recording medium