JPS5889978A - Washing apparatus - Google Patents
Washing apparatusInfo
- Publication number
- JPS5889978A JPS5889978A JP56187041A JP18704181A JPS5889978A JP S5889978 A JPS5889978 A JP S5889978A JP 56187041 A JP56187041 A JP 56187041A JP 18704181 A JP18704181 A JP 18704181A JP S5889978 A JPS5889978 A JP S5889978A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- quartz tube
- jig
- tank
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は洗浄装置、特に拡散炉の炉心管を形作る石英管
を洗浄する洗浄装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cleaning device, and particularly to a cleaning device for cleaning a quartz tube forming a core tube of a diffusion furnace.
拡散炉を形作る石英管は拡散処理を繰返して行なううち
に汚染され、製品の特性低下を来たす。The quartz tubes that form the diffusion furnace become contaminated as the diffusion process is repeated, resulting in a deterioration in the properties of the product.
このため、所定回数の拡散処理を行なりた後に。Therefore, after performing the diffusion process a predetermined number of times.
この石英管を拡散炉（拡散装置）から抜き出して汚染物
質を洗い流す必要がある。従来、この洗浄は第１図で示
すように、洗浄槽１内のふり酸系の洗浄液２中に石英管
３を入れた後、石英管３を揺動させたり、洗浄液２を攪
拌したりして洗浄な行なっているが、つぎのような欠点
ある。It is necessary to take out this quartz tube from the diffusion furnace (diffusion device) and wash away the contaminants. Conventionally, this cleaning was carried out by placing the quartz tube 3 in a fluoric acid-based cleaning solution 2 in a cleaning tank 1, and then shaking the quartz tube 3 or stirring the cleaning solution 2, as shown in Fig. 1. Although it has been thoroughly cleaned, there are the following drawbacks.
（１）、石英管は比較的破れ易い石英で形作られている
ため、その取扱上破損し易い。(1) Since the quartz tube is made of quartz, which is relatively easy to break, it is easily damaged when handled.
（２）、石英管は一般に直径が１５〜２０ｃｍで長さが
１．５〜２ｍと大きい。このため、洗浄ＷＩＩｌ内で揺
動し難く、均一洗浄が困難であるとともに、多大な作業
時間を必要とする。(2) The quartz tube is generally large, with a diameter of 15 to 20 cm and a length of 1.5 to 2 m. For this reason, it is difficult to swing within the cleaning WIIl, making uniform cleaning difficult and requiring a large amount of work time.
（３）、作業者が洗浄液中の石英管を揺動させるため、
洗浄液が作業者属付着し易い。洗浄液はぶつ酸系である
ことから人体に付着すると危険であり、作業の安全面か
らも好ましくない。(3) Because the worker rocks the quartz tube in the cleaning solution,
Cleaning liquid tends to adhere to workers. Since the cleaning liquid is acid-based, it is dangerous if it comes into contact with the human body, and is also unfavorable from the standpoint of work safety.
したがって、本発明の目的は、均一な洗浄が安 全に
行なえる作業性の高い洗浄装置を提供することＫある。Therefore, an object of the present invention is to provide a cleaning device with high workability that can safely perform uniform cleaning.
また、本発明の他の目的は石英管の破損が生じ難い洗浄
装置を提供することにある。Another object of the present invention is to provide a cleaning device in which the quartz tube is less likely to be damaged.
このような目的を達成するために本発明は、洗浄槽と、
この洗浄槽内圧着脱自在に収容されるとともに被洗浄物
を収容しかつ洗浄液流通孔を多数有する洗浄治具と、か
らなるとともに、洗浄槽には洗浄槽内で回動する回転部
を有し、かつこの回転部には１ｉｉＩ記洗浄治具が係合
して回転するものであって、以下実施例により本発明を
説明する。In order to achieve such an object, the present invention includes a cleaning tank,
a cleaning jig which is removably housed in the cleaning tank, houses the object to be cleaned, and has a large number of cleaning liquid flow holes, and the cleaning tank has a rotating part that rotates within the cleaning tank; The cleaning jig 1iii is engaged with this rotating portion and rotated.The present invention will be explained below with reference to Examples.
第２図は本発明の一実施例による洗浄装置の正面断面図
、第３図は同じ１ｍ１断面図、第４図は同じく洗浄治具
の斜視図である。この洗浄装置の洗浄槽１は底側部が斜
面４となった箱構造の槽からなり、上部の開口から被洗
浄物である石英ｆ３を入れる。石英管３は第４図に示す
ような洗浄治Ｘ５に収容されて洗浄４１！ｌＫ入れられ
る。FIG. 2 is a front sectional view of a cleaning device according to an embodiment of the present invention, FIG. 3 is a 1 m 1 sectional view of the same, and FIG. 4 is a perspective view of a cleaning jig. The cleaning tank 1 of this cleaning device is a box-shaped tank with a sloped bottom 4, and quartz f3, which is an object to be cleaned, is put into the tank from an opening at the top. The quartz tube 3 is housed in a cleaning chamber X5 as shown in FIG. 4 and is cleaned 41! lK can be put in.
洗浄治具５は円筒体をその長手方向沿っ℃二分し、−万
を収容器６．他方を蓋体７とし、蓋体７は図示しないＳ
誉によって開閉できるようになっている。収容器６．蓋
体７はともＫその両端に半円板の鏡板８を取り付け、収
容器６と蓋体７の閉状態時に形成される円筒空間からな
る収容空間９０両端を塞ぎ、収容空間９に石英管３を収
容した場合、石英管３ｈ−脱落しないようＫなつ工いる
。The cleaning jig 5 divides the cylindrical body into two parts along its longitudinal direction, and divides the cylindrical body into two parts. The other side is the lid 7, and the lid 7 is not shown in the figure.
It can be opened and closed depending on the honor. Container 6. The lid body 7 has mirror plates 8 of semicircular plates attached to both ends thereof, and both ends of a housing space 90 consisting of a cylindrical space formed when the container 6 and the lid body 7 are closed are closed, and a quartz tube 3 is placed in the housing space 9. When storing the quartz tube 3h, make sure that it does not fall off.
また、収容器６の一万の鏡板８の外面には７ランジ１０
が設けられるとともＫ、このフランジ１０の中央からは
回転軸１１が突出し、その先端には歯車１２が設けられ
ている。回転軸１１の中心は収容器６と蓋体７とによっ
て作り出される円筒体の中心と一致している。なお、特
に図示はしないが、収容器６と蓋体７との間に閉状態時
に蓋体７が容易に開かないような一般によ（用いられる
構造の留具を設けておく。洗浄治具５はふつ酸系の洗浄
液２中に浸漬されることから、耐食性の樹脂によって形
成されている。また、収容器６．ｉ１俸７の各部には洗
浄液２が流通する洗浄液流通孔１３が多数設けられ、洗
浄効果の増大を図るよ５にな−）′Ｃいる。In addition, seven lunges 10 are provided on the outer surface of the end plate 8 of the container 6.
A rotary shaft 11 protrudes from the center of the flange 10, and a gear 12 is provided at the tip thereof. The center of the rotating shaft 11 coincides with the center of the cylindrical body created by the container 6 and the lid 7. Although not particularly shown in the drawings, a fastener of a generally used structure is provided between the container 6 and the lid 7 so that the lid 7 cannot be easily opened when the lid is in the closed state. Since it is immersed in the acid-based cleaning liquid 2, it is made of a corrosion-resistant resin.In addition, each part of the container 6.i1 is provided with a large number of cleaning liquid flow holes 13 through which the cleaning liquid 2 flows. 5)'C to increase the cleaning effect.
一万、洗浄槽１の一端面にはモータ１４が取り付けられ
ている。このモータ１４はその回転軸１ｓｔ壁面を貫通
させて洗浄槽１内に突出させ、その先端には前記歯車１
２と噛み合う駆動歯車１６ｖ有している。また、この駆
動歯車１６の隣りには、同様に前記歯車１２と噛み合う
ガイド歯車１７が支軸１８を介して配記されている。そ
して、洗浄治具５の歯車１２は駆動歯車１６とガイド歯
車１７の中間に中心を位置させるようにして両歯車１６
゜１７と噛み合いながら載る。他方、洗浄槽５の底には
洗浄治具５を支えかつその回転が容易となる一対のガイ
ドローラ１９が支持板２０を介して取り付けられている
。A motor 14 is attached to one end surface of the cleaning tank 1. This motor 14 is made to protrude into the cleaning tank 1 by passing through its rotating shaft 1st wall surface, and the gear 1 is attached to the tip of the motor 14.
It has a drive gear 16v that meshes with 2. Further, a guide gear 17 that similarly meshes with the gear 12 is disposed adjacent to the drive gear 16 via a support shaft 18. The gear 12 of the cleaning jig 5 is centered between the drive gear 16 and the guide gear 17.
It is placed in conjunction with ゜17. On the other hand, a pair of guide rollers 19 are attached to the bottom of the cleaning tank 5 via a support plate 20 to support the cleaning jig 5 and to facilitate its rotation.
この洗浄装置にあっては、洗浄治具５に石英管３を収容
した後、洗浄槽１内圧入れ、モータ１４を駆動させて洗
浄治具５ｖ回動させ１石英管３の洗浄を行なう。洗浄液
２は洗浄槽１の底側部が斜ｔｈ４となっていることから
隅部に淀むこともな（流れ、洗浄治具５の各洗浄液流通
孔１３を通って石英管３を効率よく洗浄する。In this cleaning device, after the quartz tube 3 is housed in the cleaning jig 5, the inside of the cleaning tank 1 is pressurized, and the motor 14 is driven to rotate the cleaning jig 5v to clean one quartz tube 3. The cleaning liquid 2 does not stagnate in the corners because the bottom side of the cleaning tank 1 is oblique th4 (the cleaning liquid 2 flows through each cleaning liquid distribution hole 13 of the cleaning jig 5 and efficiently cleans the quartz tube 3). .
このような実施例によれば、石英管３は洗浄治具５に収
容されて取り扱われるため、破損し−くなる。特に、洗
浄以外の保管、乾燥等圧おいてもこの洗浄治具５を収容
治具として用いれば、直接石英管３に触れることもない
ので、石英管３の破損は起きにくくなる。また、石英管
３は洗浄治具５のまま洗浄ｇ２中で強制的に回動される
ことから、短時間に均一に洗浄されて作業能率が向上す
るとともに、作業者は洗浄槽１から離れて作業できるた
め、洗浄液２の付着も起きず安全である。According to such an embodiment, the quartz tube 3 is accommodated in the cleaning jig 5 and handled, so that it is not likely to be damaged. In particular, if this cleaning jig 5 is used as a storage jig even during storage other than cleaning and drying under equal pressure, the quartz tube 3 will not be directly touched, so damage to the quartz tube 3 will be less likely to occur. In addition, since the quartz tube 3 is forcibly rotated in the cleaning jig 5 during the cleaning g2, it is cleaned uniformly in a short time, improving work efficiency, and the operator can move away from the cleaning tank 1. Since the work can be done safely, the cleaning liquid 2 does not adhere to the workpiece.
なお、本発明は前記実施例に限定されない。たとえば、
第５図に示すように、洗浄治具５の収容器１司９をリン
グ２１と、リング２１の内周に沿って定間隔に配設され
る棒体２２とによって形作り、石英管３をその開放端側
から出入するようにしてもよい。この場合、洗浄槽１の
ガイドローラ１９はリング２１の外周をガイドするよう
にすればよい。Note that the present invention is not limited to the above embodiments. for example,
As shown in FIG. 5, the container 9 of the cleaning jig 5 is formed by a ring 21 and rods 22 arranged at regular intervals along the inner circumference of the ring 21, and the quartz tube 3 is attached to the ring 21. It may be possible to enter and exit from the open end side. In this case, the guide roller 19 of the cleaning tank 1 may guide the outer periphery of the ring 21.
また、本発明は、洗浄治具に歯車等は般けずに単なる円
筒体構造とし、洗浄槽の底に２組のガイドローラを設け
、−万のガイドローラを回動させて回転部の回動を洗浄
治具に伝えるようにしてもよい。この回転部構造および
洗浄治具の保合構造は他の構造でもよい。Furthermore, in the present invention, the cleaning jig has a simple cylindrical structure without gears, etc., and two sets of guide rollers are provided at the bottom of the cleaning tank, and the rotating part is rotated by rotating the ten thousand guide rollers. It is also possible to transmit the information to the cleaning jig. The rotating part structure and the cleaning jig holding structure may be other structures.
以上のようＫ、本発明によれば、石英管のような被洗浄
物を損傷させることなく高能率で均一かつ安全に洗浄で
きる洗浄装置を提供すること−ｈＬできる。As described above, according to the present invention, it is possible to provide a cleaning device that can clean objects to be cleaned, such as quartz tubes, uniformly and safely with high efficiency without damaging them.
第１図は従来の石英管の洗浄状態を示す斜視図、第２図
は本発明の一実施例による石英管の洗浄装置を示す正面
断面図、第３図は同じ＜ａ面断面図、第４図は同じく洗
浄治具を示す斜視図、ｗＩ、５図は他の実施例による洗
浄治具の斜視図である。
１・・・洗浄槽、３・・・石英管、５・・・洗浄治具、
１２・・・歯車、１３・・・洗浄液流通孔、１４・・・
モータ、１６・・・駆動歯車、１７・・・ガイド歯車、
１９・・・ガイドローラ。
代理人 弁理士 薄 １）利 辛
第 １ 図
第 ３ｔ’２１ 第 ２ 図第
４ 図
第 ５ 図FIG. 1 is a perspective view showing a conventional quartz tube cleaning state, FIG. 2 is a front sectional view showing a quartz tube cleaning device according to an embodiment of the present invention, and FIG. FIG. 4 is a perspective view of the cleaning jig, and FIG. 5 is a perspective view of a cleaning jig according to another embodiment. 1...Cleaning tank, 3...Quartz tube, 5...Cleaning jig,
12... Gear, 13... Cleaning liquid flow hole, 14...
Motor, 16... Drive gear, 17... Guide gear,
19...Guide roller. Agent Patent Attorney Bo 1) Ri Shin No. 1 Figure 3t'21 Figure 2
Figure 4 Figure 5
Claims (1)
るとともに被洗浄物を収容しかつ洗浄液流通孔を多数有
する洗浄治具と、からなるとともに１洗浄槽には洗浄槽
内で回動する回転部を有し、かつこの回転ｓＫは前記洗
浄治具が係合し１回転するように構成され工なることを
特徴とする洗浄装置。1. Consisting of a cleaning tank, and a cleaning jig that is removably housed in the cleaning tank and contains the object to be cleaned and has a large number of cleaning liquid circulation holes. 1. A cleaning device characterized in that the cleaning device has a rotating part that moves, and the rotation sK is configured such that the cleaning jig engages with the cleaning jig and rotates once.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56187041A JPS5889978A (en) | 1981-11-24 | 1981-11-24 | Washing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56187041A JPS5889978A (en) | 1981-11-24 | 1981-11-24 | Washing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5889978A true JPS5889978A (en) | 1983-05-28 |
Family
ID=16199135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56187041A Pending JPS5889978A (en) | 1981-11-24 | 1981-11-24 | Washing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5889978A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107780090A (en) * | 2017-11-24 | 2018-03-09 | 广西博白县圣德种养专业合作社 | A kind of industrial cloth washer |
-
1981
- 1981-11-24 JP JP56187041A patent/JPS5889978A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107780090A (en) * | 2017-11-24 | 2018-03-09 | 广西博白县圣德种养专业合作社 | A kind of industrial cloth washer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8293026B1 (en) | Fixtures for the cleaning of lenses | |
| CA2709197C (en) | Fixtures for the cleaning of lenses | |
| JPS5889978A (en) | Washing apparatus | |
| US3172415A (en) | Submerged surface cleaning apparatus | |
| JP2817532B2 (en) | Ultrasonic cleaning equipment | |
| JPH09257994A (en) | Radioactivity removing device for radioactive waste | |
| KR100638400B1 (en) | Radioactive contaminant decontamination device | |
| JPS6041319B2 (en) | Equipment that continuously processes processed materials in liquid | |
| KR20220027363A (en) | Waste wire decontamination apparatus | |
| JPH0433512B2 (en) | ||
| JPS6214354B2 (en) | ||
| JPH077104B2 (en) | Decontamination method for radioactive contaminants | |
| JP3343379B2 (en) | Preform rod etching equipment | |
| JPS6236593A (en) | Melter for irradiated nuclear fuel | |
| JP7305228B1 (en) | Unmanned cleaning equipment for objects to be cleaned | |
| JP5878957B2 (en) | Barrel for plating | |
| US2365984A (en) | Pipe cleaning machine | |
| CN214348257U (en) | Novel closed fossil repair device | |
| JPS6079727A (en) | Washing and drying device | |
| JPH03152499A (en) | Cleansing method for equipment parts | |
| US20230100621A1 (en) | Dissolver reactor with removable basket | |
| JPS6033439Y2 (en) | cleaning equipment | |
| JPH0647185A (en) | Barrel container for washing and drying | |
| JPH0154107B2 (en) | ||
| JPS5485556A (en) | Apparatus for removing fur from nuclear fuel rods |