JPS5889883A - Laser gas supplying device - Google Patents

Abstract

PURPOSE:To omit a pump by supplying and exhausting laser gas to laser tube by utilizing the flow of a cooling medium. CONSTITUTION:Cooling water supplied to a pressure reducer 17 enters a pipe 173 along the direction of an arrow A. In this case, since the arrow shaped end of the pipe 173 is made to be a small diameter part 173a, the flow speed of the cooling water at this part is rapidly increased so that the water is discharged as a jet stream. At this time, the air pressure at this part is lowered based on a principle of a diffusing pump by the jetting of the cooling water. That is, the pressure around the cooling water, which is discharged as the jet stream, becomes lower than that at the tip of the pipe 173. Therefore the laser gas, which is suppled to a gas supplying port 17a from a laser tube 11 is rapidly sucked into the main body 171 of the pressure reducer along the direction of an arrow B. The laser gas is exhausted into an exhausting pipe 175 together with the cooling water along the direction of an arrow C, and thereafter exhausted to the outside from a gas exhausting port 174.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser gas supply device for supplying lζ gas to a laser tube that oscillates a laser.

In recent years, lasers have been widely used in many fields.

Among these, for example, in medical and other application fields, there are many so-called 5 LOW FLOW type co-gas lasers, which have the discharge direction, optical axis, and gas flow aligned in the same three directions. It is used.

This more CO, gas laser is He-Nl-Co,
Several hundred mb-i of mixed gas such as
The gas pressure in the tube is fed into the laser tube at a slow flow rate of several torr per minute, and the gas pressure in the tube is maintained at a low pressure state Cζ of several torr, 8 degrees Celsius, so as to cause the laser to oscillate.

Therefore, such a gas laser is provided with a laser gas supply device for constantly replenishing gas in the tube and exhausting it, or sending it to a gas regeneration system for circulation.

However, conventionally, as this type of laser gas supply device, t4
As shown in the figure, the laser gas cylinder 1 is connected to the pressure reducing valve 2. Gas supply port 4 of laser tube 4 via needle pulp 3
m, connect the rotary pump 6 to the gas outlet 4b of this tube 4 via the pulp 5, and connect this pump 6
Therefore, it is effective to constantly replenish and exhaust the radar gas in the cylinder 1 into the tube 4 along the arrow shown in the figure. Here, 7 in the figure is a pressure gauge.

However, when using a Cζ pump like this, it vibrates.

This tends to cause noise, not only increases the size of the device, but also makes it expensive.Furthermore, the pump itself consumes a considerable amount of power, which is not desirable from the point of view of energy conservation.

SUMMARY OF THE INVENTION An object of the present invention is to provide a laser gas supply device that uses the flow of the cooling medium to supply and exhaust laser gas to the laser tube, thereby eliminating the need for a pump and eliminating the above-mentioned disadvantages.

Hereinafter, one embodiment of the present invention will be explained with reference to the drawings. 1 is a laser tube, and a water jacket 12 is provided around the tube 11 to allow a cooling medium such as cooling water to flow therein in order to eliminate heat generated by the tube. A laser gas cylinder 15 is connected to the gas supply port ICI of the laser tube 11 via a needle valve 13 and a pressure reducing valve 14 . In this case, the gas cylinder 15 contains a laser mixed gas such as He −
A laser mixture gas of N and -Co is sealed. Further, a gas supply port 17m of a pressure reducer 17, which will be described later, is connected to the distribution outlet 11b of the laser tube 11 via a pulp 16.

On the other hand, the cooling water right of the water jacket 12, the input D
12'''C is a cooling a with a pump that sends cooling water.
618 is connected, and the cooling water supply port 12b is depressurized.
The cooling water supply port 17b of a17 is connected.

Here, /I1. The pressure vessel 17 is constructed as shown in FIG. That is, 171 is the pressure reducer main body, and this main body 1
71 has a cylindrical shape, one end surface of which is formed into a thick wall portion 171a, and this wall 4. A small-diameter through hole 172 is formed approximately in the center of ll1171m, and a gas supply port 17m is provided on the side surface to communicate with the hollow portion. Also, the pressure reducer main body 17
A pipe 173 having a cooling water supply port 17b in the hollow part of 1
has been introduced in an airtight manner. This pipe 173 has a tip opening formed in a narrow diameter section 173a, and this narrow diameter section 173a
Seven parts of 4 are inserted into the through holes 172 of the thick portion 171g.
There are 7 installed in close proximity. ``Also, the main body 111 is provided with an exhaust pipe 175 having a gas exhaust hole 174 and communicating with the above-mentioned holes.

Returning to FIG. 2, the pressure reducer 17 connects the discharge pipe 175 to the water tank 1-9#ζ, and transfers this water 411119 to the cooler 1.
It is connected to 8.

Next, its effect will be explained.

Now, when the laser gas is discharged from the mixed gas cylinder 15, the pressure is reduced by the pressure reducing valve 14, and then the needle valve 13
The gas is supplied into the laser tube 11 through the gas supply port 11a. At the same time, pressurized cooling water from the cooler 18 is supplied to the water jacket 12#ζ to cool the area around the laser tube 11.

After the laser gas passes through the laser tube 11, it is discharged from the gas outlet 11b and passes through the pulp 15 to the pressure reducer 1.
7 gas supply port 17a.

Cooling water also passes through the water jacket 12 and is discharged from the cooling water drain port 12b, and is discharged from the cooling water supply port 17 of the pressure reducer 17.
given to b. .

The cooling water supplied to the pressure reducer 17 enters the pipe 1'X3 along arrow A. In this case, since the arrow of the pipe 173 has a narrow diameter portion of 173 m, the flow velocity of the cooling water is rapidly increased in this portion and is ejected as a new jet stream. Then, due to the jetting of cooling water at this time, the air pressure in this area decreases due to the principle of a diffusion pump. In other words, the air pressure around the cooling water that is ejected as a jet or stream from the tip of the pipe 173 decreases.

As a result, the laser gas from the laser tube 11 supplied to the gas supply port 17m is rapidly drawn into the vacuum main body 171 along the arrow B.

After that, the laser gas is pumped along the arrow C along with the cooling water.
The gas is discharged to the exhaust pipe 175 and then to the gas exhaust hole 174.
more is discharged to the outside. The cooled water is sent to the water tank 19, returned to the cooler 18, and sent out again to the water jacket h12 by the pump.

Therefore, the cooling water is similarly pumped through the pressure reducer 17.The pressure reducer 17 thus acts like a pump, thereby replenishing and exhausting the laser gas to the laser tube 11.

By using this to provide a pumping action to the pressure reducer, it is possible to perform auxiliary exhaust of the loser gas to the laser tube, eliminating the cause of the noise that was previously used, and making the device itself smaller and lighter. As well as being able to do it both ways 4
It can be done at low cost, and it can also save energy by significantly reducing power consumption compared to those using pumps.

Next, another embodiment of this invention is shown in FIG.

In this example, cooling water is supplied directly to the water jacket 12 from the water faucet 20, passes through the pressure reducer 17, and is then discharged to the outside together with the laser gas. The rest is the same as in FIG. 2, and the same parts are given the same reference numerals.

Even in this case, the same structure as in the above-mentioned embodiment can be obtained, and in addition, the cooling system equipment can be simplified, which is more economically advantageous.

It should be noted that the present invention is not limited to the above-mentioned embodiments, but can be implemented with appropriate modifications within the scope of the invention.

For example, although cooling water has been described above as the cooling medium, other cooling mediums such as cooling oil may also be used.

As described above, according to the present invention, the pump can be omitted by replenishing and discharging the laser gas to the laser tube using the flow of the cooling medium, and all the inconveniences caused by using such a pump can be eliminated. A laser gas supply device can be provided.

[Brief explanation of drawings]

11 is a schematic diagram 11 showing one row of a conventional laser gas supply device, FIG. 2 is a schematic diagram showing an embodiment of the present invention, and FIG. 3 is a depressurizer used in a similar example. Schematic Block Diagram FIG. 4 is a schematic block diagram showing another practical example of the present invention. 1... Laser gas pump 2... Pressure reducing valve 3...
Needle valve 4...Laser tube 4a...
Gas supply port 4b... Gas discharge 0.5... Valve 6... Rotary pump 7... Pressure gauge 11... Laser tube 11a... Gas supply port 11b... Gas discharge port 12a. ...Cooling water intake port 12b...Cooling water outlet 13...Needle valve 14...Pressure reducing valve 15...Laser gas cylinder 16...Valve 17...Pressure reducer 17
G...Scrap supply port 17b...Cooling water supply port 17
1... Main body 171a... 4 parts of meat 174
...Gas exhaust hole 175...Exhaust valve 18.
...Cooler 19...Water tank 20...Water faucet Figure 1 Figure 2 Figure 4

Claims (2)

[Claims] (1) A laser tube, a means for supplying a laser gas to the laser tube, and a means for rapidly increasing the flow rate of the cooling medium to which the laser chuck gas and cooling medium are supplied, and the air pressure in this part is reduced. A laser gas supply device comprising: a pressure reducer that reduces the pressure of the laser gas and applies a pulling force to the laser gas.゛ (2) The pressure reducer has a cylindrical shape and has a thick wall portion with a small-diameter through hole formed on one end surface, and a pressure reducer body having a laser gas supply port communicating with the hollow portion on the side surface; The pipe is introduced airtightly into the hollow part and has a small diameter part at the tip, and this small diameter part is connected to the cooling water supply pipe 2 provided close to the through hole and the gas exhaust pipe. 2. The laser gas supply device according to claim 1, further comprising a discharge pipe having holes.