JPS5889877A - Superconductive circuit device - Google Patents

Abstract

PURPOSE:To obtain the titled superconductive circuit device, whose area can be reduced as a whole, by arranging a common grounding superconductor layer between at least two superconductive circuit constitution parts, and laminating them on a substrate. CONSTITUTION:In the constitution comprising the superconductive circuit constitution parts 10A and 10B and the grounding superconductor layer 2AB, a current is flowed through superconductor layers 9a and 9B constituting the superconductive circuits 4A and 4B, by the grounding superconductor 2AB, and a magnetic field is generated around the superconductor layers 9A and 9B. The magnetic field is located between the grounding superconductor layer 2AB and the superconductor layers 9A and 9B. Josephson junctions 11A and 11B constituting the superconductive circuits 4A and 4B are effectively switched and controlled. The grounding superconductor 2AB, which is provided between the superconducting circuit constitution parts 10A and 10B, indicates diamagnetic property. Therefore, the constitution comprising the superconductive circuit constitution part 10A and the grounding superconductor 2AB and the constitution comprising the superconducting circuit constitution part 10B and the grounding superconductor layer 2AB are operated under the magnetically separated state by the grounding superconductive layer 2AB.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is characterized in that an m-component superconducting circuit structure IIt section comprising a superconducting circuit on an insulating layer and a grounding superconductor layer therefor are formed on a substrate. The present invention relates to a superconducting circuit device having a configuration.

Conventionally, as shown in FIG. 1, lead, lead, etc. are placed on a substrate 1 made of silicon, glass, etc.
A ground superconductor layer 2 made of indium-gold alloy, niobium, etc. is formed by vapor deposition, sputtering, etc., and an insulating layer 6 made of Sio2, etc. is formed on the image ground superconductor layer 2 by vapor deposition, etc. Then, a superconducting circuit 4 is formed on the insulating layer 6, and in this case, the superconducting circuit 4 is made of lead, lead-indium-gold alloy, lead-bismuth alloy, niobium, etc. on the insulating layer 5. A superconductor layer 5 is formed in a required pattern, and a thin insulating layer 6 is formed on the surface of the free end portion (at least on the surface of the free end) to serve as a tunnel barrier by oxidizing the superconductor layer 5. A superconductor layer 7 made of the same material as the superconductor layer 5 is formed on the layer 6, or a desired pattern is formed in such a manner that the superconductor layer 5 and the insulating layer 6 are faced to each other in appropriate lengths. An interlayer insulating layer 8 made of the same material as the insulating layer 3 is formed by embedding the superconductor layers 5 and 7 on the insulating layer 3, and on the interlayer insulating layer 8. , the superconductor layer 7 is made of the same material as the superconductor layers 5 and 7, with the superconductor layer 5 and the insulating layer 6 interposed in between, and the superconductor layer 7 facing the insulating layer 6 and extending in parallel with each other. It has been proposed that the conductor layer 9 has an llI4 structure formed in a desired pattern.

The superconducting circuit device having the configuration described above has a superconducting circuit component 10 consisting of an absolute layer 3 and a superconducting circuit 4, and the superconducting circuit configuration @10 and a grounding superconductor layer 2 for this Toka base f! It has a structure formed on 1. In this case, the superconducting circuit 4 of the superconducting circuit component 10 has a superconductor layer 7, a superconductor layer 5 and an insulating layer 6.
The Josephson junction 11 is formed in a portion where the superconductor layer 7 faces the superconductor layer 5 with the S edge layer 6 in between. Switching occurs under the influence of the magnetic field generated around the superconductor layer 9 when the electric current for 111111 is applied to the extended portion, that is, the superconductor layer 9 extending opposite to the Josephson junction 11. It is something that is controlled.

Further, the grounding superconductor layer 2 is a superconductor layer 9 as described above.
The magnetic field generated around the grounding superconductor layer 2 and the superconductor layer 9 is localized between the grounding superconductor layer 2 and the superconductor layer 9, thereby effectively causing the switching of the Josephson junction 11 described above. .

Therefore, according to the conventional superconducting circuit device shown in FIG. is formed on the substrate 1, and a superconductor layer 9 capable of forming a superconducting path 4 in the grounding superconductor layer 2.
Josephson constructs a superconducting circuit 4 by localizing a magnetic field generated around the superconductor layer 9 between the grounding superconductor layer 2 and the superconductor layer 9 by a current flowing through the superconductor layer 9. This makes it possible to effectively control the switching IIJ of the junction 11.

However, in the grounding superconductor layer 2, the magnetic field generated around the superconductor layer 9 by the current flowing through the superconductor layer 9 that can form a superconducting circuit wI4 of 1/I# is controlled by the grounding superconductor layer 2. Since it is arranged to be localized between the conductor layer 2 and the superconductor layer 9, there is no influence of the magnetic field between the grounding superconductor layer 2 and the superconductor layer 9. However, there are restrictions in that superconductor layers, other Josephson junctions, etc. cannot be disposed, and for this reason, the transmission 4-path device as a whole becomes a major problem.

Therefore, the present invention proposes a νI-standard ultra-transparent circuit device that can be made into a small-sized circuit as a whole, and this will become clear from the detailed description below.

FIG. 2 shows an example of a superconducting circuit device according to the present invention, and in FIG. 111 of the superconducting circuit components (both of which have as first and wJ2 conductive circuits 4[ei:l110A and 10B, which are the first and second superconducting circuits [ei:l110A and 10B)] The g1 path forming parts 10A and 10B have a common grounding superconductor layer 2 in the case of FIG. In relation, it has a structure in which it is stacked on the base &1 of the unit and flllm in FIG. 1.The first and second superconducting circuit components 1
In 0 person and 10B, parts corresponding to those in FIG. 1 are given the same reference numerals with A and B added.

In this case, the superconducting circuit configurations $1OA and 10B are formed by stacking the superconducting circuit configuration portion 10A on the substrate 1 with the substrate 1@, and superconducting circuit configuration portions 10A and 10B
In this case, the insulating layers 3A and 3B of Sogo are respectively placed on the side of the superconductor layer 2 for Honchi B. In this case, the super-lowered four-circuit structure g section 10B is the grounding superconductor laminar flow base @1
Since it is formed on the surface opposite to 1m, the insulating layer 3-B1 superconductor i! ll513. The insulating layer 6B, the superconductor layer 7J, the interlayer insulating layer 8B, and the superconductor layer 9B form the one-superconductor circuit described above in Figure 1? In the case of the lI bottom part 10, even if they are formed on the grounding superconductor layer 2AB, the superconducting circuit JiSl:1@5
10A is the substrate 1 of the grounding superconductor layer 2AB.
The insulating layer 5 includes a superconductor layer 7A, an insulating layer 6A, a superconductor layer 5A, an interlayer insulating layer 8 and a superconductor layer 9, or It is formed on the substrate 1 in the opposite order.

The above is an example configuration of a superconducting circuit device according to the present invention, or according to a suitable configuration, it can be used exclusively for superconducting circuits! 1@Nari810A
and 1013 have the same configuration as the superconducting circuit component 1o described above in FIG. Cross-circuit w & even formation 510B and grounding superconductor layer 2A
Since the configuration consisting of H corresponds to the structure IJk4 consisting of the superconducting circuit component 10 and the grounding superconductor layer 2 in @1mo), the superconducting circuit component 10A and the grounding superconductor layer 2 In the configuration consisting of 2AB, as in the case of the first doctor, the superconductor layer 9A that constitutes the superconductor circuit 4A is washed away by the superconductor layer 9AIC that constitutes the superconductor circuit 4A with the grounding superconductor layer dust. The magnetic field generated around is localized between the grounding superconductor layer 2AB and the superconductor layer 9M.
, the Josephson junction 11A that forms the superconducting circuit 4 is effectively switched to the switch side II! 11. Also, in the configuration consisting of the superden dedicated mmg section 10B and the grounding superconductor layer 2AB, similarly, in the grounding superconductor layer 2AB,
Superconducting (b) path 4. The magnetic field generated around the superconductor 1m9B by the current flowing through the superconductor layer 9B, which can be formed by the grounding superconductor layer 2AH and the superconductor 1
-9B to form a superconducting circuit 4B, which can effectively bring about the switch f7 junction 11B. Also, for this reason, the first
As in the case shown in the figure, in the configuration consisting of the superconducting circuit component 10A and the grounding superconductor layer 2AH, a magnetic field is created between the grounding superconductor layer 2AB and the superconductor layer 9A. A superconductor layer that must not be affected by the effects of Similarly, in the configuration, the grounding superconductor layer 2AB and the superconductor layer 9b
A superconductor layer that must not be affected by the magnetic field,
It is possible to arrange other Josephson junctions.

However, in the case of the superconducting circuit device according to the present invention shown in FIG. 2, the superconducting circuit components 10A and 10B of the superconducting circuit devices i@S10 and lW1 described above in FIG. Since the grounding superconductor layer 2AH is placed in common with the substrate 1, the area of the substrate 1 is reduced to w, which is 1/2 of that in Figure 1. Even if it is small, it is possible to obtain &kll: similar to the case of Peng 1. Also, superconductivity (b) route Seiji 1 @ 510A
Since the grounding superconductor m2AB inserted in 10B and 10B exhibits diamagnetic properties, the superconducting circuit component 10A and the grounding superconductor layer 2AB, and the superconducting circuit component 10B and the grounding superconductor layer 2AB The structure consisting of the superconducting monolithic layer 2AB is
They operate in a state where they are magnetically separated from each other by the grounding superconductor layer 2AB.

Therefore, the superconducting circuit device according to the present invention shown in FIG. Compared to the conventional superconducting path device mentioned above, it has a large area reduction and can be obtained with a significantly smaller area.

Next, another example of the superconducting W6 device according to the present invention will be described.
To explain this with reference to the drawings, the same reference numerals are given to the parts corresponding to l121J, and the detailed explanation thereof will be omitted. A superconductor layer 9 is placed between the 8 interlayer insulating layers and the substrate 1.
Around the person, an insulating layer 25A similar to the interlayer insulating layer 8A having approximately the same thickness as the superconductor layer 9 is formed as a spacer, and the interlayer insulating layer 25A is opposite to the substrate 1111 of the 8 person. On the side surface, around the superconductor layer 5m, an insulating layer 22A similar to the interlayer insulating layer 8m having approximately the same thickness as the superconductor layer 5m is formed. Insulating layer 22 on top
A #/# structure should be obtained in which seven superconductor layers are formed through B (a superconductor layer 710 is formed as a spacer, and further on five superconductor layers and the insulating layer 22A). In this case, the 7 superconductor layers, the 8 interlayer insulating layers and the uniform insulating layer 21 having approximately the same thickness are uniformly formed as a spacer, so that the insulating layer 3A is It has a flat upper surface that can be used as a base almost parallel to the plate surface of the substrate 1, and correspondingly, the grounding superconductor layer 2AB has a flat upper surface, and also in the superconducting circuit configuration @10B. Then, on the surface of the insulating layer 3B opposite to the grounding superconductor layer 2ABII, an insulating layer having approximately the same thickness as the superconductor layer 5B is placed around the superconductor layer 5B. An insulating layer 21B similar to 5B is formed as a spacer in order to obtain a structure in which a superconductor layer 7B is formed on an insulating layer 3B via an insulating layer 21B, and further superconductor layer 5B and an insulating layer On the superconductor layer 7B, an insulating layer 22B similar to the insulating layer 3B having substantially the same thickness as the superconductor layer 7B is formed on the superconductor layer 7B as a spacer, thus forming an interlayer. The structure is the same as that shown in FIG. sm2, except that the insulating layer 8B has a flat upper surface that can be polished parallel to the interplates of the substrate 1.

Practically insulating layers 25, 22A, 21, 21B and 22
B can be formed by a so-called lift-off method after forming superconductor layers 9M, 5M, 7M, 6B and 7B, respectively.

The above is the structure of another example of the super-flat 411jl emplacement according to the present invention.
Since the configuration is the same as in the 21st case except for ξ having 25A, 21B] and 22B, an excellent e-spring similar to that in the case shown in FIG. 92 can be obtained.

However, in the case of the superconducting circuit device according to the present invention described above in FIG. 3, the insulating layers 21A, 22A,
23, 21B, and 22B, the superconductor layer 5
A17mu, 6-B.

7B and 9B do not overlap and elongate, and therefore, there is no possibility of unnecessarily disconnecting the superconductor layers 5, 7, 6, 17B, and 9B. .

The above description merely shows a few examples of the present invention, and the superconducting circuit structure M has a structure in which either one of the parts 10A and 10B has a super-flat four-body layer but does not have a Josephson junction. It is also possible to do so. Furthermore, in the above description, the Josephson junction has been disclosed and explained as being a so-called tunnel junction straight Sat, but the Josephson junction can also be a tunnel-aligned orthogonal type, or even a bridge type. It would be possible to make other modifications and variations of the figures without departing from the spirit of invention.

[Brief explanation of the drawing]

Figure 1 is a 4-axis view showing the conventional superconducting circuit configuration.
FIG. 2 is a schematic sectional view showing one example of the superconducting circuit device according to the present invention, and FIG. 3 is a schematic sectional view showing another example of the superconducting circuit device according to the present invention. In the figure, 1 is a substrate, 2AB is a superconductor layer for contact deposition, 3A and 5B are insulating layers, 4A and 4B are superconducting circuits, 5 people 1.5
B, 7A, 7B, 9 and 9B are superconductor layers, 10 and 10B are super-flat 4ig circuit components, 11 and 11B are Josephson junctions, and 21A, 22A, 25 and 21B and 22B are spacers. The insulating layers are shown respectively. Applicant Nippon Telegraph Corporation

Claims (1)

[Claims] A superconducting port consisting of a superconducting circuit on an insulating layer*
*# at least two 7s in the g section! 1 and a second superconductor 4 as the same circuit component, and the first and second superconductor circuit configurations have a common grounding superconductor layer between them. A superconducting path device characterized by ◆, which is formed by being stacked on a substrate in this manner.