JPS588919A - 燃焼制御回路 - Google Patents

燃焼制御回路

Info

Publication number
JPS588919A
JPS588919A JP56107629A JP10762981A JPS588919A JP S588919 A JPS588919 A JP S588919A JP 56107629 A JP56107629 A JP 56107629A JP 10762981 A JP10762981 A JP 10762981A JP S588919 A JPS588919 A JP S588919A
Authority
JP
Japan
Prior art keywords
purge
post
switch
circuit
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56107629A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621484B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Takuo Ohara
拓雄 大原
Junji Tanaka
淳司 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Original Assignee
Tokyo Sanyo Electric Co Ltd
Tottori Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Tottori Sanyo Electric Co Ltd, Sanyo Electric Co Ltd, Sanyo Denki Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP56107629A priority Critical patent/JPS588919A/ja
Publication of JPS588919A publication Critical patent/JPS588919A/ja
Publication of JPS621484B2 publication Critical patent/JPS621484B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N5/00—Systems for controlling combustion
    • F23N5/20—Systems for controlling combustion with a time programme acting through electrical means, e.g. using time-delay relays
    • F23N5/203—Systems for controlling combustion with a time programme acting through electrical means, e.g. using time-delay relays using electronic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2227/00—Ignition or checking
    • F23N2227/06—Postpurge

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Combustion (AREA)
JP56107629A 1981-07-09 1981-07-09 燃焼制御回路 Granted JPS588919A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56107629A JPS588919A (ja) 1981-07-09 1981-07-09 燃焼制御回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56107629A JPS588919A (ja) 1981-07-09 1981-07-09 燃焼制御回路

Publications (2)

Publication Number Publication Date
JPS588919A true JPS588919A (ja) 1983-01-19
JPS621484B2 JPS621484B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-13

Family

ID=14464024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56107629A Granted JPS588919A (ja) 1981-07-09 1981-07-09 燃焼制御回路

Country Status (1)

Country Link
JP (1) JPS588919A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240160341A (ko) 2023-05-02 2024-11-11 세메스 주식회사 가스 공급 장치, 가스 공급 제어 방법, 및 기판 처리 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413625U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-06-24 1979-01-29
JPS55122067U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-02-21 1980-08-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413625U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-06-24 1979-01-29
JPS55122067U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-02-21 1980-08-29

Also Published As

Publication number Publication date
JPS621484B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-13

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