JPS5888612A - Tracer head - Google Patents
Tracer headInfo
- Publication number
- JPS5888612A JPS5888612A JP2388582A JP2388582A JPS5888612A JP S5888612 A JPS5888612 A JP S5888612A JP 2388582 A JP2388582 A JP 2388582A JP 2388582 A JP2388582 A JP 2388582A JP S5888612 A JPS5888612 A JP S5888612A
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- displacement
- movable
- head
- stylus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000700 radioactive tracer Substances 0.000 title claims description 8
- 238000006073 displacement reaction Methods 0.000 claims abstract description 48
- 241001422033 Thestylus Species 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 abstract 3
- 238000010168 coupling process Methods 0.000 abstract 3
- 238000005859 coupling reaction Methods 0.000 abstract 3
- 230000010355 oscillation Effects 0.000 abstract 1
- 229920002545 silicone oil Polymers 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
コノ発明は、スタイラスを支持する可動体をスタイラス
の軸線と直交する面内で移動可能に支持し、このスタイ
ラス軸線と直交する方向の変位を一対の変位検出器によ
って斤いに直交する２方向の変位に分離して検出するよ
うに■、たトレーサヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention supports a movable body that supports a stylus so as to be movable in a plane orthogonal to the axis of the stylus, and detects displacement in a direction orthogonal to the axis of the stylus using a pair of displacement detectors. This invention relates to a tracer head that is configured to detect displacement in two orthogonal directions separately.
従来のこのようなトレーサヘッドにおいては、スタイラ
スを上下動可能に支持するｉｉＪ動体を、水平面内の特
定の方向に移動できるように第１の平行ばねを介Ｉ７て
別の中間ｍ動体に支持するとともに、この中間ｍ動体を
前記特定の方向と直交する水平方向に移動できるように
第２の平行ばねを介１、でヘッド本体に固着し、前記中
間ｍ動体とｍ動体との間に可動体の前記特定方向の変位
を検出する変位検出器を配設し、ヘッド本体と中間ｍ動
体との間に前記ｍ動体の前記特定方向と直交する方向の
変位を検出する変位検出器を配設置、て、＋ｉＪ動体の
スタイラス軸線と直交する面内での変位を検出するよう
にしていた。In such a conventional tracer head, a moving body supporting the stylus in a vertically movable manner is supported by another intermediate moving body via a first parallel spring so as to be movable in a specific direction in a horizontal plane. At the same time, a movable body is fixed to the head body via a second parallel spring 1 so that the intermediate moving body can be moved in a horizontal direction perpendicular to the specific direction, and a movable body is provided between the intermediate moving body and the m moving body. a displacement detector for detecting displacement in the specific direction, and a displacement detector for detecting displacement of the m moving body in a direction perpendicular to the specific direction between the head main body and the intermediate m moving body; Accordingly, the displacement of the +iJ moving object in a plane orthogonal to the stylus axis was detected.
しかしながら、このものにおいては−ス・１の変位力
検出器の少なくとも一対は１旧１旧１［動体に取ｆＪ（
Ｊなければならないために、スタイラスとともに変位す
る可動部の重Ｍが増大することになり、慣性力が増Ｉ、
てＪ口従速度が低下する問題があるだけでなく、中間ｎ
ｆ動体のない支持構成の・Ｕ、のでは、変位検出器をこ
のような配置ａで取イ・Ｊりることかできない問題があ
る。However, in this device, at least one pair of displacement force detectors in the
J, the weight M of the movable part that displaces with the stylus increases, and the inertia force increases.
Not only is there a problem that the J mouth compliance speed decreases, but also the intermediate n
In the case of a supporting structure without a moving body, there is a problem that the displacement detector can only be arranged in such an arrangement.
」５だ、ヘッド本体に一部」の変位検出器をＬＩ九）に
直交１．て配■ｔＩ−で、それぞれの［１１動部がスタ
イラスのＩＩｑｈ線に向って進退てきるようｉ／ｃＬ
、この一対の変位検出器の１■動ｆπ；先端を、可動体
のｌｔ、いに直交する一対のグ１側面にそ）１．そノ１
．押圧係合さぜたもノテハ上述した問題はないが、この
ものでＨ−＋ｉＪ 動体と変位検出器の１１動部との間
が摺接しているため、長時間の使用の間には可動体の側
面および変位検出器の１１」動部先端が摩耗して、ｉｉ
ｌ！Ｉ定ｆｔｊ度が悪化する恐れがある。5. Place the displacement detector (part of the head body) orthogonally to the LI9). With the tI-, set the i/cL so that each [11 moving part moves forward and backward toward the IIqh line of the stylus.
, the tips of the pair of displacement detectors are placed on the sides of the pair of displacement detectors orthogonal to the movable body. Part 1
．． Pressure engagement does not have the above-mentioned problem, but since there is sliding contact between the moving body and the 11 moving part of the displacement detector, the movable body cannot be used for long periods of time. The side surface of the 11" moving part of the displacement detector is worn out, and the ii
l! There is a possibility that the I constant ftj degree will deteriorate.
本発明はこのような従来σ）問題点に鑑みてなされたも
ので、ヘッド本体に取イ旧ノｒ、ノ′１．た一対の変位
検出器の可動部のそれそカフと、スタイラスを支持しス
タイラスの軸線と直交する面内で変位する可動体との間
を、互いに直交して配設された−・対の板ばねによって
連結することによって、スタイラス軸線と直交する方向
の目ｆ動体の変位を、ヘッド本体に設けられた一対の変
位検出器によって高精度にかつ長期にわたって安定的に
検出できるようにすることを１」的とするものである。The present invention has been made in view of the problems of the conventional σ). A pair of plates arranged orthogonally to each other between the cuffs of the movable parts of the pair of displacement detectors and the movable body that supports the stylus and is displaced in a plane perpendicular to the axis of the stylus. One object of the present invention is to enable a pair of displacement detectors provided on the head body to stably detect the displacement of the moving object in the direction orthogonal to the stylus axis with high precision over a long period of time by connecting them with a spring. ”.
以下本発明の実施例を図面に基づいて説明する。Embodiments of the present invention will be described below based on the drawings.
第１図、第２図において、１は横断面が正方形の筒状の
可動体であり、この！’ＩＴ 動体１はカバー２内の中
心に軸線方向を垂直方向ｃ以下２万自という）にして配
設されている。可動体ｌの下端には可動ヘッド３が固定
され、可動ヘッド３はカバー２の下方に延びている。可
動ヘッド３内の中心にはスタイラス４が１１ｆ動体ｌと
同軸線上に配設され、スタイラス４は上、下板ばね５，
６によって可動ヘッド乙に２方向への移動ｆ「能に弾性
支持されている。前記スタイラス４の下部は」動ヘッド
３の下方に延び、スタイラス４の下端には球状接触部４
ａが形成されている。差動トランスからなるＺ方向変位
検出器７のｒＪＪ動コア８がスタイラス４の上。In Figures 1 and 2, 1 is a cylindrical movable body with a square cross section, and this! 'IT The moving object 1 is arranged at the center within the cover 2 with the axial direction being the vertical direction c or less. A movable head 3 is fixed to the lower end of the movable body 1, and the movable head 3 extends below the cover 2. A stylus 4 is disposed at the center of the movable head 3 coaxially with the moving body 11f, and the stylus 4 is attached to upper and lower leaf springs 5,
The lower part of the stylus 4 extends below the movable head 3, and the lower end of the stylus 4 has a spherical contact portion 4.
a is formed. The rJJ motion core 8 of the Z-direction displacement detector 7 consisting of a differential transformer is on the stylus 4.
下板ばね５，６間に位置する部分に設けられ、前記可動
コア８と対応する位置にコイル９が配置され、コイル９
は可動ヘッド３に固定されている。A coil 9 is provided in a portion located between the lower leaf springs 5 and 6, and is disposed at a position corresponding to the movable core 8.
is fixed to the movable head 3.
前記＋１１動ヘッド３内下部には吸振ダンパ１０の筒体
１０ａが固定され、この筒体１０ａの上、下端にベロー
ズ１０ｂ、 １００の一！／Ｍｆが固定され、これらの
他端がスタイラス４に固定され、筒体１０ａおよびベロ
ーズ１０ｂ、 １０ｃで囲まれた内冷（に０Ｊシリコー
ンオイルが封入され、スタイラス４に設けた鍔４ｂがシ
リコーンオイル内に挿入されている。前記カバー２内に
はこれと一体にヘッド本体１１が固定され、ヘッド本体
１１にはこれの一部を構成する左、右支持ブロック１２
が相対向Ｉ−で固定されている。前記可動体１の各角部
外面には、水平方向の第２図」−下方向（以下Ｙ方向と
いう）に延びる４個の第１連結体１３が配設され、第１
連結体１３の外端と前記支持ブロック１２の両端部との
間には水平方向の第２図左右方向Ｃ以下Ｘ方向という）
に延びる４個の第２連結体１４が配設されている。第１
．第２連結体１３．１４は、金属なとの剛体からなり、
２方向に「１］動体１より少し短い長さをもっている。A cylindrical body 10a of a vibration absorbing damper 10 is fixed to the inner lower part of the +11 dynamic head 3, and bellows 10b, 100 are attached to the upper and lower ends of the cylindrical body 10a. /Mf is fixed, the other end of these is fixed to the stylus 4, and 0J silicone oil is sealed in the internal cooler surrounded by the cylindrical body 10a and bellows 10b and 10c, and the collar 4b provided on the stylus 4 is filled with silicone oil. A head main body 11 is fixed integrally within the cover 2, and left and right support blocks 12 forming a part of the head main body 11 are inserted into the cover 2.
is fixed at relative orientation I-. Four first connecting bodies 13 are disposed on the outer surface of each corner of the movable body 1 and extend in the horizontal direction (FIG. 2)-downward (hereinafter referred to as the Y direction).
There is a horizontal direction between the outer end of the connecting body 13 and both ends of the support block 12.
Four second connectors 14 are provided that extend to. 1st
．． The second connecting body 13.14 is made of a rigid body such as metal,
It has a length slightly shorter than ``1'' moving object 1 in two directions.
ｌ■動体１の角部外面と第１連結体１３の内端部とが十
字ばね工５を介して連結され、第１連結体１３の外端部
と第２連結体１４の一端部とが十字ばね１６を介して連
結され、さらに第２連結体１４の他端部と支持ブロック
］−２の両端とが十字ばね１７を介して連結されて、そ
れぞれ」二下２個所で可動体１が支持ブロック１２にＸ
、Ｙ方向への移動可能に弾性支持されている。なお、前
記十字ばね１５．１６．１７は、Ｚ方向寸法が短い２枚
のばね片を互に直角をなすように配置して立体交差させ
、前述した各部材にばね片の両端部をビスで締付は固定
するものであり、すべての十字ばねのばね常数を互に等
しくすることにより、Ｘ、Ｙ各方向に相等しくかつ板ば
ね５Ｉ６による２方向のばね常数とも等しいばね常数で
可動体１を支持ブロック１２［弾性支持している。l) The outer corner of the moving body 1 and the inner end of the first connecting body 13 are connected via the cross spring 5, and the outer end of the first connecting body 13 and one end of the second connecting body 14 are connected. The movable body 1 is connected via a cross spring 16, and the other end of the second connecting body 14 and both ends of the support block 1-2 are connected via a cross spring 17. X on support block 12
, are elastically supported so as to be movable in the Y direction. The cross springs 15, 16, and 17 are made by arranging two spring pieces with short dimensions in the Z direction so as to intersect with each other at right angles, and attaching both ends of the spring pieces to each of the above-mentioned members with screws. Tightening is for fixing, and by making the spring constants of all the cross springs equal to each other, the movable body 1 is made to have a spring constant that is equal in each of the X and Y directions and is also equal to the spring constant in the two directions by the leaf spring 5I6. is elastically supported by the support block 12.
さらに、第１図、第３図に示すように、可動体１の上端
部の隣接する２辺にそれぞれＹ方向およびＸ方向に所定
の幅を有する板はね１８．１９の下端部が固定され、こ
れらの上端部にはＹ方向、Ｘ方向連結？ｆ１１拐２０．
２１がそれぞれ固定されている。Ｙ方向、Ｘ方向連結部
＋ｌ’Ｊ’２０．２１は、Ｙ方向、Ｘ方向に延びて、＋
ｊｌ動体１」〕方でｔ７に接触Ｌ＆いように直角に立体
交差されている。Ｙ方向、Ｘ方向連結部１Ａ２０．２１
の一端は差動Ｉ・ランスかＣ）なるＹ方向。Furthermore, as shown in FIGS. 1 and 3, the lower ends of plate blades 18 and 19 having predetermined widths in the Y direction and the X direction are fixed to two adjacent sides of the upper end of the movable body 1, respectively. , are the upper ends of these connected in the Y and X directions? f11 kidnapping 20.
21 are fixed respectively. The Y direction and X direction connecting portion +l'J'20.21 extends in the Y direction and the X direction, and
Jl Moving Object 1] is crossed at right angles to t7. Y direction, X direction connecting part 1A20.21
One end is the differential I/lance (C) in the Y direction.
Ｘ方向変位検出器２２，２．３の開動コア２４．２５０
内端とそれぞれ固定され、これらの可動コア２４．２５
と対応する位置に配置されたコイル２６．２’７がヘッ
ド４（体］−１に固定され、ｉ＋■動コア２４．２５の
他端が２方向に延びる板ばね２８．２９でヘッド本体１
１Ｖｌ連結支持されている。また・Ｙ方向、Ｘ方向連結
部４４’ ２０ 。Opening core 24.250 of X-direction displacement detector 22, 2.3
These movable cores 24.25 are respectively fixed with their inner ends.
A coil 26.2'7 arranged at a position corresponding to the head body 1 is fixed to the head 4 (body)-1, and the other end of the i+■ moving core 24.25 is connected to the head body 1 by a leaf spring 28.29 extending in two directions.
1Vl connection supported. Also, Y-direction and X-direction connecting portions 44' 20 .
２１の他端はダンパ１ｌｉＩｌ１３０．３：Ｌの内端と
固定され、これらの軸３０．３］−はコア２４．２５の
＋Ｉ＋ｌ＋線延長方向に延びる軸線をもち、ダンパ１ｌ
ｌｌｌＩ３０，３１の外Ｚ１ｊがＺ方向に延びる板ばね
３２．３３を介してヘッド本体１１に連結支持されてい
る。ヘッド本体１１．ＶＣ吸振ダンパ１０と同様な吸振
ダンパ３４．３５の筒体３４ａ、 ３５８が固定され、
これらの節体３４ａ、 ３５ａの両端にベローズ３４ｂ
、 ３４ｃ、 ３５ｂ、 ３５ｃの一端が固定され、
これらの他端がダンパ軸３０．３１に固定され、吸振ダ
ンパ１０内に封入されたシリコーンオイル内にダンパ軸
３０、３１に設けた鍔３Ｃ１ａ、 ３１ａがそれぞれ挿
入されている。The other end of 21 is fixed to the inner end of the damper 1liIl130.3:L, and these axes 30.3]- have an axis extending in the +I+l+ line extension direction of the core 24.25, and the damper 1l
The outer sides Z1j of IllI30 and 31 are connected and supported by the head body 11 via leaf springs 32 and 33 extending in the Z direction. Head body 11. Cylindrical bodies 34a and 358 of vibration dampers 34 and 35 similar to the VC vibration damper 10 are fixed,
Bellows 34b are attached to both ends of these segments 34a and 35a.
, 34c, 35b, one end of 35c is fixed,
The other ends of these are fixed to the damper shafts 30 and 31, and flanges 3C1a and 31a provided on the damper shafts 30 and 31 are inserted into silicone oil sealed in the vibration damper 10, respectively.
次に、以」−のように構成されたトレーサヘッドの動作
について説明する。トレーサヘッドと被検出物と相対移
動により、スタイラス４の接触部４ａが被検出物上接触
１−、スタイラス４がＺ方向に上。Next, the operation of the tracer head configured as follows will be explained. Due to the relative movement between the tracer head and the object to be detected, the contact portion 4a of the stylus 4 comes into contact with the object to be detected 1-, and the stylus 4 moves upward in the Z direction.
下板ばね５，６のばね力に抗して移動すると、２方向度
位検出器７のコア８がフィル９に抗して変位するので、
Ｚ方向変位検出器？［よってＺ方向の変位が検出される
。また、スタイラス４にＹ方向の力が作用１１、十字ば
ね１．５．１６．１７のばね力に抗して可動体１がＹ方
向に移動すると、板ばね１８゜Ｙ方向連結部材２０を介
してＹ方向変位検出器２２の可動コア２５がコイル２６
に対して変位するので、Ｙ方向変位検出器２２によって
Ｙ方向の変位が検出される。さらに、スタイラス４にＸ
方向の力が作用して可動体１がＸ方向に移動すると、板
ばね１９゜ ７−
Ｘ方向連結部拐２１を介Ｉ、てＸ方向変位検出器２３の
＋ｉＪ動コア２４が変位するので、Ｘ ｉｌｉ＋Ｉ＋方
向変位検出器２３によってＸ軸方向の変位が検出される
。そして、Ｘ、Ｙ、Ｚ方向変位検出器２３．２２．７か
らの検出器けによって被検出物Ｘ、Ｙ、Ｚ方向の座標に
より、被検出物の形状を検出することができる。まだ、
被検出物を被測定物に１．た場合には、その形状を正確
に測定できる。When it moves against the spring force of the lower plate springs 5 and 6, the core 8 of the two-direction degree detector 7 is displaced against the fill 9.
Z direction displacement detector? [Thus, displacement in the Z direction is detected.] Further, when a force in the Y direction is applied to the stylus 4 and the movable body 1 moves in the Y direction against the spring force of the cross springs 1, 5, 16, and 17, the leaf spring 18 is moved through the Y direction connecting member 20. The movable core 25 of the Y-direction displacement detector 22 is connected to the coil 26.
Therefore, the displacement in the Y direction is detected by the Y direction displacement detector 22. Furthermore, X on stylus 4
When the movable body 1 moves in the X direction due to a force in the direction, the +iJ moving core 24 of the X direction displacement detector 23 is displaced via the leaf spring 19°7-X direction connecting part 21. The X ili+I+ direction displacement detector 23 detects the displacement in the X-axis direction. Then, the shape of the object to be detected can be detected from the coordinates of the object in the X, Y, and Z directions using the detectors from the X, Y, and Z direction displacement detectors 23.22.7. still,
1. Object to be measured as object to be measured. In this case, its shape can be measured accurately.
以上述べたように本発明においては、ヘッド本体に取ｆ
Ｊけた一対の変位検出器の１１ｆ動部のそれぞれと、ス
タイラスを支持しスタイラス軸線と直交する面内で変位
する＋ｉＪ動体との間を、！ｊ−いに直交１−で配設さ
れた一対の板ばねによって連結することによって、可動
体のスタイラス軸線と直交する面内での特定方向の変位
のみを一方の変位検出器に伝達１−１特定方向と直交す
る他方向の変位のみを他方の変位検出器に伝達するよう
にした構成であるので、可動体のスタイラス軸線と直交
する方向の変位をヘッド本体に取（’Ｊけた一対の変位
検出器によって高精度に４（す定できるた（Ｊでなく、
１−１ｆ動 ８一
体と変位検出器の可動部との間に摺動部がないため、高
精度な測定を長期にわたって行なえる利点がある。As described above, in the present invention, the head body has a
Between each of the 11f moving parts of the pair of J-digit displacement detectors and the +iJ moving body that supports the stylus and is displaced in a plane orthogonal to the stylus axis,! By connecting a pair of leaf springs disposed at right angles to each other, only the displacement in a specific direction in a plane orthogonal to the stylus axis of the movable body is transmitted to one of the displacement detectors 1-1. Since the configuration is such that only the displacement in the other direction orthogonal to the specific direction is transmitted to the other displacement detector, the displacement in the direction orthogonal to the stylus axis of the movable body is transmitted to the head body (a pair of 'J-digit displacements'). 4 (not J) can be determined with high precision by the detector.
Since there is no sliding part between the 1-1f movement 8 and the movable part of the displacement detector, there is an advantage that highly accurate measurement can be performed over a long period of time.
第１図はこの発明の実施例を示す縦断面図、第２図およ
び第３図は第１図の■−■線および■−■線に沿う断面
図である。
１・・・目１動Ｋ、４ ＠ ＠ ＠スタイラス、５Ｉ
６・・・−Ｌ、下板ばね、１１・・・ヘッド本体、１２
・・・支持ブロック、１３．１４拳・・第１＋ ’Ｍ
２４ 給体、１５．１６．１７・・・十字ばね、１Ｂ、
１９・雫・板ばね、２０．２１−−・連結体、２２．
２３・・・変位検出器、２４．２５・・・Ｉ「動コア。
特許出願人
豊田工機株式会社FIG. 1 is a longitudinal cross-sectional view showing an embodiment of the present invention, and FIGS. 2 and 3 are cross-sectional views taken along the lines ■--■ and ■--■ in FIG. 1...Eye 1 movement K, 4 @ @ @ stylus, 5I
6...-L, lower leaf spring, 11... head body, 12
...Support block, 13.14 fist...1st + 'M
24 Supply body, 15.16.17...Cross spring, 1B,
19. Droplet: Leaf spring, 20.21--Connection body, 22.
23...Displacement detector, 24.25...I "moving core. Patent applicant Toyota Machinery Co., Ltd.
Claims (1)
対して前記スタイラスの軸線と直交する面内で移動可能
に支持Ｉ７、前記ｍ動体の前記スタイラス軸線と直交す
る面内での変位を前記ヘッド本体に固着した一対の変位
検出器によって検出するようにしたトレーサヘッドにお
いて、前記一対の変位検出器のそれぞれの用動部が前記
１■動体の変位平面と平行でかつ互いに直交状態にある
一対の移動方向のそれぞれに沿って移動できるように前
記一対の変位検出器の固定部と可動部とを前記ヘッド本
体に支持するとともに、前記一対の変位検出器の可動部
のそれぞれと前記可動体２を、それぞれの可動部の移動
方向に所定の幅を有しそれぞれの可動部の移動方向と直
交する方向のみに弾性変形する板ばねによって連結した
ことを特徴とするトレーサヘッド。(1) The m moving body supporting the stylus is movably supported I7 relative to the head body in a plane orthogonal to the stylus axis, and the displacement of the m moving body in the plane orthogonal to the stylus axis is controlled by the head body. In the tracer head, the detection is performed by a pair of displacement detectors fixed to the tracer head, in which each movable part of the pair of displacement detectors is parallel to the displacement plane of the moving body and perpendicular to each other. A fixed part and a movable part of the pair of displacement detectors are supported on the head main body so as to be movable along each of the directions, and each of the movable parts of the pair of displacement detectors and the movable body 2 are A tracer head characterized in that each movable part is connected by a leaf spring having a predetermined width in the direction of movement of each movable part and elastically deformed only in a direction perpendicular to the direction of movement of each movable part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2388582A JPS5888612A (en) | 1982-02-17 | 1982-02-17 | Tracer head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2388582A JPS5888612A (en) | 1982-02-17 | 1982-02-17 | Tracer head |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18734081A Division JPS5888604A (en) | 1981-11-21 | 1981-11-21 | Tracer head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5888612A true JPS5888612A (en) | 1983-05-26 |
| JPH037044B2 JPH037044B2 (en) | 1991-01-31 |
Family
ID=12122897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2388582A Granted JPS5888612A (en) | 1982-02-17 | 1982-02-17 | Tracer head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5888612A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074004U (en) * | 1983-10-26 | 1985-05-24 | 日立精機株式会社 | Contact measuring device for machine tools |
| NL1037143C (en) * | 2008-08-14 | 2010-03-09 | Sios Messtechnik Gmbh | DEVICE FOR THE TACTICAL MEASUREMENT OF THREE-DIMENSIONAL FORCES. |
| CN108007357A (en) * | 2017-11-14 | 2018-05-08 | 成都华量传感器有限公司 | Flat spring measurement structure and displacement sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51149050A (en) * | 1975-05-13 | 1976-12-21 | Rolls Royce | Measuring device |
| JPS52145058A (en) * | 1976-03-24 | 1977-12-02 | Rolls Royce | Displacement measuring device |
-
1982
- 1982-02-17 JP JP2388582A patent/JPS5888612A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51149050A (en) * | 1975-05-13 | 1976-12-21 | Rolls Royce | Measuring device |
| JPS52145058A (en) * | 1976-03-24 | 1977-12-02 | Rolls Royce | Displacement measuring device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074004U (en) * | 1983-10-26 | 1985-05-24 | 日立精機株式会社 | Contact measuring device for machine tools |
| NL1037143C (en) * | 2008-08-14 | 2010-03-09 | Sios Messtechnik Gmbh | DEVICE FOR THE TACTICAL MEASUREMENT OF THREE-DIMENSIONAL FORCES. |
| CN108007357A (en) * | 2017-11-14 | 2018-05-08 | 成都华量传感器有限公司 | Flat spring measurement structure and displacement sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037044B2 (en) | 1991-01-31 |
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