JPS5888428U - surface acoustic wave device - Google Patents
surface acoustic wave deviceInfo
- Publication number
- JPS5888428U JPS5888428U JP14019282U JP14019282U JPS5888428U JP S5888428 U JPS5888428 U JP S5888428U JP 14019282 U JP14019282 U JP 14019282U JP 14019282 U JP14019282 U JP 14019282U JP S5888428 U JPS5888428 U JP S5888428U
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- wave device
- axis
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図はニオブ酸リチウム単結晶基板の結晶軸配向の説
明図、第2図は本考案の実施例の構成を示す説明図、第
3図a、 b〜第10図は本考案の効果を示す特性図
であり、図中、1は基板、2□。
2□は入出カドランジューサ、3は伝搬路、4はシリコ
ン酸化膜を示す。Fig. 1 is an explanatory diagram of the crystal axis orientation of a lithium niobate single crystal substrate, Fig. 2 is an explanatory diagram showing the configuration of an embodiment of the present invention, and Figs. 3a, b to 10 illustrate the effects of the present invention. In the figure, 1 is the substrate and 2 □. 2□ indicates an input/output quadrant, 3 indicates a propagation path, and 4 indicates a silicon oxide film.
Claims (1)
るようにカットしたニオブ酸リチウム単結晶基板上に入
出力電極を形成し1該入出力電極を含む前記基板の上に
弾性表面波波長の1720以上175未満の膜厚のシリ
コン酸化膜を被着したことを特徴とする弾性表面波素子
。Input/output electrodes are formed on a lithium niobate single crystal substrate cut so that the crystal axis is oriented at a y-axis rotation angle of 125° to 131'; 1. A surface acoustic wave device comprising a silicon oxide film having a thickness of 1720 or more and less than 175 wavelength.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14019282U JPS5888428U (en) | 1982-09-16 | 1982-09-16 | surface acoustic wave device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14019282U JPS5888428U (en) | 1982-09-16 | 1982-09-16 | surface acoustic wave device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5888428U true JPS5888428U (en) | 1983-06-15 |
Family
ID=29933362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14019282U Pending JPS5888428U (en) | 1982-09-16 | 1982-09-16 | surface acoustic wave device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5888428U (en) |
-
1982
- 1982-09-16 JP JP14019282U patent/JPS5888428U/en active Pending
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