JPS5886558U - Specular object scratch inspection device - Google Patents
Specular object scratch inspection deviceInfo
- Publication number
- JPS5886558U JPS5886558U JP18332581U JP18332581U JPS5886558U JP S5886558 U JPS5886558 U JP S5886558U JP 18332581 U JP18332581 U JP 18332581U JP 18332581 U JP18332581 U JP 18332581U JP S5886558 U JPS5886558 U JP S5886558U
- Authority
- JP
- Japan
- Prior art keywords
- inspection device
- light
- light sources
- specular object
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の表面傷の検査装置の1例を示す概略側面
図、第2図は光源と表面傷との位置関係を赤す平面図、
第3図、第4図は同側面図、第5 −図aは本考案の1
実施例における検査装置の側面図、bは2つの光源の位
置関係を示す同平面図である。
1・・・・・・被検査体、8.8′・・・・・・傷、7
・・・・・・受光面、16.17・・・−u、1 B・
・・・・・レンズ。
第4図 2
1 \FIG. 1 is a schematic side view showing an example of a conventional surface flaw inspection device, and FIG. 2 is a plan view showing the positional relationship between the light source and surface flaws.
Figures 3 and 4 are the same side views, and Figure 5-a is a part of the present invention.
FIG. 2 is a side view of the inspection device in the embodiment, and FIG. 1...Test object, 8.8'...Flaw, 7
...... Light receiving surface, 16.17...-u, 1 B.
·····lens. Figure 4 2 1 \
Claims (3)
照射する複数の光源どJ前記表面の傷により乱反射され
た前記光源よりの光を集光して受光面に導く光学手段と
を有し、前部受光面上に一照射された光の状態により前
記被検査体の表面の傷を検査する鏡面体の傷検査装置。(1) A plurality of light sources that irradiate the surface of the object to be inspected from mutually opposite directions; and an optical means that collects the light from the light sources that is diffusely reflected by scratches on the surface and guides it to the light receiving surface. A specular object flaw inspection device for inspecting flaws on the surface of the object to be inspected based on the state of light irradiated onto the front light-receiving surface.
°〜150°異なった方向より被検査体に照射されるよ
う光源が配設されていることを特徴とする実用新案登録
請求の範囲第1項に記載の鏡面体の傷検査装置。(2) At least two of the lights from the plurality of light sources are mutually 30
The apparatus for inspecting scratches on a specular object according to claim 1, wherein the light sources are arranged so as to irradiate the object to be inspected from directions different from each other by 150 degrees.
る実用新案登録請求の範囲第1項あるいは第2項に記載
の鏡面体の傷検査装置。(3) Utility model registration claim item 1 or 2. The specular object scratch inspection device according to item 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18332581U JPS5886558U (en) | 1981-12-08 | 1981-12-08 | Specular object scratch inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18332581U JPS5886558U (en) | 1981-12-08 | 1981-12-08 | Specular object scratch inspection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5886558U true JPS5886558U (en) | 1983-06-11 |
Family
ID=29982484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18332581U Pending JPS5886558U (en) | 1981-12-08 | 1981-12-08 | Specular object scratch inspection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5886558U (en) |
-
1981
- 1981-12-08 JP JP18332581U patent/JPS5886558U/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2005345281A5 (en) | ||
JPS5886558U (en) | Specular object scratch inspection device | |
JPS6027347U (en) | Appearance test device for striatum | |
JPS59113707U (en) | Mirror surface inspection device | |
JPS6038167Y2 (en) | Measurement lighting device | |
JPS5998353U (en) | Reticle surface scratch detection device | |
JPS5893859U (en) | Single crystal cut surface inspection device | |
JPS5985906U (en) | Flatness measuring device | |
JPS58182556U (en) | Optical sensor assembly | |
JPS62117559U (en) | ||
JPS5964559U (en) | Surface defect inspection equipment | |
JPS5923612U (en) | Sheet inspection equipment | |
JPS5912045U (en) | Glass bottle flaw detection device | |
JPS5899654U (en) | surface inspection equipment | |
JPS59152404U (en) | sample detection device | |
JPS6288947U (en) | ||
JPS59109904U (en) | Measuring position detection device for stylus type shape measuring machine | |
JPS6076254U (en) | Original density detection device | |
JPS59194048U (en) | Coaxial reflective optical inspection device | |
JPH0290009A (en) | Measuring apparatus for pitch of helix | |
JPS6042949U (en) | Defect inspection equipment | |
JPS598144U (en) | automatic inspection equipment | |
JPS5949270U (en) | Optical paper detection device | |
JPS594406U (en) | Transparent sheet material thickness measuring device | |
JPS5849333U (en) | Defect detection device |