JPS5883152U

JPS5883152U - Stylus type measuring device

Info

Publication number: JPS5883152U
Application number: JP17960881U
Authority: JP
Inventors: 正行芝野; 勇井上; 松村　隆吉
Original assignee: 松下電器産業株式会社
Priority date: 1981-12-01
Filing date: 1981-12-01
Publication date: 1983-06-06

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は従来例の側面図、第２図はプローブカードの平
面図、第３図はその断面図、第４図は要部斜視図、第５
図はその針の交差部の拡大斜視図、第６図はその断面図
、第７図は第５図の部分拡大図、第８図はこの考案の一
実施例の斜視図、第９図は要部斜視図、第１０図はその
針を示す拡大斜視図、第１１図および第１２図は各交差
部の拡大図、第１３図は位置検知針の被測定物に対する
非接触状態の側面図、第１４図はその平面図、第１５図
および第１６図は各交差部の断面図、第１７図は位置検
知針の被測定物に対する正常な接触状態の側面図、第１
８図はその平面図、第１９図および第２０図は各交差部
あ断面図、第２１図は位置検知針の被測定物に対する過
圧な接触状態の側面図、第２２薗はその平面図、第２３
図および第２４図は各交差部の断面図、第２５図は制御
ブロック図、第２６図および第２７図はそのタイムチャ
ートである。１・・・被測定物、４・・・測定針、６・・・ブロービ
カード（支持部材）、７・・・位置検知針、７ａ・・・
接触針、７ｂ・・・検知針（検知部材）。。−・第３図Ｘ。第８図　、　　　　− １第６図ａ、ｌ・７ｂ第２！ブｂ　　− 第２３図。市　　　　　　第２４図５図　　　　　　　　　＼７゜Figure 1 is a side view of the conventional example, Figure 2 is a plan view of the probe card, Figure 3 is its sectional view, Figure 4 is a perspective view of the main part, Figure 5
The figure is an enlarged perspective view of the intersection of the needles, Figure 6 is a sectional view thereof, Figure 7 is a partially enlarged view of Figure 5, Figure 8 is a perspective view of an embodiment of this invention, and Figure 9 is A perspective view of the main part, FIG. 10 is an enlarged perspective view showing the needle, FIGS. 11 and 12 are enlarged views of each intersection, and FIG. 13 is a side view of the position detection needle in a non-contact state with respect to the object to be measured. , FIG. 14 is a plan view thereof, FIGS. 15 and 16 are cross-sectional views of each intersection, FIG. 17 is a side view of the position detection needle in a normal state of contact with the object to be measured, and FIG.
Figure 8 is a plan view of the same, Figures 19 and 20 are cross-sectional views of each intersection, Figure 21 is a side view of the position sensing needle in contact with the object under excessive pressure, and Figure 22 is a plan view thereof. , 23rd
24 and 24 are cross-sectional views of each intersection, FIG. 25 is a control block diagram, and FIGS. 26 and 27 are time charts thereof. DESCRIPTION OF SYMBOLS 1... Object to be measured, 4... Measuring needle, 6... Blovi card (supporting member), 7... Position detection needle, 7a...
Contact needle, 7b...detection needle (detection member). . -・Figure 3 X. Figure 8, - 1 Figure 6 a, l, 7b 2nd! Bu b - Figure 23. City Figure 24 Figure 5 ＼7゜

Claims

[Scope of utility model registration request]

(1) A support member disposed so as to be able to approach and move away from the object to be measured, and measurement in which the electrical characteristics of the object are measured by being installed on this support member and coming into contact with the object by approaching the object. A needle, a contact needle which is provided on the support member and elastically deforms when it comes into contact with the measuring needle due to its approaching movement, and a contact needle which is located at the front and rear of the displacement direction of the contact needle and which contacts and separates from the contact needle by the displacement. and a position detection member for detecting a proper contact state of the measuring needle and an overpressure contact portion of the measuring needle.

(2) The position detection member is needle-shaped, and is bent into a substantially helical shape on the contact needle, so that the contact needle is separated from the object to be measured, and the position detection needle is connected to the object to be measured. A stylus-type measuring device according to claim (1) of the utility model registration, which comes into contact when the device contacts and is displaced by a predetermined amount or more.