JPS5883145U - Sample heating mechanism - Google Patents
Sample heating mechanismInfo
- Publication number
- JPS5883145U JPS5883145U JP17933281U JP17933281U JPS5883145U JP S5883145 U JPS5883145 U JP S5883145U JP 17933281 U JP17933281 U JP 17933281U JP 17933281 U JP17933281 U JP 17933281U JP S5883145 U JPS5883145 U JP S5883145U
- Authority
- JP
- Japan
- Prior art keywords
- heating mechanism
- sample heating
- sample
- abstract
- cloner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thermotherapy And Cooling Therapy Devices (AREA)
- Control Of Resistance Heating (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は本考案の一実施例を示した試料の加熱機構、第
2図はその一部詳細図である。
1:基台、2:電熱線、3:絶縁性プレート、4:加熱
用電源、5:金属板、6:絶縁被膜、7:試料、8:高
電圧源。FIG. 1 is a sample heating mechanism showing an embodiment of the present invention, and FIG. 2 is a partially detailed view thereof. 1: Base, 2: Heating wire, 3: Insulating plate, 4: Heating power source, 5: Metal plate, 6: Insulating coating, 7: Sample, 8: High voltage source.
Claims (1)
ンカにより引き合う電極材とを配置した試料加熱機構。A sample heating mechanism in which an electric heating material is placed below the sample via an insulating material, and an electrode material that is attracted to the sample by a cloner.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17933281U JPS5883145U (en) | 1981-12-01 | 1981-12-01 | Sample heating mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17933281U JPS5883145U (en) | 1981-12-01 | 1981-12-01 | Sample heating mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5883145U true JPS5883145U (en) | 1983-06-06 |
Family
ID=29974931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17933281U Pending JPS5883145U (en) | 1981-12-01 | 1981-12-01 | Sample heating mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5883145U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3993509A (en) * | 1973-11-07 | 1976-11-23 | U.S. Philips Corporation | Semiconductor device manufacture |
JPS5483373A (en) * | 1977-12-16 | 1979-07-03 | Fujitsu Ltd | Heating-up method of semiconductor substrate |
-
1981
- 1981-12-01 JP JP17933281U patent/JPS5883145U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3993509A (en) * | 1973-11-07 | 1976-11-23 | U.S. Philips Corporation | Semiconductor device manufacture |
JPS5483373A (en) * | 1977-12-16 | 1979-07-03 | Fujitsu Ltd | Heating-up method of semiconductor substrate |
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