JPS5878359A - Ion generator - Google Patents

Ion generator

Info

Publication number
JPS5878359A
JPS5878359A JP56176738A JP17673881A JPS5878359A JP S5878359 A JPS5878359 A JP S5878359A JP 56176738 A JP56176738 A JP 56176738A JP 17673881 A JP17673881 A JP 17673881A JP S5878359 A JPS5878359 A JP S5878359A
Authority
JP
Japan
Prior art keywords
sample
high voltage
ions
amount
projections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56176738A
Other languages
Japanese (ja)
Other versions
JPS5838911B2 (en
Inventor
Masahiko Tsuchiya
土屋正彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP56176738A priority Critical patent/JPS5838911B2/en
Publication of JPS5878359A publication Critical patent/JPS5878359A/en
Publication of JPS5838911B2 publication Critical patent/JPS5838911B2/en
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To increase the produced amount of sample ions greatly, and improve the sensitivity of a mass spectrograph or an ionization detector exceptionally from that of the conventional one by fixing a sample to a holding member having many projections, and applying a high voltage to said holding member. CONSTITUTION:Since a sample is fixed to and held by a member having a number of pin-line projections 21, to which a high voltage is applied, an exceptionally strong electric field exists around the projections 21, and the sample surface is exposed to the strong electric field. Therefore, molecules of the sample, after receiving the energy of Ar* (11.55eV or 11.72eV) by touching Ar*, are immediately ionized, and rapidly eliminated from the surface due to the strong electric field. As a result, a remarkably increased amount of sample ions can be eliminated by the application of the high voltage, compared to the amount of sample ions eliminated when the same amount of Ar* is applied without any application of high voltage. In addition, in this invention, since the sample is fixed to and held by the many pin-like projections 21, the surface area of the sample (the contact area between Ar* and the sample) is increased, and the produced amount of sample ions is increased in this connection too.

Description

【発明の詳細な説明】 本発明は質量分析装置或いはイオン化検出装置等に用い
て好適なイオン生成装−に関するものである0゛ 本発明番は先lこキャリヤーガスより作成した電荷i項
一ない励起種を試料擾こあてて該試料をイオン化する新
しいイオン生成方法を提案した。この提案方法は特開昭
55−9107号Iど詳説されているが、大略第1図に
例示した装置t構成で実施することができる。同図1こ
おいで1は導入口2から内部へキャリヤーガス例えばア
ルゴンが導入されるガラス管で、該ガラス管1の一端は
絶縁体6Iこよって封止されでおり、該絶縁体6を貫通
して針を極4がガラス管内に挿入されている。ガラス管
の他端lこは上起針鑞極4と向き合う対向W1極5が収
付けられ、該対向I!lt極5に続けて網−極6.リペ
ラ電極7,8が間に絶縁と気密を兼ねるリング9゜10
.11を介してこの順序で配置されている。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion generating device suitable for use in mass spectrometers, ionization detection devices, etc. We proposed a new ion generation method in which an excited species is applied to a sample and the sample is ionized. This proposed method is described in detail in Japanese Unexamined Patent Publication No. 55-9107 I, and can be implemented using the apparatus t configuration roughly illustrated in FIG. In FIG. 1, reference numeral 1 denotes a glass tube through which a carrier gas such as argon is introduced into the interior from an inlet 2. One end of the glass tube 1 is sealed by an insulator 6I, and the glass tube 1 is sealed by an insulator 6I. The needle pole 4 is inserted into the glass tube. At the other end of the glass tube, an opposing W1 pole 5 facing the upper needle brazing electrode 4 is housed, and the opposing I! lt pole 5 followed by net-pole 6. A ring 9゜10 between which the repeller electrodes 7 and 8 serve both as insulation and airtightness.
.. 11 and are arranged in this order.

12は試料である。12 is a sample.

そして針電極4と対向電極5の間にコロナ放電を起こさ
せてアルゴンイオンAr+、を子C−及び励起、状態の
アルゴン原子Ar  (励起S)を作成し、電極6によ
りこのうちAr  及びe−を除いてムrゝのみを取出
し、該Ar の持つ励起(内部)エネルギー醗こよって
試料をイオン化することがこの提案方法の特徴であり、
ta+液体試料を大気圧下で直接イオン化できる、(b
)特にアルゴンを用いると大部分の有機化合物をイオン
化でき、しかも水、空気等は殆んどイオン化しないので
試料を空気中で自由に扱うことができる、(C)大気圧
のイオン化なので厳密な気密が不快となり装置構成を簡
略化できる、等多くの優れた点を有している0 本発明はこの様に優れた点を持つ提案方法を更に改善す
ることを目的とするものであり、特に試料を多数の突起
を有する保持部材に付着保持さぜると共−こ該保持部材
1こ高電圧を印加Vることにより試料イオンの生成量を
飛躍的に増大させ、感度をこれまでよりも桁違い−こ向
上させることのできるイオン生成litを提供するもの
である。以下図面に基づき本発明を詳説する。
Then, a corona discharge is caused between the needle electrode 4 and the counter electrode 5 to create argon ions Ar+, C- and excited argon atoms Ar (excited S), of which Ar and e- are generated by the electrode 6. The feature of this proposed method is to remove only the Ar and ionize the sample using the excitation (internal) energy of the Ar.
ta+ liquid sample can be directly ionized under atmospheric pressure, (b
) In particular, when argon is used, most organic compounds can be ionized, and water, air, etc. are hardly ionized, so samples can be handled freely in the air. (C) Since ionization is performed at atmospheric pressure, strict airtightness is required. The present invention aims to further improve the proposed method, which has such excellent points, and in particular, it By applying a high voltage to each holding member, the amount of sample ions produced is dramatically increased, and the sensitivity is improved by an order of magnitude higher than before. The purpose of this invention is to provide ion generation technology that can improve the difference. The present invention will be explained in detail below based on the drawings.

−第2図は本発明1こかかるイオン生成装置を四重極m
貞電分析装置のイオン源として用いた実施例を示す断面
図、第3図はそのI−I断面図であり、第1図と同一の
傳成Ij!索には同−査号が付されている。本実施−り
ではアルゴンイオンAr十及び電子e−の除去を確実に
するため網颯憧6とリペラ畦極7の間1こもう1枚の網
離極16を配置し適宜な電位を与えており、併せてリン
グ141追加されている。又リング11には排気口15
が設けられると共蓼こ、多数の突起を有する部材を備え
た試料ホルダ16が押入されている。該ホルダ16はガ
ラス緘基台17.該基台を全通する2本の支持旺億18
,19及び該区惚間に張架されたタングステン4I20
から成り、試料液は該タングステン線2uの衣面看こ多
数成長させた針状突起(ウィスカー:例えばシリコンあ
るいは炭素の針状結晶)21に付着保持される。上記タ
ングステン4I2u基こは電源22によりaiv乃至千
赦百Vの高電圧が印加されでおり、必要に応じて鑞#2
6により通電加熱を行うことができる。
- Figure 2 shows an ion generator according to the present invention with a quadrupole m
A cross-sectional view showing an embodiment used as an ion source of a Teiden analyzer, FIG. 3 is a cross-sectional view taken along the line I-I, and the same densification Ij! as in FIG. 1 is shown. The search terms are marked with the same symbol. In this implementation, in order to ensure the removal of argon ions Ar and electrons e-, one more net polarization 16 was placed between the net ion 6 and the repeller ridge 7, and an appropriate potential was applied. In addition, a ring 141 has been added. Also, the ring 11 has an exhaust port 15.
When the sample holder 16 is provided, a sample holder 16 including a member having a large number of protrusions is pushed in. The holder 16 has a glass base 17. There are two supports that pass through the entire base.18
, 19 and tungsten 4I20 stretched between the sections.
The sample liquid is adhered and held on needle-like protrusions (whiskers: for example, needle-like crystals of silicon or carbon) 21 that have grown in large numbers on the surface of the tungsten wire 2u. A high voltage of AIV to 100 V is applied to the above tungsten 4I2U base by the power supply 22, and the solder #2 is applied as needed.
6, electrical heating can be performed.

1紀リング11の後段1こはレンズ磁極24,25、四
極子を極26、イオン検出器27、真空ポンプ28を備
えた四重極屋質量分析装@29が接続されており、両者
の間−こは高真空の′1![′M分析装喧との圧力差を
維持し得る鎌なコンダクタンスが与えられたピンホール
60を何する1他61が設置されている。該電極61は
リング32.こより周囲と絶縁され、vt # 66か
ら適宜な電圧を印加することができる。
A quadrupole mass spectrometer @ 29 equipped with lens magnetic poles 24 and 25, a quadrupole pole 26, an ion detector 27, and a vacuum pump 28 is connected to the rear stage 1 of the primary ring 11. -This is high vacuum '1! A pinhole 60 is provided with a pinhole 60 having a uniform conductance capable of maintaining a pressure difference with the analyzer. The electrode 61 is connected to the ring 32. This makes it insulated from the surroundings, and an appropriate voltage can be applied from VT #66.

上述の如き構成身こおいて、イオン生成装置の内s暑こ
は導入口2からガラスf1.リング9 、 ILI。
With the above-mentioned configuration, the inner heat of the ion generator is connected from the inlet 2 to the glass f1. Ring 9, ILI.

14.11を介して排気口15へ抜ける1気圧@度のア
ルゴンガスの定常流が形成されており、そのうちの一部
はピンホール60を介して買緻分析誠1置内へ流入rる
。そして針fIL億4に例えば3KV4!4tLの員の
高電圧を印加rると、磁極5との間でコロナ放電が起こ
り、この放l1tIとよってカラス管内のアルゴンガス
中にはそのイオンAr、[子e−及び励起状態のアルゴ
ン原子Ar  F紅  が生成する。その反応はおよそ
次式で示される。
A steady flow of argon gas at 1 atm@degrees is formed which escapes to the exhaust port 15 through the opening 14. When a high voltage of, for example, 3KV4!4tL is applied to the needle fIL4, a corona discharge occurs between it and the magnetic pole 5, and due to this discharge, the ions Ar, [ A child e- and an excited state argon atom Ar F are generated. The reaction is approximately shown by the following equation.

放  区 Ar−−→Ar++e−・・・・ (1)Ar LAr
*−、****  L2)(2)式の反応で生成するA
r1は準安定状態(励起エネルギー11−55eV及び
11.72eV)を示す0この人rの状態は寿命が長(
(10sec以J:)、Ar原子と衝突しでも次式の嫌
に共鳴的にエネルギー移動が起こるだけでAr の総数
は変わらないOAr  十 Ar −一一一一一一繁A
r +Ar本   −−−−131この葎にしてコロナ
放1こより生成されたAr+。
Release area Ar--→Ar++e-... (1) Ar LAr
*-, **** L2) A produced by the reaction of formula (2)
r1 indicates a metastable state (excitation energy 11-55 eV and 11.72 eV) 0 This state of person r has a long life (
(after 10 sec J:), even if it collides with an Ar atom, the total number of Ar remains unchanged as only the resonance energy transfer occurs according to the following equation.
r + Ar book ------131 Ar+ generated from one corona blast in this seedling.

e−及びArは定常tlLl(乗って試料ホルダ方向へ
移動するが、amを持つAr十及びe−は適宜な電位が
与えられたsft極6,16を通過することができず除
去されるため、リング11内には電荷を持たないAr*
のみが到達することになる。このAr寧が試料に触れる
とAr’の持つ励起エネルギー(11,55eV或いは
11.72eV )よりも低いイオン比エネルギーを持
つ化合−1jl1Mは次式に従ってすべてイオン化され
る。
e- and Ar are stationary tlLl (ride) and move toward the sample holder, but Ar and e- with am cannot pass through the sft poles 6 and 16 given an appropriate potential and are removed. , Ar* which has no charge in the ring 11
only will be reached. When this Arn comes into contact with the sample, the compound -1jl1M, which has an ion specific energy lower than the excitation energy (11.55 eV or 11.72 eV) of Ar', is completely ionized according to the following equation.

Ar + M−チAr 十M++ e  @ 11@ 
141本発明ではこの時試料を多数の針状突起を持つ部
材−こよって付着保持し、これに高電圧を印加している
ため、針状突起部分ICは極めて強い屯がが存在し試料
表向はこの直昇にさらされている0従ってAr*との接
触着こよりAr’の持つエネルギー(11,55eV或
いは11・72 eV )を受は取った試料分子は即座
にイオン化されてこの強電界1こより表向から速やかに
脱離するため、高電圧を印加しない時に比べ同じ電のA
r”をあてても脱離する試料イオン量を飛躍的に増大さ
せることができ60更に本発明では試料を多数の針状突
起に付着保持させているため試料の表面M(即らAr’
との接触面積)が大きくなり、この面でも生成する試料
イオン社が増大rる0発明者倉こよる実験では高電圧を
印加しない時iこ比べ検出される試料イオン量が10 
〜lO倍曇ζ6増加し、従って感度がl゛02〜10”
匿向上することが確認され、難揮発性試料についても有
効にイオン化できることも確認された0 尚印加する磁圧を^くするS試料イオンの生成・   
 (7) 量を増加さ@:得ることが確かめられたが、約1500
Vを超えると強電界により試料分子ばかりでなく周囲の
アルゴン励起種がイオン化されてしまい、試料イオンに
比べて圧四的曇こ大きなバックグラウンド電流を与える
ので好ましくCく、実際曇こはioo。
Ar + M-chi Ar 10M++ e @ 11@
141 In the present invention, at this time, the sample is attached and held by a member having a large number of needle-like protrusions, and a high voltage is applied to this. Therefore, the sample molecules that receive the energy of Ar' (11.55 eV or 11.72 eV) through contact with Ar* are immediately ionized and ionized by this strong electric field. Since it is quickly desorbed from the surface, the A of the same electric current is lower than when high voltage is not applied.
r'', the amount of sample ions desorbed can be dramatically increased60 In addition, in the present invention, since the sample is attached and held by a large number of needle-like protrusions, the surface M of the sample (i.e., Ar'
The area of contact with
~lO times the cloud increases by ζ6, thus the sensitivity increases by l゛02~10''
It was also confirmed that even difficult-to-volatile samples can be effectively ionized.
(7) Increase the amount @: It was confirmed that you can get about 1500
If it exceeds V, not only the sample molecules but also the surrounding argon excited species will be ionized by the strong electric field, giving a significantly larger background current than the sample ions, so C is preferable; in fact, clouding is ioo.

Vからtsoo yの範囲が印加電圧として破過である
The range from V to tsoo y is the breakthrough voltage.

爽に従来試料を加熱することにより生成する試料イオン
量を増加させることが試みられでいたが、A@圧を印加
すること1こよりイオン量を飛躍的に増加させ得る本発
明では加熱は必ずしも必要はなく、従って熱不安定性試
料であっても試料を波層することなくイオン化rること
かでさる0ただし本発明でb屯諒26によるX111区
カロ熱を併用すれば更に生成するイオン量を増加させる
ことができることは言うまでもなく、そのJM&らそれ
S扁濫にする必要はない〇 この様蚤こして生琲された多電の試料イオンは、リベラ
を極7:こ印刀口される電圧身こよる力と試料付近から
ピンホール60へ向けて流れるアルゴンガス流−こよっ
て賞童分析!1111内へ尋人され、買瀘分(8) 析されるため買置分析の感度も着しく向上すること1こ
なる0尚本夾施例は正イオンを質量分析装置へ導入する
例であるが、負イオンを分析するのであればタングステ
ン線20.リベラ電惨7及びピ :ンホール電極61へ
印加する電圧の極性を逆にすればよい。
Conventionally, attempts have been made to increase the amount of sample ions generated by heating the sample, but heating is not necessarily necessary in the present invention, which can dramatically increase the amount of ions by applying A@ pressure. Therefore, even if the sample is thermally unstable, it is possible to ionize the sample without forming a wave layer. It goes without saying that it can be increased, and there is no need to make the JM & et al. The strong force and the argon gas flow flowing from near the sample toward the pinhole 60 - a powerful analysis! This example is an example of introducing positive ions into a mass spectrometer. However, if negative ions are to be analyzed, tungsten wire 20. Libera electric shock 7 and pin: The polarity of the voltage applied to the pinhole electrode 61 may be reversed.

本発明は上述した実施例暑〔限定されることな(幾多の
変形が司能である。例えば本発明をイオン化検出a1こ
適用するのであればイオンコレクタ電極を試料に近接し
て配置し、生成した試料イオンをコレクタ駐極tC集め
で検出するようにすれば良いO 又J:述した実施例ではタングステン線1こ多数の針状
突起を成長させたもの1こ試料を付着させたか、多数の
突起を有する部lであれば板状でもコイル状でも形状は
印章に選ぶことができる。
The present invention can be applied to the above-mentioned embodiments (without limitation (many modifications are possible). For example, if the present invention is applied to an ionization detection system, the ion collector electrode is placed close to the sample, and the ion collector electrode is placed close to the sample, The collected sample ions can be detected by collector-parked tC collection.In the above-mentioned embodiment, one tungsten wire with many needle-like protrusions attached to it or one sample attached to it, or a large number of As long as the part l has a protrusion, the seal can be shaped into a plate or a coil.

又リング11内に液体クロマトグラフの分離カラムに接
続したパイプを挿入し、流出rる試料m液を針状突起部
に滴下あるいは連続的iこ付着させれば、液体クロマト
グラフと′x址分析装置をオンラインで結&rることが
可能とぼる、 又上述した実施例では励起種Ar  を生成1さぜるの
1こ放眠を用いたが、光その他の放射−を用いることも
考えられ、キャリヤーガスもアルゴン1こ限らfltl
lのガスを使用rることができる。
In addition, if a pipe connected to a separation column of a liquid chromatograph is inserted into the ring 11 and the sample liquid flowing out is dripped or continuously attached to the needle-like protrusion, the liquid chromatograph and the liquid analysis can be performed. It is possible to connect the device online.Also, in the above-mentioned embodiment, the excited species Ar was generated using one-time, one-time operation, but it is also conceivable to use light or other radiation. The carrier gas is also limited to one argon fltl.
l of gas can be used.

又E述しIこ実施例では網曜、極6 、161こより荷
電粒子(Ar+、e  )を除去したが中央が穴1こな
った電極を用いることができるし、鍔砿粒子を除去する
ためiこはガス流に対し直焚する方向の磁場或いは磁場
を印ノ)口するよう1こしても良い〇更1こ励起種は紙
面と直父する方向から試料にめてる方法すある〇
In addition, in this example, the charged particles (Ar+, e) were removed from the 6th and 161st electrodes, but an electrode with a hole in the center could be used, and in order to remove the Tsubato particles. It is also possible to apply a magnetic field or a magnetic field in the direction of direct combustion to the gas flow.Additionally, there is a method of applying the excited species to the sample from a direction that is perpendicular to the plane of the paper.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は提案方法を説明するための装fil構成を示す
図、第2図は本発明の一実施例の構成を示す断面図、第
3図はそのI−I断面図である04:針1極、5:対向
に極、6,7:網畷憧、16:試料ホルダ、20:タン
グステン線、21:針状突起、22二蹴源、29:@瀘
分析装置、60:ピンホール。
Fig. 1 is a diagram showing a mounting structure for explaining the proposed method, Fig. 2 is a cross-sectional view showing the structure of an embodiment of the present invention, and Fig. 3 is a cross-sectional view taken along line I-I. 1 pole, 5: opposite pole, 6, 7: Toshi Aminawate, 16: sample holder, 20: tungsten wire, 21: needle-like projection, 22 Nikkegen, 29: @ Ro analysis device, 60: pinhole.

Claims (1)

【特許請求の範囲】 L キャリヤーガスを励起する励起手段と、励起着こよ
り生成された荷電粒子及び励゛起種が導かれる通路に配
置される荷電粒子除去手段と、該除去手段を通過した励
起種が通る位置lこ配置された多数の突起を有する部材
と、該部材に高電圧を印加するための手段とを備え、前
記多数の突起を信する部材に試料を付着させ、該試料に
前記励起種をあててイオン化するよう1こしたことを特
徴とするイオン生成装置O a 励起sIこよりイオン化した試料イオンが質量分析
装置へ導入される特許請求の範囲第1項記載の装置。 & 励起種1こよりイオン化した試料イオンがイオンコ
レクタへ導かれる特許請求の範囲第1項記載の装置。 本 前記励起手段はコロナ族[1こよってキャリヤーガ
スを励起する特許請求の範囲第1項記載の装置。
[Claims] L: excitation means for exciting a carrier gas; charged particle removal means disposed in a passage through which charged particles and excited species generated by the excitation are guided; and excitation that has passed through the removal means. A member having a large number of protrusions arranged at positions through which the seeds pass, and means for applying a high voltage to the member, a sample is attached to the member that extends through the large number of protrusions, 2. The apparatus according to claim 1, wherein the ionized sample ions are introduced into the mass spectrometer through the ion generator O a excitation sI, which is characterized in that the excited species is applied to the ion generator for ionization. & The apparatus according to claim 1, wherein sample ions ionized from the excited species 1 are guided to the ion collector. The device according to claim 1, wherein the excitation means excites the carrier gas by a corona group.
JP56176738A 1981-11-04 1981-11-04 ion generator Expired JPS5838911B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56176738A JPS5838911B2 (en) 1981-11-04 1981-11-04 ion generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56176738A JPS5838911B2 (en) 1981-11-04 1981-11-04 ion generator

Publications (2)

Publication Number Publication Date
JPS5878359A true JPS5878359A (en) 1983-05-11
JPS5838911B2 JPS5838911B2 (en) 1983-08-26

Family

ID=16018926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56176738A Expired JPS5838911B2 (en) 1981-11-04 1981-11-04 ion generator

Country Status (1)

Country Link
JP (1) JPS5838911B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114441A (en) * 1988-10-25 1990-04-26 Fumio Watanabe Residual gas analyzer of mass analysis type

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114441A (en) * 1988-10-25 1990-04-26 Fumio Watanabe Residual gas analyzer of mass analysis type

Also Published As

Publication number Publication date
JPS5838911B2 (en) 1983-08-26

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