JPS5877571A - Vapor deposition device for thin film in thin film forming device - Google Patents

Abstract

PURPOSE:To permit vapor deposition uniformly on a large quantity of objects to be formed with thin films at one time by contg. said objects in a screen-like cage, and performing vapor deposition while rotating the cage in a vacuum. CONSTITUTION:Work pieces 1 which are objects to be formed with thin films are contained in a cage 11 in a vacuum deposition vessel 10. A motor M is started to rotate a driving shaft 13 slowly and to rotate a revolving shaft 16 via bevel gears 20, 17 thereby rotating the cage 11 slowly. At the same time, the vapor deposition by an evaporating source 12 provided in the vessel 10 is started. The evaporating material passes through the meshes of the cage 11 and deposits on the surfaces of the work pieces 1. Since the work pieces 1 change their positions freely in the cage 11 while rolling according to the rotation of the cage 11, thin films of uniform thickness are formed on the entire surface of the work pieces 1. Thus a large quantity of the work pieces 1 are vapor deposited inexpensively with the simple constitution.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides fI! Regarding a thin film forming apparatus for forming a film, in particular, the thin film forming object is housed in a mesh-like medullary body, and the thin film forming object is transferred within the electric body as the electric body rotates or swings. Or by rocking, m:AAJI+,,! It is our 14th objective to provide a fish shield device for forming a lake film, which can deposit a uniform coating on the surface of a large amount of thin film forming material, and which can be manufactured at low cost. -4-2) It is a thing.

In order to explain an example of a conventional method for forming a thin film on the surface of a workpiece, etc., we will explain the method for forming a single-layer film resistor in Figure 1. ``Follow the steps and attach the rotating shaft 2 to each workpiece's proboscis 1.

By rotating the rotary shelf 12, the weight and weight of the crops 1 are rotated 1 time in the air.
Then, by uniformly depositing the steam from the steam source 3 using a ladle, the metal film resistor is formed. stomach,.

However, in the VC method, the device for rotating the valley workpiece 1 by the rotating shaft 12 is commercially expensive, and it is difficult to steam a large number of workpieces into 11 pieces. I can't do it ~・I've written down the shortcomings of the author.

Therefore, -, L: g + 2 (l'E Based on the method of rice, each workpiece 1 is turned + 1 ml 1 lllll 2
By Vc, it is necessary to rotate the crop ゛゛(1　crop, as well as the equipment θ) without the need for multiple h1θ)]-crops.
It is possible to make a mature beach #'-;d), and the configuration is IK1 year, and it can be provided at a low price. This is a tea cup with four legs.

In other words, is it true? 1 Ming Dynasty+=Fish rear clothing is the surface of the anti-formed object VC7 special ha λ)] father - aged clothing is ℃・
Then, the 41 bodies in the shape of 1-roboku-kuchi were placed in the air, rotating freely, or 1~1ljh. Or, it is meant to be a Buddha that is composed by passing the (kai 11.-i) in order to oscillate.

Hereinafter, I will explain one aspect of this equipment along with drawings.

10 is the blood of the shellfish steaming device, and the workpiece 1 is a thin film-forming product.
The substance to be deposited on the surface of the fish θ) is provided with a source 12).

11 is a rotating shaft 16 which is mounted between bearings 14 and 15 in the real boiling container 1 ().
The axis is H.

In addition, the umbrella cocoon wheel 17 with lii+i +fit- on the !l1II receiver 151111 of 4 ?41i of the rotating shaft "'16
, ll, lfi connect the upper 7j12I'iζ body 11σ) rotation i1i+++ 1.6 to the drive shaft 13 of the motor M via the umbrella wheel 2o that fits this, 2, and connect the motor M to the drive shaft 13 of the motor M.
1 action-4-a) By doing so, the electric body 11 is
It would be possible to turn 0 into 1.
4': 4' is formed.

The 21st Kyochu, 18.19 is the scale movement axis 13θ) 11s 11
(The reception is neo-mono.)

Face, 21st g+; 1*
When 11 nails are attached to the rotating shaft 16, Fig. 4 a&con J-4-j 1.1 <, both left and right of the integral 11 1i41
As a concrete example, I would like to cite the configuration (11'I) in which the rotating shaft 16 is set in the 1 + + + rainbow part 22 of the frame 21 of the i, as shown in Fig. 4. As shown, 1゛^body 11α) Left A 1 car 1111I U) Frame 1
4-21 center part 23, respectively rotation 1111112
A rotary shaft 124, which is missing from the four-part 1161 and which is missing from the frame 21 on the left and right sides, is attached to the bearing 14.15.
! I11 Branches-(-,!:, Ko and Ni':su, 711 bodies 1
1 can be rotatably constructed and used to erect +1, ', and construction.

Furthermore, in addition to the case where the net-shaped i-body 11) is a cylindrical body, as shown in the third section aK, there is a triangular shape as shown in Figure 3. As shown in Figure C, examples of fruit production using polygonal cylinders such as square cylinders, and furthermore,
A cylinder body having a shape similar to these cross-sectional shapes is used to form a cylindrical body, and a workpiece 1 on which a thin film is to be formed is housed in the modified body 11, as shown in FIG. Although it was not shown explicitly, it is shown in Fig. 5 -f'! j+1 <,
An example of Senryo I Bosairo Furikiya can be given by placing the entrance 25 on the shield of the dragon body 11 at the required position (Date 1'') and adding an opening cover 26 to this entrance 25.

Now, the main brother Akisotane consists of the above 4 regenerations or I-).Next, I will explain how to use it.
As shown in the figure, the workpiece 1, which is a Nukiko group formation, is placed inside the electric body 11 by opening the opening 26 shown in Figure 5 and storing it safely through the doorway 25. Close and set.

Then, start the motor M and slowly rotate the kishite 11 to 1~1, and prepare it in the Shinmensho Yugaya utensil 10.
1: S, fish〉 to start the anxiety caused by the source 121C
In the blind sea 12, 9 bamboos are vaporized on the surface of 9 bamboos in 1 month.

Moreover,? &Each workpiece l stored in the body 11 is transferred as the body 11 rotates, and changes the free ν in the body 11 to 1. Boiled 2.・
As a result of iterating through 17 sources 12 of each workpiece 1 during the process, it is possible to form a uniform surface of ψ11 over the entire surface of each workpiece 1. reactor.

In addition, the rolling motion of each workpiece 1 due to the rotation of the molten body 11 is calculated by the area covered by μm\(Il)14 of the surface center body 11 of each workpiece 11. , N, [Rapini name - Nisaku%I 1 roll!
i between 1t'1, 1 - ℃ for each workpiece 1 v) boiling 7
．． ``The formation of evenly and uniformly steamed M I&! J7... is also θ)-C''.

In addition, the rotation external problems of the electric body 11, etc.
(+1111fli (Figuren 1 Rishina L ” ) '
a", the surface is a), so; (to) the control dj,
＋ Shitsutsukuri Punishment -4/:,) Kotoha・Dodomo l
I
(1) It has a target and has the same effect, and (h) swings not only the center 4ili but also the I foot body 11 by rotating operation, and each workpiece stored in the unit 11. It is also possible to perform the application while shaking the object 1. In this case, (...)
, in addition to the rotating mechanism of the above-mentioned unit 11, the swinging mechanism 1. One color j) Also, depending on the opposite body.

``υ上θ）Saba, 1]] to 1 shi 1 tranquil street, according to the main brother Akira's picture of the steamer, the work example ke rotation 11i1 with skin '-J-rotomo V1 valley work Move objects through a rotating shaft [
- Rotate 4- to the field, 117f cropping section and equipment - 4- Simply store the 1c-forced I membrane formation in the finger [2, this Jl lid < movement] , there is a fluctuation σ
) While giving exercise, the shellfish is ripened in the steaming valley vessel. I can do it.

In addition, the heather 9 also has Ming's Wij: Pa Massacre's Cross 111- in the air, and its net-like finger body is erected so that it can rotate freely, and this dragon 14- is rotated. It consists of 4 units and 1 unit, and it is an effective and effective item that can be provided to Anyu.

4 Figure 1 shows a single surface, C Explanation 11th 1 shows a conventional workpiece. Membrane vaporization 7
a schematic mid-longitudinal cross-sectional view showing an embodiment of the device iij;
Figures 3 a to C show the cross-sectional shapes of the foam cylinders in Figure 2. Figure 4 a shows the frames on both the left and right sides when a single rack is cast with a finger-like rotation axis. Show body 1” partial gi+
The congratulatory picture, funeral picture 41' 51 So1 is the entrance/exit of the workpiece to the hanging body (・1゛1+formation 7J<-
4” ill・bunmu/, [ka・1 congratulation map deru)ro.

■・・・Workpiece 10...Page A reply device 11.e.quantum 12...Jiobeigen 13... Drive shaft 14... 4 Haku Uke 15・φ・Bearing 16Φ... Rotating axis 17...Bevel gear 18...Bearing 19...φ bearing 20... Bevel teeth 21...frame body 22...-Heavy cradle I 23...center 24... To the result Ogawa 25...φ entrance 26...open 1 i 1 rose

Claims (5)

[Claims] (1) Apparatus for forming a thin film on the surface of the object to be formed into a thin film
・It is constructed by installing a mesh-like electric body that houses the thin film formation material in a vacuum so that it can rotate or swing freely, and also equipped with a mechanism for rotating or swinging the electric body. A thin film deposition apparatus in a thin film forming apparatus characterized by: (2) A mesh-shaped electric body for storing the thin film formation material is installed in a JI4 air-fish observation container that honors the vapor deposition source of the vapor deposition material, so that it can rotate freely while supporting both ends of its rotating shaft on bearings. At the same time, the rotating shaft of the above-mentioned electric body was connected to a bevel gear hidden at one end of this rotating shaft to drive the motor @lfc (mouth)
The electric body is connected to the drive shaft of the motor via a bevel gear hidden at one end of the rotating shaft, and the electric body is rotated in the Makabe fish tank and is configured in a 5-5 configuration. Is it listed in scope 1? 1# Film formation-thin film deposition equipment in loading. (3) The thin film in the thin film forming apparatus according to claim 1, wherein the mesh electric body is a cylindrical body, a polygonal cylinder such as a triangle, a square, etc., or a force cylinder. Vapor deposition equipment. (4) A rotary shaft is attached to the wire-shaped electric body by penetrating the electric body, or a rotary shaft is provided protruding from both left and right sides of the electric body, as claimed in claim 1. A thin film deposition apparatus in the thin film forming apparatus described above. (5) A thin film forming apparatus according to claim 1, characterized in that the net-like electric body is provided with an entrance/exit of a straw-shaped thin film type A material, and the entrance/exit is provided with an opening/closing lid. Vapor deposition equipment.