JPS5877569A - Production of product with interference pattern - Google Patents

Production of product with interference pattern

Info

Publication number
JPS5877569A
JPS5877569A JP17491181A JP17491181A JPS5877569A JP S5877569 A JPS5877569 A JP S5877569A JP 17491181 A JP17491181 A JP 17491181A JP 17491181 A JP17491181 A JP 17491181A JP S5877569 A JPS5877569 A JP S5877569A
Authority
JP
Japan
Prior art keywords
particles
vapor
vapor deposition
deposited
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17491181A
Other languages
Japanese (ja)
Inventor
Kenji Ogasawara
健二 小笠原
Keiichi Yamada
山田 景一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP17491181A priority Critical patent/JPS5877569A/en
Publication of JPS5877569A publication Critical patent/JPS5877569A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks

Abstract

PURPOSE:To produce products with interference patterns such as beautiful interference colors by vapor depositing the particles of a vapor depositing material in such a way as to strike diagonally against the surface to be vapor deposited. CONSTITUTION:A holder which holds a vapor depositing material 2 is fixed below a box body of which the inside is evacuated, and a base material 4 is suspended above. In the intermediate part in the box, an electron gun 5 as a heating source and a circular baffle plate 6 above the same are connected by means of a U-shaped arm 7 and the arm 7 is made movable back and forth or right and left. The surface 41 to be vapor deposited of the material 4 and the plate 6 are held level, and the inside of the device is evacuated. A beam 8 is cast to the material 2 with the gun 5 to release the particles 9 of the vapor depositing material radially. The particles advancing nearly right above among the particles 9 are blocked by the plate 6 and the arm 7 is moved back and forth or right and left. Then the particles are blocked at about <15 deg. angle with respect to the perpendicular of the surface 41, whereby beautiful interference patterns are formed on the surface 41 of the material 4.

Description

【発明の詳細な説明】 この発明は、光線の干渉によりどの方向からでもさ捷ざ
まなスペクトル色(干渉色)が見え、しかも観察する方
向によりこのスペクトル色による色彩が異なって見える
美しい干渉色など干渉模様付製品の製法に関する。
Detailed Description of the Invention: This invention provides beautiful interference colors, in which various spectral colors (interference colors) can be seen from any direction due to the interference of light rays, and the colors due to these spectral colors appear different depending on the viewing direction. Concerning the manufacturing method of products with interference patterns.

従来、透明薄膜はさまざ1な機械、道具、設備等の製品
に用いられている。たとえば照明器具の反射板や投光器
の反射鏡に用いられる反射面保護用の二酸化ケイ素膜な
どである。このような透明膜においては、従来、干渉に
よるスペクトル色を有するといったようなことは欠点と
みられてきた。
Conventionally, transparent thin films have been used in various products such as machines, tools, and equipment. For example, silicon dioxide films are used to protect reflective surfaces used in reflectors of lighting equipment and reflectors of floodlights. Conventionally, such transparent films have been considered to have a spectral color due to interference, which is considered a drawback.

すなわち、そのようなことが生じるということは、透明
膜の表面が平滑でなく微細な凹凸があることあるいは膜
厚が一定でないこと等を意味するからである。
That is, the occurrence of such a phenomenon means that the surface of the transparent film is not smooth and has minute irregularities, or that the film thickness is not constant.

発明者らは、従来、透明膜の欠点としてみられてきた前
症のような現象を逆に積極的に出すことにより、光線の
干渉によるさまざ1なスペクトル色がどの方向からでも
見え、しかも観察する方向により色彩の異なる美しい干
渉模様となる模様付製品を得ようとして、その製法の研
究を重ねた。
The inventors have created a system in which various spectral colors due to interference of light rays can be seen from any direction by actively producing a phenomenon such as a pre-symptom, which has traditionally been seen as a drawback of transparent films. In an effort to create a patterned product with a beautiful interference pattern that changes color depending on the direction of observation, we conducted repeated research on the manufacturing method.

そしてついにこの発明を光成した。Finally, this invention was realized.

この発明にかかる干渉模様付製品の製法は、蒸着材料粒
子が被蒸着面に斜めにあたるよう蒸着を行なうことを特
徴としている。以ドに、との発明の詳細な説明する。
The method for manufacturing a product with an interference pattern according to the present invention is characterized in that the vapor deposition is performed so that the particles of the vapor deposition material obliquely contact the surface to be vapor-deposited. The following is a detailed explanation of the invention.

この発明にかかる干渉模様付製品の製法では、真空蒸着
法など蒸着法により、基材」−に薄膜をつくる。すなわ
ち、基材上に二酸化ゲ・r素等の4A料を蒸着させ光干
渉の起きる膜とするのである。蒸着材料としては膜とし
たとき光干渉をz、1しさせるものであればどのような
ものであっても、1: < 、限定はされない。この場
合、従来のように蒸着材料粒子が基材の被蒸着面にほぼ
垂直にあたるようにするのではなく、蒸着材料粒子が被
蒸着面に斜めにあたる」:うにする、すなわち斜め蒸着
を行なうのである。このようにすると、美り、い干渉模
様付製品を得ることができるのである。
In the method for manufacturing a product with an interference pattern according to the present invention, a thin film is formed on a base material by a vapor deposition method such as a vacuum vapor deposition method. That is, a 4A material such as Ge/R element dioxide is deposited on the base material to form a film that causes optical interference. The vapor deposition material is not limited to any material as long as it causes optical interference to be z, 1 when formed into a film, 1:<. In this case, instead of the deposition material particles hitting the deposition surface of the base material almost perpendicularly as in the conventional method, the deposition material particles hit the deposition surface obliquely, that is, performing oblique deposition. . In this way, a product with a beautiful interference pattern can be obtained.

′)その理由はつぎのように説明される1、余1め蒸着
を行なうと、蒸着膜の表面は、−N&通、きれいな平滑
面とはならない。ときにより、むしろ粗面となり、微細
な凹凸を持つ。この表面状態が膜表面」−にどのような
方向から見てもさ1ざ捷なスペクトル色が見え、しかも
観察する方向によりこのスペクトル色による色彩が変化
して見えるという現象を生じさせるのである。基材とし
ては金属板等どのようなものであってもよく、限定はさ
れない。
The reason for this is explained as follows: 1. If the first vapor deposition is performed, the surface of the vapor deposited film will not be a clean smooth surface. In some cases, the surface is rather rough, with minute irregularities. This surface condition causes a phenomenon in which a sharp spectral color is visible on the film surface when viewed from any direction, and the color of this spectral color appears to change depending on the viewing direction. The base material may be any material such as a metal plate, and is not limited to any material.

基材の被蒸着面は平坦なものに限らず凹凸があるもので
あってもよい。また、金属等からなる基材であって被蒸
着面が研摩されるなどして反射面となっているものを用
いる場合もありうる。基材上の干渉膜は1層に限らず多
層設けるようにしてもよい。
The surface of the base material to be vapor-deposited is not limited to a flat surface, and may be uneven. Alternatively, a base material made of metal or the like whose deposition surface is polished to become a reflective surface may also be used. The interference film on the base material is not limited to one layer, but may be provided in multiple layers.

斜め蒸着を行なう場合、第1図に示されるような真空蒸
着装置を用いるとよい。この真空蒸着装置は加熱源とし
て電子銃を備えたものであって、以下のように構成され
ている点を除けば従来と同様である。すなわち、図に示
されるように内部が真空となる箱体lを備え、箱体1内
の下方に、蒸着材料2をその凹部に保持するホルダ3、
および吊り下げる等して基材4を上方に固定する手段(
図示省略)を備えている。さらに、図示はしないが、高
真空雰囲気形成手段なども備えている。図に示されるよ
うに、箱体1内の中間部には加熱源としての電子銃5お
よびその上方に円形のし十1板6が備えられている。電
子銃5は1−コ」の字形のアーム7でじゃ1板6と連結
され、−γ−ム7はじやま板6を、電子線が蒸着材料に
当たる位1eの真上に来させもようその設W態様が決め
られている。
When performing oblique vapor deposition, it is preferable to use a vacuum vapor deposition apparatus as shown in FIG. This vacuum evaporation apparatus is equipped with an electron gun as a heating source, and is the same as the conventional one except for the following configuration. That is, as shown in the figure, a holder 3 is provided with a box l whose interior is in a vacuum, and a holder 3 that holds the vapor deposition material 2 in its concave portion is provided at the lower part of the box 1;
and means for fixing the base material 4 upward by hanging it etc. (
(not shown). Furthermore, although not shown, a means for forming a high vacuum atmosphere is also provided. As shown in the figure, an electron gun 5 as a heating source is provided in the middle part of the box 1, and a circular shield plate 6 is provided above the electron gun 5. The electron gun 5 is connected to the baffle plate 6 by a U-shaped arm 7, and the -gamma arm 7 allows the baffle plate 6 to be placed directly above the evaporation material 1e so that the electron beam hits the evaporation material. The W configuration mode has been determined.

そして図示はしないが、アーム7を箱体l内の空間部に
保持し、かつ前後左右に移動させる手段が備えられてい
る。じゃま板6は、加熱によって生じる蒸着材料粒子の
うち、基材の被蒸7h面に垂直にあたろうとするものを
さえぎる/ζめに用いられるのである。
Although not shown, means for holding the arm 7 in the space inside the box 1 and moving it back and forth and left and right is provided. The baffle plate 6 is used to block particles of the vapor deposition material generated by heating that are about to hit perpendicularly to the surface 7h of the base material to be vaporized.

この装置を用いた場合、斜め蒸着は第2図に示されるよ
うにして行なわれる。基相4の被蒸着面41およびじゃ
ま板6を水平に保ち装置内を真空とする。電子銃5によ
りホルダ3内の蒸着材料(ターゲット)2にほぼ鉛直方
向からビーム(電子線)8を当てるととび出た蒸着材料
粒子(蒸気)9が放射状に進行する。これらの蒸着材料
粒子9のうち、はぼ真上に進行するもの、すなわち被蒸
着面41にほば垂直に衝突しようとするものはじやま板
6によって全て阻止される。そして、蒸着材料に電子線
8を当てながらアーム7を前後および/または左右に動
かせば、被蒸着面41全面に蒸着材料が斜めに当たるよ
うになるのである。
When this apparatus is used, oblique deposition is performed as shown in FIG. The surface 41 on which the base phase 4 is deposited and the baffle plate 6 are kept horizontal and the inside of the apparatus is evacuated. When a beam (electron beam) 8 is applied from an electron gun 5 to a vapor deposition material (target) 2 in a holder 3 from a substantially vertical direction, vapor deposition material particles (steam) 9 that fly out travel radially. Of these vapor deposition material particles 9, those that proceed almost directly above, that is, those that are about to collide almost perpendicularly with the surface 41 to be vapor deposited, are all blocked by the barrier plate 6. By moving the arm 7 back and forth and/or left and right while applying the electron beam 8 to the vapor deposition material, the vapor deposition material comes to obliquely impinge on the entire surface 41 to be vapor deposited.

なお、蒸着材料粒子の阻止は、被蒸着面に対し75°以
上の角度で当たろうとするもの、すなわち被蒸着面の垂
線に対し15°以内の角度(阻止角度15°以内)で当
たろうとするものについて行なわれるのが最も好ましい
In addition, the blocking of vapor deposition material particles is defined as particles that try to hit the surface to be deposited at an angle of 75 degrees or more, that is, particles that try to hit the surface to be deposited at an angle of 15 degrees or less to the perpendicular to the surface to be deposited (blocking angle of 15 degrees or less). Most preferably, this is done for those who do.

上記斜め蒸着の説明では、被蒸着面およびじゃま板を水
平に保ち、電子線をほぼ鉛直方向から当てるようにして
いるが必ずしもこのようにする必要はなく、水平あるい
はほぼ鉛直としない場合もありうる。また、じゃま板は
必ずしも円形とする必要はなく、さらに上記真空蒸着装
置のようにじゃま板を電子銃と連結して共に動かすこと
もまた必ずしも必要でない。
In the above explanation of oblique evaporation, the surface to be evaporated and the baffle plate are held horizontally, and the electron beam is applied from an almost vertical direction, but it is not always necessary to do so, and there may be cases where it is not horizontal or almost vertical. . Further, the baffle plate does not necessarily have to be circular, and furthermore, it is not necessarily necessary to connect the baffle plate to the electron gun and move the baffle plate together with the electron gun as in the vacuum evaporation apparatus described above.

この発明にかかる干渉模様付製品の製法は、このように
構成されるものであって、透明蒸着材料粒子が被蒸着面
に斜めにあたるよう蒸着を行なうのでどの方向からみて
もさ1ざ−まなスペクトル色が見え、1〜かも観察する
方向によりこのスペクトル色による色彩が変化して見え
る美しい干渉模様付製品を得ることができる。
The method for manufacturing a product with an interference pattern according to the present invention is constructed as described above, and since the transparent vapor deposition material particles are vapor-deposited so as to obliquely contact the surface to be vapor-deposited, a very different spectrum can be obtained when viewed from any direction. It is possible to obtain a product with a beautiful interference pattern in which color is visible and the color of the spectrum changes depending on the viewing direction.

つぎに、実施例について比較例と併せてd((、明する
Next, Examples will be explained along with Comparative Examples.

実施例1.2および比較例では、第1表に示されるよう
にいずれも基材としてアルミニウノ、(AI)板、蒸着
材料(ターゲット旧)とし°τ二酸化ケイ素(SiO2
)  を用い、アルミニウム板表面に二酸化ケイ素をそ
れぞれ同じ蒸着速度で蒸着さぜた3、そして、アルミニ
ウム板−Fにそれぞれ同じ膜厚の二酸化ケイ素膜を備え
た製品を1f+だ。l−、かし、実施例1.2では二酸
化ケイ素の蒸着の際、第1衣に示されるそれぞれの阻止
角度で蒸着規制全行なったのに対し、比較例では阻止を
行なわなかった。
In Example 1.2 and Comparative Example, as shown in Table 1, aluminum UNO, (AI) plate, and vapor deposition material (old target) were used as the base materials, and °τ silicon dioxide (SiO2) was used as the base material.
) was used to deposit silicon dioxide on the surface of the aluminum plate at the same deposition rate, and 1f+ was the product in which the aluminum plate -F was coated with a silicon dioxide film of the same thickness. In Example 1.2, the deposition of silicon dioxide was regulated at the respective blocking angles shown in the first layer, whereas in the comparative example, no blocking was performed.

(以 下 余 白) 第  1  表 上記のような実施例1.2および比較例の製法により得
られた製品について外観を比較した。その結果を第1表
に示す。比較例は着色して見えなかったのに対し、実施
例1,2はどちらも着色して見えた。
(See margin below) Table 1 The appearance of the products obtained by the manufacturing methods of Example 1.2 and Comparative Example as described above was compared. The results are shown in Table 1. While the comparative example did not appear colored, both Examples 1 and 2 appeared colored.

また、実施例1.2および比較例の製法により得られた
製品について、積分球を用い反射1■視スペクトルを測
定した。その結果を第3図に示す。
In addition, the reflection spectra of the products obtained by the manufacturing methods of Example 1.2 and Comparative Example were measured using an integrating sphere. The results are shown in FIG.

図にみるように比較例によるものは波長による反射率の
変化が比較的小さいのに対し、実施例1.2によるもの
は変化が大きい。この測定結果からも、比較例によるも
のが着色して見えない、すなわち反射光が白色光となる
のに対し、実施例1.2はどちらも着色して見えること
が判る。)
As shown in the figure, the reflectance according to the comparative example has a relatively small change in reflectance depending on the wavelength, whereas the change according to Example 1.2 is large. This measurement result also shows that the comparative example is colored and cannot be seen, that is, the reflected light is white light, whereas Examples 1 and 2 are both visible as colored. )

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明にかかる干渉模様付製品の製法に用い
る蒸着装置の1例をあられす414’t l’13 t
tR5明図、四回図は第1図における蒸着装置の使用例
のd;)、四回、第3図は実施例1,2および比較例の
製法により得られた製品の波長に伴なう反射率の変化を
あられすグラフである。 l・・・箱体 2・・・蒸着材料 、(・・・ホルダ4
・・・基相 41・・・破蒸着面 5・・・甫子銃6・
・・じや1板 7・・・了−ム 8−・ビー ム(′醒
子線) 9・・ 蒸着4/l別粒子
FIG. 1 shows an example of a vapor deposition apparatus used in the method of manufacturing a product with an interference pattern according to the present invention.
The tR5 clear diagram and the fourth diagram are d ;) of the usage example of the vapor deposition apparatus in Figure 1; This is a graph showing changes in reflectance. l...Box 2...Vapor deposition material, (...Holder 4
... Base phase 41 ... Hazardous deposition surface 5 ... Hoshigun 6.
...Jiya 1 plate 7...Rim 8-Beam ('Sakiko line) 9... Vapor deposition 4/l different particles

Claims (1)

【特許請求の範囲】 (4)  蒸着材料粒子が被蒸着面に斜めにあたるよう
蒸着を行なうことを特徴とする干渉模様付製品の製法。 (2)蒸着材料粒子のうち被蒸着面に垂直に進行するも
のを、加熱源としての電子銃によるビーム照射位置の動
きに合わせて動くじゃ1板でさえぎり、斜めに進行する
もののみを通すようにする特許請求の範囲第1項記載の
干渉模様付製品の製法。 (3)蒸着材料粒子を被蒸着面に対し75°よりも小さ
い角度であてる特許請求の範囲第1項捷たは第2項記載
の干渉模様付製品の製法。
[Claims] (4) A method for manufacturing a product with an interference pattern, characterized in that vapor deposition is performed so that particles of vapor deposition material obliquely contact a surface to be vapor-deposited. (2) Among the deposition material particles, those traveling perpendicularly to the surface to be deposited are blocked by a plate that moves in accordance with the movement of the beam irradiation position by the electron gun as a heating source, so that only those traveling diagonally are allowed to pass through. A method for producing an interference patterned product according to claim 1. (3) A method for manufacturing a product with an interference pattern according to claim 1 or 2, in which the vapor deposition material particles are applied at an angle smaller than 75° to the surface to be vapor deposited.
JP17491181A 1981-10-30 1981-10-30 Production of product with interference pattern Pending JPS5877569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17491181A JPS5877569A (en) 1981-10-30 1981-10-30 Production of product with interference pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17491181A JPS5877569A (en) 1981-10-30 1981-10-30 Production of product with interference pattern

Publications (1)

Publication Number Publication Date
JPS5877569A true JPS5877569A (en) 1983-05-10

Family

ID=15986846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17491181A Pending JPS5877569A (en) 1981-10-30 1981-10-30 Production of product with interference pattern

Country Status (1)

Country Link
JP (1) JPS5877569A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04232262A (en) * 1990-08-31 1992-08-20 Internatl Business Mach Corp <Ibm> Sputtering apparatus
CN102602159A (en) * 2011-01-24 2012-07-25 山东新北洋信息技术股份有限公司 Thin-film type thermo-sensitive printing head and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04232262A (en) * 1990-08-31 1992-08-20 Internatl Business Mach Corp <Ibm> Sputtering apparatus
CN102602159A (en) * 2011-01-24 2012-07-25 山东新北洋信息技术股份有限公司 Thin-film type thermo-sensitive printing head and manufacturing method thereof

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