JPS5872072A - Composite photodetector - Google Patents
Composite photodetectorInfo
- Publication number
- JPS5872072A JPS5872072A JP56170901A JP17090181A JPS5872072A JP S5872072 A JPS5872072 A JP S5872072A JP 56170901 A JP56170901 A JP 56170901A JP 17090181 A JP17090181 A JP 17090181A JP S5872072 A JPS5872072 A JP S5872072A
- Authority
- JP
- Japan
- Prior art keywords
- light
- film
- coordinates
- receiving
- plural
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 14
- 229920000642 polymer Polymers 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 abstract description 7
- 239000011159 matrix material Substances 0.000 abstract description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011787 zinc oxide Substances 0.000 abstract description 2
- 239000004411 aluminium Substances 0.000 abstract 1
- YPMOSINXXHVZIL-UHFFFAOYSA-N sulfanylideneantimony Chemical compound [Sb]=S YPMOSINXXHVZIL-UHFFFAOYSA-N 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 239000002120 nanofilm Substances 0.000 description 3
- 241000251468 Actinopterygii Species 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 241000473391 Archosargus rhomboidalis Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 206010010071 Coma Diseases 0.000 description 1
- 241000287531 Psittacidae Species 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003337 fertilizer Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、切体の辿行万同や、切体表面の方向の設定そ
の鵠の目的に1史用する羨合受光木子壷こ−するもので
、符に透光性の受光信号座標を有する縄分子S−性フイ
ルム素子を氏7にの坐儂1愼を有する別の受光水子と組
合せたものである。[Detailed Description of the Invention] The present invention utilizes a light-receiving wood jar that is used for the purpose of tracing the cutting body and setting the direction of the surface of the cutting body. A rope molecule S-type film element having a photosensitive light receiving signal coordinate is combined with another light receiving water element having a lattice of 7 degrees.
運−する−$J体の進行方間や七〇&向の向き、水平度
などを外部より礪−jすることは、走行峨器の軌道修正
やロボットの運動制御その1小に必要である。従来は王
として外部より光学的銃6I11を行なっていたが、人
が物体の運動を見ながら運転する場合はともかく、自動
運転に用いる績幽データーとしては不適当である。一方
、光学的観測データーを・−気的な数値として得る手段
として、受光素子が用いられるが、従来の受光素子は点
若しくは面などの2次元以下の座憚を−j定することは
できても、6次元座標として観測できるものはなく、運
(2)
鯛するm棒の退灯万同や、立体的配置などを鋭測できる
ものは得られていISい。Externally determining the direction of movement, orientation, levelness, etc. of a body is necessary for trajectory correction of a traveling machine and robot motion control part 1. . Conventionally, the optical gun 6I11 was used as a control from the outside, but this is not suitable for use as a driving data for automatic driving, regardless of when a person drives while observing the movement of an object. On the other hand, a light-receiving element is used as a means of obtaining optical observation data as a numerical value, but conventional light-receiving elements cannot determine two-dimensional or less distortions such as points or surfaces. However, there is nothing that can be observed as 6-dimensional coordinates, and there is no IS that can be used to accurately measure the timing of the m-rod that catches the sea bream, the three-dimensional arrangement, etc.
不発明は6次元座、係としての;悦61すがロー化な複
合受光水子に詠るものであって、逍光注の受光1d号座
憚を有する尚分子焦嶋注フィルム水子とその背板に19
1定の間隔を設けて配置された他の受光系子との繊合せ
から成っている。Non-invention is the 6th dimension, as a member; Etsu 61 is a poem about the complex light receiving Mizuko, which is low, and the Shokojima film Mizuko, who has the light receiving number 1d position of the Shogou Note. 19 on that backboard
It consists of a combination with other light-receiving elements arranged at a certain interval.
不発明の複合受光水子(こおける背恢の受光系子は、1
個即ち1点の受光1d号座標を有する受光系子でも、或
いは面状でマ) IJラックス状受光1百号座襟を待つ
ものでも、任意をこ選択することができ、またその部類
も例えば光中2!!!体タイプ、元電池タイプ、焦−任
タイブなど任意のタイプの受光系子を1吏用することが
できる。これらの背友の受光素子は、前方に配置された
逍光注の熟成性フィルムタイプの受光素子に対して所定
の間隔(任7底にdゑ
ぶことが出来が、例えば1間〜1000m、好ましくは
6M〜500 rays )へだてで配置すれることに
より、前後の受光素子を結ぶ光線を受光した時(こ少r
、1’、 (とも前方に配置された焦成性フィルム面の
立体−位置が測定tiJ庇となる。The uninvented composite light-receiving system (the light-receiving system on the back of the
It is possible to select any type of light receiving system, such as one having the coordinates of one light receiving point, number 1d, or one that is planar and waits for the IJ rack type light receiving number 100. Light middle 2! ! ! Any type of light-receiving system, such as a body type, a battery type, or a focus type, can be used. These light-receiving elements are arranged at a predetermined distance (for example, from 1 meter to 1000 meters, preferably 1 to 1,000 meters) with respect to the light-receiving element of a maturing film type placed in front. (6M to 500 rays), when the light beam connecting the front and rear photodetectors is received,
, 1', (in both cases, the three-dimensional position of the pyrophoric film surface placed in front becomes the measured tiJ eave.
以下に不発明を一■(こ示す央部Vすにより、8明する
。Below, the invention will be explained as follows:
第1図〜第6図にpいて、(1)は焦電l!lE尚汁子
フィルム糸子であり、例えば成協さlした黒#4を注ポ
リフッ化ビニリデンフィルムt21、+2)’が透明な
尋喝俸1m +3) (例えばITO魚層j臭)を弁し
て接台され、史にこれっのフィルム12+、+21’の
内外側−船こは同じ< i ’r oのi+m状嵯憾(
4)、(4)′が七、ルぞれ数本ずつ平行(こ設げゆれ
ている。そして%似状磁憧(4)、(4)′から導びか
れた自己−は直扱(こ、よたはli” E T (5)
、 +51’などのインピーダンス変換装置、!t’i
−dた後、過当な16号認at g、i i <図示さ
れていy、(いが、例えばミニコンピユータ−)(こ人
力され、組状4 m+4)、(4)′と対向t4[1i
4+31との間に生じた焦電気がそれぞれとの線法・−
極+41、(4fから流−ルるかがこの1H号認識装置
1において認、礒される。決画すれば、起磁力の1誠さ
れた。暉状直極i4) 、i?よび(4fの1つずつの
電極の交叉部分(即ち、焦電倍号の発生する受光1ぎ号
坐襟)が認識さルる。(6)は1点受光匿号坐原の受光
素子(?llえはフォトトランジスター)であり、上述
のようなマトリックス状に配置された仮叡の受光座標を
有する焦電注尚分子フィルム糸子(1)と共に弔1図に
示す通りにケース(7)に組み込まれC複合受光水子(
8)を4141収している。Referring to Figures 1 to 6, (1) is a pyroelectric l! IE Naojiruko film thread, for example, polyvinylidene fluoride film T21, +2)' is a transparent film with black #4 (for example, ITO fish layer j odor). The inner and outer sides of this film 12+, +21' are the same <i'ro's i+m shape (
4), (4)' are parallel to each other (they are swaying), and the self- derived from the similar magnetism (4), (4)' can be treated directly ( This, Yotaha li” E T (5)
, +51' and other impedance conversion devices,! t'i
-d, then the correct No. 16 recognition at g, i
The pyroelectricity generated between 4 + 31 is the line method with each -
Pole +41, (The flow from 4f is recognized and activated in this 1H recognition device 1. If it is decided, the magnetomotive force is 1.), i? (6) is the intersection part of each electrode of (4f) (i.e., the light-receiving number 1 seat collar where the pyroelectric multiplier is generated) is recognized. (6) is the light-receiving element ( ?lle is a phototransistor), and it is placed in the case (7) as shown in Figure 1 together with the pyroelectric injection molecular film thread (1) having the light reception coordinates of the phantom arranged in a matrix as described above. Built-in C composite light receiving water (
8), 4,141 of them were collected.
この複合受光水子(8)を被銭側物俸11J)の六■に
収りつけ、外部の1点にある元源四〃・ら例えばレーザ
ー元のような光線旧)を受光素子(6)の方間に四σで
定量しながら照射rる。そして七の元1d if 11
が受光素子(6)を照射した時(或いはその前段)に、
元sIuυが水子+11の而と交叉している点(14の
坐儂に直をこの点(14に位置する竜極座樟に′1ミじ
る魚心Aがら認識する。なお点(1カの座4#i立献を
、1することが出来n、ば、この物体19)が光線(I
υ普こ対しどのように鴎斜しているかは谷鵬に判断でき
るので、例えば物体19)を、4噛巾リーしてその姿勢
の11正、tSどをイテなうことができる。This composite light-receiving element (8) is placed in the 6 part of the receiver side 11J), and the light source 4, such as a laser source, is placed at one point outside of the light-receiving element (6). ) is irradiated while quantifying with 4σ. And the source of seven 1d if 11
When the light-receiving element (6) is irradiated (or before that),
The point where the original sIuυ intersects with the water of Mizuko + 11 (recognize the 14th zane ni nai at this point (the fish heart A that is '1' in the ryugoku zacho located at 14). The seat 4 #i can be made 1 n, b, this object 19) is the ray (I
Since Taniho can judge how oblique it is with respect to υ normal, he can, for example, move object 19) by 4 degrees and take the 11 positive, tS, etc. of that posture.
以上の例において、透明電極はITO(、夜化インジウ
ムー酸化錫)としたが、そのnutこ、醒化揚−酸化ア
ンチモンなどの透明な導電性セラミック膜や釜、日蚤、
ニッケル、クロムその旧の4−可輩鵡の慝く博い腺を用
いた透九注の一憧でもよく、また坐裸’m憾は必ずしも
主面1こほどこされる公安はなく、実用的をこま用され
る部分(例えは中火部分)のみに設けられていてもよい
。また座像#を憾は1収の焦電性のフィルムの表艮曝こ
収けた点よたは心状の4憾とすることもロエ能である。In the above examples, the transparent electrode was made of ITO (indium tin oxide), but the nut could also be a transparent conductive ceramic film such as oxidized antimony oxide, a cauldron, a solar fertiliser, etc.
Nickel, chromium, and the old 4-color parrot's generous glands may be used as a reference to Touken, and sitting naked'm regret is not necessarily a public security that is applied on the main surface, but is practical. It may be provided only in the part where the top is used (for example, the medium heat part). It is also possible to make the seated image # one of four dots or hearts exposed on the surface of a pyroelectric film.
第4図は不発明l/)複合受光水子の別の火ぬ例を示す
もので、洲分子′S−注フイルム素子11)としては尚
分子焦゛1性フィルム(2)の中央部の一曲に一体のI
TO膜′−極j3fが設けられ、またそのl1こはスポ
ット状のI’l”0・m 億(4a)がマトリックス状
に儀数個設けられている。このフィルム系子t11はガ
ラス板(140表面に貼布され、また七の畿IM′ii
こは半導体・受光素子1漠u゛0が設けられている。I
Sおこの光半導体受光素子膜117)は城方間に平行に
設けら7’した複数のITO=d極Hsa化亜鉛又は硫
化アンチ七ンなどの光半導体の蒸着Nilω、債万回に
平行に設けろルた限敏のアルミニウム4極(国の)貝に
偵j−されたものであってよい。この複合受光水子I8
rは第1図をこlドす系子とはず同体Qこして1史用ざ
才しるが、#A4図のものは削(川Pよひ宵曲の系子が
共をこマトリックス状昏こ配置された汲奴り受光離係を
躬するので、?ll乙ば座像[…崗エリも太いビームの
尤味を用いれば、九碑/il−疋宜させないでも両ut
ll面の76子のいずれかの座標/:i:それぞれ照射
し得る利点を勺”する。Figure 4 shows another example of the uninvented composite light-receiving water droplet. I in one song
A TO film'-pole j3f is provided, and several spot-shaped I'l"0.m billion (4a) are provided in a matrix on this l1. This film-type element t11 is a glass plate ( It is affixed to the surface of 140, and it is also 7 no Ki IM'ii.
Here, a semiconductor/light receiving element 1 is provided. I
The photo-semiconductor light-receiving element film 117) of the photo-semiconductor light-receiving element film 117) is formed by depositing a photo-semiconductor such as a plurality of ITO=d electrodes, zinc oxide or anti-sulfide Nilω, which are provided parallel to each other. The configuration may be based on a four-pole aluminum shell with limited sensitivity. This composite light-receiving water droplet I8
r is a derivative of Figure 1, and an anomalous homologue Q is used for 1 history, but the one in Figure A4 is deleted (Kawa P Yohi, the family of the evening song is also in the form of a matrix) Since it is erected by the light-receiving person who is placed in a coma, ?llll Otba seated statue [...If you also use the possibility of a thick beam, you will be able to do both without letting it go.
Coordinates of any of the 76 children on the ll plane /:i: Exploring the advantages of each irradiation.
(以F余白、Cに…こつつく。)
なお第4図に示すように背後の受光素子も泡故の受光座
@を持つ面状のものを使用する場合、前方に配置した高
分子焦電性フィルム素子とその背後の面状水子とは必ず
しも平行に置かれる必要は7ffi(、任意の角度をも
つで置かれてもよく、或いは史(こ一方“または内方を
球面状とするなどの任意の構成とすることかできる。(Hereinafter, in the margin F, refer to C...) In addition, as shown in Fig. 4, if the rear photodetector is also a planar one with a photodetector seat made of foam, the polymer pyroelectric The surface film element and the planar water element behind it do not necessarily need to be placed parallel to each other, but they may be placed at any angle, or they may be placed at an arbitrary angle (for example, this or the inner surface is spherical). can have any configuration.
またnJ方に配置したi%分子焦屯住フィルム素子は亦
外詠に価力な感度を有するので、雌恢(泣置俣出に使用
する光線は赤色光蘇苔しくは赤外線をムむ光線が望まし
いが、背麦の素子が更に短波長の光に対する感度か良い
場打は、1IItl方の水子にIべ度の良い光を混打し
て@田光としで使用するなどの適当な工夫を施すのが好
ましい。In addition, since the i% molecular focusing film element placed in the nJ direction has significant sensitivity in addition to external signals, the light beam used for female detection is red light or infrared light. is desirable, but if you want to use a field shot where the backlight element is more sensitive to light with a shorter wavelength, you can use an appropriate device such as mixing light with a good Ibeta on the Mizuko on the 1IItl side and using it with @Damitsu. It is preferable to apply
四にまた、第1図iこ示す*/7ui例の場合とは逆に
、前方に配置する第1の受光素子を1点受光・M号座標
をMするものとし、その背後の弔2の受光素子をマトリ
ックス状に配置された易叙の受光16吟座憚を市するも
のとしrもよい。この]易汀、上記第1の受光素子とし
では、442図に示す焦嵐性尚分子フィルム素子(1)
において嶽状亀4躯t41. [Jのうちの真中の1本
のみをそれぞれ残してこれ以外の゛唾極8′4略したも
のであってもよいし、その他の[ト意の摘取のものであ
ってもよい。また上記@2の受光素子としては、第4図
に示す光牛専体受光索子aηで必ってもよいし、他の任
意の+14 Xのものであってもよい。Fourth, contrary to the */7ui example shown in Figure 1, the first light-receiving element placed in front is assumed to receive light at one point and the M coordinate is M, and the second light receiving element behind it is assumed to receive light at one point. It is also possible to use a light-receiving device with 16 light-receiving elements arranged in a matrix. As the first light-receiving element, the pyrophoric film element (1) shown in Fig. 442 is used.
4 mountain turtles t41. It may be possible to leave only the middle one of J and omit the other poles 8'4, or it may be any other removed one. Further, the light receiving element @2 may be necessarily the light receiving element aη shown in FIG. 4, or may be any other +14X type.
以上に述べた本発明の複合受光素子は檎々の物体に取り
つけて、その空間位If−′f−姿勢、趣動方同などの
検出や照単器などの畝多くの用途(こ使用きれ得る。The composite light-receiving element of the present invention described above can be attached to various objects to detect its spatial position, If-'f-attitude, direction of movement, etc., and can be used for many purposes such as illuminating devices. obtain.
図面は本発明の実施例をボすものであって、第1図は複
合受光素子の概略藺向図、第2図は第1図に示す被合受
光素子に用いられでいる焦゛畦性^分子フィルム素子の
概略平曲図、弔6図は同上の概I@断面図、第4図は複
合受光水子の別の実施しリを示す概略胡面図である。゛
なお図…1に用いられでいるfj−号Qこおいで、tl
J・・・・・・・・・・・・焦゛#M、性尚分子フィル
ム素子t2X2+’ ・・・・・・・・・ 焦゛岨性
ポリフッ化ビニリデンフィルム(J引・・・・・・・・
・・・・4嵯体層14X4)’・・・・・・・・・−状
嵐極(6)・・・・・・・・・・・・1点受光1d号座
標の受光素子t’/l・・・・・・・・・・・・ケース
+8118i’・・・・・・・・・複合受光素子(LO
・・・・・・・・・・・・光半尋体党光木子膜である。
代理人 上屋 腸
第1諷
第2因
第3図
第4図 。The drawings show embodiments of the present invention; FIG. 1 is a schematic diagram of a composite light receiving element, and FIG. Figure 6 is a schematic cross-sectional view of the molecular film element, and Figure 4 is a schematic cross-sectional view showing another implementation of the composite light-receiving water droplet.゛In addition, the fj-Q used in 1 is here, and the tl
J・・・・・・・・・Focus #M、Poor molecular film element t2X2+'・・・・・・・・・Focus polyvinylidene fluoride film (J... ...
...... 4 solid body layers 14 x 4)' ...... - shaped storm pole (6) ......... 1 point light receiving element t' at coordinate No. 1d /l・・・・・・・・・Case+8118i'・・・・・・Composite light receiving element (LO
・・・・・・・・・It is a light half body party light tree child membrane. Agent Ueya Intestine 1st imitation 2nd cause 3rd figure 4th figure.
Claims (1)
も1個の透光性受光旧号座標を有する第1の受光素子と
、この第1の受光素子の背後昏こ所定の間隔をへだでて
配された第2の受光素子とをそれぞれ具備し、前記第1
及び第2の受光素子の少なくとも一方に複数の受光信号
座標が設けられていることを秀徴とする複合受光水子。 2、第1の受光素子がマ) IJラックス状配置された
複数の受光信号座標を有し、第2の受光素子が1個の受
光信号座標を有する特許請求の範囲第1項記載の複合受
光素子。 6、 第1の受光素子及び第2の受光素子の何れもがマ
) IJラックス状配置された複数の受光信号座標を有
する特許請求の範囲第1項記載の複合受光素子。 4、 第1の受光素子が1個の受光信号座標をM・(1
) し1.A2の受光水子がマトリックス状に配置された復
航の受光信号座標を有する狩杆副水の範囲第1塊ml−
の4J1.台受光素子。[Claims] 1. A first light-receiving element made of a polymer focal film element and having at least one light-transmitting light-receiving old coordinate; and a second light-receiving element arranged at a distance from the first light-receiving element.
and a composite light-receiving water element characterized in that at least one of the second light-receiving elements is provided with a plurality of light-receiving signal coordinates. 2. The composite light receiving device according to claim 1, wherein the first light receiving element has a plurality of light receiving signal coordinates arranged in an IJ rack shape, and the second light receiving element has one light receiving signal coordinate. element. 6. The composite light receiving element according to claim 1, wherein both the first light receiving element and the second light receiving element have a plurality of light receiving signal coordinates arranged in an IJ rack shape. 4. The first light-receiving element converts the coordinates of one light-receiving signal to M・(1
) 1. The first mass ml-
4J1. Base light receiving element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56170901A JPS5872072A (en) | 1981-10-26 | 1981-10-26 | Composite photodetector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56170901A JPS5872072A (en) | 1981-10-26 | 1981-10-26 | Composite photodetector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5872072A true JPS5872072A (en) | 1983-04-28 |
Family
ID=15913424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56170901A Pending JPS5872072A (en) | 1981-10-26 | 1981-10-26 | Composite photodetector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5872072A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4675535A (en) * | 1984-12-06 | 1987-06-23 | Kabushiki Kaisha Toshiba | Multi-layered solid-state image sensor for three-dimensional picture image processing |
-
1981
- 1981-10-26 JP JP56170901A patent/JPS5872072A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4675535A (en) * | 1984-12-06 | 1987-06-23 | Kabushiki Kaisha Toshiba | Multi-layered solid-state image sensor for three-dimensional picture image processing |
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