JPS5870666U - ８極静電偏向器 - Google Patents

８極静電偏向器

Info

Publication number
JPS5870666U
JPS5870666U JP16563481U JP16563481U JPS5870666U JP S5870666 U JPS5870666 U JP S5870666U JP 16563481 U JP16563481 U JP 16563481U JP 16563481 U JP16563481 U JP 16563481U JP S5870666 U JPS5870666 U JP S5870666U
Authority
JP
Japan
Prior art keywords
electrode
electrostatic deflector
pole electrostatic
cylindrical surface
rectangular parallelepiped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16563481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336923Y2 (enrdf_load_stackoverflow
Inventor
俊彦 長田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16563481U priority Critical patent/JPS5870666U/ja
Publication of JPS5870666U publication Critical patent/JPS5870666U/ja
Application granted granted Critical
Publication of JPS6336923Y2 publication Critical patent/JPS6336923Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP16563481U 1981-11-06 1981-11-06 ８極静電偏向器 Granted JPS5870666U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16563481U JPS5870666U (ja) 1981-11-06 1981-11-06 ８極静電偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16563481U JPS5870666U (ja) 1981-11-06 1981-11-06 ８極静電偏向器

Publications (2)

Publication Number Publication Date
JPS5870666U true JPS5870666U (ja) 1983-05-13
JPS6336923Y2 JPS6336923Y2 (enrdf_load_stackoverflow) 1988-09-29

Family

ID=29957824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16563481U Granted JPS5870666U (ja) 1981-11-06 1981-11-06 ８極静電偏向器

Country Status (1)

Country Link
JP (1) JPS5870666U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6336923Y2 (enrdf_load_stackoverflow) 1988-09-29

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