JPS5868636A - Pressure detector - Google Patents

Abstract

PURPOSE:To eliminate the influence exercised by a force exerted on a diaphragm when detecting a pressure, by a method wherein a magnetic electric conversion element, converting a change in a magnetic flux into a voltage, is located at the inside of a base, supporting a diaphragm, so that it is positioned facing and opposite to and way from the diaphragm. CONSTITUTION:A pressure detector conists of a diaphragm 4, formed of a magnet such s rubber magnets, a base 7 consisting of a coasing supporting the periphery thereof, a magneticelectric convesion element 5, positioned facing and opposite to the diaphragm 4 at the internal bottom thereof, and a magnet 6 located below the element 5. If a pressure P is applied to the diaphragm 4, the diaphragm 4 is bent, and the element 4 outputs a voltage corresponding to a magnitude of density of a magnetic flux passing through the element 5. The magnetic flux, emanating from the magnet 6, concentrates in the proximity of the maximum bend point of the diaphragm 4, and the magnetic flux passing through the element 5 is increased in density. This removes the influence exercised by a force exerted on the diaphragm 4.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an E-force detection direction and relates to a pressure sensor which can be of the same type in terms of durability.

FIG. 1 is a sectional view showing an example of a conventional pressure detector.

In the figure, 1 is a diaphragm that is formed into a flat plate shape and deflects when subjected to pressure, 2 is a base that supports the periphery of this diaphragm 1, and 3 is a strain gauge that is attached to the diaphragm 1 and is adjusted to the deflection of the diaphragm 1. The resistance changes accordingly.0 In the conventional pressure sensor configured in this way, when the pressure P shown in the figure is applied to the diaphragm 1, the resistance of the strain gauge 3 changes via this diaphragm 1. An output proportional to the pressure P can be obtained. However, since the strain gauge 3 itself deforms when detecting this specific force, it is difficult to cause fatigue to the strain gauge 3.
＼Especially when used for a long period of time, the inspection B-1
There was a problem with the reliability of the 11th grade.

The present invention has been made in view of the actual situation in the prior art, and its purpose is to provide a pressure detector that can eliminate the stress caused by the force applied to the diaphragm when detecting pressure. .

In order to achieve this goal, the present invention provides a magnetoelectric conversion element that converts a change in magnetic flux into a decrease in voltage inside a base that supports a diaphragm, and also arranges this AM conversion element to face the diaphragm. Moreover, it has a configuration in which the diaphragm is spaced apart from the diaphragm.

Hereinafter, the pressure sensor of the present invention will be explained based on m-.

Figure 2 shows the first embodiment of the present invention;
V is a side view showing a second embodiment of the present invention. The first embodiment shown in FIG. The structure includes a base 7 consisting of a base 7, a fly blind and wrinkle changing element 5 disposed inside the base 7 and converting a change in the Wi flux into a change in voltage, and a magnet 6 disposed within the base 70. stomach). The magnetic moxibustion/warrior element 5 is arranged to face the diaphragm 4, and is sufficiently spaced apart from the diaphragm 4 so as not to come into contact with it even if the diaphragm 4 is bent.

In a pressure sensor which is a physical structure like the first embodiment, when pressure P is applied to the diaphragm 4 as shown in FIG. 2, the diaphragm 4 is deflected.

The %k'flL conversion element 5 outputs a signal corresponding to the magnitude of the 'ff East density passing through the magnetic rIL conversion element 5. In addition, when the magnet 6 is attracted to the magnetic diaphragm 4 generated by the magnet 6, and the diaphragm 4 is deflected, the magnetic flux is most concentrated near the maximum deflection point, and therefore the magnetoelectric conversion element 5
0, the magnetic flux density passing through the magnetoelectric conversion element 5 increases.
output voltage increases. In this way, the change in pressure P can be changed into the deflection of the diaphragm 4, roughly converted into the output voltage of the magnetoelectric transducer 5, and detected.

Note that the output means connected to the magnetoelectric transducer 5 is well known, so a description thereof will be omitted.

The second embodiment shown in FIG. 13 includes a diaphragm 8 made of 4 magnets such as rubber magnets, a base 7 formed from a housing that supports the periphery of this diaphragm, and this base 7.
It has a structure including a magnetoelectric transducer 5 disposed on the bottom surface portion 9 of the casing f*t#. As in the first embodiment, the avi conversion confectionery 5 is placed opposite the diaphragm 4 and spaced apart from it by one space.

In the case of a pressure sensor constructed as in this embodiment of supply 2, it is possible to use a pressure sensor with a thickness of 3. As shown in the figure, when the CJ Hayuka P is applied to the diaphragm 8, it causes a deflection of 1F, but since the diaphragm 8 is made of a magnet, it constantly generates magnetic flux, and when the diaphragm 8 deflects, the magnetic flux passing through the magnetoelectric conversion element 5 increases. As a result, the output voltage of the magnetoelectric conversion element 5 changes. In this way, as in the first embodiment, changes in pressure P can be extracted as changes in the output voltage of the magnetoelectric transducer 5.

In addition, when the magnetoelectric transducer 5 constituting the embodiments #11 and #I2 and the output means connected to the magnetoelectric transducer 5, such as an amplifier or a cosciparator TIC, are used, it is possible to realize pressure detection that is always compact. It can be used as a container.

In addition, the paper force detection CGel of the present invention is #11 as a displacement needle that converts the dynamic zero position of the displacement corresponding to the flow or the displacement of an object into %T, Qi (g) and outputs it. Dinner is also possible.

F and money of the present invention;: G; J) &!
As described above, since a magnetoelectric conversion element is provided and this fIji conversion element r is sufficiently set to 4- from the diaphragm tJ), the pressure applied to the diaphragm is transmitted to the magnetic core and the conversion element. I can't stand it! C! Ia
It does not cause any deformation to the Scroll element, has a durability of 1+, and has the effect of allowing good dexterity performance over a long period of 131:. In addition, in the present invention, the strain gauge is +
Therefore, it is possible to eliminate the work of attaching the gauge or the work of diffusing and forming the gauge, which also has the effect of reducing production costs.

[Brief explanation of the drawing]

Figure 1 shows an example of a conventional pressure detector. Figure 2 shows an example of the pressure detector of the present invention.
UII+S;, Lead 3112! is the supply of the present invention 2-51 (h
An example is Ippaku nj and J″?″. 4.8...Diaphragm, 5...Repair substation≠child, 6...Stone, 7...Pace, 9... Bottom F. Figure 2 Figure 5 197-

Claims (1)

[Claims] 1. A pressure sensor comprising a diaphragm formed in a flat plate shape and capable of deflecting when subjected to pressure, and a base supporting the diaphragm, in which a change in magnetic flux is generated inside the base. 1. A pressure sensor comprising: a magnetoelectric transducer that converts the voltage into a change in voltage; the magnetoelectric transducer is placed in opposition to the diaphragm and spaced apart from the diaphragm. 2 The base is formed into a housing, and a magnetic v
j! The pressure sensor according to claim 1, characterized in that an L-conversion element is arranged. 3. The diaphragm is constituted by a magnetic V+ body, and a magnet is arranged below the magnetoelectric conversion element. Claim 1 &l! Bush pressure detector. t. Pressure detector 0 according to claim 1, characterized in that the diaphragm is constituted by a magnet.